CN102608121A - 基板检查*** - Google Patents

基板检查*** Download PDF

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Publication number
CN102608121A
CN102608121A CN2012100038809A CN201210003880A CN102608121A CN 102608121 A CN102608121 A CN 102608121A CN 2012100038809 A CN2012100038809 A CN 2012100038809A CN 201210003880 A CN201210003880 A CN 201210003880A CN 102608121 A CN102608121 A CN 102608121A
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CN
China
Prior art keywords
mentioned
substrate
checking device
automatic checking
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012100038809A
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English (en)
Chinese (zh)
Inventor
冈平裕幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN102608121A publication Critical patent/CN102608121A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN2012100038809A 2011-01-06 2012-01-04 基板检查*** Pending CN102608121A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-001515 2011-01-06
JP2011001515A JP5722049B2 (ja) 2011-01-06 2011-01-06 基板検査システム

Publications (1)

Publication Number Publication Date
CN102608121A true CN102608121A (zh) 2012-07-25

Family

ID=46525670

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2012200057735U Expired - Fee Related CN202421084U (zh) 2011-01-06 2012-01-04 基板检查***
CN2012100038809A Pending CN102608121A (zh) 2011-01-06 2012-01-04 基板检查***

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2012200057735U Expired - Fee Related CN202421084U (zh) 2011-01-06 2012-01-04 基板检查***

Country Status (4)

Country Link
JP (1) JP5722049B2 (ko)
KR (1) KR20120080135A (ko)
CN (2) CN202421084U (ko)
TW (1) TW201233996A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103245674A (zh) * 2013-05-14 2013-08-14 王文学 注射剂型与液体型眼用制剂灯检方法
CN103604815A (zh) * 2013-11-26 2014-02-26 上海海事大学 玻璃晶片检测装置与标定方法
CN105334021A (zh) * 2014-07-03 2016-02-17 苏州三星显示有限公司 显示屏检查***及方法
CN108613990A (zh) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 一种微观和宏观复合检查机

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105699400A (zh) * 2014-11-28 2016-06-22 中电电气(上海)太阳能科技有限公司 一种钢化玻璃外观检验装置
CN104502361B (zh) * 2014-12-08 2017-04-12 浙江泽源玻璃科技有限公司 一种玻璃检验装置
CN109470704B (zh) * 2018-05-31 2023-05-23 武汉深海弈智科技有限公司 一种汽车制动支架视觉缺陷检测***及其检测方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2925539B1 (ja) * 1998-07-10 1999-07-28 オリンパス光学工業株式会社 マクロ検査用照明装置
JP3931111B2 (ja) * 2002-05-30 2007-06-13 オリンパス株式会社 基板保持装置及び基板検査装置
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
JP2007107945A (ja) * 2005-10-12 2007-04-26 Olympus Corp 基板検査装置
JP5005945B2 (ja) * 2006-04-03 2012-08-22 オリンパス株式会社 基板検査装置
JP2008202954A (ja) * 2007-02-16 2008-09-04 Olympus Corp 画像取込装置
JP2009147320A (ja) * 2007-11-21 2009-07-02 Horiba Ltd 検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103245674A (zh) * 2013-05-14 2013-08-14 王文学 注射剂型与液体型眼用制剂灯检方法
CN103604815A (zh) * 2013-11-26 2014-02-26 上海海事大学 玻璃晶片检测装置与标定方法
CN103604815B (zh) * 2013-11-26 2016-01-13 上海海事大学 玻璃晶片检测装置与标定方法
CN105334021A (zh) * 2014-07-03 2016-02-17 苏州三星显示有限公司 显示屏检查***及方法
CN108613990A (zh) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 一种微观和宏观复合检查机

Also Published As

Publication number Publication date
KR20120080135A (ko) 2012-07-16
JP2012145336A (ja) 2012-08-02
JP5722049B2 (ja) 2015-05-20
CN202421084U (zh) 2012-09-05
TW201233996A (en) 2012-08-16

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PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120725