CN107192536B - It is a kind of without burnt conjugated optical channels MTF test device and test method - Google Patents
It is a kind of without burnt conjugated optical channels MTF test device and test method Download PDFInfo
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- CN107192536B CN107192536B CN201710255802.0A CN201710255802A CN107192536B CN 107192536 B CN107192536 B CN 107192536B CN 201710255802 A CN201710255802 A CN 201710255802A CN 107192536 B CN107192536 B CN 107192536B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
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Abstract
The invention discloses a kind of without burnt conjugated optical channels MTF test device, including being located at the same target light source turned back on optical axis, optical filter, paraboloid collimating mirror, it turns back plane mirror, standard lens and as analyzer, the described picture analyzer and standard lens setting are can be on fixed pivot left-right rotation rotary table, the first aperture and second orifice diaphragm are disposed in front of standard lens, the center of circle of first aperture and second orifice diaphragm is on the axis of standard lens, first aperture is located at the entrance pupil of standard lens, the bore of first aperture is 2 mm of φ, center is overlapped with the entrance pupil center of standard lens, the bore of second orifice diaphragm is 5 mm of φ, at 100-150mm in front of standard lens entrance pupil center;Also disclose its test method, the present invention to without burnt conjugated optical channels MTF test device by building, it solves and participates in entire novel optical imaging system images without burnt optical path, but it is directly used in the problem of image quality evaluation without Common Testing device, is suitble to work in visible light, medium-wave infrared and long wave infrared region without burnt light path system.
Description
Technical field
The invention belongs to optical metrology and measurement fields, and in particular to a kind of non-focus optical system MTF(optical modulation transmitting
Function) test device and its test method.
Background technique
With the fast development of electro-optical equipment, high-precision, novel optical imaging system that is multi-functional, complicating meet the tendency of and
It is raw.Imaging class system is divided by light channel structure, is generally included infinity conjugated optical channels, limited remote conjugated optical channels and is conjugated without coke
Three kinds of optical path, wherein infinity, limited remote two kinds of conjugated optical channels structures can directly be imaged in its image space, and external mature development is high-precision
Spend the producer of MTF test equipment such as: the CI SYSTEMS of U.S. OPTIKOS, Germany TRIOPTICS and Israel have complete
Equipment is directly used in test, and the country has no professional production producer.
The image planes of no burnt conjugated optical channels structure are located at infinite point, are not imaged directly in its image space, MTF test method
It is totally different from infinity, limited remote two types.Though no burnt conjugated optical channels are not imaged directly, usually as novel light
The subsystem for learning imaging system is placed in the front end of whole system, and participates in the distribution of system geometrical aberration, the direct shadow of adjustment quality
Ring the final imaging quality of whole system, it is therefore necessary to which measurement is without the burnt MTF for being conjugated sub- imaging optical path to objectively evaluate a whole set of system
The image quality of system.
Be limited by built without burnt conjugated optical channels MTF test benchmark, testing process complexity and measuring accuracy guarantee etc. it is all
The MTF test of multifactor influence, no burnt conjugated optical channels is always a technical problem, is also to be difficult to carry out in assembling process
Test.Only whether there is or not the schematic diagrams of burnt conjugated optical channels image quality testing scheme for foreign vendor at present, there are no test method and are seen in report,
Test directly can not be completed by purchase existing equipment.
Summary of the invention
It is a primary object of the present invention to the deficiencies according to existing measuring technology and means of testing, by without burnt conjugate beam
The analysis of road MTF test philosophy, built it is a kind of without burnt conjugated optical channels MTF test device, can be in assembly, test phase handle comprehensively
The image quality without burnt conjugated optical channels is held, assembles that image quality is excellent, novel optical imaging system of high reliablity.
The technical solution adopted by the present invention to solve the technical problems is: a kind of without burnt conjugated optical channels MTF test device, packet
It includes and is located at the same target light source turned back on optical axis, optical filter, paraboloid collimating mirror, plane mirror of turning back, standard lens and picture
Analyzer, the described picture analyzer and standard lens setting are can be on fixed pivot left-right rotation rotary table, standard mirror
Head front is disposed with the first aperture and second orifice diaphragm, and the center of circle of the first aperture and second orifice diaphragm exists
On the axis of standard lens, the first aperture is located at the entrance pupil of standard lens, and the bore of the first aperture is 2 mm of φ,
Center is overlapped with the entrance pupil center of standard lens, and the bore of second orifice diaphragm is 5 mm of φ, is located at standard lens entrance pupil center
At the 100-150mm of front.
Described is a kind of without burnt conjugated optical channels MTF test device, and standard lens is mounted on flexible abutment sleeve.
Described is a kind of without burnt conjugated optical channels MTF test device, and standard lens is infinity conjugate optical system structure.
Described is a kind of without burnt conjugated optical channels MTF test device, and target light source is the alternative light source of embedded circular hole targets.
It is described a kind of without burnt conjugated optical channels MTF test device, centered on the first aperture and second orifice diaphragm
The circular of saturating circular hole, target surface is black.
It is described a kind of without burnt conjugated optical channels MTF test device, as analyzer and standard lens are mounted on by guide rail
On rotary table, the rotary table rotates angle > ± 90 °.
The second object of the present invention is deficiency according to prior art, provides a kind of test side non-focus optical system MTF
Method.
A) fixation of standard lens position
Standard lens is set in rotary table, the visible collimated light beam for issuing target light source is successively through paraboloid collimating mirror
It is transmitted with the first aperture of plane mirror reflection of turning back, then 2 mm of the second orifice diaphragm through 5 mm of φ and φ, and controls rotation
Revolving worktable drive standard lens and as analyzer around fulcrum respectively along it is suitable, rotate counterclockwise appropriate low-angle, observation is incident on
5 mm visible light spot of φ on first aperture moves left and right situation, then front, rear, left and right four-way micro-shifting standard lens,
Until hot spot does not move when rotary table rotation, last fixed standard camera lens;
B) as the fixation of analyzer
Along front, rear, left and right four-way move as analyzer find standard lens optimum image plane, and by measured value with it is known
Standard value is compared, and fixes after confirming optimal focal plane position as analyzer, records the zero point position as analyzer;
C) it is tested the fixation without burnt optical path position
It is placed in the front of rotary table tested without Jiao Guanglu, the flexible abutment sleeve of centre insertion, it is ensured that tested without coke
The emergent pupil of optical path, the entrance pupil of optical axis and standard lens, optical axis match, fixed tested without Jiao Guanglu, then extract flexible positioning
Sleeve;
D) test of angle enlargement ratio
Turn back position that plane mirror and rotary table are presently in of regulation is zero-bit, and turning angle is respectively defined as、,
When turning back, plane mirror rotation is smallerWhen angle value, according to tested suitable or reverse without burnt light channel structure Type Control rotary table
RotationAngle, until receiving Energy maximum value again as analyzer, by angle enlargement ratio formulaIt calculatesValue with
Whether design value is consistent;
E) MTF test is carried out
Tested combine without burnt optical path with standard lens is equivalent to infinity conjugated optical channels structure, carries out 0 w visual field on axis
MTF test, test result unit are Lp/mrad;
The plane mirror that will turn back rotationAngle,Value is the half of Zhou Wai half field-of-view respective corners angle value, rotary table
According to formulaIt is rotated after calculatingAngle carries out the outer 1.0 w visual field MTF test of outer 0.7 w of axis, axis, test result list
Position is Lp/mrad;
Mutually convert between Lp/mrad and Lp/mm unit according to following formula, show that test result unit is Lp/
Mm's is tested without 1.0 w visual field MTF test results outside 0.7 w outside 0 w visual field on burnt optical path axis, axis, axis:In formula:For standard lens focal length, unit mm.
Main advantages of the present invention are:
1, the present invention solves entire new without the participation of burnt optical path by building to without burnt conjugated optical channels MTF test device
Type optical imaging system imaging, the problem of image quality evaluation is but directly used in without Common Testing device, be suitble to work visible light,
Medium-wave infrared and long wave infrared region without burnt light path system;
2, by the analysis to test philosophy, a whole set of testing process is subdivided into five steps, 0 w on axis is realized and regards
The test of field, outer 0.7 w of axis, the outer 1.0 w visual field MTF of axis, it is ensured that the correctness of measuring accuracy.
Detailed description of the invention
Fig. 1 is the schematic diagram of apparatus of the present invention;
Fig. 2 is 2 the first aperture of mm of φ of the present invention, 5 mm second orifice diaphragm schematic diagram of φ;
Fig. 3 is that the fixed principle in standard lens position of the present invention adjusts figure;
Fig. 4 is the fixed schematic diagram in no burnt conjugated optical channels position after the present invention is inserted into flexible abutment sleeve;
Fig. 5 is that the present invention turns back plane mirror and rotary table cooperation rotates, and carries out axis outer 0.7 w, 1.0 w visual field MTF
The schematic diagram of test;
Fig. 6 is the test result (unit Lp/mrad) of 0 w MTF on axis of the present invention;
Fig. 7 is the test result (unit Lp/mrad) of 0.7 w MTF of the present invention;
Fig. 8 is the test result (unit Lp/mrad) of 1.0 w MTF of the present invention;
Fig. 9 is the test result that 0 w MTF converts after unit on axis of the present invention;
Figure 10 is that 0.7 w MTF of the present invention converts the test result after unit;
Figure 11 is that 1.0 w MTF of the present invention convert the test result after unit.
Each appended drawing reference are as follows: 1-target light source, 2-optical filters, 3-paraboloid collimating mirrors, 4-turn back plane mirror, and 5-
Rotary table, 6-as analyzer, and 7-standard lens, the 8-the first aperture, 9-second orifice diaphragms, 10-is flexible fixed
Position sleeve.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Referring to figs. 1 to shown in Fig. 5, the invention discloses a kind of without burnt conjugated optical channels MTF test device, solves previous nothing
Focus optical system participates in entire optical system imaging, the problem being but unable to test, including being located at the same target turned back on optical axis
Mark light source 1, optical filter 2, paraboloid collimating mirror 3, plane mirror 4 of turning back, standard lens 7 and as analyzer 6, the picture analyzer
6 and the setting of standard lens 7 the can be disposed in front of standard lens 7 on fixed pivot left-right rotation rotary table 5
Axis of the center of circle of one aperture 8 and second orifice diaphragm 9, the first aperture 8 and second orifice diaphragm 9 in standard lens 7
On line, the first aperture 8 is located at the entrance pupil of standard lens 7, and the bore of the first aperture 8 is 2 mm of φ, center and mark
The entrance pupil center of quasi- camera lens 7 is overlapped, and the bore of second orifice diaphragm 9 is 5 mm of φ, is located in front of 7 entrance pupil center of standard lens
At 100-150mm.The target light source 1 of this patent, optical filter 2, paraboloid collimating mirror 3, plane mirror 4 of turning back, rotary table 5,
As analyzer 6 be external high-precision MTF test equipment have by oneself component, belong to universal component;Selected optical filter 2 and as analysis
Instrument 6 is replaceable, should be adapted with tested without burnt optical path service band.
Further, the standard lens 7 is mounted on flexible abutment sleeve 10, and the stack shell band for the abutment sleeve 10 that stretches is carved
Degree, internal scalable, an end interface is matched with the entrance pupil of standard lens 7, another end interface and the tested emergent pupil without burnt optical path
Match;Standard lens 7 is infinity conjugate optical system structure, and entrance pupil is located on the first lens, focal length and without burnt conjugated optical channels after
The ideal lens focus just designed is consistent, and object space bore is greater than without burnt conjugated optical channels image space emergent pupil bore, and standard lens is on axis
And mtf value reaches diffraction limit within the scope of paraxial ± 3 °, and has standard comparison data, to eliminate as much as standard lens to no coke
Subsystem image quality tests the harm of bring aberration;Furthermore the bore of paraboloid collimating mirror 3 and plane mirror 4 of turning back is greater than tested without coke
Optical path bore, it is tested without burnt optical path to look in the distance structure for Ke Pule type or Galilean type is looked in the distance optical texture.
Further, the target light source 1 is the alternative light source of embedded circular hole targets, is worked in visible light, medium-wave infrared
And long wave infrared region;The circular of saturating circular hole, target surface are centered on first aperture 8 and second orifice diaphragm 9
Black.
Further, described to be mounted on rotary table 5 as analyzer 6 and standard lens 7 by guide rail, it is described
Rotary table 5 rotates angle > ± 90 °.
The present invention is based on the test methods without burnt conjugated optical channels MTF test device to include the following steps
The fixation of standard lens position
Standard lens 7 is set in rotary table 5, the visible light wave range light source of target light source 1 is opened, sends out target light source 1
The visible collimated light beam of a branch of heavy caliber out is successively reflected through paraboloid collimating mirror 3 and plane mirror 4 of turning back, then the through 5 mm of φ
The first aperture 8 of 2 mm of two apertures 9 and φ transmits, and controls rotary table 5 and drive standard lens 7 and as analysis
Instrument 6 around fulcrum respectively along it is suitable, rotate counterclockwise appropriate low-angle, it is visible to observe 5 mm of φ being incident on the first aperture 8
Light hot spot moves left and right situation, if hot spot is moved left and right with the rotation of rotary table 5, indicates the entrance pupil of standard lens 7 not
Overlapping of axles are rotated with rotary table 5, then front, rear, left and right four-way micro-shifting standard lens 7, and passes through rotary table 5
Rotate verifying visible light spot repeatedly moves left and right situation, until hot spot does not move when rotary table 5 rotates,
It eliminates the outer visual field collimated light beam of axis and tests bring Beam Walk problem, last fixed standard camera lens 7.
As analyzer is along the fixation of optical axis direction position
Along front, rear, left and right, four-way moves the optimum image plane as the searching standard lens 7 of analyzer 6, and by measured value and
Know that standard value is compared, confirm optimal focal plane position after fix as analyzer 6) record as analyzer 6 zero point position;For
True MTF measured value of the reflection without burnt conjugated optical channels system comprehensively, as analyzer should strictly be fixed on mark during follow-up test
The optimum image plane position of quasi- camera lens.
The tested fixation without burnt optical path position
It is independently placed in the front of rotary table 5 tested without Jiao Guanglu, the flexible abutment sleeve 10 of centre insertion, it is ensured that quilt
Survey emergent pupil without burnt optical path, entrance pupil, the optical axis of optical axis and standard lens 7 match, fixed tested without Jiao Guanglu, then extract and stretch
Contracting abutment sleeve 10.
The test of angle enlargement ratio
Turn back position that plane mirror 4 and rotary table 5 are presently in of regulation is zero-bit, and turning angle is respectively defined as、, as analyzer energy is maximum when zero-bit, at this time、, when turning back, the rotation of plane mirror 4 is smallerWhen angle value, according to
It is tested without burnt light channel structure Type Control rotary table 5 is suitable or backwards rotationAngle receives again until as analyzer 6
Energy maximum value, by angle enlargement ratio formulaIt calculatesWhether value is consistent with design value;If, for Ke Pule type
Light channel structure works as design valueWhen, then, at this time as analyzer is acted in accordance with to rotationTimes;For Galilean type optical path
Structure works as design valueWhen, then, at this time as analyzer becomes backwards rotationTimes.Angle enlargement ratioNumerical value is straight
Connecing influences the depth of parallelism without burnt optical path incident beam and outgoing beam, if multiplier valueIt is not inconsistent with design objective, it should be according to drawing
Inclination, bias and the center size of space of optical element are reexamined, or empty, focusing to theoretical installation site is drawn in adjustment, only
Have when angle enlargement ratioWhen meeting optical design requirements index, MTF test just can most reflect without the excellent of burnt light path imaging quality
It is bad.
Carry out MTF test
Tested combine without burnt optical path with standard lens 7 is equivalent to infinity conjugated optical channels structure, carries out 0 w visual field on axis
MTF test, test result unit are Lp/mrad.
The plane mirror 4 that will turn back rotatesAngle,Value is the half of Zhou Wai half field-of-view respective corners angle value, rotary table
5 according to formulaIt is rotated after calculatingAngle carries out the outer 1.0 w visual field MTF test of outer 0.7 w of axis, axis, test result
Unit is Lp/mrad.
Mutually convert between Lp/mrad and Lp/mm unit according to following formula, show that test result unit is Lp/
Mm's is tested without 1.0 w visual field MTF test results outside 0.7 w outside 0 w visual field on burnt optical path axis, axis, axis:In formula:For standard lens focal length, unit mm.
When carrying out MTF test, the test pattern of traditional infinity conjugated optical channels is Infinity, the statement of spatial frequency unit
For Lp/mm, infinity conjugated optical channels test pattern is Afocal, and spatial frequency unit is expressed as Lp/mrad, finally should be according to upper
It states formula mutually convert between Lp/mrad and Lp/mm unit, show that test result unit is the tested without Jiao Guanglu of Lp/mm
Outer 0.7 w of 0 w visual field, axis, the outer 1.0 w visual field MTF test results of axis on axis.
By taking focal length is the standard lens of 50 mm as an example, Lp/mm value corresponding to 0~0.8 Lp/mrad see the table below 1.
With representative a set of wavelength for 3.7~4.8 μm, F 2, angle enlargement ratio is 6.5XMedium-wave infrared without
For burnt conjugated optical channels test, final test knot of the test result as shown in Fig. 6, Fig. 7, Fig. 8 and table 2, after 1 unit conversion of table
Fruit is as shown in Fig. 9, Figure 10, Figure 11.Test result shows: without burnt optical path in 16 Lp/mm, MTF >=0.49 at 0 w, 0.7 w
Locate MTF >=0.32, MTF >=0.13 at 1.0 w meets design objective.
1 Lp/mrad of table and Lp/mm unit mutually convert the table of comparisons
2 medium-wave infrared of table is without burnt conjugated optical channels MTF test value
The above-described embodiments merely illustrate the principles and effects of the present invention, and the embodiment that part uses, for
For those skilled in the art, without departing from the concept of the premise of the invention, can also make it is several deformation and
It improves, these are all within the scope of protection of the present invention.
Claims (7)
1. a kind of without burnt conjugated optical channels MTF test device, it is characterised in that: including being located at the same target light turned back on optical axis
Source (1), optical filter (2), paraboloid collimating mirror (3), plane mirror of turning back (4), standard lens (7) and as analyzer (6), it is described
As analyzer (6) and standard lens (7) are arranged can be on fixed pivot left-right rotation rotary table (5), standard lens (7)
Front is disposed with the first aperture (8) and second orifice diaphragm (9), the first aperture (8) and second orifice diaphragm
(9) the center of circle is on the axis of standard lens (7), and the first aperture (8) is located at the entrance pupil of standard lens (7), and first is small
The bore of hole diaphragm (8) is 2 mm of φ, and center is overlapped with the entrance pupil center of standard lens (7), the bore of second orifice diaphragm (9)
For 5 mm of φ, it is located in front of standard lens (7) entrance pupil center at 100-150mm.
2. according to claim 1 a kind of without burnt conjugated optical channels MTF test device, which is characterized in that the standard mirror
Head (7) is mounted on flexible abutment sleeve (10).
3. according to claim 2 a kind of without burnt conjugated optical channels MTF test device, which is characterized in that the standard mirror
Head (7) is infinity conjugate optical system structure.
4. according to claim 2 or 3 a kind of without burnt conjugated optical channels MTF test device, which is characterized in that the target
Light source (1) is the alternative light source of embedded circular hole targets.
5. according to claim 2 or 3 a kind of without burnt conjugated optical channels MTF test device, which is characterized in that described first
The circular of saturating circular hole centered on aperture (8) and second orifice diaphragm (9), target surface is black.
6. according to claim 2 or 3 a kind of without burnt conjugated optical channels MTF test device, which is characterized in that the picture point
Analyzer (6) and standard lens (7) are mounted on rotary table (5) by guide rail, and the rotary table (5) rotates angle
> ± 90 °.
7. a kind of test method as described in claim 1 without burnt conjugated optical channels MTF test device, it is characterised in that: including such as
Lower step
A) fixation of standard lens position
Standard lens (7) is set in rotary table (5), the visible collimated light beam for issuing target light source (1) is successively through paraboloid
Collimating mirror (3) and plane mirror of turning back (4) reflection, then the first aperture light of 2 mm of second orifice diaphragm (9) and φ through 5 mm of φ
Late (8) transmission, and control rotary table (5) drive standard lens (7) and as analyzer (6) around fulcrum respectively along the suitable, inverse time
Needle rotates appropriate low-angle, observes the 5 mm visible light spot of φ being incident on the first aperture (8) and moves left and right situation, so
Front, rear, left and right four-way micro-shifting standard lens (7) afterwards, until hot spot does not move when rotary table (5) rotation, most
Fixed standard camera lens (7) afterwards;
B) as the fixation of analyzer
Along front, rear, left and right, four-way moves the optimum image plane as analyzer (6) searching standard lens (7), and by measured value and
Know that standard value is compared, fixes after confirming optimal focal plane position as analyzer (6), record the zero-bit point as analyzer (6)
It sets;
C) it is tested the fixation without burnt optical path position
It places and is tested without Jiao Guanglu in the front of rotary table (5), flexible abutment sleeve (10) are inserted into centre, it is ensured that tested nothing
Entrance pupil, the optical axis of the emergent pupil of burnt optical path, optical axis and standard lens (7) match, fixed tested without Jiao Guanglu, then extract flexible
Abutment sleeve (10);
D) test of angle enlargement ratio
Turn back position that plane mirror (4) and rotary table (5) are presently in of regulation is zero-bit, and turning angle is respectively defined as、, when plane mirror of turning back (4), rotation is smallerWhen angle value, according to tested without burnt light channel structure Type Control rotary table (5)
Suitable or backwards rotationAngle, until receiving Energy maximum value again as analyzer (6), by angle enlargement ratio formulaIt calculatesWhether value is consistent with design value;
E) MTF test is carried out
It tested will be combined without burnt optical path with standard lens (7) and be equivalent to infinity conjugated optical channels structure, and carry out 0 w visual field on axis
MTF test, test result unit are Lp/mrad;
To turn back plane mirror (4) rotationAngle,Value is the half of Zhou Wai half field-of-view respective corners angle value, rotary table (5)
According to formulaIt is rotated after calculatingAngle carries out the outer 1.0 w visual field MTF test of outer 0.7 w of axis, axis, test result list
Position is Lp/mrad;
Mutually convert between Lp/mrad and Lp/mm unit according to following formula, show that test result unit is Lp/mm's
It is tested without 1.0 w visual field MTF test results outside 0.7 w outside 0 w visual field on burnt optical path axis, axis, axis:
In formula:For standard lens focal length, unit mm.
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CN112304574B (en) * | 2020-09-22 | 2022-11-01 | 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) | Image quality testing device and method for optical system with optical despin assembly |
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