CN105572796B - A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating - Google Patents
A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating Download PDFInfo
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- CN105572796B CN105572796B CN201610126673.0A CN201610126673A CN105572796B CN 105572796 B CN105572796 B CN 105572796B CN 201610126673 A CN201610126673 A CN 201610126673A CN 105572796 B CN105572796 B CN 105572796B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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Abstract
The invention discloses a kind of path filters up and down based on antisymmetry multimode Bragg waveguide grating, when TE light is inputted from singlemode input waveguide, lower road Asymmetry Y furcation waveguide is converted into the TE basic modes of multimode waveguide, antisymmetry Bragg waveguide grating is reflected light the incident light reverse coupled for meeting phase-matching condition wavelength, TE moulds by being converted into lower road single mode waveguide when lower road Asymmetry Y furcation waveguide are exported from lower terminal, transmitted light then by upper road Asymmetry Y furcation waveguide, is exported from single-mode output waveguide;Similarly, road singlemode input waveguide inputs on upper Lu Guangcong, upper road Asymmetry Y furcation waveguide is converted into the TE First-Order Modes of multimode waveguide, antisymmetry Bragg waveguide grating is meeting the reflected light of phase-matching condition wavelength by being converted into the TE moulds of single-mode output waveguide when upper road Asymmetry Y furcation waveguide, it is exported from output end, the present invention realizes signal road function up and down simultaneously, can be applied to the optical interconnection system of on piece High Density Integration.
Description
Technical field
The present invention relates to a kind of roads Guang Shang and lower road to filter integrated device, and antisymmetry multimode is based on more particularly to one kind
The path filter up and down of Bragg waveguide grating.
Background technology
With the rapid development of integrated circuit, transistor feature size constantly reduces, and high speed information is when being electrically interconnected transmission
A series of bottlenecks of speed, bandwidth and power consumption etc. are inevitably met with.It is this based on the optical on-chip optical interconnection of silicon
The solution of one technical barrier provides a kind of feasible scheme, and the exchange of information will directly carry out in the transport layer of light.
The detaching of unlike signal, upper road can be neatly realized in a basic function device of the optical filter as light network
It is the very important link of dense wavelength division multiplexing optical networks with lower road.The device of achievable light top and bottom path filter function at present
There are mainly three types of structures for part:The first is micro-ring resonant cavity configuration, it can provide higher Q values, while it does not need two instead
The bandwidth penetrated end face, but it there are a series of resonance wavelength, the filtering of light is influenced by free spectrum width, and filtered compared with
It is small;Second is F-P cavity structure, it needs two reflection end faces, and there are the small spies of a series of resonance wavelength and filtering bandwidth
Point;The third is Bragg-grating structure, it is using periodic refractive index perturbation area, it can be achieved that the light of different bandwidth filters
Function, but since it is two end device, can not realize that band logical and bandreject filtering function, the reflectance spectrum of light can not pass through simultaneously
It is extracted similar to fiber optic circulator, if the loss of 6 dB will be introduced using symmetrical Y bifurcation structures.
Therefore, simple in structure, compact dimensions are developed, multiple functional, the road optical filter up and down that is easily integrated and makes,
It is the important and significant work of Future Development on piece integrated optical communication technology.
Invention content
The purpose of the present invention is to provide a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating, knots
Structure is simple, compact dimensions, multiple functional, be easily integrated and make.
A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating of the present invention, including single mode incoming wave
Lead, lower road Asymmetry Y furcation waveguide, multimode waveguide, antisymmetry Bragg waveguide grating, upper road Asymmetry Y furcation waveguide, single mode
Output waveguide, lower road single mode waveguide and upper road singlemode input waveguide, wherein singlemode input waveguide and lower road Asymmetry Y furcation waveguide
One branch connects, and lower road single mode waveguide is connect with another branch of lower road Asymmetry Y furcation waveguide, lower road Asymmetry Y furcation wave
One end of the trunk and multimode waveguide led connects, the Truck Connection of the other end of multimode waveguide and upper road Asymmetry Y furcation waveguide,
Single-mode output waveguide is connect with upper one branch of road Asymmetry Y furcation waveguide, upper road singlemode input waveguide and upper road Asymmetry Y furcation
Another branch of waveguide connects, and the antisymmetry Bragg waveguide grating is located on multimode waveguide, is distributed in antisymmetry.
The singlemode input waveguide, lower road Asymmetry Y furcation waveguide, multimode waveguide, antisymmetry Bragg waveguide grating,
Upper road Asymmetry Y furcation waveguide, lower road single mode waveguide, upper road single mode waveguide and single-mode output waveguide are slab waveguide.
The lower road Asymmetry Y furcation waveguide is consistent with upper road Asymmetry Y furcation waveguiding structure, Asymmetry Y furcation wave
Two branches led are made of two single mode waveguides of different size, and the trunk of Asymmetry Y furcation waveguide is made of a multimode waveguide.
It is TE that the period of the antisymmetry Bragg waveguide grating, which meets the TE basic mode reverse coupleds in multimode waveguide,
The phase-matching condition of First-Order Mode.
The periodic refractive index perturbation area of the antisymmetry Bragg waveguide grating is on the two sides of multimode waveguide.
The periodic unit shape of the composition antisymmetry Bragg waveguide grating is rectangle.
Technical solution using the present invention, TE light are inputted from singlemode input waveguide, and lower road Asymmetry Y furcation waveguide is by its turn
The TE basic modes of multimode waveguide are changed to, antisymmetry Bragg waveguide grating is the reversed coupling of incident light for meeting phase-matching condition wavelength
The TE First-Order Modes being combined into multimode waveguide, reflected light is by being converted into lower road single mode waveguide when lower road Asymmetry Y furcation waveguide
TE moulds, from lower terminal export;And it is unsatisfactory for the transmitted light of phase-matching condition wavelength, by upper road Asymmetry Y furcation waveguide,
It is exported from single-mode output waveguide;Likewise, road singlemode input waveguide inputs on upper Lu Guangcong, upper road Asymmetry Y furcation waveguide will
It is converted to the TE First-Order Modes of multimode waveguide, and antisymmetry Bragg waveguide grating is the upper road light for meeting phase-matching condition wavelength
Reverse coupled is the TE basic modes in multimode waveguide, and reflected light when upper road Asymmetry Y furcation waveguide by being converted into single-mode output
The TE moulds of waveguide are exported from the output end of single-mode output waveguide, and the present invention realizes signal road function up and down simultaneously, has structure
Simply, compact dimensions and the advantages that big tolerance, manufacture craft has CMOS technology compatibility, is easily integrated and extends, facilitates low
Cost manufactures, and can be applied to the optical interconnection system of on piece High Density Integration.
The beneficial effects of the invention are as follows:
1, road optical filter function up and down is realized in conjunction with Asymmetry Y furcation waveguide and antisymmetry Bragg waveguide grating,
Have the characteristics that Insertion Loss is small and tolerance is big.
2, device design structure is simple, compact dimensions.
3, device making technics have CMOS technology compatibility so that device is easily integrated and extends, and facilitates inexpensive system
It makes, can be widely applied to the light network communication system of on piece High Density Integration.
Description of the drawings
Fig. 1 is the structure chart of the present invention;
Fig. 2 is the sectional view of slab waveguide in Fig. 1;
Fig. 3 is the periodic unit schematic shapes of Bragg waveguide grating in Fig. 1;
Fig. 4 is the vertical view of Bragg waveguide grating in Fig. 1;
Below in conjunction with drawings and examples, the invention will be further described.
It is identified in figure:
1, singlemode input waveguide 2, lower road Asymmetry Y furcation waveguide
3, multimode waveguide 4, antisymmetry Bragg waveguide grating
5, upper road Asymmetry Y furcation waveguide 6, single-mode output waveguide
7, lower road single mode waveguide 8, upper road singlemode input waveguide.
Specific implementation mode
As shown in Figure 1, a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating of the present invention, including list
Mould input waveguide(1), lower road Asymmetry Y furcation waveguide(2), multimode waveguide(3), antisymmetry Bragg waveguide grating(4), upper road
Asymmetry Y furcation waveguide(5), single-mode output waveguide(6), lower road single mode waveguide(7)With upper road singlemode input waveguide(8), wherein
Singlemode input waveguide(1)With lower road Asymmetry Y furcation waveguide(2)One branch connects, lower road single mode waveguide(7)It is asymmetric with lower road
Y bifurcated waveguides(2)Another branch connection, lower road Asymmetry Y furcation waveguide(2)Trunk and multimode waveguide(3)One end connect
It connects, multimode waveguide(3)The other end and upper road Asymmetry Y furcation waveguide(5)Truck Connection, single-mode output waveguide(6)With it is upper
Road Asymmetry Y furcation waveguide(5)One branch connects, upper road singlemode input waveguide(8)With upper road Asymmetry Y furcation waveguide(5)'s
Another branch's connection, the antisymmetry Bragg waveguide grating(4)Positioned at multimode waveguide(3)On, it is distributed in antisymmetry;TE light
From singlemode input waveguide(1)Input, lower road Asymmetry Y furcation waveguide(2)It is converted into the TE basic modes of multimode waveguide, antisymmetry
Bragg waveguide grating(4)It is multimode waveguide the incident light reverse coupled for meeting phase-matching condition wavelength(3)In TE mono-
Rank mould, reflected light pass through lower road Asymmetry Y furcation waveguide(2)When be converted into lower road single mode waveguide(7)TE moulds, from lower terminal
Output;And it is unsatisfactory for the transmitted light of phase-matching condition wavelength, pass through upper road Asymmetry Y furcation waveguide(5), from single-mode output wave
It leads(6)Output;Likewise, road singlemode input waveguide on upper Lu Guangcong(8)Input, upper road Asymmetry Y furcation waveguide(5)By its turn
It is changed to multimode waveguide(3)TE First-Order Modes, antisymmetry Bragg waveguide grating(4)The upper road for meeting phase-matching condition wavelength
Light reverse coupled is multimode waveguide(3)In TE basic modes, reflected light passes through upper road Asymmetry Y furcation waveguide(5)When be converted into
Single-mode output waveguide(6)TE moulds, from single-mode output waveguide(6)Output end output, the present invention realizes signal or more simultaneously
Road function, has many advantages, such as simple in structure, and compact dimensions and tolerance are big, and manufacture craft has CMOS technology compatibility, is easy to collect
At and extension, facilitate low cost manufacturing, can be applied to the optical interconnection system of on piece High Density Integration.
The lower road Asymmetry Y furcation waveguide(2)Two branches be made of two single mode waveguides of different size, lower road is non-
Symmetric Y-branch waveguide(2)Trunk be made of a multimode waveguide, work as singlemode input waveguide(1)Input pattern be TE moulds when, under
Road Asymmetry Y furcation waveguide(2)The pattern is converted to the TE basic modes of multimode waveguide;
The upper road Asymmetry Y furcation waveguide(5)Structure and lower road Asymmetry Y furcation waveguide(2)Structure is consistent, when
Upper road singlemode input waveguide(8)Input pattern be TE moulds when, lower road Asymmetry Y furcation waveguide(2)The pattern is converted to more
The TE First-Order Modes of mould waveguide;
The antisymmetry Bragg waveguide grating(4)Periodic refractive index perturbation area be symmetrically arranged at multimode waveguide(3)
Two sides on, in antisymmetry be distributed;Work as multimode waveguide(3)The TE basic modes that middle lambda1-wavelength meets phase-matching condition pass through
Antisymmetry Bragg waveguide grating(4)When, it is reversed and is coupled as multimode waveguide(3)TE First-Order Modes, the reflection of the TE First-Order Modes
Light passes through lower road Asymmetry Y furcation waveguide(2)When be converted into lower road single mode waveguide(7)TE moulds, from lower road single mode waveguide(7)
Output end output;And work as multimode waveguide(3)The TE basic modes that medium wavelength is unsatisfactory for phase-matching condition pass through antisymmetry Prague
Waveguide optical grating(4)When, which will not be by antisymmetry Bragg waveguide grating(4)Influence, continue onwards transmission, pass through
Upper road Asymmetry Y furcation waveguide(5)When, it is converted into single-mode output waveguide(6)TE moulds, from single-mode output waveguide(6)It is defeated
Outlet exports;When the roads Guang Congshang singlemode input waveguide(8)Middle input passes through upper road Asymmetry Y furcation waveguide(5)When, it is converted
For multimode waveguide(3)First-Order Mode, the TE First-Order Modes that wavelength meets phase-matching condition pass through antisymmetry Bragg waveguide grating
(4)When, it is reversed and is coupled as multimode waveguide(3)TE basic modes, the reflected light of the TE basic modes passes through upper road Asymmetry Y furcation waveguide
(5)When, it is converted into single-mode output waveguide(6)TE moulds, from single-mode output waveguide(6)Output end output.
Shown in as shown in Figure 1, Figure 3 and Figure 4, the antisymmetry Bragg waveguide grating(4)It is by etching one in waveguide
Tie up what rectangular Periodic unit was formed, antisymmetry Bragg waveguide grating(4)Period meet multimode waveguide(3)TE basic modes it is reversed
It is coupled to the phase-matching condition of TE First-Order Modes.
To meet multimode waveguide(3)TE moulds are coupled back to the requirement of TE First-Order Modes, need to design Bragg waveguide grating
Period can be obtained by following formula
(1)
Λ is screen periods in formula,For the propagation constant of multimode waveguide TE basic modes,For multimode waveguide TE First-Order Modes
The propagation constant of formula.
A kind of embodiment as shown in Figure 1, a kind of filter of road up and down based on antisymmetry multimode Bragg waveguide grating of the present invention
Wave device is made of single mode waveguide, Asymmetry Y furcation waveguide, multimode waveguide and antisymmetry Bragg waveguide grating, and the device is all
In component part is all generally aligned in the same plane.All single mode waveguides 1,6,7,8 in Fig. 1, Asymmetry Y furcation waveguide 2,5, multimode wave
3 and Bragg waveguide grating 4 are led, slab waveguide shown in Fig. 2 is all used.
Embodiment:
As shown in Figure 1, Figure 2 and Figure 4, use top layer silicon thickness for 220 nm, 2 μm of buried silicon oxide layer insulating layer on silicon
(SOI) material carries out deep-UV lithography or e-beam direct write lithography obtains silicon etching mask after completing crystal column surface cleaning,
By silicon dry etching, the slab waveguide that height is 220 nm is produced, two bifurcated waveguides of wherein Asymmetry Y furcation waveguide are wide
Degree is respectively 500 nm and 400 nm, and trunk waveguide width is 900 nm, and the width of multimode waveguide is 900 nm, and the two of multimode waveguide
Side etches the Bragg waveguide grating of antisymmetry structure, and rectangular raster tooth is 150 nm, and the period is 308 nm, Bradley lattice wave
The length of guide grating is 300 μm.
It is 1550 nm, the multimode item of 900 nm width that screen periods parameter in above-described embodiment, which is for operation wavelength,
Shape waveguide design, device also is adapted for the multimode slab waveguide of other operation wavelengths and width, is also applied for different top layer silicons
The slab waveguide of thickness need to only change the size of the graded guide screen periods parameter different with design, you can realize light filter
Wave device function.Entire device, which only needs once to etch, can be completed making.
Above-mentioned specific implementation mode is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, to any modifications and changes that the present invention makes, the protection model of the present invention is both fallen within
It encloses.
Claims (6)
1. a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating, it is characterised in that:It is inputted including single mode
Waveguide, lower road Asymmetry Y furcation waveguide, multimode waveguide, antisymmetry Bragg waveguide grating, upper road Asymmetry Y furcation waveguide, list
Mould output waveguide, lower road single mode waveguide and upper road singlemode input waveguide, wherein singlemode input waveguide and lower road Asymmetry Y furcation wave
Branch connection is led, lower road single mode waveguide is connect with another branch of lower road Asymmetry Y furcation waveguide, lower road Asymmetry Y furcation
The trunk of waveguide and one end of multimode waveguide connect, and the other end of multimode waveguide and the trunk of upper road Asymmetry Y furcation waveguide connect
It connects, single-mode output waveguide is connect with upper one branch of road Asymmetry Y furcation waveguide, upper road singlemode input waveguide and the asymmetric Y in upper road
Another branch of bifurcated waveguide connects, and the antisymmetry Bragg waveguide grating is located on multimode waveguide, antisymmetry Prague
The periodic refractive index perturbation area of waveguide optical grating is distributed on the two sides of multimode waveguide in antisymmetry.
2. a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating according to claim 1, special
Sign is:The singlemode input waveguide, upper road Asymmetry Y furcation waveguide, multimode waveguide, lower road Asymmetry Y furcation waveguide, under
Road single mode waveguide, upper road singlemode input waveguide and single-mode output waveguide are slab waveguide.
3. special according to a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating described in claim 2
Sign is:Two branches of the lower road Asymmetry Y furcation waveguide are made of two single mode waveguides of different size, and the upper road/
The trunk of lower road Asymmetry Y furcation waveguide is made of multimode waveguide.
4. special according to a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating described in claim 2
Sign is:The upper road Asymmetry Y furcation waveguide and lower road Asymmetry Y furcation waveguide are completely the same.
5. special according to a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating described in claim 2
Sign is:Period of the antisymmetry Bragg waveguide grating meet by multimode waveguide TE basic modes and TE First-Order Modes it is mutual
The phase-matching condition coupled.
6. special according to a kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating described in claim 2
Sign is:The periodic unit shape for constituting Bragg waveguide grating is rectangle.
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CN105759362A (en) * | 2016-05-13 | 2016-07-13 | 龙岩学院 | Band-pass and band-stop filter based on anti-symmetric multimode Bragg light guide grating |
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CN1249820A (en) * | 1997-03-07 | 2000-04-05 | 艾利森电话股份有限公司 | Optical wavelength selective device including at least one Bragg-grating structure |
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