CN102865822B - The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate - Google Patents
The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate Download PDFInfo
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- CN102865822B CN102865822B CN201210375341.8A CN201210375341A CN102865822B CN 102865822 B CN102865822 B CN 102865822B CN 201210375341 A CN201210375341 A CN 201210375341A CN 102865822 B CN102865822 B CN 102865822B
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Abstract
The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate belongs to Grating examinations field, and the chi plate of grating scale is positioned at driving water plane, and the first benchmark grating scale and the second benchmark grating scale are positioned at worktable both sides, parallel with grating scale chi plate; Parallel light tube is positioned at the side of worktable, and leading screw is fixed on the worktable below parallel light tube, and slide unit is placed on the guide rail of worktable, controls slide unit at moving on rails by leading screw; First catoptron is fixed on slide unit, and photoelectric reader is fixed on the side of slide unit, and grating ruler reading head is fixed in slide unit, and computing machine is connected with leading screw and photoelectric reader.The present invention by positioning precision, the width of the absolute code channel groove of automatic non-contact detection grating scale, copy shortcoming, on-line real-time measuremen selects qualified grating scale chi plate, to ensure the accuracy requirement needed for grating scale.<!--1-->
Description
Technical field
The invention belongs to Grating examinations field, be specifically related to the non-contact automatic detection device of the absolute code channel graduating accuracy of a kind of grating scale chi plate.
Background technology
The absolute code channel of grating scale chi plate of specific coding data delineation does not wait the groove of width, unequal-interval to form by several ten thousand, each groove of absolute code channel independently carries out opto-electronic conversion, participate in forming absolute measurement data, positioning precision, the width of groove, copy the correctness that shortcoming all can have influence on absolute measurement.Existing code channel groove detection method spininess is to relative code channel groove, absolute code channel cannot be detected or adopt contact type measurement, the common structure of contact measurement measuring equipment is that Mobile Slide moves on guide rail, gauge head is arranged on Mobile Slide and contacts with tested grating scale chi plate, because contact portion exists friction force and stress deformation, testing result is caused to be forbidden.
Summary of the invention
In order to solve problems of the prior art, the invention provides the non-contact automatic detection device of the absolute code channel graduating accuracy of a kind of grating scale chi plate, this device solves does not have the problem effectively can carrying out non-contact measurement to absolute type code channel now, improves the precision of measurement.
The technical scheme that technical solution problem of the present invention adopts is as follows:
The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate, this device comprises: worktable, slide unit, leading screw, parallel light tube, catoptron, computing machine, photoelectric reader, grating scale chi plate, grating ruler reading head, the first benchmark grating scale and the second benchmark grating scale; The chi plate of grating scale is positioned at driving water plane, and the first benchmark grating scale and the second benchmark grating scale are positioned at worktable both sides, parallel with grating scale chi plate; Parallel light tube is positioned at the side of worktable, and leading screw is fixed on the worktable below parallel light tube, and slide unit is placed on the guide rail of worktable, controls slide unit at moving on rails by leading screw; Catoptron is fixed on slide unit, and photoelectric reader is fixed on the side of slide unit, and grating ruler reading head is fixed in slide unit, and computing machine is connected with leading screw and photoelectric reader;
Photoelectric reader comprises: LED light source, collimator objective, the first Amici prism, the second Amici prism, CCD camera, microcobjective and photodetector; LED light source sends by light-metering, collimated by collimator objective, through first Amici prism reflection laggard enter grating scale chi plate, reflected by grating scale chi plate, with grating scale chi plate information by light-metering after the first Amici prism, a part by second Amici prism reflect, gathered by CCD camera, a part, by the second Amici prism transmission, is gathered by photodetector.
The invention has the beneficial effects as follows: the present invention by positioning precision, the width of the absolute code channel groove of automatic non-contact detection grating scale, copy shortcoming, on-line real-time measuremen selects qualified grating scale chi plate, to ensure the accuracy requirement needed for grating scale.
Accompanying drawing explanation
The non-contact automatic detection structure drawing of device of the absolute code channel graduating accuracy of Fig. 1 grating scale of the present invention chi plate.
The right view of the non-contact automatic detection device of the absolute code channel graduating accuracy of Fig. 2 grating scale of the present invention chi plate.
The non-contact automatic detection device photoelectric reading upper margin structural drawing of the absolute code channel graduating accuracy of Fig. 3 grating scale of the present invention chi plate.
In figure: 1, worktable, 2, slide unit, 3, leading screw, 4, parallel light tube, 5, computing machine, 6, catoptron, 7, photoelectric reader, 8, grating scale chi plate, the 9, first benchmark grating scale, 10, the second benchmark grating scale, 11, LED light source, 12, collimator objective, 13, the first Amici prism, 14, CCD camera, 15, microcobjective, 16, the second Amici prism, 17, photodetector and 18,1 times of object lens.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further details.
As depicted in figs. 1 and 2, the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate 8, this device comprises: worktable 1, slide unit 2, leading screw 3, parallel light tube 4, computing machine 5, catoptron 6, photoelectric reader 7, grating scale chi plate 8, first benchmark grating scale 9 and the second benchmark grating scale 10; The chi plate of grating scale is positioned at worktable 1 surface level, and the first benchmark grating scale 9 and the second benchmark grating scale 10 are positioned at worktable 1 both sides, parallel with grating scale chi plate 8; Parallel light tube 4 is positioned at the side of worktable 1, and leading screw 3 is fixed on the worktable 1 below parallel light tube 4, and slide unit 2 is placed on the guide rail of worktable 1, controls slide unit 2 at moving on rails by leading screw 3; Catoptron 6 is fixed on slide unit 2, and photoelectric reader 7 is fixed on the side of slide unit 2, and grating ruler reading head is fixed in slide unit 2, and computing machine 5 is connected with leading screw 3 and photoelectric reader 7.
Computing machine 5 controls slide unit 2 at slide on rails by leading screw 3, send collimation directional light by parallel light tube 4 to incide catoptron back reflection and return parallel light tube 4, returning whether swing is existed in guide rail direction to slide unit 2 by detecting only Fou Yuan road, eliminating the Abbe error of vertical direction.Grating ruler reading head and the first benchmark grating scale 9 and the second benchmark grating scale 10 keep certain detecting distance, and detect the information of the first benchmark grating scale 9 and the second benchmark grating scale 10 simultaneously, whether to be existed in guide rail direction by the infomation detection slide unit 2 of the first benchmark grating scale 9 and the second benchmark grating scale 10 and swing, the Abbe error in elimination of level direction.
As shown in Figure 3, tested grating scale chi plate 8 groove faces up, and is installed in worktable 1 plane.Photoelectric reader 7 comprises: LED light source 11, collimator objective 12, first Amici prism 13, CCD camera 14, microcobjective 15, second Amici prism 16, photodetector 17 and 1 times of object lens 18; The light that LED light source 11 sends forms directional light after collimator objective 12 optically focused, after the first Amici prism 13 reflects, incides on tested grating scale chi plate 8.The light of tested grating scale chi plate 8 reflection, after the first Amici prism 13 and 1 times of object lens 18, is divided into two light paths by the second Amici prism 16, and one, by the second Amici prism 16, is received by photodetector 17; Article one, reflected by the second Amici prism 16, after microcobjective 15, in the projection imaging of CCD camera 14 target surface.Then processed CCD vision signal by computing machine 5 image processing system, judge the positional precision of tested grating scale chi plate 8, the photosignal received by photodetector 17 judges the shortcoming that grating line is delineated.
Claims (5)
1. the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate, this device comprises: worktable, slide unit and leading screw; It is characterized in that, this device also comprises: parallel light tube, catoptron, computing machine, photoelectric reader, grating scale, grating ruler reading head, the first benchmark grating scale and the second benchmark grating scale; The chi plate of described grating scale is positioned at driving water plane, and the first benchmark grating scale and the second benchmark grating scale are positioned at worktable both sides, parallel with grating scale chi plate; Parallel light tube is positioned at the side of worktable, and leading screw is fixed on the worktable below parallel light tube, and slide unit is placed on the guide rail of worktable, controls slide unit at moving on rails by leading screw; Catoptron is fixed on slide unit, sending collimation directional light and incides catoptron back reflection and return parallel light tube, returning whether there is swing to slide unit in guide rail direction by detecting only Fou Yuan road by parallel light tube; Photoelectric reader is fixed on the side of slide unit, and grating ruler reading head is fixed in slide unit, and computing machine is connected with leading screw and photoelectric reader;
Photoelectric reader comprises: LED light source, collimator objective, the first Amici prism, the second Amici prism, CCD camera and photodetector; LED light source sends by light-metering, collimated by collimator objective, through first Amici prism reflection laggard enter grating scale chi plate, reflected by grating scale chi plate, with grating scale chi plate information by light-metering after the first Amici prism, a part by second Amici prism reflect, gathered by CCD camera, a part, by the second Amici prism transmission, is gathered by photodetector.
2. the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate as claimed in claim 1, is characterized in that, the radiation direction of parallel light tube and the guide rail parallel of worktable.
3. the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate as claimed in claim 1, it is characterized in that, this device also comprises 1 times of object lens; With grating scale chi plate information by light-metering after the first Amici prism, after 1 times of object lens, run into the second Amici prism.
4. the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate as claimed in claim 1, it is characterized in that, this device also comprises microcobjective; With grating scale chi plate information by light-metering by second Amici prism reflect after, amplified by microcobjective, gathered by CCD camera.
5. the non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate as claimed in claim 1, it is characterized in that, described first benchmark grating scale and the second benchmark grating scale are equal with the distance of grating scale chi plate respectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210375341.8A CN102865822B (en) | 2012-09-27 | 2012-09-27 | The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate |
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| CN201210375341.8A CN102865822B (en) | 2012-09-27 | 2012-09-27 | The non-contact automatic detection device of the absolute code channel graduating accuracy of grating scale chi plate |
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| CN102865822B true CN102865822B (en) | 2015-10-28 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103531139B (en) * | 2013-10-18 | 2016-08-17 | 台龙电子（昆山）有限公司 | CCD amplification detection instrument for LED display screen |
| CN103968757B (en) * | 2014-04-30 | 2017-06-09 | 中国科学院长春光学精密机械与物理研究所 | The detection method and device of reliability of the grating scale under the conditions of high speed |
| CN105606033B (en) * | 2016-03-18 | 2018-04-20 | 清华大学深圳研究生院 | Absolute grating scale, its key light grid and its measuring method |
| CN105758435B (en) * | 2016-04-14 | 2018-02-09 | 清华大学深圳研究生院 | A kind of absolute grating scale |
| CN105890521B (en) * | 2016-06-07 | 2018-01-26 | 吉林大学 | Grating scale reliability test and method |
| CN109935138A (en) * | 2019-04-18 | 2019-06-25 | 安徽理工大学 | Novel and multifunctional measurement and control integration teaching experiment platform |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4008398B2 (en) * | 2003-09-04 | 2007-11-14 | アオイ電子株式会社 | Position and orientation measurement apparatus and position and orientation measurement method |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
| CN102564307A (en) * | 2011-12-29 | 2012-07-11 | 中国科学院长春光学精密机械与物理研究所 | Automatic detection device for precision in cycle of grating scale |
| CN102607470A (en) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Non-contact automatic detection device for straightness errors of milling surface of scale grating of grating ruler |
| CN102628811A (en) * | 2012-03-30 | 2012-08-08 | 中国科学院长春光学精密机械与物理研究所 | Verifying device of grating groove defect |
-
2012
- 2012-09-27 CN CN201210375341.8A patent/CN102865822B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4008398B2 (en) * | 2003-09-04 | 2007-11-14 | アオイ電子株式会社 | Position and orientation measurement apparatus and position and orientation measurement method |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
| CN102564307A (en) * | 2011-12-29 | 2012-07-11 | 中国科学院长春光学精密机械与物理研究所 | Automatic detection device for precision in cycle of grating scale |
| CN102607470A (en) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Non-contact automatic detection device for straightness errors of milling surface of scale grating of grating ruler |
| CN102628811A (en) * | 2012-03-30 | 2012-08-08 | 中国科学院长春光学精密机械与物理研究所 | Verifying device of grating groove defect |
Non-Patent Citations (2)
| Title |
|---|
| 每毫米25线光栅尺精度的动态测量;刘祥文，毛国英;《计量技术》;19811231(第3期);第1-6页 * |
| 陈龙飞，金其坤.自准直平行光管应用举例.《工程测量》.同济大学出版社,1990,第219-220页. * |
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