CN102038552A - High-precision diagnostic equipment collimation method and device thereof - Google Patents

Abstract

The invention provides a high-precision diagnostic equipment collimation method and a device thereof, and aims to solve the problems of low collimation precision, complex collimation device and limited space in the traditional collimation method. The method comprises the following steps: imaging a target point on two sets of CCDs (Charge Coupled Devices) in an optical imaging convergence measurement mode; interpreting the two sets of CCD images to obtain CCD convergence measuring point coordinates; when the CCD convergence measuring point coordinates coincide with the initialization-given target point coordinates, indicating that the diagnostic equipment strictly points to the target point, which means collimated; and when the CCD convergence measuring point coordinates do not coincide with the initialization-given target point coordinates, adjusting the degree of freedom of the diagnostic equipment collimation structure in three directions according to the CCD convergence measurement model established during initialization until the CCD convergence measuring point coincides with the target point. The invention has high collimation precision up to 5-10 mu m; and the system can judge whether the diagnostic equipment is collimated without a target monitoring system for observing the collimation condition of the collimated target point, so that the invention is convenient for use.

Description

The method and the device thereof of the aiming of high-precision diagnosis equipment

Technical field

The present invention relates to a kind of method and device thereof of high-precision diagnosis equipment aiming.

Background technology

For guaranteeing diagnostic device aiming target spot, diagnostic device all has sighting device.The precision and the aiming performance of different method of sight decision aimings.General method of sight mainly contains: single laser beam aims at, two laser beam crosses aiming.

Single laser beam method of sight is with the light shaft coaxle of laser beam with the optics system as shown in Figure 1, and when laser beam pointed to target spot, expression measuring system optical axis pointed to target center.The method does not account for space outerpace, but will take light hole, and is limited in the application.

Two laser beams aiming that crosses: finish aiming by crossing by two laser focusing beam emitters.The laser focusing beam emitter by fiber coupler with laser coupled to the optical focus mirror system, the angle of optical focus mirror system scalable outgoing beam, and with two the bundle laser intersect on target spot.But the pointing accuracy of this aiming mode is excited the restriction of beam sizes, and pointing accuracy is not high, and maximum pointing accuracy is about 100um.

Above single laser beam aiming crosses with two laser beams and aims at the situation that all needs third-party range surveillance systematic observation aiming target spot when operating each time, and is very restricted on using.And the target spot slight change needs to adjust installation site, angle of laser focusing beam emitter etc. especially.

Summary of the invention

The present invention aims to provide a kind of method of high-precision diagnosis equipment aiming, and traditional method of sight pointing accuracy is not high, sighting device is complicated to solve, the problem of limited space.

Technical scheme of the present invention is as follows:

A kind of method of high-precision diagnosis equipment aiming may further comprise the steps:

(1) two groups of CCD camera heads are fixedly installed in the diagnostic device front end face through the aiming joint, these two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face; Set up the CCD Intersection Measuring Model, the given target coordinate of initialization;

(2) adopt the optical imagery CCD metering system that crosses, target spot is imaged on two groups of CCD;

(3) two groups of ccd images that step (2) is obtained carry out interpretation, draw the CCD measurement point coordinate that crosses;

(4) cross the given target coordinate of measurement point coordinate and initialization when overlapping as CCD, the strict target spot that points to of expression diagnostic device promptly aims at;

When CCD crosses the given target coordinate of measurement point coordinate and initialization when not being inconsistent, the CCD Intersection Measuring Model of setting up according to initialization is adjusted the degree of freedom of three directions of diagnostic device aiming structure; Carry out step (5);

(5) repeated execution of steps (2), (3), (4) overlap until the CCD given target coordinate of measurement point coordinate and initialization that crosses, and promptly aim at.

The optical system of above-mentioned CCD camera head is for taking the photograph system far away, and amplification is 1: 1.

Above-mentioned steps (4) is by feedback control, adopts servo dragging system to adjust the degree of freedom of three directions of diagnostic device aiming structure.

The present invention also provides a kind of high-precision diagnosis equipment sighting device of using this method.

This high-precision diagnosis equipment sighting device comprises the servo dragging system that is fixedly installed in two groups of CCD camera heads of diagnostic device front end face, the computer processing module that is electrically connected with the CCD camera head and is pointed in order to the adjustment diagnostic device by computer processing module control through the aiming joint; Described two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face, and distance light is learned camera lens to the CCD camera head and ccd video camera is formed by taking the photograph, and take the photograph distance light for two groups and learn camera lens with the metering system sensing target spot that crosses.

Above-mentionedly take the photograph that distance light is learned camera lens and the ccd video camera vacuum seal is fixing as a whole.

Above-mentionedly take the photograph distance light to learn the camera lens amplification be 1: 1, object image distance is 250mm, and object plane is learned camera lens foremost apart from 190mm from taking the photograph distance light.

The present invention has the following advantages:

1, the precision aiming is high, can reach the pointing accuracy of 5um～10um.

2, system itself just can judge whether aiming, does not need the aiming situation of range surveillance systematic observation aiming target spot, uses very convenient.

Description of drawings

Fig. 1 is single laser beam aiming principle in the prior art;

Fig. 2 is the aiming principle that crosses of two laser beams in the prior art;

Fig. 3 is the structural representation of application apparatus of the present invention;

Fig. 4 is embodiment of the invention CCD intersection measuring principle figure;

Fig. 5 is an embodiment of the invention optical system structure sketch map.

The drawing reference numeral explanation:

The 1-target spot, 2-optical lens, 3-CCD video camera, 4-terminal pad (aiming joint), 5-diagnostic device, 6-diagnostic device light path; The 7-laser instrument, the 8-dolly.

The specific embodiment

The present invention adopts optical imagery CCD intersection measuring principle, and target spot is imaged on the CCD, by two ccd image interpretations, draws off-centered position by crossing.Structure is seen shown in Figure 3, is made up of camera lens, CCD, aiming joint.The effect of aiming joint is that it is connected with diagnostic device.When CCD crosses measurement point when overlapping with target spot, the strict target spot that points to of expression diagnostic device.

1) CCD Intersection Measuring Model

Show that as Fig. 4 two CCD cameras are installed in 2 points of aiming joint respectively, 2 lines are baseline S.Wherein to be zero O, baseline S is an X-axis, and pitching is a Y-axis, and the orientation is the Z axle.

In field range, when diagnostic device did not aim at, the target center position coordinates (derivation of equation is omitted) that two CCD record was:

$x=\frac{s\&times;\mathrm{<figure-callout\; id="2"\; label="tg\; A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_2}{{\mathrm{<figure-callout\; id="1"\; label="tgA"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tgA</figure-callout>}}_1+\mathrm{<figure-callout\; id="2"\; label="tg\; A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_2}$

$y=\frac{1}{2}[\frac{s\&times;\mathrm{<figure-callout\; id="2"\; label="tg\; A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_2}{\mathrm{<figure-callout\; id="1"\; label="tg\; A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_1+\mathrm{tg}{A}_2}{(1+{\mathrm{tg}}^2{A}_1)}^{\frac{1}{2}}\&times;{\mathrm{<figure-callout\; id="1"\; label="tgE"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tgE</figure-callout>}}_1+\frac{s\&times;\mathrm{<figure-callout\; id="1"\; label="tg\; A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_1}{\mathrm{<figure-callout\; id="1"\; label="tg\; A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_1+\mathrm{tg}{A}_2}(1+{\mathrm{tg}}^2{A}_1)\&times;\mathrm{tg}{E}_2]$

$z=\frac{s\&times;\mathrm{<figure-callout\; id="1"\; label="tg\; A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_1\&times;\mathrm{<figure-callout\; id="2"\; label="tg\; A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_2}{\mathrm{<figure-callout\; id="1"\; label="tg\; A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_1+\mathrm{<figure-callout\; id="2"\; label="tg\; A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">tg</figure-callout>}{A}_{}{}_2}$

In the following formula: A ₁=A ₁₀+ Δ A ₁, A ₂=A ₂₀+ Δ A ₂E ₁=Δ E ₁, E ₂=Δ E ₂

Wherein:

A ₁₀When having aimed at, the orientation angle of first CCD optical axis and target center;

A ₂₀When having aimed at, the orientation angle of second CCD optical axis and target center.

A ₁₀, A ₂₀Two-value can be by designing, process and debug assurance;

Δ A ₁, Δ E ₁Be respectively that first CCD records the azimuth and the angle of site that target center departs from when not aiming at;

Δ A ₂, Δ E ₂Be respectively that second CCD records the azimuth and the angle of site that target center departs from when not aiming at.

Δ A ₁, Δ E ₁, Δ A ₂, Δ E ₂These angles can be tried to achieve through the conversion of second of arc space half-convergency by the number of scanning lines (Z value) on the pairing CCD target surface of image and scanning columns (X value), and its approximate formula is:

${\mathrm{\&Delta;<figure-callout\; id="1"\; label="A"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">A</figure-callout>}}_1=\frac{X_1}{f},$ ${\mathrm{\&Delta;<figure-callout\; id="1"\; label="E"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">E</figure-callout>}}_1=\frac{Z_1}{f};$ ${\mathrm{\&Delta;<figure-callout\; id="2"\; label="A"\; filenames="HDA0000043873990000021.png"\; state="\{\{state\}\}">A</figure-callout>}}_2=\frac{X_2}{f},$ ${\mathrm{\&Delta;<figure-callout\; id="1"\; label="E"\; filenames="HDA0000043873990000011.png"\; state="\{\{state\}\}">E</figure-callout>}}_1=\frac{Z_2}{f};$

X wherein ₁, Z ₁, X ₂, Z ₂Be respectively the two-dimensional data that the target chamber target center that records on first, second ccd video camera imaging surface when not aiming at departs from.F is the focal length of two ccd video camera camera lenses.

Adopting servo dragging system to adjust diagnostic device and point to, specifically is the degree of freedom of adjusting three directions of diagnostic device aiming structure according to above data, makes it reach the given target center position coordinates of initial designs.This moment, the bulls-eye chart picture just in time was positioned at the center of two CCD target surfaces.

If need target spot other positions on vertical plane of aiming, diagnostic device aims at and needn't change the position and the angle of camera lens again to target, only need to select the given target coordinate of corresponding initialization (as the high-precision diagnosis equipment sighting device of the present invention of product, in the memorizer of CCD, record the given target coordinate of a plurality of initialization), can set up new CCD Intersection Measuring Model.

2) CCD design of Optical System

Optical system is for taking the photograph system far away, adopts to take the photograph distance light and learn system the distance between camera lens and the target spot is increased, and helps reducing the angle between two CCD and the target spot, avoids blocking the light path of other diagnostic device of installing on target chamber.Take the photograph distance light system simultaneously the distance between CCD and the camera lens is shortened, be convenient to CCD and camera lens fixedly becomes one.

Optical system is made up of five eyeglasses, sees shown in Figure 5ly, and its amplification is 1: 1.Object image distance is 250mm, object plane from optical glass foremost the distance about 190mm.By concrete designing and calculating, the disc of confusion maximum that draws optical system is no more than diffraction limit 8um, 50 lines to the time MTF reach 0.40.

This CCD design of Optical System has realized the high accuracy aiming, and solved camera lens from target spot the far away and high contradiction of enlargement ratio.

Claims (6)

1. the method for high-precision diagnosis equipment aiming may further comprise the steps:

(1) two groups of CCD camera heads are fixedly installed in the diagnostic device front end face through the aiming joint, these two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face; Set up the CCD Intersection Measuring Model, the given target coordinate of initialization;

(2) adopt the optical imagery CCD metering system that crosses, target spot is imaged on two groups of CCD;

(3) two groups of ccd images that step (2) is obtained carry out interpretation, draw the CCD measurement point coordinate that crosses;

(4) cross the given target coordinate of measurement point coordinate and initialization when overlapping as CCD, the strict target spot that points to of expression diagnostic device promptly aims at;

When CCD crosses the given target coordinate of measurement point coordinate and initialization when not being inconsistent, the CCD Intersection Measuring Model of setting up according to initialization is adjusted the degree of freedom of three directions of diagnostic device aiming structure; Carry out step (5);

(5) repeated execution of steps (2), (3), (4) overlap until the CCD given target coordinate of measurement point coordinate and initialization that crosses, and promptly aim at.

2. the method for high-precision diagnosis equipment aiming according to claim 1, it is characterized in that: the optical system of described CCD camera head is for taking the photograph system far away, and amplification is 1: 1.

3. the method for high-precision diagnosis equipment aiming according to claim 2, it is characterized in that: step (4) is by feedback control, adopts servo dragging system to adjust the degree of freedom of three directions of diagnostic device aiming structure.

4. application rights requires the high-precision diagnosis equipment sighting device of 1 described method, it is characterized in that: comprise the servo dragging system that is fixedly installed in two groups of CCD camera heads of diagnostic device front end face, the computer processing module that is electrically connected with the CCD camera head and is pointed in order to the adjustment diagnostic device by computer processing module control through the aiming joint; Described two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face, and distance light is learned camera lens to the CCD camera head and ccd video camera is formed by taking the photograph, and take the photograph distance light for two groups and learn camera lens with the metering system sensing target spot that crosses.

5. high-precision diagnosis equipment sighting device according to claim 4 is characterized in that: describedly take the photograph that distance light is learned camera lens and the ccd video camera vacuum seal is fixing as a whole.

6. high-precision diagnosis equipment sighting device according to claim 5 is characterized in that: describedly take the photograph distance light to learn the camera lens amplification be 1: 1, object image distance is 250mm, and object plane is learned camera lens foremost apart from 190mm from taking the photograph distance light.

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