CN102664552A - Double drive-feet rectangular piezoelectric plate type linear ultrasonic motor - Google Patents
Double drive-feet rectangular piezoelectric plate type linear ultrasonic motor Download PDFInfo
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- CN102664552A CN102664552A CN2012101430987A CN201210143098A CN102664552A CN 102664552 A CN102664552 A CN 102664552A CN 2012101430987 A CN2012101430987 A CN 2012101430987A CN 201210143098 A CN201210143098 A CN 201210143098A CN 102664552 A CN102664552 A CN 102664552A
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Abstract
The invention discloses a double drive-feet rectangular piezoelectric plate type linear ultrasonic motor. The motor comprises a base, a stator and a mover, wherein the stator comprises one rectangular plate piezoelectric ceramics and two ceramic drive feet, both the top surface and the bottom surface of the rectangular plate piezoelectric ceramics are silvered as electrode layers; the two ceramic drive feet are respectively adhered to peak and trough of a 2-step bending vibration of the side of the rectangular plate piezoelectric ceramics; the mover comprises a sliding block and an aluminum oxide ceramic strip, and the aluminum oxide ceramic strip is adhered to one side of the sliding block; an accommodation cavity is formed on the top surface of the base, a track is arranged on one side of the accommodation cavity, and the mover can arranged on the track in a sliding manner; the stator is arranged in the accommodation cavity, and the two ceramic drive feet on the stator can contact the aluminum oxide ceramic strip on the mover. The ultrasonic motor has the characteristics that multiple ultrasonic motors can be connected in parallel to improve the output force substantially, the structure is simple and compact, and the ultrasonic motor is easy to process and miniaturize.
Description
Technical field
The invention belongs to the ultrasound electric machine technical field, particularly a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor.
Background technology
Ultrasound electric machine is the specific type of electric machine of a kind of new ideas of developing rapidly the eighties of eighties of last century; Drive mechanism is as the one of which: the inverse piezoelectric effect of utilizing piezoelectric; Excite elastomer to produce the micro breadth oscillation of supersonic range; Force the particle of contact-making surface to produce similar elliptical orbit motion, and convert thereof into the rotation or the rectilinear motion of mover through the friction between fixed, the mover.Compare with electromagnetic machine, have that version is various, low speed high torque, low noise operation, response are fast, cut off self-lock, position and speed control characteristic are good, do not produce magnetic field does not also receive advantages such as electromagnetic interference.Owing to have above plurality of advantages, ultrasound electric machine has obtained number of applications in fields such as industrial automation, Aero-Space, medical treatment, bioengineering, and has brought into play enormous function.This case inventor develops a kind of novel ultrasound electric machine structure based on the puzzlement in the widespread usage of present ultrasound electric machine.
Summary of the invention
The object of the invention is to provide a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor, has to be convenient to parallel connection significantly to improve power output, simple in structure, compact, the characteristics that are easy to process, be easy to miniaturization.
In order to reach above-mentioned purpose, solution of the present invention is:
A kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor; Comprise pedestal, stator and mover; Said stator comprises a rectangular slab piezoelectric ceramic and two ceramic driving foot, and this rectangular slab piezoelectric ceramic polarizes along thickness direction, its end face, bottom surface all by silver as electrode layer; The electrode layer of end face carries out the quartering along cross centre line; And the two arrays of electrodes that is in diagonal position links to each other through lead respectively, and the input phase difference is 90 ° a same frequency sinusoidal signal respectively, and the electrode layer of said rectangular slab piezoelectric ceramic bottom surface is as earth terminal; Said two ceramic driving foot is bonded in curved crest and the trough place that shakes, rectangular slab piezoelectric ceramic 2 rank respectively;
Mover comprises slide block and aluminium oxide ceramics bar, and said aluminium oxide ceramics bar is bonded in a side of slide block;
The end face of pedestal forms containing cavity, and a side of this containing cavity is provided with track, and the slide block of mover is located on the track slidably; Stator is located in the containing cavity, and two ceramic driving foot on the stator is contacted with aluminium oxide ceramics bar on the mover; The sidewall of said containing cavity also offers open-work, and the lateral adjustment can regulate precompression between moving, stator and the vertical governor motion that can regulate axial clearance between stator and pedestal are set respectively in the open-work.
The position of the corresponding stator in the top of said base containing cavity also is equipped with cover plate, this cover plate by screw on pedestal.
Above-mentioned lateral adjustment comprises crossed strip and horizontal holding screw; Said crossed strip is in the open-work of pedestal side; The one of which end is against the rectangular slab piezoelectric ceramic side of stator, and the other end is against horizontal holding screw, regulates the precompression between moving, stator through screwing horizontal holding screw.
Above-mentioned vertical governor motion comprises longitudinal spring and vertical holding screw; Said longitudinal spring is located in the open-work; The one of which end is against the rectangular slab piezoelectric ceramic side of stator, and the other end is regulated the axial clearance between stator and pedestal against vertical holding screw through screwing vertical holding screw.
After adopting such scheme, linear ultrasonic motor provided by the present invention does not have the existence of metal matrix material in its stator; The critical piece of stator is a rectangular slab piezoelectric ceramic, through the design of four divisional electrodes, realizes the curved excitation of shaking of 1 rank longitudinal vibration and 2 rank; Thereby simplified the structure of motor; Be easy to little, miniaturization, can realize easily that a plurality of parallel connections to improve power output and stability, have huge promotional value and application potential.
Description of drawings
Fig. 1 is the structural representation of stator among the present invention;
Fig. 2 is an internal structure sketch map of the present invention;
Fig. 3 (a) is the mode of oscillation sketch map of stator 1 rank longitudinal vibration among the present invention;
Fig. 3 (b) is the curved mode of oscillation sketch map that shakes in stator 2 rank among the present invention;
Fig. 4 is a stator steady-state response sketch map among the present invention.
Embodiment
Below will combine accompanying drawing, technical scheme of the present invention will be elaborated.
As shown in Figure 2, the present invention provides a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor, comprises pedestal 7, stator 6, mover and cover plate 13, introduces respectively below.
Stator 6 is core components of ultrasound electric machine, and its structure can cooperate shown in Figure 1, comprises a rectangular slab piezoelectric ceramic 1 and two ceramic driving foots 2; Said rectangular slab piezoelectric ceramic 1 polarizes along thickness direction; Its end face drapes over one's shoulders silver as electrode layer, and along cross centre line this electrode layer is carried out the quartering, and the two arrays of electrodes that will be in diagonal position links to each other through lead respectively; As two phase signals inputs 4,5; And silver is also draped over one's shoulders as another electrode layer in the bottom surface of rectangular slab piezoelectric ceramic 1, but does not carry out subregion, and this bottom-side electrodes layer is as earth terminal 3; In addition, in order to make the driving maximum effect, curved crest, the trough place that shakes, 2 rank that said two ceramic driving foot 2 is bonded in rectangular slab piezoelectric ceramic 1 respectively.
The end face middle part of pedestal 7 is recessed to form containing cavity downwards, is used for ccontaining stator 6, and a side of said pedestal 7 also is provided with track 9, specifically is to offer holddown groove in a side of pedestal 7, and the two ends of track 9 are fixed in the holddown groove by screw 8.
Cooperate shown in Figure 2ly, mover comprises each other bonding slide block 10 and aluminium oxide ceramics bar 11, and slide block 10 is the U font, falls on track 9 and can do rectilinear motion along track 9; Said aluminium oxide ceramics bar 11 is bonded in a side of slide block 10, and two ceramic driving foots 2 on this aluminium oxide ceramics bar 11 and the stator 6 are contacted; Said pedestal 7 drives foot 2 in containing cavity opposing sidewalls also offers at least one open-work, is provided with lateral adjustment in this open-work, and this lateral adjustment comprises crossed strip 18 and horizontal holding screw 17; Specifically; Crossed strip 18 is located in the open-work, and an end of this crossed strip 18 is against the rectangular slab piezoelectric ceramic 1 of stator 6, and the other end is against horizontal holding screw 17; Change the flexible of crossed strip 18 by screwing of horizontal holding screw 17; Thereby regulate the precompression between fixed, the mover, and in order to increase buffering, the outer cover of said crossed strip 18 is provided with horizontal rubber blanket 19; The longitudinal side wall of said containing cavity also offers open-work, is provided with vertical governor motion in this open-work, and this vertical governor motion comprises longitudinal spring 15 and vertical holding screw 14; Specifically; Longitudinal spring 15 is located in the open-work, and an end of this longitudinal spring 15 is against the side of rectangular slab piezoelectric ceramic 1, and the other end is against vertical holding screw 14; Change the flexible of longitudinal spring 15 by screwing of vertical holding screw 14, thereby regulate the axial clearance between stator 6 and the pedestal 7; And in order to increase buffering, the outer cover of said longitudinal spring 15 is provided with vertical rubber blanket 16.
In the present embodiment, in order to limit the extra dof of stator 6, also the position of corresponding stator 6 is equipped with cover plate 13 above pedestal 7 containing cavities, and fastening by screw 12.
Linear ultrasonic motor provided by the present invention has two specific operation modes; Cooperate shown in Fig. 3 (a); A mode of oscillation of stator 6 is 1 rank longitudinal vibrations; Make two ceramic driving foots 2 produce the reciprocal linear reciprocating motion of along continuous straight runs (in the drawings under the coordinate system) along Y direction; To be that 2 rank are curved shake another mode of oscillation of stator 6, cooperates shown in Fig. 3 (b), makes two ceramic driving foots 2 produce the vertically reciprocal linear reciprocating motion of (in the drawings under the coordinate system, along Z-direction).After above-mentioned two mode of oscillations stack, each ceramic driving foot 2 vertical reciprocating motion that reach on the horizontal both direction can be synthesized an elliptic motion, so two ceramic driving foots 2 have just produced two elliptic motions independent of each other.
Linear ultrasonic motor provided by the present invention is that 90 ° same frequency sine voltage signal excitation is worked down at the two-way phase difference; Wherein (U is a magnitude of voltage to one road sine voltage signal Usin ω t; ω is a model frequency; T is the time) be applied to a group of four subregion rectangular slab piezoelectric ceramic 1 on the corner electrode, like the signal input part among Fig. 14, an operation mode of excitation stator 6; Another road phase difference is that 90 ° same frequency sinusoidal signal Ucos ω t is applied to another group on the corner electrode, like another phase signals input 5 among Fig. 1, and another operation mode of excitation stator 6.Earth terminal 3 ground connection of rectangular slab piezoelectric ceramic.
Under the excitation of above-mentioned two-way voltage signal, the steady-state response of the stator 6 of above-mentioned linear ultrasonic motor in an Energizing cycle (result is obtained by the humorous response analysis of ANSYS) as shown in Figure 4.In an Energizing cycle, stator has experienced (1) successively to (4) four change procedures.Can find out among the figure that two ceramic driving foot 2 has produced the elliptic motion (seeing a, b among Fig. 4) in two YZ of being present in independent of each other planes.In stator 6 is packed pedestal 7 into; And under the effect of horizontal holding screw 17, crossed strip 18 and horizontal rubber blanket 19; The position, summit of two ceramic driving foot 2 contact with aluminium oxide ceramics bar 11 and when keeping certain precompression, the bielliptic(al) motion at the top of ceramic driving foot 2 can alternative expression ground promotion aluminium oxide ceramics bar 11 (mover) linear movement output.After exchange pumping signal (changing the phase difference between two signals), the direction of motion of ceramic driving foot 2 will be reverse, and the direction of linear movement output also changes thereupon.
Above embodiment is merely explanation technological thought of the present invention, can not limit protection scope of the present invention with this, every technological thought that proposes according to the present invention, and any change of on the technical scheme basis, being done all falls within the protection range of the present invention.
Claims (4)
1. double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor; It is characterized in that: comprise pedestal, stator and mover; Said stator comprises a rectangular slab piezoelectric ceramic and two ceramic driving foot, and this rectangular slab piezoelectric ceramic polarizes along thickness direction, its end face, bottom surface all by silver as electrode layer; The electrode layer of end face carries out the quartering along cross centre line; And the two arrays of electrodes that is in diagonal position links to each other through lead respectively, and the input phase difference is 90 ° a same frequency sinusoidal signal respectively, and the electrode layer of said rectangular slab piezoelectric ceramic bottom surface is as earth terminal; Said two ceramic driving foot is bonded in curved crest and the trough place that shakes, rectangular slab piezoelectric ceramic 2 rank respectively;
Mover comprises slide block and aluminium oxide ceramics bar, and said aluminium oxide ceramics bar is bonded in a side of slide block;
The end face of pedestal forms containing cavity, and a side of this containing cavity is provided with track, and the slide block of mover is located on the track slidably; Stator is located in the containing cavity, and two ceramic driving foot on the stator is contacted with aluminium oxide ceramics bar on the mover; The sidewall of said containing cavity also offers open-work, and the lateral adjustment can regulate precompression between moving, stator and the vertical governor motion that can regulate axial clearance between stator and pedestal are set respectively in the open-work.
2. a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor as claimed in claim 1 is characterized in that: the position of the corresponding stator in the top of said pedestal containing cavity also is equipped with cover plate, this cover plate by screw on pedestal.
3. a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor as claimed in claim 1; It is characterized in that: said lateral adjustment comprises crossed strip and horizontal holding screw; Said crossed strip is located in the open-work; The one of which end is against the rectangular slab piezoelectric ceramic side of stator, and the other end is against horizontal holding screw, regulates the precompression between moving, stator through screwing horizontal holding screw.
4. a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor as claimed in claim 1; It is characterized in that: said vertical governor motion comprises longitudinal spring and vertical holding screw; Said longitudinal spring is located in the open-work; The one of which end is against the rectangular slab piezoelectric ceramic side of stator, and the other end is regulated the axial clearance between stator and pedestal against vertical holding screw through screwing vertical holding screw.
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| CN2012101430987A CN102664552A (en) | 2012-05-10 | 2012-05-10 | Double drive-feet rectangular piezoelectric plate type linear ultrasonic motor |
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| CN2012101430987A CN102664552A (en) | 2012-05-10 | 2012-05-10 | Double drive-feet rectangular piezoelectric plate type linear ultrasonic motor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104124891A (en) * | 2014-07-25 | 2014-10-29 | 北京派和科技股份有限公司 | Piezoelectric vibrator and precise displacement platform comprising same |
| CN106208803A (en) * | 2016-07-25 | 2016-12-07 | 南京航空航天大学 | Utilize rectangular block shape linear ultrasonic motor and electric excitation method thereof thereof that single mode drives |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109495011A (en) * | 2018-12-12 | 2019-03-19 | 华南农业大学 | A kind of arc vibrator line type piezoelectric motor and its driving method |
| CN110546774A (en) * | 2017-04-05 | 2019-12-06 | 物理仪器(Pi)两合有限公司 | Method of operating an ultrasonic motor |
| CN112072951A (en) * | 2020-09-14 | 2020-12-11 | 哈尔滨工程大学 | A-type elastic topological piezoelectric actuating mechanism |
| CN112260578A (en) * | 2020-09-02 | 2021-01-22 | 广州大学 | Low-voltage driving V-shaped linear ultrasonic motor |
| CN112271954A (en) * | 2020-11-13 | 2021-01-26 | 上海工程技术大学 | Symmetrically-arranged double-foot driving linear ultrasonic motor |
| CN114247667A (en) * | 2021-11-17 | 2022-03-29 | 合肥工业大学 | Full-automatic photovoltaic panel dust removal trolley and motion control method thereof |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104124891A (en) * | 2014-07-25 | 2014-10-29 | 北京派和科技股份有限公司 | Piezoelectric vibrator and precise displacement platform comprising same |
| CN106208803A (en) * | 2016-07-25 | 2016-12-07 | 南京航空航天大学 | Utilize rectangular block shape linear ultrasonic motor and electric excitation method thereof thereof that single mode drives |
| CN110546774A (en) * | 2017-04-05 | 2019-12-06 | 物理仪器(Pi)两合有限公司 | Method of operating an ultrasonic motor |
| CN110546774B (en) * | 2017-04-05 | 2023-07-18 | 物理仪器(Pi)两合有限公司 | Method for operating an ultrasonic motor |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109495011A (en) * | 2018-12-12 | 2019-03-19 | 华南农业大学 | A kind of arc vibrator line type piezoelectric motor and its driving method |
| CN109495011B (en) * | 2018-12-12 | 2020-04-17 | 华南农业大学 | Arc-shaped vibrator linear piezoelectric motor and driving method thereof |
| CN112260578A (en) * | 2020-09-02 | 2021-01-22 | 广州大学 | Low-voltage driving V-shaped linear ultrasonic motor |
| CN112260578B (en) * | 2020-09-02 | 2022-01-04 | 广州大学 | Low-voltage driving V-shaped linear ultrasonic motor |
| CN112072951A (en) * | 2020-09-14 | 2020-12-11 | 哈尔滨工程大学 | A-type elastic topological piezoelectric actuating mechanism |
| CN112271954A (en) * | 2020-11-13 | 2021-01-26 | 上海工程技术大学 | Symmetrically-arranged double-foot driving linear ultrasonic motor |
| CN114247667A (en) * | 2021-11-17 | 2022-03-29 | 合肥工业大学 | Full-automatic photovoltaic panel dust removal trolley and motion control method thereof |
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Inventor after: Wang Jinpeng Inventor after: Jin Jiamei Inventor after: Chen Jing Inventor after: Tan Zhenzhen Inventor after: Zhang Quan Inventor before: Wang Jinpeng Inventor before: Jin Jiamei Inventor before: Chen Jing |
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Free format text: CORRECT: INVENTOR; FROM: WANG JINPENG JIN JIAMEI CHEN JING TO: WANG JINPENG JIN JIAMEI CHEN JING TAN ZHENZHEN ZHANG QUAN |
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Application publication date: 20120912 |