CN102778748B - Aiming device for microscope for plasma diagnosis and use method thereof - Google Patents
Aiming device for microscope for plasma diagnosis and use method thereof Download PDFInfo
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- CN102778748B CN102778748B CN201110121077.0A CN201110121077A CN102778748B CN 102778748 B CN102778748 B CN 102778748B CN 201110121077 A CN201110121077 A CN 201110121077A CN 102778748 B CN102778748 B CN 102778748B
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Abstract
The invention relates to an aiming device for a microscope for plasma diagnosis and a use method thereof. The aiming device comprises a line gatherer, a plane mirror, a luminous source, a glass plate and a grid plate. The line gatherer is connected with a short connecting pipe arranged on a vacuum pipeline through a flange piece, the plane mirror is arranged in the vacuum pipeline and connected with the line gatherer capable of driving the plane mirror to lead in and lead out, the grid plate is adhered to the glass plate, and the glass plate with the grid plate is arranged at one end of a long connecting pipe communicated with the vacuum pipeline and fixed through a flange cover. According to the method, a reverse imaging method is adopted, an image distance of an image system is first determined, and an object point is located through the microscope with small depth of field. Compared with the prior art, the aiming device and the use method of the aiming device have the advantages that a device structure is simple, a use method is easy, aiming precision is high, normal work of other diagnosis devices in a strong-laser device target cavity can not be affected and the like.
Description
Technical field
The present invention relates to plasma diagnosis microscope field, especially relate to a kind of plasma diagnosis microscope sighting device and application process thereof.
Background technology
In plasma diagnostics experiment, the coincidence relation of the best object point of imaging system and target is to the success or failure of diagnostic test.Imaging system has two aspects to the aiming of target spot, and the first is positioned on the optical axis of system target spot, its two be ensure target spot system imaging spatial resolution allow field depth in.
The extreme ultraviolet Schwarzschild(Schwartz Anthony Heald of light laser plasma diagnostics experiment use) microscope is normal incidence reflective imaging device, its object lens are made up of two concentric spherical catoptrons, as shown in Figure 1, primary mirror 5 is concave mirror, secondary mirror 4 is convex mirror, can eliminate three grades of spherical aberrations, coma and astigmatisms, there is the advantages such as high resolving power, high collection efficiency and large visual field.Schwarzschild microscope operation wavelength described in the present invention is 18.2nm, and enlargement ratio is 10, and numerical aperture is 0.1.
Diagnostic test requires the microscopical imaging performance of Schwarzschild: the resolution that realizes 5 μ m in 2mm visual field.For realizing this resolution requirement, system will reach the pointing accuracy of target spot: axially (x direction) pointing accuracy 15 μ m, the axle that hangs down (is better than 0.1mm perpendicular to x) laying for direction precision, so this just needs imaging system to have accurate aiming localization method.
At present, the method for sight of diagnostic system used mainly comprises on strong laser device at home: auxiliary visual light imaging method of sight, Double passage laser method of sight and place kick method of sight.
Auxiliary visual light imaging aims at
Auxiliary visual light imaging method of sight is to be independent of extreme ultraviolet Schwarzschild image-forming objective lens a set of visual light imaging equipment in addition, and this equipment and Schwarzschild object lens are arranged in same regulating device.Adjust visual light imaging equipment by imaging experiment, the object point of its object point and extreme ultraviolet Schwarzschild object lens is coincided.The object point of visual light imaging equipment is the object point of Schwarzschild object lens like this.In the experiment of light laser plasma diagnostics, only target need to be placed on to the object point position of visual light imaging equipment, now this Physical Target is positioned at the best object point position of extreme ultraviolet Schwarzschild imaging system.
This method of sight mainly contains following two shortcomings: 1. need to be by means of the camera lens of large-numerical aperture, complex structure in order to realize high-precision aiming; 2. the imaging device that is independent of extreme ultraviolet optics system can take the finite space in strong laser device target chamber.
Double passage laser aims at
Double passage laser method of sight is to cross to realize by the space of two bundle laser diagnostic system is aimed at, and laser joint is definite target position.The positioning precision of this method of sight optical axis direction determines by the angle of two bundle laser, and angle more pointing accuracy is higher.But, being subject to target chamber space constraint, the subtended angle of two-way laser can not be too large, and therefore axial location error is large.In addition, pointing error also judges relevant with laser focal spot size and degree of overlapping, and therefore, whole system pointing error is larger.
For above 1,2 two kind of method of sight, with it similarly Chinese invention patent to have application publication number be the apparatus and method of the diagnostic device aiming of micro target pellet of CN101793515A.This patent combines 1, the feature of 2 two kind of method, adopts the burnt optical imaging lens of two group leaders to substitute Double passage laser transmitter, obtains higher pointing accuracy by the introducing of CCD image-forming component and post-processed process.But, aiming scheme in this patent of invention has following shortcoming: 1. the critical component aiming at is two long burnt optical imaging lens, so axial pointing accuracy depends on the angle of the depth of field and two telephoto lenses of telephoto lens, greatly axial location precision is high for the little and angle of the depth of field, the depth of field is large and the little axial location of angle precision is low, so the pointing accuracy of axial (the Z direction) of this method of sight described in patent is ± 100 μ m.But, be 15 μ m in the needed axial pointing accuracy of the Schwarzschild imaging system described in this patent, obviously the diagnostic device method of sight described in patent of invention CN101793515A cannot reach the requirement of Schwarzschild imaging system.If 2. will improve the axial pointing accuracy of the method for sight described in patent of invention CN101793515A, need the numerical aperture NA that improves long burnt optical lens to reduce its depth of field, and increase two angles between long burnt optical lens.But this can increase its space in strong laser device target chamber undoubtedly, in the comprehensive physical experiment of following strong laser device, will be difficult to enough Space Angle and place a few cover to tens covers and adopt the diagnostic device of this pointing device.
Place kick aims at
Location simulation ball method is based upon on the basis with the desirable object point of place kick Mk system, by target monitoring system, adjusts diagnostic system and makes place kick arrive assigned address, afterwards place kick is retracted, and by electric control gear, pellet is placed in to same position.The advantage of this method is that positioning precision is high, and reliability is strong, but in experiment, needs place kick to regain, and this needs more complicated physical construction to realize, and in addition, place kick is very easy to damage, and just need to again demarcate place kick once damage.
Therefore,, for the diagnostic system of a set of long-term use, it is a kind of convenient, flexible urgently to need, and durable high precision sighting device.
Summary of the invention
Object of the present invention is exactly plasma diagnosis microscope sighting device and the application process thereof that provides in order to overcome the defect that above-mentioned prior art exists that a kind of apparatus structure is simple, using method is easy, pointing accuracy is high and can not affect the normal work of other diagnostic device in strong laser device target chamber.
Object of the present invention can be achieved through the following technical solutions: a kind of plasma diagnosis microscope sighting device, be arranged on Schwarzschild micro objective, described Schwarzschild micro objective comprises position finding microscope, secondary mirror, primary mirror, vacuum pipe, ccd detector, one end of described vacuum pipe is connected with ccd detector by flange part, on the tube wall of described vacuum pipe, be arranged with the long connecting pipe and the nipple that communicate with vacuum pipe, it is characterized in that, this sighting device comprises straight line inducting device, plane mirror, light emitting source, glass plate, mesh flake, described straight line inducting device is connected with the nipple being arranged on vacuum pipe by flange part, described plane mirror is arranged in vacuum pipe, be connected with the straight line inducting device that can drive plane mirror to import and export, described mesh flake sticks on glass plate, the glass plate that is pasted with mesh flake is arranged on one end of the long connecting pipe communicating with vacuum pipe, fix by blind flange, described light emitting source is arranged on the outside of blind flange, its light sending is through glass sheet, after plane mirror reflection, by imaging after secondary mirror and primary mirror.
Described straight line inducting device and the junction of nipple are provided with O-ring seal.
Described glass plate is equipped with O-ring seal with the junction of the junction of long connecting pipe, glass plate and blind flange.
Described O-ring seal is viton seal ring.
Described light emitting source sends visible ray.
The magnification of described position finding microscope is that 50～100 times, the depth of field are 4.3～6.7 μ m.
A kind of application process of plasma diagnosis microscope sighting device, it is characterized in that, this application process comprises the following steps: 1) take off ccd detector, a mesh flake is placed at joint flange part center at vacuum pipe and ccd detector, radiation of visible light arrives this mesh flake, imaging after secondary mirror, primary mirror after mesh flake is first; 2) by position finding microscope, the imaging in step 1) is positioned, and lock in place microscope; 3) utilize straight line inducting device that plane mirror is imported to vacuum pipe, light emitting source sends visible ray and is irradiated to through glass plate the mesh flake being arranged on glass plate, and mesh flake is successively through plane mirror, secondary mirror and primary mirror imaging; 4) adjust the position of the mesh flake on glass plate, make this mesh flake through plane mirror, secondary mirror and primary mirror imaging and step 2) in the imaging of being located by position finding microscope overlap, then ccd detector is connected with vacuum pipe; 5) adjust the position of target, make that target locates with position finding microscope in step 4) mesh flake imaging overlap; 6) Schwarzschild micro objective is vacuumized, then repeating step 5), further adjust the position of target, then utilize straight line inducting device that plane mirror is derived to vacuum pipe, complete the aiming location to target.
Compared with prior art, the present invention has the following advantages:
1, the critical component in sight device is Schwarzschild microscope, and (comprising primary mirror and secondary mirror), it is again the equipment of extreme ultraviolet waveband imaging simultaneously, so simplified system architecture, can not occupy again the exceptional space in light laser diagnostic device target chamber.
2, the present invention adopts the method for sight of determining image distance searching object point pointing accuracy can be improved to 100 times.
3, this method of sight adopts position finding microscope to position, and axial location precision can reach 6.7 μ m, and vertical optical axis direction positioning precision is better than 50 μ m.
4, method of sight of the present invention can not destroyed the needed vacuum environment of light laser plasma diagnostics, and has improved pointing accuracy (aim under vacuum and to have eliminated the impact on imaging experiment of minor shifts that vacuum hits).
5, the aiming elements in the present invention is except primary mirror and secondary mirror, and other parts relevant with aiming are all in the outside in strong laser device target chamber, so do not affect the normal work of other diagnostic device in strong laser device target chamber.
Brief description of the drawings
Fig. 1 is use status architecture schematic diagram of the present invention;
Fig. 2 is the partial enlarged drawing of Fig. 1;
Fig. 3 is the image gathering in diagnostic test aiming process.
In figure, 1 is position finding microscope, 2 is laser, 3 is target, 4 is secondary mirror, 5 is primary mirror, 6 is strong laser device target chamber, 7 is target chamber DN200 flange, 8 is DN200 flange, 9 is plane mirror, 10 is viton seal ring, 16 is viton seal ring, 18 is viton seal ring, 11 is straight line inducting device, 12 is DN16 flange, 13 is vacuum pipe, 14 is DN42 flange, 15 is ccd detector, 17 is auxiliary pointing device, 19 is DN32 flange, 20 is DN32 blind flange, 21 is light emitting source, 22 is glass plate, 23 is mesh flake, 24 is viton seal ring, 25 is viton seal ring, 26 is the picture that target becomes through position finding microscope, 27 is that grid is through plane mirror, secondary mirror, the picture that primary mirror becomes with position finding microscope.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment
The present invention adopts the mode of twice imaging of visible ray, realizes the accurate aiming of system to vacuum chamber point of impact on target.
In the present invention, crucial positioning equipment is microscope 1, and its magnification can be chosen as 50～100 times, numerical aperture is 0.2～0.25, its depth of field has determined the axial x direction positioning precision of system, and magnification has determined the axial positioning precision of vertical light, and its depth of field meets:
λ is visible wavelength, can value 540nm, and NA is the numerical aperture of the position finding microscope 1 of location use.So the depth of field of this position finding microscope approximately 4.3～6.7 μ m, can reach the requirement of Schwarzschild microscope to axial pointing accuracy.In addition, can observe the axial variation of the even less vertical light of 50 μ m by the microscopes of 50～100 times, so, can meet equally the accuracy requirement of experiment.
The present invention can realize by following technical measures: adopt position finding microscope 1 as positioning equipment, the object of visual light imaging is to realize mesh flake 23 and ccd detector 15 image plane center conjugation for the first time; Visual light imaging is to utilize mesh flake 23 to replace ccd detector 15 centers for the second time, again passes through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings, and adopts position finding microscope 1 to locate, and this position is the microscopical best object point of Schwarzschild position.
In Fig. 1,1 is position finding microscope, and its effect is that mesh flake 23 is positioned through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings.2 is laser, and 3 is target, the parts that the two does not belong in sighting device, and the object being marked in figure is problem for convenience of explanation.
Secondary mirror 4 and the common composition Schwarzschild of primary mirror 5 microscope, it has two effects: the first is operated in visible ray, and mesh flake 23 is carried out to imaging, now uses as aiming at; It two is to be operated in extreme ultraviolet waveband, and the extreme ultraviolet that laser 2 irradiation targets 3 are produced carries out imaging, now uses as image-forming diagnose.
Strong laser device target chamber 6 and target chamber DN200 flange 7 are vacuum target chambeies, only mark part cavity in figure, and target chamber DN200 flange 7 is the flange ports for erecting equipment.13 is vacuum pipe, DN200 flange 8, DN16 flange 12 and DN32 flange 14 are the flange ports on vacuum pipe 13, its effect is to be connected with target chamber DN200 flange 7, straight line inducting device 11 and ccd detector 15 respectively, the effect of vacuum pipe 13 is that vacuum pipe 13 keeps vacuum seal by viton seal ring 10,16,18 for keeping pipeline interior in vacuum state.
The effect of plane mirror 9 is that the light that light emitting source 21 is irradiated to mesh flake 23 carries out 45 ° of reflections.Straight line inducting device 11 can drive the rectilinear motion of ultrahigh vacuum midplane catoptron 9, and accurately control position of energy, its effect is to import and export plane mirror 9, in the time that system is aimed at, plane mirror 9 is imported in vacuum pipe 13, while carrying out extreme ultraviolet waveband imaging experiment after aiming finishes, plane mirror 9 is derived to vacuum pipe 13, object be prevent plane mirror 9 block by target 3 send and first after the extreme ultraviolet that reflects through primary mirror 5 and secondary mirror 4.
Ccd detector 15 is for gathering the equipment of target 3 through Schwarzschild microscope (comprising primary mirror 5 and secondary mirror 4) imaging.17 is auxiliary pointing device, wherein DN32 flange 19 and 20 both combinations of DN32 blind flange clamp viton seal ring 24,25 and glass plate 22, like this in the time being vacuum environment in vacuum pipe 13, the visible ray that light emitting source 21 sends still can see through glass plate 22 and be irradiated to mesh flake 23, so when strong laser device target chamber exhausts after vacuum, in chamber and vacuum pipe 13 inside are vacuum, by means of auxiliary pointing device 17, still can aim at target 3.That is to say that this method of sight can (utilize Schwarzschild microscope to carry out imaging to target 3 not destroying plasma diagnostics, service band is extreme ultraviolet, and extreme ultraviolet is produced by laser irradiation target 3) realize the accurate aiming to target 3 in the situation of needed vacuum environment.
Schwarzschild microscope in the present invention is made up of primary mirror 5 and secondary mirror 4, and it has two effects: aim at and extreme ultraviolet.Introduce respectively its flow process below:
Aiming process: light emitting source 21 is irradiated to mesh flake 23, light carries out 45 ° of reflections through plane mirror 9, then after secondary mirror 4 and primary mirror 5 reflections, image in a bit, this picture is positioned by position finding microscope 1, makes can clearly see by position finding microscope 1 picture of mesh flake 23.Then target 3 is placed on to the position of the grid image of being located by position finding microscope 1.In Fig. 3 26,27 is the target 3 observed from position finding microscope 1 and the picture of mesh flake 23.
Extreme ultraviolet process: aim on complete on the basis of process, laser 2 irradiation targets 3 can produce extreme ultraviolet, extreme ultraviolet is successively imaged on the image plane center of ccd detector 15 after the microscopical primary mirror 5 of Schwarzschild and secondary mirror 4 reflections, and imaging is by ccd detector 15 records.
Aiming elements primary mirror 5 in the present invention and secondary mirror 4 be in 6 inside, strong laser device target chamber, and in aiming elements, position finding microscope 1, plane mirror 9 and auxiliary pointing device 17 and other parts DN200 flange 8, vacuum pipe 13, straight line inducting device 11, DN16 flange 12, DN42 flange 14 and ccd detector 15 are all in the outside in strong laser device target chamber 6.And the primary mirror 5 and the secondary mirror 4 that aim at use are core components of plasma diagnostics (extreme ultraviolet), so this sight device can not occupy the exceptional space in strong laser device target chamber 6.
In light laser plasma diagnostics, specifically aim at step and be divided into two stages:
The process of debugging mesh flake 23 and ccd detector 15 image plane center conjugation:
1) place a grid identical with mesh flake 23 (DN42 flange 14 centers and ccd detector 15 center superpositions) at DN42 flange 14 centers, radiation of visible light (is now not yet installed ccd detector 15 to grid, plane mirror 9 not yet imports), grid images in a bit through secondary mirror 4 and primary mirror 5 first;
2) utilize position finding microscope 1 to position the picture of step 1), locking microscope 1;
3) utilize straight line inducting device 11 that plane mirror 9 is imported to vacuum pipe 13.
4) light emitting source 21 sees through glass plate 22 and is irradiated to mesh flake 23, successively images in a bit through plane mirror 9, secondary mirror 4 and primary mirror 5;
5) repeatedly the position of mobile grid sheet 23 (mesh flake 23 sticks on glass plate 22 surfaces, when mobile grid sheet 23 by DN32 blind flange 20, glass plate 22, viton seal ring 24 unloads, and behind the position of mobile grid sheet 23, installs again.), make mesh flake 23 through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings and step 2) in located by position finding microscope 1 picture overlap.Now, mesh flake 23 and ccd detector image plane center complete conjugation;
6) ccd detector is arranged on DN42 flange 14.
Application process (the aiming process of Schwarzschild microscope to target 3 in plasma diagnostics) after debugging:
7) light emitting source 21 sees through glass plate 22 and is irradiated to mesh flake 23, successively images in a bit through plane mirror 9, secondary mirror 4 and primary mirror 5;
8) utilize position finding microscope 1 to position the picture of step 7);
9) position of adjustment target 3, overlaps its picture of locating with position finding microscope in step 8) 1;
10) strong laser device target chamber 6 is vacuumized;
11) repeating step 7)～9); Because vacuum hits, 3 position can produce small skew, repeating step 7)～9) object be accurate aiming target 3 again after vacuumizing;
12) utilize straight line inducting device 11 that plane mirror 9 is derived to vacuum pipe 13.
Completed the accurate aiming of Schwarzschild microscope to target 3 by 6 steps in the complete application process of above debugging, above 6 steps all can complete under vacuum environment, that is to say that this method of sight can the required vacuum environment of breaking test, so eliminated vacuum 3 the skew impact on experimental precision that hits, improved conventional efficient in ensureing precision.
Claims (7)
1. a plasma diagnosis microscope sighting device, be arranged on Schwarzschild micro objective, described Schwarzschild micro objective comprises position finding microscope, secondary mirror, primary mirror, vacuum pipe, ccd detector, one end of described vacuum pipe is connected with ccd detector by flange part, on the tube wall of described vacuum pipe, be arranged with the long connecting pipe and the nipple that communicate with vacuum pipe, it is characterized in that, this sighting device comprises straight line inducting device, plane mirror, light emitting source, glass plate, mesh flake, described straight line inducting device is connected with the nipple being arranged on vacuum pipe by flange part, described plane mirror is arranged in vacuum pipe, be connected with the straight line inducting device that can drive plane mirror to import and export, described mesh flake sticks on glass plate, the glass plate that is pasted with mesh flake is arranged on one end of the long connecting pipe communicating with vacuum pipe, fix by blind flange, described light emitting source is arranged on the outside of blind flange, its light sending is through glass sheet, after plane mirror reflection, by imaging after secondary mirror and primary mirror.
2. a kind of plasma diagnosis microscope sighting device according to claim 1, is characterized in that, described straight line inducting device and the junction of nipple are provided with O-ring seal.
3. a kind of plasma diagnosis microscope sighting device according to claim 1, is characterized in that, described glass plate is equipped with O-ring seal with the junction of the junction of long connecting pipe, glass plate and blind flange.
4. according to a kind of plasma diagnosis microscope sighting device described in claim 2 or 3, it is characterized in that, described O-ring seal is viton seal ring.
5. a kind of plasma diagnosis microscope sighting device according to claim 1, is characterized in that, described light emitting source sends visible ray.
6. a kind of plasma diagnosis microscope sighting device according to claim 1, is characterized in that, the magnification of described position finding microscope is that 50～100 times, the depth of field are 4.3～6.7 μ m.
7. an application process for plasma diagnosis microscope sighting device as claimed in claim 1, is characterized in that, this application process comprises the following steps:
1) take off ccd detector, place a mesh flake at the joint flange part center of vacuum pipe and ccd detector, radiation of visible light arrives this mesh flake, imaging after secondary mirror, primary mirror after mesh flake is first;
2) by position finding microscope to step 1) in imaging position, and lock in place microscope;
3) utilize straight line inducting device that plane mirror is imported to vacuum pipe, light emitting source sends visible ray and is irradiated to through glass plate the mesh flake being arranged on glass plate, and mesh flake is successively through plane mirror, secondary mirror and primary mirror imaging;
4) adjust the position of the mesh flake on glass plate, make this mesh flake through plane mirror, secondary mirror and primary mirror imaging and step 2) in the imaging of being located by position finding microscope overlap, then ccd detector is connected with vacuum pipe;
5) adjust the position of target, make target and step 4) middle position finding microscope locate mesh flake imaging overlap;
6) Schwarzschild micro objective is vacuumized, then repeating step 5), further adjust the position of target, then utilize straight line inducting device that plane mirror is derived to vacuum pipe, complete the aiming location to target.
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| CN201110121077.0A CN102778748B (en) | 2011-05-11 | 2011-05-11 | Aiming device for microscope for plasma diagnosis and use method thereof |
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| CN201110121077.0A CN102778748B (en) | 2011-05-11 | 2011-05-11 | Aiming device for microscope for plasma diagnosis and use method thereof |
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| CN102778748B true CN102778748B (en) | 2014-08-13 |
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Families Citing this family (4)
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| CN106769883B (en) * | 2016-12-29 | 2019-06-11 | 同济大学 | A kind of Schwarzschild focal plane of lens positioning device and localization method |
| CN108169790B (en) * | 2017-11-27 | 2020-08-18 | 同济大学 | Intensity calibration method of grazing incidence X-ray microscope |
| CN110413009A (en) * | 2019-07-24 | 2019-11-05 | 中国工程物理研究院激光聚变研究中心 | A kind of sighting system |
| CN117352527B (en) * | 2023-10-08 | 2024-04-26 | 同济大学 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
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| JPH06331798A (en) * | 1993-05-27 | 1994-12-02 | Olympus Optical Co Ltd | Diffuser |
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