CN102608121A - 基板检查*** - Google Patents
基板检查*** Download PDFInfo
- Publication number
- CN102608121A CN102608121A CN2012100038809A CN201210003880A CN102608121A CN 102608121 A CN102608121 A CN 102608121A CN 2012100038809 A CN2012100038809 A CN 2012100038809A CN 201210003880 A CN201210003880 A CN 201210003880A CN 102608121 A CN102608121 A CN 102608121A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- substrate
- checking device
- automatic checking
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-001515 | 2011-01-06 | ||
JP2011001515A JP5722049B2 (ja) | 2011-01-06 | 2011-01-06 | 基板検査システム |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102608121A true CN102608121A (zh) | 2012-07-25 |
Family
ID=46525670
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012200057735U Expired - Fee Related CN202421084U (zh) | 2011-01-06 | 2012-01-04 | 基板检查*** |
CN2012100038809A Pending CN102608121A (zh) | 2011-01-06 | 2012-01-04 | 基板检查*** |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012200057735U Expired - Fee Related CN202421084U (zh) | 2011-01-06 | 2012-01-04 | 基板检查*** |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5722049B2 (ko) |
KR (1) | KR20120080135A (ko) |
CN (2) | CN202421084U (ko) |
TW (1) | TW201233996A (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103245674A (zh) * | 2013-05-14 | 2013-08-14 | 王文学 | 注射剂型与液体型眼用制剂灯检方法 |
CN103604815A (zh) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | 玻璃晶片检测装置与标定方法 |
CN105334021A (zh) * | 2014-07-03 | 2016-02-17 | 苏州三星显示有限公司 | 显示屏检查***及方法 |
CN108613990A (zh) * | 2018-07-13 | 2018-10-02 | 江苏东旭亿泰智能装备有限公司 | 一种微观和宏观复合检查机 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105699400A (zh) * | 2014-11-28 | 2016-06-22 | 中电电气(上海)太阳能科技有限公司 | 一种钢化玻璃外观检验装置 |
CN104502361B (zh) * | 2014-12-08 | 2017-04-12 | 浙江泽源玻璃科技有限公司 | 一种玻璃检验装置 |
CN109470704B (zh) * | 2018-05-31 | 2023-05-23 | 武汉深海弈智科技有限公司 | 一种汽车制动支架视觉缺陷检测***及其检测方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2925539B1 (ja) * | 1998-07-10 | 1999-07-28 | オリンパス光学工業株式会社 | マクロ検査用照明装置 |
JP3931111B2 (ja) * | 2002-05-30 | 2007-06-13 | オリンパス株式会社 | 基板保持装置及び基板検査装置 |
JP4700365B2 (ja) * | 2005-02-09 | 2011-06-15 | オリンパス株式会社 | 基板検査装置 |
JP2007107945A (ja) * | 2005-10-12 | 2007-04-26 | Olympus Corp | 基板検査装置 |
JP5005945B2 (ja) * | 2006-04-03 | 2012-08-22 | オリンパス株式会社 | 基板検査装置 |
JP2008202954A (ja) * | 2007-02-16 | 2008-09-04 | Olympus Corp | 画像取込装置 |
JP2009147320A (ja) * | 2007-11-21 | 2009-07-02 | Horiba Ltd | 検査装置 |
-
2011
- 2011-01-06 JP JP2011001515A patent/JP5722049B2/ja active Active
- 2011-12-20 TW TW100147483A patent/TW201233996A/zh unknown
-
2012
- 2012-01-02 KR KR1020120000135A patent/KR20120080135A/ko not_active Application Discontinuation
- 2012-01-04 CN CN2012200057735U patent/CN202421084U/zh not_active Expired - Fee Related
- 2012-01-04 CN CN2012100038809A patent/CN102608121A/zh active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103245674A (zh) * | 2013-05-14 | 2013-08-14 | 王文学 | 注射剂型与液体型眼用制剂灯检方法 |
CN103604815A (zh) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | 玻璃晶片检测装置与标定方法 |
CN103604815B (zh) * | 2013-11-26 | 2016-01-13 | 上海海事大学 | 玻璃晶片检测装置与标定方法 |
CN105334021A (zh) * | 2014-07-03 | 2016-02-17 | 苏州三星显示有限公司 | 显示屏检查***及方法 |
CN108613990A (zh) * | 2018-07-13 | 2018-10-02 | 江苏东旭亿泰智能装备有限公司 | 一种微观和宏观复合检查机 |
Also Published As
Publication number | Publication date |
---|---|
KR20120080135A (ko) | 2012-07-16 |
JP2012145336A (ja) | 2012-08-02 |
JP5722049B2 (ja) | 2015-05-20 |
CN202421084U (zh) | 2012-09-05 |
TW201233996A (en) | 2012-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120725 |