CN102607418B - Absolute position measurement device - Google Patents
Absolute position measurement device Download PDFInfo
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- CN102607418B CN102607418B CN201210090799.9A CN201210090799A CN102607418B CN 102607418 B CN102607418 B CN 102607418B CN 201210090799 A CN201210090799 A CN 201210090799A CN 102607418 B CN102607418 B CN 102607418B
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- absolute position
- convex lens
- striped
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Abstract
The invention provides an absolute position measurement device, belonging to the technical field of photoelectric measurement and solving the problems of poor antipollution resistance and high requirement for an optical system in the existing absolute type measurement. The absolute position measurement device comprises a protection medium, an absolute position stripe, a light emitter, a convex lens, a photoelectric sensor and a position reading module, wherein the absolute position stripe is arranged in the protection medium, the plane where the absolute position stripe is located is perpendicular to the principal optic axis of the convex lens, the plane where the photoelectric sensor is located is perpendicular to the principal optic axis of the convex lens, light emitted by the light emitter enters the absolute position stripe through the protection medium and is reflected by the absolute position stripe, the reflected light forms an image on the photoelectric sensor through the convex lens, the position reading module is connected with the photoelectric sensor. The absolute position measurement device has bright application prospect in the machining industry of numerically-controlled machine tools.
Description
Technical field
The present invention relates to absolute position measuring device, belong to photoelectric measurement technical field.
Background technology
Position-measurement device can be divided into linear position measurement mechanism and angular position measurement device by its function, is widely used in machine industry.
Position-measurement device can be with increment type is measured or the mode that absolute type is measured realizes.Increment type measurement is that light is become to Morie fringe by the Grating Modulation of two relative motions, after Morie fringe is counted, segmented, obtains displacement variable.Increment type is measured and is realized simply, can not obtain immediately current location information but exist after powering on, and the shortcoming such as can not revise after counting loss once produce.
Absolute type measurement is that positional information is inscribed on grating with the form of striped, the corresponding unique positional information of each group striped and on direction of measurement continuous arrangement, just can obtain the positional information at this place by reading fringe.Absolute type is measured can obtain immediately positional information after powering on, thereby reduces the design difficulty of machine tool control system, improves working (machining) efficiency.Absolute type is measured and has more and more been widely used in numerically-controlled machine processing industry.
But the sensitivity that absolute type is measured polluting is measured far above increment type, makes a mistake once striped reads, absolute type measurement result can and actual bit be equipped with greatest differences, there is the even possibility of the major accident such as personal damage of damage process equipment.
At present to measure conventional striped reading manner be that light scioptics are modulated into directional light to absolute type, then by fringe projection in photodetector surfaces.The depth of parallelism of light has directly affected image quality, by this way the depth of parallelism of light is had relatively high expectations, conventionally need to design complicated lens curved surface.In addition, the degree being reflected on photodetector to any pollution in the space of photodetector surfaces at lens all can be identical with striped, and this is very unfavorable to antipollution.
Summary of the invention
Poor in order to solve the contamination resistance existing in existing absolute type measurement, optical system is required to high technical matters.
The invention provides absolute position measuring device, comprise: module is read in protective medium, absolute position striped, illuminator, convex lens, photoelectric sensor and position, described absolute position striped is arranged on protective medium inside, the plane at striped place, described absolute position is vertical with convex lens primary optical axis, and described photoelectric sensor place plane is vertical with convex lens primary optical axis; The light that described illuminator sends sees through protective medium and incides on the striped of absolute position, and light is through absolute position streak reflex, and reflected light is by convex lens imaging on photoelectric sensor, and position is read module and is connected with photoelectric sensor.
Beneficial effect of the present invention is being: absolute position striped is in protective medium inside, not contaminated; Imaging plane after the striped planoconvex lens of absolute position and photodetector planes overlapping, the extent of reaction of the pollution on protective medium surface on photodetector be the extent of reaction on photodetector lower than absolute position striped; By regulating the position between absolute position striped, convex lens, photodetector test surface three, the picture that can make striped become to dwindle in photodetector plane, makes onesize photodetector can accommodate more stripe information.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of absolute position measuring device embodiment 1 of the present invention, that absolute position striped becomes on photodetector is clear, etc. large image.
Fig. 2 is the schematic diagram of absolute position measuring device embodiment 2 of the present invention, the image that absolute position striped becomes on photodetector is clear, dwindle.
Embodiment
As shown in Figure 1, absolute position measuring device of the present invention, comprise: module 6 is read in protective medium 1, absolute position striped 2, illuminator 3, convex lens 4, photoelectric sensor 5, position, described absolute position striped 2 is arranged on protective medium 1 inside, the plane at striped 2 places, described absolute position is vertical with convex lens 4 primary optical axis, and described photoelectric sensor 5 place planes are vertical with convex lens 4 primary optical axis; The light that described illuminator 3 sends sees through protective medium 1 and incides on absolute position striped 2; light reflects through absolute position striped 2; reflected light is by convex lens 4 imaging on photoelectric sensor 5; position is read module 6 and is connected with photoelectric sensor 5, and position is read the information that module 6 spreads out of photoelectric sensor 5 and carried out analyzing and processing.
Several situations can make absolute position striped 2 imaging on the receiving plane of photoelectric sensor 5 below:
Described protective medium 1 has the characteristic of printing opacity, and absolute position striped 2 is arranged and formed by material unequal-interval on direction of measurement light to reflection characteristic.Illuminator 3 is between absolute position striped 2 and convex lens 4, and absolute position striped 2 is by reflection ray imaging on photoelectric sensor 5; Absolute position striped 2 is between illuminator 3 and convex lens 4, and the space on absolute position striped 2 is by transmitted ray imaging on photoelectric sensor 5.
Described protective medium 1 has the characteristic of printing opacity, and absolute position striped 2 is arranged and formed by material unequal-interval on direction of measurement light to absorption characteristic.Absolute position striped 2 is between illuminator 3 and convex lens 4, and the space on absolute position striped 2 is by transmitted ray imaging on photoelectric sensor 5.
Described protective medium 1 side near apart from convex lens 4 has the characteristic of printing opacity, and a side far away apart from convex lens 4 has light absorbing characteristic, and absolute position striped 2 is arranged and formed by material unequal-interval on direction of measurement light to reflection characteristic.Illuminator 3 is between absolute position striped 2 and convex lens 4, and absolute position striped 2 is by reflection ray imaging on photoelectric sensor 5.
Described protective medium 1 side near apart from convex lens 4 has the characteristic of printing opacity, and a side far away apart from convex lens 4 has catoptrical characteristic, and absolute position striped 2 is arranged and formed by material unequal-interval on direction of measurement light to absorption characteristic.Illuminator 3 between absolute position striped 2 and convex lens 4, the light that illuminator 3 sends after protective medium 1 reflection by the imaging on photoelectric sensor 5 of the space of absolute position striped 2.
Described absolute position measuring device, on absolute position striped 2, any point and convex lens 4 edge lines form cone, and this cone is the hot spot that on absolute position striped 2, any point forms on protective medium 1 surface in the surperficial cross section of protective medium 1.The diameter of this hot spot is greater than 0.1mm.Airborne floating dust diameter is greatly about 10 μ m, and with respect to the spot diameter of 0.1mm, its impact can be ignored.
Embodiment 1:
As shown in Figure 1, a kind of absolute position measuring device, this device is for linear movement measuring.Comprise: module 6 is read in protective medium 1, absolute position striped 2, illuminator 3, convex lens 4, photoelectric sensor 5 and position.
Protective medium 1 has the characteristic of printing opacity, and absolute position striped 2 is spatially sealed.Absolute position striped 2 is arranged and is formed by material unequal-interval on direction of measurement light to reflection characteristic.Striped 2 place planes in absolute position are vertical with convex lens 4 primary optical axis.Photoelectric sensor 5 place planes are vertical with convex lens 4 primary optical axis.Striped 2 place plan range convex lens 4 centre distances in absolute position are d
1, photoelectric sensor 5 place planes and convex lens 4 centre distances are d
2, convex lens 4 focal lengths are f, three's mutual relationship is d
1=d
2=2f.
As seen from Figure 1, take absolute position striped 2 as object plane, its image planes after convex lens 4 and the detection plane coincidence of photoelectric sensor 5, therefore absolute position striped 2 becomes real image clearly on photoelectric sensor 5.Take the pollution 7 on protective medium surface as object plane, its image planes after convex lens 4 and the detection plane of photoelectric sensor 5 do not overlap, and become fuzzy real image therefore pollute 7 on photoelectric sensor 5.By the present embodiment, known apparatus of the present invention have reduced pollutes the influence degree at detector surface, improves the contamination resistance of absolute position measuring device.
As shown in Figure 2, a kind of absolute position measuring device, this device is for linear movement measuring.It comprises: module 6 is read in protective medium 1, absolute position striped 2, illuminator 3, convex lens 4, photoelectric sensor 5 and position.
Protective medium 1 has the characteristic of printing opacity, and absolute position striped 2 is spatially sealed.Absolute position striped 2 is arranged and is formed by material unequal-interval on direction of measurement light to reflection characteristic.Striped 2 place planes in absolute position are vertical with convex lens 4 primary optical axis.Photoelectric sensor 5 place planes are vertical with convex lens 4 primary optical axis.Striped 2 plan range lens center, place distances in absolute position are d
1, photoelectric sensor 5 place planes and convex lens 4 centre distances are d
2, the focal length of convex lens 4 is f, three's mutual relationship is d
1=3f, d
2=1.5f.
As seen from Figure 2, take absolute position striped 2 as object plane, the detection plane of the image planes after convex lens 4 and photoelectric sensor 5 overlaps, therefore the real image that absolute position striped 2 becomes clearly, dwindles on the test surface of photoelectric sensor 5.By the present embodiment, known apparatus of the present invention, in the time adjusting convex lens 4 at diverse location, are accommodated more stripe information on onesize photodetector 5, improve signal redundancy degree.
Absolute position measuring device of the present invention is not limited to described in above-described embodiment, and it also can comprise that other change design, as: absolute position striped can be placed between light source and lens, and coding is carried out to imaging; By changing the mutual alignment relation of absolute position striped, lens and photodetector, can make absolute position striped on photodetector, become the real image clearly of arbitrary proportion.
Absolute position measuring device of the present invention has wide application space in numerically-controlled machine processing industry.
Claims (5)
1. absolute position measuring device, comprise: module (6) is read in protective medium (1), absolute position striped (2), illuminator (3), convex lens (4), photoelectric sensor (5) and position, it is characterized in that, described absolute position striped (2) is arranged on protective medium (1) inside, the plane at described absolute position striped (2) place is vertical with convex lens (4) primary optical axis, and described photoelectric sensor (5) place plane is vertical with convex lens (4) primary optical axis; The light that described illuminator (3) sends sees through protective medium (1) and incides on absolute position striped (2), light reflects through absolute position striped (2), reflected light is by convex lens (4) in the upper imaging of photoelectric sensor (5), and position is read module (6) and is connected with photoelectric sensor (5); The upper any point of absolute position striped (2) is greater than 0.1mm at protective medium (1) near the surface light spot diameter of convex lens (4) one sides.
2. absolute position measuring device according to claim 1, is characterized in that, protective medium (1) is made up of light transmissive material, and absolute position striped (2) is arranged and formed by material unequal-interval on direction of measurement light to reflection characteristic.
3. absolute position measuring device according to claim 1, is characterized in that, protective medium (1) is made up of light transmissive material, and absolute position striped (2) is arranged and formed by material unequal-interval on direction of measurement light to absorption characteristic.
4. absolute position measuring device according to claim 1; it is characterized in that; protective medium (1) side near apart from convex lens (4) has the characteristic of printing opacity; a side far away apart from convex lens (4) has light absorbing characteristic, and absolute position striped (2) is arranged and formed by material unequal-interval on direction of measurement light to reflection characteristic.
5. absolute position measuring device according to claim 1; it is characterized in that; protective medium (1) side near apart from convex lens (4) has the characteristic of printing opacity; a side far away apart from convex lens (4) has catoptrical characteristic, and absolute position striped (2) is arranged and formed by material unequal-interval on direction of measurement light to absorption characteristic.
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CN201210090799.9A CN102607418B (en) | 2012-03-30 | 2012-03-30 | Absolute position measurement device |
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CN201210090799.9A CN102607418B (en) | 2012-03-30 | 2012-03-30 | Absolute position measurement device |
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CN102607418B true CN102607418B (en) | 2014-06-11 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1461404A (en) * | 2001-04-11 | 2003-12-10 | 瑞尼斯豪公司 | Absolute position measurement |
CN1563887A (en) * | 2004-04-09 | 2005-01-12 | 清华大学 | Optical vernier protractor, its measuring range and precision design method |
CN101223433A (en) * | 2005-07-20 | 2008-07-16 | 株式会社岛津制作所 | Optical measuring instrument |
CN101504925A (en) * | 2009-03-06 | 2009-08-12 | 上海微电子装备有限公司 | Optical position measurement apparatus and method |
CN102155914A (en) * | 2011-03-08 | 2011-08-17 | 西安邮电学院 | Method and device for coding and measuring absolute position grid ruler based on pseudo random sequence |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1461404A (en) * | 2001-04-11 | 2003-12-10 | 瑞尼斯豪公司 | Absolute position measurement |
CN1563887A (en) * | 2004-04-09 | 2005-01-12 | 清华大学 | Optical vernier protractor, its measuring range and precision design method |
CN101223433A (en) * | 2005-07-20 | 2008-07-16 | 株式会社岛津制作所 | Optical measuring instrument |
CN101504925A (en) * | 2009-03-06 | 2009-08-12 | 上海微电子装备有限公司 | Optical position measurement apparatus and method |
CN102155914A (en) * | 2011-03-08 | 2011-08-17 | 西安邮电学院 | Method and device for coding and measuring absolute position grid ruler based on pseudo random sequence |
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