CN102095375B - Method for measuring displacement along optical axis direction by using contrasts of three primary colors as characteristics - Google Patents

Method for measuring displacement along optical axis direction by using contrasts of three primary colors as characteristics Download PDF

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CN102095375B
CN102095375B CN200910191629A CN200910191629A CN102095375B CN 102095375 B CN102095375 B CN 102095375B CN 200910191629 A CN200910191629 A CN 200910191629A CN 200910191629 A CN200910191629 A CN 200910191629A CN 102095375 B CN102095375 B CN 102095375B
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曾艺
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Abstract

The invention discloses a method and a device for measuring displacement along an optical axis direction by using contrasts of three primary colors as characteristics. The device consists of a common computer connected with a computer camera through a universal serial bus (USB) interface thereof, a step motor and an interface circuit thereof and a camera axial displacement device, wherein the camera is arranged on the axial displacement device and driven by the step motor, the step motor is connected to the RS232C interface of the computer through the interface circuit of the step motor, and the computer is configured with a program for shooting with the camera and measuring the axial displacement according to the contrasts of the three primary colors. The contrasts of the three primary colors of a pixel are used as the characteristics of an image frame of a measured object, and the method comprises the following steps of: automatically analyzing and selecting an optimal observation region by computing self-associated coefficients of pixel brightness; and judging the imaging and focusing degree of the object by counting the number of the image characteristics in the observation window region, and further measuring the micro displacement of the object in the optical axis direction of the camera. The measurement method is novel, and can adapt to the environmental illumination change of a certain degree.

Description

With the three primary colours contrast is the method for pattern measurement along the displacement of optical axis direction
Technical field
The invention belongs to the digital picture field of measuring technique, the camera Measuring Object that particularly uses a computer is along the method and the device thereof of the micro-displacement of its optic axis direction generation.
Background technology
The shape of detection of complex workpiece, profiling measurement and aspects such as optical devices automatic focusing, compact disc pulsation measurement usually need detect the displacement that takes place along the optical axis direction of system.This axial range finding work usually utilizes the out of focus phenomenon; Relevant distance-finding method summary is (referring to " photoelectric detecting technology ", Liu Menghua, Wu Xiaohong write, Science Press, 2005,6,21, the 331-333 pages or leaves) as follows:
1) optical focus method: utilize pointolite that testee is thrown light on, use image-forming objective lens, when object during along the optical axis direction displacement to this luminous point imaging and focusing; The image planes focus diffuses to form blur circle; Have only when the object plane position such as accurately being positioned at, good image formation state could guarantee to have on the image planes concentrated optical density to distribute, after the displacement of object laser image spot surpasses depth of focus (or depth of field); Energy density on the imaging surface sharply descends, according to the intensity judgment object axial displacement of focal beam spot Density Distribution.
Utilization can be formed various forms of image planes out of focus detection systems as analyzer, and for example, scanning modulation detection, double passage differential are as (referring to this book 199-209 page or leaf for example) such as analyzer detections.
2) the picture deflection method of the outer offset detection of picture point axle; Claim light cross-section method again: use (laser) light beam vertical irradiation to testee; Light spot position on the object is formed images with the direction that has angle with (laser) light beam with image-forming objective lens; Measure the side-play amount of picture point, calculate the axial dipole field size of object plane through the triangulation relation.This method can realize high-precision measurement at several millimeters to several meters distance range, and the acoplanarity displacement that is usually used in the industrial circle detects, and can adopt CCD picture pick-up device or semiconductor position detector (PSD) to implement.The relevant performance of CCD picture pick-up device, for example, spatial resolution, temperature drift and job stability, quite a lot of, still, its measurement response speed receives the restriction of sweep velocity.Its output signal of PSD detection method is simulated; Resolution receives the influence of incident optical power, the resolution approaching with the CCD device just can be arranged when having only luminous power to reach certain value, but its response speed is high; Can carry out detecting continuously of light spot position; Light modulated also can detect, and therefore easy and bias light is separated, in addition; The signal processing circuit of PSD detection method is simple, and lighting source can be selected incandescent lamp, He-Ne laser instrument (it is Gaussian distribution that the light distribution of very little beam divergence angle, circle symmetrical section is arranged) or semiconductor laser for use.
So-called as analyzer be through analyze testee the geometric center on the image planes with respect to image planes on the drift condition of certain selected reference; Confirm the method for this object in the position in space; Being a kind of modulator that can how much morpheme information be modulated to formation optical signalling on the carrier wave luminous flux, is the G/O transducer that is transformed into geometric sense optical quantities.The picture analyzer of one dimension is for example measured the aligning and the shift state of optics strain line with the slit method.And so-called picture limit decomposition method can be used in the locus of confirming target; It will decompose different coordinate picture limits with respect to the measuring basis axle of system from the light radiant flux of measured target; According to these images energy distributions ratio on each picture limit, detect the brightness center of target again, be applicable to moving targets such as macro object at a distance; Take place to be a blur circle after the slight out of focus like imaging system, also be applicable to the rule picture that the test pattern that produced by illumination initiatively forms.Realize that radiation flux can adopt dual mode by the decomposition of coordinate picture limit: 1) optical image decomposes, and 2) utilization picture limit detecting device.Picture limit detector is used for confirming the position coordinates of luminous point on two dimensional surface; Generally be used for aspects such as collimation, location, tracking; It is to utilize the IC etching technology; A circle or square photosurface window is divided into the zone that several areas equate, shape is identical, the position is symmetrical (back side still is full wafer), and each zone is equivalent to a photoelectric device.Under the ideal situation, each photoelectric device should have identical performance parameter, but also need select meticulously during actual the use.Typically picture limit detector has four pictures to limit photodiodes, four as limit silicon photocells and four picture limit photomultipliers, also has two as silicon photocell of limitting and photoresistance etc.
By above-mentioned visible, than picture limit detector and semiconductor position detector (PSD), the photosensor arrays of computing machine camera has remarkable advantages on the spatial information of surveying testee.In order to bring into play its function, 200910104277.8), " is the method and the device of the displacement of characteristic frame coupling measure two dimensional with the contrast " (application number: 200910190926.0), " measuring the peak valley motion detection method and and the device of sub-pix displacement " (application number: 200910190924.1), " is the method and the device of characteristic frame coupling Displacement Measurement with the two-dimensional contrast " (application number: 200910190925.6), " is the method and the device of characteristic frame coupling Displacement Measurement with two-dimentional three primary colours contrast " (application number: 200910191320.9), " measuring the peak valley motion detection method and and the device of sub-pix displacement fast " (application number: 200910191319.6), " is the method and the device of the displacement of characteristic frame coupling measure two dimensional with the three primary colours contrast " (application number: 200910191318.1), " the camera three primary colours that use a computer are measured the method and the device of small two-dimension displacement " (application number: 200910191317.7) proposed the method and the device of various appliance computer camera Measuring Object micro-displacements respectively patent of invention " camera that uses a computer is measured the method and the device of small two-dimension displacement " (application number:; But, they all only to object be positioned at the perpendicular plane of the optic axis of camera on the displacement situation, still reckon without the displacement that is taken place along the optic axis direction.
Summary of the invention
It is method and the device of pattern measurement along the displacement of optical axis direction with the three primary colours contrast that the present invention provides a kind of; It utilizes the computing machine camera; Can take place in the environment of certain variation at illuminating position, Measuring Object is along the micro-displacement vector that optical axis direction took place of camera.
The technical solution adopted for the present invention to solve the technical problems is: computing machine camera of computer configuration that a Daepori is logical; It is on the axial displacement device formed of core by the high-precision micro displacement stepper motor that this camera is installed in one; This stepper motor is connected to the RS232C interface of said computing machine through the stepper motor interface circuit; Said computer configuration has camera to take and measures the axial displacement program according to the three primary colours contrast; The contrast that this program has embodied with three primary colours is the method for the pattern measurement axial displacement of picture frame, comprising:
Step 1, with the form of bitmap (M * N, M, N ∈ positive integer), take the image of a frame testee, as a reference frame; First locations of pixels with this frame pel array upper left corner is an initial point, is the x direction of principal axis with to the right direction, and vertical downward direction is the y direction of principal axis, and the unit of the coordinate system of getting is the size of a pixel; Choose a zone at the middle section of said pel array, size is m 0* n 0, m 0, n 0The ∈ positive integer is referred to as view window, and the horizontal direction of the said pel array of its distance and the edge pixel of vertical direction respectively have h and v pixel, promptly have: m 0+ 2h=M, n 0+ 2v=N, h, v ∈ positive integer;
Step 2, for the pel array of above-mentioned reference frame; By pixel column, by the edge direction data of pixel column derivation along X-direction and Y direction; And with the binary numeral 001 of 3bit; 010 and 100 wherein positive limit, marginal and the 3rd type of limits of expression respectively, so constituted corresponding said reference frame pel array about X-direction with about two frame edge direction data { reference of Y direction x(x, y) } and { reference y(x, y) }, wherein, subscript x or y represent the direction of the coordinate axis on institute edge respectively, all pixels in the change in coordinate axis direction view window that wherein the function subscript is indicated of symbol " { } " expression edge (x, these data are preserved in a set of the edge direction data of y) locating;
Step 3, for above-mentioned two frame edge direction data, calculate the auto correlation matching factor of view window interior pixel array in the said reference frame respectively:
auto _ correlation x ( a , b ) = Σ y = v + 1 v + 1 + n 0 Σ x = h + 1 h + 1 + m 0 [ reference x ( x , y ) · reference x ( x + a , y + b ) ]
auto _ correlation y ( a , b ) = Σ y = v + 1 v + 1 + n 0 Σ x = h + 1 h + 1 + m 0 [ reference y ( x , y ) · reference y ( x + a , y + b ) ]
In the formula, sign of operation is represented binary logic and computing, its operation result or be logical zero or for logical one, the pairing numerical value of value of logical operation function is wherein got in sign of operation " [] " expression; Or be numerical value 0, or be numerical value 1, parametric variable a, the combination of b has determined the scale of associated match operator array; If get 3 * 3 associated match operator arrays: a=-1,0,1, b=-1; 0,1, therefore, each will produce 9 auto correlation coefficient auto_correlation along each change in coordinate axis direction x(a, b) and auto_correlation y(a, b);
Step 4, the auto correlation matching factor corresponding according to above-mentioned two frame edge direction data, search for respectively and under present body surface situation and illuminating position, can carry out matching ratio optimal viewing window pel array:
m x=m 0±step,n x=n 0±step,2h=M-m x,2v=N-n x
And m y=m 0± step, n y=n 0± step, 2h=M-m y, 2v=N-n y
In the formula, subscript x, y represent respectively its value corresponding along X-direction and Y direction, step is the stepped parameter in the search procedure, the unlike signs of its front is determined by the direction of search; Get in this two class value big person and measure the scale of used view window array: m * n for this;
Step 5, for the pel array of above-mentioned reference frame; Data according to its redness, green and blue component; Respectively line by line, derive along the redness of X axle and Y direction, green and edge direction data blueness by row, one has 3 * 2=6 frame edge direction data; According to the edge direction data of above-mentioned three kinds of primary colours,, use their pairing positive limit and marginal number: N of accumulator count respectively for wherein view window zone The RX axle just, N The RX axle is negative, N The RY axle justAnd N The RY axle is negative, N The GX axle just, N The GX axle is negative, N The GY axle justAnd N The GY axle is negative, N The BX axle just, N The BX axle is negative, N The BY axle justAnd N The BY axle is negative, wherein, N (umber) representes number, R, G, B represent red, green and blue respectively; Add up above-mentioned totalizer count results and preserve it, be expressed as: N (i, j=0, forw=0, back=0), wherein; I=1,2,3...... representes the sequential counting of captured reference frame, also is the counting of measuring, j=0,1; 2,3 ..., the counting of the sampling frame of representing to take in the i time measuring process, variable forw (=0,1; 2 ...) and back (=0,1,2 ...) represent that respectively stepper motor generation clockwise described in the i time measurement rotates and the pairing step-by-step impulse counting of anticlockwise rotation; Before this measures beginning, have: i=1, j=0, forw=0, back=0;
Step 6, measurement beginning: said computing machine is exported forw=1 digital pulse signal to said stepper motor interface circuit through an output control line FORWARD of its RS232C interface; Control this stepper motor clockwise and rotate a step; Then, take j=1 frame sample framing bit figure;
For the pel array of above-mentioned sampling frame,, respectively line by line, derive along the redness of X axle and Y direction, green and edge direction data blueness, have 3 * 2=6 frame edge direction data by row according to the data of its redness, green and blue component;
According to the edge direction data of above-mentioned three kinds of primary colours,, use their pairing positive limit and marginal number: N of accumulator count respectively for wherein view window zone The RX axle just, N The RX axle is negative, N The RY axle justAnd N The RY axle is negative, N The GX axle just, N The GX axle is negative, N The GY axle justAnd N The GY axle is negative, N The BX axle just, N The BX axle is negative, N The BY axle justAnd N The BY axle is negativeAdd up above-mentioned totalizer count results and preserve it, be expressed as: N (i, j=1, forw=1, back=0);
If step 7: N (i, j=1, forw=1, back=0)>=N (i, j=0; Forw=0, back=0), the output control line FORWARD of said computing machine through its RS232C interface export forw (=2,3 ...) individual digital pulse signal is to said stepper motor interface circuit; It is progressive to control the rotation of this stepper motor clockwise, each one step of clockwise rotation all take and analyze respectively take a sample before and after the comparison in the frame in the view window along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum N (i, j=forw-1, forw-1, back=0) and N (i; J=forw, forw back=0), preserves it, should have in this process: N (i; J=forw, forw, back=0)>=N (i, j=forw-1, forw-1; Back=0), up to satisfying: N (i, j=forw, forw, back=0)<N (i; J=forw-1, forw-1, back=0), and at this moment, record (forw) MAX=forw; Simultaneously; Said computing machine arrives said stepper motor interface circuit through another root output control line BACKWARD digital pulse signal of output (back=1) of its RS232C interface, controls anticlockwise one step of rotation of this stepper motor, at this moment; This measures the preceding initial position of beginning relatively, and the camera of this device promptly is in the best object image-forming focal position in this measurement: FocusP=(forw) MAX-back=(forw) MAX-1, its result calculated is more than or equal to 0, and the sense of rotation of representing said stepper motor is clockwise, in the corresponding sampling frame view window of this focal position along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum is:
N (i, j=(forw) MAX-1, forw=(forw) MAX-1, back=0), the tale result of the sampling frame of taking in the measuring process is: j=(forw) MAX+ back=(forw) MAX+ 1;
If: N (i, j=1, forw=1, back=0)<N (i, j=0; Forw=0, back=0), said computing machine is exported back=1 digital pulse signal to said stepper motor interface circuit through an output control line BACKWARD of its RS232C interface, controls the anticlockwise rotation backward of this stepper motor, promptly gets back to the initial position of this measurement; Then, the output control line BACKWARD of said computing machine through its RS232C interface continue output back (=2,3 ...) individual digital pulse signal is to said stepper motor interface circuit, controls the further anticlockwise rotation of this stepper motor; In this process, each one step of anticlockwise rotation all take and analyze respectively take a sample before and after the comparison in the frame view window along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum N (i, j=back+1, forw=1, back) and N (i; J=back, forw=1 back=back-1), should have: N (i, j=back+1; Forw=1, back=back)>=N (i, j=back, forw=1; Back=back-1), preserve it, so continue, up to satisfying: N (i; J=back+1, forw=1, back)<N (i, j=back; Forw=1, back-1), at this moment, record: (back) MAX=back; Simultaneously; Said computing machine arrives said stepper motor interface circuit through another root output control line FORWARD digital pulse signal of output (forw=2) of its RS232C interface, controls this stepper motor clockwise and rotates a step, at this moment; This measures the preceding initial position of beginning relatively, and the camera of this device promptly is in the best object image-forming focal position in this measurement: FocusP=forw-(back) MAX=2-(back) MAXIts result calculated is a negative value; The sense of rotation of representing said stepper motor is anticlockwise, in the corresponding sampling frame view window of this focal position along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum is: N (i, j=((back) MAX-1)+1=(back) MAX, forw=1, back=(back) MAXThe tale result of the sampling frame of-1), taking in the measuring process is: j=forw+ (back) MAX=2+ (back) MAX
Integrate, this measures the preceding initial position of beginning relatively, and the displacement that this optic axis direction of measuring the said camera in object edge that is obtained takes place is: Δ z (i)=forw-back,
The value of counter forw and back is count results last in this measuring process in the aforementioned calculation formula; Result of calculation has the symbol of plus or minus; The displacement that taken place of the expression direction of advancing or retreating respectively along optic axis; Corresponding to the sense of rotation of said stepper motor (promptly clockwise or anticlockwise), specifically confirm by the arrangement of the axial displacement device of stepper motor;
Total displacement is: Δ Z 0(i)=Δ Z 0(i-1)+Δ z (i)
Wherein, Δ Z 0(i-1) measure the axial displacement of accumulation before for this;
Step 8, prepare surveying work next time: measure time counter i=i+1, get all positive limits of measuring the interior three kinds of primary colours along X axle and Y direction of the corresponding object image-forming frame of the best object image-forming focal position view window of confirming for the i time and marginal number sum as new witness mark value:
N (i, j=0, forw=0, back=0)=N (i, j=(forw) MAX-1, forw=(forw) MAX-1, back=0), or N (i, j=0, forw=0, back=0)=
N(i,j=((back) MAX-1)+1=(back) MAX,forw=1,back=(back) MAX-1);
Step 9, jump to step 6, continue to measure;
In the actual measurement process,, can obtain direct measurement result through measuring calibration.
The definition that edge direction data described in the step of axial displacement program were taken and measured according to the three primary colours contrast to above-mentioned camera is:
In the pel array, along the X axle or along Y direction, if the light intensity value of a pixel is than the also little error margin value error of second corresponding light intensity value of pixel of its back, if promptly
I (X, Y)<I (X+2, Y)-error or I (X, Y)<I (X, Y+2)-error
Then define and have this axial positive limit, an edge between these two pixels; If the light intensity value of a pixel is than the also big error margin value error of second corresponding light intensity value of pixel of its back, if promptly
I (X, Y)>I (X+2, Y)+error or I (X, Y)>I (X, Y+2)+error
Then define between these two pixels and to have an edge this is axial marginal; The limit that so obtains is positioned at first locations of pixels after this pixel, also promptly is positioned on that pixel in the centre position of participating in two pixels relatively; If second corresponding light intensity value of pixel of certain light intensity value of a pixel and its back is approaching, its value differs and is no more than an error margin value error, if promptly
I(X+2,Y)-error≤I(X,Y)≤I(X+2,Y)+error
Or I (X, Y+2)-error≤I (X, Y)≤I (X, Y+2)+error,
Then think not have corresponding " limit " along this direction of principal axis between these two pixels, or be referred to as the 3rd type of limit;
Along some change in coordinate axis direction, all positive limit of corresponding pixel column or pixel column, marginal and the 3rd type of limit form this row maybe should row along the edge direction data of this change in coordinate axis direction; Error margin value in the above-listed formula can be predisposed to a little numerical value, for example: error=10 according to concrete light conditions; There are not the edge direction data in four limits in the pel array and the location of pixels on the angle.
Above-mentioned camera is taken and is comprised according to the method for searching for optimal viewing window pel array described in the step of three primary colours contrast measurement axial displacement program:
For the view window of said pel array and k * k (k ∈ positive integer) associated match operator array (a b), can produce k * k auto correlation matching factor along certain change in coordinate axis direction, by following inequality these auto correlation matching factors relatively:
auto_correlation(a,b)≥auto_correlation(0,0)×similarity
In the formula, similarity has described the similarity degree of the pel array of view window and its contiguous identical scale, for example gets similarity=60%, can be provided with in advance, also can debug and selects according to the quality on light conditions and measured object surface;
If the auto correlation coefficient that satisfies above-mentioned inequality more than k * k * 1/3, need to enlarge each step of scope of view window capable with the step row: make m=m 0+ step, n=n 0+ step recomputates the auto correlation coefficient of new view window, and carries out above-mentioned comparison; Up to the no more than k * k of auto correlation matching factor that satisfies above-mentioned inequality * 1/3, at this moment, 2h=M-m; 2v=N-n, wherein, step is a stepped parameter; Initial value is 1, needs the scale of expansion view window just to increase by 1 at every turn; If exceed predetermined scope in the frame, also do not find suitable view window, think that then the quality of this this part reflecting surface of object is inappropriate for the surveying work of this device, and provide the prompting warning;
If satisfy the no more than k * k of auto correlation matching factor of above-mentioned inequality * 1/3; The architectural feature on surface that subject is described is enough meticulous; Value between the neighborhood pixels can be distinguished; Can further attempt dwindling the capable and step row of each step of scope of view window, to reduce amount of calculation: make m=m 0-step, n=n 0-step recomputates the auto correlation coefficient of view window, and carries out above-mentioned comparison; The parameter s of going forward one by one tep is each to increase by 1; The number that satisfies the auto correlation coefficient of above-mentioned inequality up to selected view window zone is not less than k * k * 1/3, at this moment, thinks to have searched optimal viewing window pel array.
The definition that edge direction data red, green or blue described in the step of axial displacement program were taken and measured according to the three primary colours contrast to above-mentioned camera is:
Component data according to one of red in the pel array, green or these three kinds of primary colours of blueness; Along the X axle or along Y direction; If certain three primary colours component value of a pixel is than the also little error margin value error of the corresponding three primary colours component value of second pixel of its back, if promptly
I (X, Y) Red<I Red(X+2, Y)-error or I (X, Y) Red<I (X, Y+2) Red-error
I (X, Y) Green<I Green(X+2, Y)-error or I (X, Y) Green<I (X, Y+2) Green-error
I (X, Y) Blue<I Blue(X+2, Y)-error or I (X, Y) Blue<I (X, Y+2) Blue-error
Then define and have a positive limit redness, green or blue between these two pixels; If certain three primary colours component value of a pixel is than the also big error margin value error of the corresponding three primary colours component value of second pixel of its back, if promptly
I (X, Y) Red>I Red(X+2, Y)+error or I (X, Y) Red>I (X, Y+2) Red+ error
I (X, Y) Green>I Green(X+2, Y)+error or I (X, Y) Green>I (X, Y+2) Green+ error
I (X, Y) Blue>I Blue(X+2, Y)+error or I (X, Y) Blue>I (X, Y+2) Blue+ error
Then define and have the marginal of a redness, green or blueness between these two pixels; The limit that so obtains is positioned at first locations of pixels after this pixel, also promptly is positioned on that pixel in the centre position of participating in two pixels relatively; If the corresponding three primary colours component value of second pixel of certain three primary colours component value of a pixel and its back is approaching, its RGB component value differs and is no more than an error margin value error, if promptly
I (X+2, Y) Red-error≤I (X, Y) Red≤I (X+2, Y) Red+ error
Or I (X, Y+2) Red-error≤I (X, Y) Red≤I (X, Y+2) Red+ error;
I (X+2, Y) Green-error≤I (X, Y) Green≤I (X+2, Y) Green+ error
Or I (X, Y+2) Green-error≤I (X, Y) Green≤I (X, Y+2) Green+ error;
I (X+2, Y) Blue-error≤I (X, Y) Blue≤I (X+2, Y) Blue+ error
Or I (X, Y+2) Blue-error≤I (X, Y) Blue≤I (X, Y+2) Blue+ error;
Then think not have this color wavelength corresponding " limit " between these two pixels, or be referred to as the limit of the 3rd type of this color; Along some change in coordinate axis direction; The red edge direction data of this direction are formed on the limit of marginal and the 3rd type of redness of the positive limit of all redness and redness; The green edge direction data of this direction are formed on the limit of marginal and the 3rd type of green of the positive limit of all greens and green, the blue edge direction data of limit this direction of composition of marginal and the 3rd type of blueness of the positive limit of all bluenesss and blueness; Error margin value in the above-mentioned formula can be predisposed to a little numerical value, for example: error=10 according to concrete light conditions; There are not the edge direction data in four limits in the pel array and the location of pixels on the angle.
Said camera axial displacement device comprises: said camera is installed on the worktable; This worktable and a long tap turning axle are with the tap socket; This tap turning axle is installed on the big worktable through two bracing frames; And it and these two bracing frames all are the mode sockets with rotating shaft, can rotate at the socket place with bracing frame but displacement does not forward or backward take place; A fixing gear is arranged, the mutual interlock of gear above the rotating shaft of it and stepper motor on the said tap turning axle.Said stepper motor also is installed on the said big worktable, and it is connected to the RS232C interface of computer system through the stepper motor interface circuit.
Advantage of the present invention is, it through the auto correlation matching factor of calculating pixel brightness, analyzes and choose the optimal viewing zone with the contrast of the pixel three primary colours characteristic as the testee picture frame automatically; Through counting the number of characteristics of image in this view window zone, the degree of judgment object imaging and focusing, and then the micro-displacement that taken place in camera optic axis direction of Measuring Object; This measuring method is novel, and the ambient lighting that can adapt to a certain degree changes.
Description of drawings
Further specify patent of the present invention below in conjunction with accompanying drawing.
Fig. 1 is computing machine of the present invention and camera measuring system block scheme thereof.
Fig. 2 be of the present invention be the camera axial displacement device block scheme that core is formed by the high-precision micro displacement stepper motor.
Fig. 3 is that optical imagery of the present invention focuses on the process synoptic diagram.
Fig. 4 is that the photoelectric sensor chip carries out the pel array and the view window area schematic thereof that produce after the opto-electronic conversion.
Fig. 5 is the synoptic diagram of a traveling optical signal and digitized signal thereof, edge direction data.
Among Fig. 1,1. computing machine camera, 2. optical lens, 3. photoelectric sensor chip; 4.USB interface, 5. computer system, 6.USB interface, 7.CPU; 8.RS232C interface, 9. display card and display, 10. internal memory and hard disk, 11. keyboards and mouse; 12. operating system, 13. webcam driver programs, 14. cameras are taken and are measured axial displacement program, 15. light fixture according to the three primary colours contrast.
Among Fig. 2, the worktable of 30. stepper motors and camera, 31. bracing frames; 32. bracing frame, the worktable of 33. cameras (1), 34. tap turning axles; 341. the gear on the tap turning axle (34); 40. stepper motor, the turning axle of 41. stepper motors (40), the gear on the turning axle (41) of 42. stepper motors (40).
Among Fig. 3,90.-96. object (circle hot spot) synoptic diagram that form images in different positions on optical axis, 97. optic axises.
Among Fig. 5,21. 1 traveling optical signals, 22. with the corresponding digitized signal of light signal (21), 23. edge direction data corresponding with digitized signal (22).
Embodiment
Patent of the present invention comprises two parts: computing machine shown in Figure 1 and camera measuring system thereof, shown in Figure 2 be the camera axial displacement device that core is formed by the high-precision micro displacement stepper motor.
Go up the webcam driver program (13) of operation the placing in computer system (5), be connected camera (1) with (6) to computing machine (5) through USB interface (4).Then, let camera focal imaging object being measured.
In the measuring process, allow illuminating position that certain variation takes place, changing the light and shade contrast who influences object being measured not obviously and formed images with it is limit.Select for use light fixture (15) to help enforcement of the present invention.For example adopt irreflexive even lighting system, or its intensity of light fixture can be better than the influence of environment parasitic light.The material of object being measured preferably has more careful surface reflection characteristic, also can select for use this type of material to make target, avoids or overcomes smooth reflecting surface material.
As shown in Figure 2, camera (1) is installed on the worktable (33), moves with worktable, and this worktable (33) and a long tap turning axle (34) are with the tap socket.Tap turning axle (34) is installed on the big worktable (30) through bracing frame (31) and (32); And; Tap turning axle (34) all is the mode socket with rotating shaft with bracing frame (31) and (32), and tap turning axle (34) can rotate at the socket place with bracing frame (31) and (32) but displacement does not forward or backward take place.A fixing gear (341) is arranged on the tap turning axle (34); The interlock each other of gear (42) above the rotating shaft (41) of it and stepper motor (40); When the rotating shaft (41) of stepper motor (40) is rotated; Rotation meeting driven gear (341) rotation of gear (42), and then drive tap turning axle (34) rotation, impel camera (1) and worktable (33) thereof to be moved forward or backward together.Stepper motor (40) also is installed on the big worktable (30).
Choose two output signal lines of RS232C interface (8) lining of computer system (5); FORWARD as shown in the figure and BACKWARD; Receive a stepper motor interface circuit (43) with a ground wire GROUND, carry out power amplification at this, then; Be connected to stepper motor (40), control step motor (40) is done clockwise rotation or anticlockwise rotation.
The property relationship of stepper motor (40) is to the measuring accuracy of patent of the present invention, should select that step-wise displacement is meticulous, precision is high, the motor of working stability for use,
The operation camera is taken and is measured axial displacement program (14) according to the three primary colours contrast, in real time Displacement Measurement.Concrete steps see that " summary of the invention " describe, and are following with regard to its general condensed summary below.
Whether clear the principle of patent measurement optical shaft orientation micrometric displacement of the present invention and method be, as shown in Figure 3 based on optical imagery focusing, and its judgment criterion is: when focusing on clearly, picture frame view window zone has the maximum characteristics of image of number--limit reflection condition.Pel array and view window zone thereof that relevant photoelectric sensor chip carries out producing after the opto-electronic conversion are as shown in Figure 4.Relevant characteristics of image is the definition of edge direction data and confirms as shown in Figure 5.
Before measuring beginning, calculate the auto correlation matching factor,, judge whether the optical reflectance property on testee surface adapts to this surveying work, and optimize and analyze operand with suitable view window zone, constituency.
The described measuring method of patent of the present invention also is applicable to other picture pick-up device.

Claims (2)

1. one kind is the method for pattern measurement along the displacement of optical axis direction with the three primary colours contrast; The micro-displacement that it takes place along the optical axis direction of said camera through the logical computing machine of a Daepori, computing machine camera, camera axial displacement device, stepper motor and stepper motor interface circuit Measuring Object; This computing machine is connected to the computing machine camera through its USB interface; It is on the camera axial displacement device formed of core by stepper motor that this camera is installed in one; This stepper motor is connected to the RS232C interface of computing machine through the stepper motor interface circuit; Said camera axial displacement device comprises: camera (1) is installed on first worktable (33); First worktable (33) and a long tap turning axle (34) are with the tap socket; Tap turning axle (34) is installed on big second worktable (30) through first bracing frame (31) and second bracing frame (32), and tap turning axle (34) all is the mode socket with rotating shaft with first bracing frame (31) and second bracing frame (32), and tap turning axle (34) can rotate at the socket place with first bracing frame (31) and second bracing frame (32) but displacement does not forward or backward take place; A fixing gear (341) is arranged on the tap turning axle (34); The interlock each other of gear (42) above the rotating shaft (41) of it and stepper motor (40), stepper motor (40) also is installed on second worktable (30), and it is connected to the RS232C interface (8) of computing machine (5) through stepper motor interface circuit (43); It is characterized in that; Said is that pattern measurement is measured axial displacement along the method for the displacement of optical axis direction through the camera shooting and according to the three primary colours contrast with the three primary colours contrast, comprises the step of following Measuring Object along the micro-displacement of the optical axis direction generation of said camera:
Step 1, take the image of a frame testee, frame as a reference with the form of bitmap M * N; First locations of pixels with this frame pel array upper left corner is an initial point, is X-direction with to the right direction, and vertical downward direction is a Y direction, and the unit of the coordinate system of getting is the size of a pixel; Choose a zone at the middle section of said pel array, size is m 0* n 0, being referred to as view window, the horizontal direction of the said pel array of its distance and the edge pixel of vertical direction respectively have h and v pixel, promptly have: m 0+ 2h=M, n 0+ 2v=N, wherein, M, N, m 0, n 0, h, v ∈ positive integer;
Step 2, for the pel array of above-mentioned reference frame; By pixel column, by the edge direction data of pixel column derivation along X-direction and Y direction; And with the binary numeral 001 of 3bit; 010 and 100 wherein positive limit, marginal and the 3rd type of limits of expression respectively, so constituted corresponding said reference frame pel array about X-direction with about two frame edge direction data { reference of Y direction x(x, y) } and { reference y(x, y) }, wherein, subscript x or y represent the direction of the coordinate axis on institute edge respectively, all pixels in the change in coordinate axis direction view window that wherein the function subscript is indicated of symbol " { } " expression edge (x, these data are preserved in a set of the edge direction data of y) locating;
Step 3, for above-mentioned two frame edge direction data, calculate the auto correlation matching factor of view window interior pixel array in the said reference frame respectively:
auto _ correlation x ( a , b ) = Σ y = v + 1 v + 1 + n 0 Σ x = h + 1 h + 1 + m 0 [ reference x ( x , y ) · reference x ( x + a , y + b ) ]
auto _ correlation y ( a , b ) = Σ y = v + 1 v + 1 + n 0 Σ x = h + 1 h + 1 + m 0 [ reference y ( x , y ) · reference y ( x + a , y + b ) ]
In the formula, sign of operation is represented binary logic and computing, its operation result or be logical zero or for logical one; The pairing numerical value of value of logical operation function is wherein got in sign of operation " [] " expression, or is numerical value 0, or is numerical value 1; The combination of parametric variable a, b has determined the scale of associated match operator array, if get 3 * 3 associated match operator array: a=-1,0,1, b=-1,0,1; Therefore, each will produce 9 auto correlation coefficient auto_correlation along each change in coordinate axis direction x(a, b) and auto_correlation y(a, b);
Step 4, the auto correlation matching factor corresponding according to above-mentioned two frame edge direction data, search for respectively and under present body surface situation and illuminating position, can carry out matching ratio optimal viewing window pel array:
m x=m 0±step,n x=n 0±step,2h=M-m x,2v=N-n x
And m y=m 0± step, n y=n 0± step, 2h=M-m y, 2v=N-n y,
In the formula, subscript x, y represent respectively its value corresponding along X-direction and Y direction, step is the stepped parameter in the search procedure, the unlike signs of its front is determined by the direction of search; Get in this two class value big person and measure the scale of used view window array: m * n for this;
Step 5, for the pel array of above-mentioned reference frame; Data according to its redness, green and blue component; Respectively line by line, derive along the redness of X axle and Y direction, green and edge direction data blueness by row, one has 3 * 2=6 frame edge direction data;
According to the edge direction data of above-mentioned three kinds of primary colours,, use their pairing positive limits of accumulator count, marginal number: N respectively for wherein view window zone The RX axle just, N The RX axle is negative, N The RY axle justAnd N The RY axle is negative, N The GX axle just, N The GX axle is negative, N The GY axle justAnd N The GY axle is negative, N The BX axle just, N The BX axle is negative, N The BY axle justAnd N The BY axle is negative, wherein, N representes number, R, G, B represent red, green and blue respectively; Add up above-mentioned totalizer count results and preserve it, be expressed as: N (i, j=0, forw=0, back=0), wherein; I=1,2,3...... representes the sequential counting of captured reference frame, also is the counting of measuring, j=0; 1,2,3 ..., the rotation of stepper motor generation clockwise was counted with the pairing step-by-step impulse of anticlockwise rotation described in the counting of the sampling frame of representing to take in the i time measuring process, variable forw and back were represented respectively to measure for the i time: forw=0; 1,2 ..., back=0,1,2; ..., before this measures beginning, have: i=1, j=0, forw=0, back=0;
Step 6, measurement beginning: said computing machine is exported forw=1 digital pulse signal to said stepper motor interface circuit through an output control line FORWARD of its RS232C interface; Control this stepper motor clockwise and rotate a step; Then, take j=1 frame sample framing bit figure;
For the pel array of above-mentioned sampling frame,, respectively line by line, derive along the redness of X axle and Y direction, green and edge direction data blueness, have 3 * 2=6 frame edge direction data by row according to the data of its redness, green and blue component;
According to the edge direction data of above-mentioned three kinds of primary colours,, use their pairing positive limits of accumulator count, marginal number: N respectively for wherein view window zone The RX axle just, N The RX axle is negative, N The RY axle justAnd N The RY axle is negative, N The GX axle just, N The GX axle is negative, N The GY axle justAnd N The GY axle is negative, N The BX axle just, N The BX axle is negative, N The BY axle justAnd N The BY axle is negativeAdd up above-mentioned totalizer count results and preserve it, be expressed as: N (i, j=1, forw=1, back=0);
If step 7: N (i, j=1, forw=1, back=0)>=N (i, j=0; Forw=0, back=0), said computing machine is exported forw digital pulse signal to said stepper motor interface circuit: forw=2 through an output control line FORWARD of its RS232C interface, and 3 ...; It is progressive to control the rotation of this stepper motor clockwise, each one step of clockwise rotation all take and analyze respectively take a sample before and after the comparison in the frame in the view window along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum N (i, j=forw-1, forw-1, back=0) and N (i; J=forw, forw back=0), preserves it, should have in this process: N (i; J=forw, forw, back=0)>=N (i, j=forw-1, forw-1; Back=0), up to satisfying: N (i, j=forw, forw, back=0)<N (i; J=forw-1, forw-1, back=0), and at this moment, record (forw) MAX=forw; Simultaneously; Said computing machine arrives said stepper motor interface circuit: back=1 through digital pulse signal of another root output control line BACKWARD output of its RS232C interface, controls anticlockwise one step of rotation of this stepper motor, at this moment; This measures the preceding initial position of beginning relatively, and the camera of this device promptly is in the best object image-forming focal position in this measurement: FocusP=(forw) MAX-back=(forw) MAX-1; Its result calculated is more than or equal to 0; The sense of rotation of representing said stepper motor in general is clockwise, in the corresponding sampling frame view window of this focal position along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum is: N (i, j=(forw) MAX-1, forw=(forw) MAX-1, back=0), the tale result of the sampling frame of taking in the measuring process is: j=(forw) MAX+ back=(forw) MAX+ 1;
If: N (i, j=1, forw=1, back=0)<N (i, j=0; Forw=0, back=0), said computing machine is exported back=1 digital pulse signal to said stepper motor interface circuit through an output control line BACKWARD of its RS232C interface, controls the anticlockwise rotation backward of this stepper motor, promptly gets back to the initial position of this measurement; Then, said computing machine continues back digital pulse signal of output to said stepper motor interface circuit: back=2 through the output control line BACKWARD of its RS232C interface, and 3 ..., control the further anticlockwise rotation of this stepper motor; In this process, each one step of anticlockwise rotation all take and analyze respectively take a sample before and after the comparison in the frame view window along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum N (i, j=back+1, forw=1, back) and N (i; J=back, forw=1 back=back-1), should have: N (i, j=back+1; Forw=1, back=back)>=N (i, j=back, forw=1; Back=back-1), preserve it, so continue, up to satisfying: N (i; J=back+1, forw=1, back)<N (i, j=back; Forw=1, back-1), at this moment, record: (back) MAX=back; Simultaneously; Said computing machine arrives said stepper motor interface circuit: forw=2 through digital pulse signal of another root output control line FORWARD output of its RS232C interface, controls this stepper motor clockwise and rotates a step, at this moment; This measures the preceding initial position of beginning relatively, and the camera of this device promptly is in the best object image-forming focal position in this measurement: FocusP=forw-(back) MAX=2-(back) MAXIts result calculated is a negative value; The sense of rotation of representing said stepper motor is anticlockwise, in the corresponding sampling frame view window of this focal position along all positive limits of three kinds of primary colours of X axle and Y direction and marginal number sum is: N (i, j=((back) MAX-1)+1=(back) MAX, forw=1, back=(back) MAXThe tale result of the sampling frame of-1), taking in the measuring process is: j=forw+ (back) MAX=2+ (back) MAX
Integrate, this measures the preceding initial position of beginning relatively, and the displacement that this optic axis direction of measuring the said camera in object edge that is obtained takes place is: Δ z (i)=forw-back,
The value of counter forw and back is count results last in this measuring process in the aforementioned calculation formula; Result of calculation has the symbol of plus or minus; The displacement that taken place of the expression direction of advancing or retreating respectively along optic axis; Corresponding to the sense of rotation of said stepper motor clockwise or anticlockwise promptly, specifically confirm by the arrangement of the camera axial displacement device of stepper motor;
Total displacement is: Δ Z 0(i)=Δ Z 0(i-1)+Δ z (i),
Wherein, Δ Z 0(i-1) measure the axial displacement of accumulation before for this;
Step 8, prepare surveying work next time: measure time counter i=i+1, get all positive limits of measuring the interior three kinds of primary colours along X axle and Y direction of the corresponding object image-forming frame of the best object image-forming focal position view window of confirming for the i time and marginal number sum as new witness mark value:
N (i, j=0, forw=0, back=0)=N (i, j=(forw) MAX-1, forw=(forw) MAX-1, back=0), or N (i, j=0, forw=0, back=0)=
N(i,j=((back) MAX-1)+1=(back) MAX,forw=1,back=(back) MAX-1);
Step 9, jump to step 6, continue to measure;
The definition of edge direction data described in the above-mentioned steps two is:
In the pel array, along the X axle or along Y direction, if the light intensity value of a pixel is than the also little error margin value error of second corresponding light intensity value of pixel of its back, if promptly:
I (X, Y)<I (X+2, Y)-error or I (X, Y)<I (X, Y+2)-error,
Then define and have this axial positive limit, an edge between these two pixels; If the light intensity value of a pixel is than the also big error margin value error of second corresponding light intensity value of pixel of its back, if promptly:
I (X, Y)>I (X+2, Y)+error or I (X, Y)>I (X, Y+2)+error,
Then define between these two pixels and to have an edge this is axial marginal; The limit that so obtains is positioned at first locations of pixels after this pixel, also promptly is positioned on that pixel in the centre position of participating in two pixels relatively; If second corresponding light intensity value of pixel of certain light intensity value of a pixel and its back is approaching, its value differs and is no more than an error margin value error, if promptly:
I(X+2,Y)-error?≤I(X,Y)≤I(X+2,Y)+error,
Or I (X, Y+2)-error≤I (X, Y)≤I (X, Y+2)+error,
Then think not have corresponding " limit " along this direction of principal axis between these two pixels, or be referred to as the 3rd type of limit;
Along some change in coordinate axis direction, all positive limit of corresponding pixel column or pixel column, marginal and the 3rd type of limit form this row maybe should row along the edge direction data of this change in coordinate axis direction; According to concrete light conditions, the error margin value error that presets in the above-listed formula is a little numerical value; There are not the edge direction data in four limits in the pel array and the location of pixels on the angle;
The definition of red, green or blue edge direction data described in above-mentioned steps five, the step 6 is:
Component data according to one of red in the pel array, green or these three kinds of primary colours of blueness; Along the X axle or along Y direction; If certain three primary colours component value of a pixel is than the also little error margin value error of the corresponding three primary colours component value of second pixel of its back, if promptly:
I (X, Y) Red<I Red(X+2, Y)-error or I (X, Y) Red<I (X, Y+2) Red-error,
I (X, Y) Green<I Green(X+2, Y)-error or I (X, Y) Green<I (X, Y+2) Green-error,
I (X, Y) Blue<I Blue(X+2, Y)-error or I (X, Y) Blue<I (X, Y+2) Blue-error,
Then define and have a positive limit redness, green or blue between these two pixels; If certain three primary colours component value of a pixel is than the also big error margin value error of the corresponding three primary colours component value of second pixel of its back, if promptly: I (X, Y) Red>I Red(X+2, Y)+error or I (X, Y) Red>I (X, Y+2) Red+ error,
I (X, Y) Green>I Green(X+2, Y)+error or I (X, Y) Green>I (X, Y+2) Green+ error,
I (X, Y) Blue>I Blue(X+2, Y)+error or I (X, Y) Blue>I (X, Y+2) Blue+ error,
Then define and have the marginal of a redness, green or blueness between these two pixels; The limit that so obtains is positioned at first locations of pixels after this pixel, also promptly is positioned on that pixel in the centre position of participating in two pixels relatively; If the corresponding three primary colours component value of second pixel of certain three primary colours component value of a pixel and its back is approaching, its RGB component value differs and is no more than an error margin value error, if promptly:
I (X+2, Y) Red-error≤I (X, Y) Red≤I (X+2, Y) Red+ error,
Or I (X, Y+2) Red-error≤I (X, Y) Red≤I (X, Y+2) Red+ error;
I (X+2, Y) Green-error≤I (X, Y) Green≤I (X+2, Y) Green+ error,
Or I (X, Y+2) Green-error≤I (X, Y) Green≤I (X, Y+2) Green+ error;
I (X+2, Y) Blue-error≤I (X, Y) Blue≤I (X+2, Y) Blue+ error,
Or I (X, Y+2) Blue-error≤I (X, Y) Blue≤I (X, Y+2) Blue+ error;
Then think not have this color wavelength corresponding " limit " between these two pixels, or be referred to as the limit of the 3rd type of this color; Along some change in coordinate axis direction; The red edge direction data of this direction are formed on the limit of marginal and the 3rd type of redness of the positive limit of all redness and redness; The green edge direction data of this direction are formed on the limit of marginal and the 3rd type of green of the positive limit of all greens and green, the blue edge direction data of limit this direction of composition of marginal and the 3rd type of blueness of the positive limit of all bluenesss and blueness; According to concrete light conditions, the error margin value error that presets in the above-mentioned formula is a little numerical value; There are not the edge direction data in four limits in the pel array and the location of pixels on the angle.
2. according to claim 1 is the method for pattern measurement along the displacement of optical axis direction with the three primary colours contrast, it is characterized in that, the method for search optimal viewing window pel array comprises in the said step 4:
For the view window of said pel array and k * k associated match operator array (a, b), k ∈ positive integer can produce k * k auto correlation matching factor along certain change in coordinate axis direction, by following inequality these auto correlation matching factors relatively:
auto_correlation(a,b)≥auto_correlation(0,0)×similarity,
In the formula, similarity has described the similarity degree of view window and the pel array of its contiguous identical scale, and similarity is provided with in advance, or debugs and select according to the quality on light conditions and measured object surface;
If the auto correlation coefficient that satisfies above-mentioned inequality more than k * k * 1/3, need to enlarge each step of scope of view window capable with the step row: make m=m 0+ step, n=n 0+ step recomputates the auto correlation coefficient of new view window, and carries out above-mentioned comparison; Up to the no more than k * k of auto correlation matching factor that satisfies above-mentioned inequality * 1/3, at this moment, 2h=M-m; 2v=N-n, wherein, step is a stepped parameter; Initial value is 1, needs the scale of expansion view window just to increase by 1 at every turn; If exceed predetermined scope in the frame, also do not find suitable view window, think that then the quality of this this part reflecting surface of object is inappropriate for the surveying work of this device, and provide the prompting warning;
If satisfy the no more than k * k of auto correlation matching factor of above-mentioned inequality * 1/3; The architectural feature on surface that subject is described is enough meticulous; Value between the neighborhood pixels can be distinguished; Further attempt dwindling the capable and step row of each step of scope of view window, to reduce amount of calculation: make m=m 0-step, n=n 0-step recomputates the auto correlation coefficient of view window, and carries out above-mentioned comparison; Stepped parameter step is each to increase by 1; The number that satisfies the auto correlation coefficient of above-mentioned inequality up to selected view window zone is not less than k * k * 1/3, at this moment, thinks to have searched optimal viewing window pel array.
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