CN102570853A - Constant-power-output magnetron sputtering coating power supply - Google Patents
Constant-power-output magnetron sputtering coating power supply Download PDFInfo
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- CN102570853A CN102570853A CN2010105976411A CN201010597641A CN102570853A CN 102570853 A CN102570853 A CN 102570853A CN 2010105976411 A CN2010105976411 A CN 2010105976411A CN 201010597641 A CN201010597641 A CN 201010597641A CN 102570853 A CN102570853 A CN 102570853A
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Abstract
The invention provides a constant-power-output magnetron sputtering coating power supply. The power supply comprises an input rectification filter circuit, an inverter circuit, a high-frequency transformer and an output rectification filter circuit, wherein the inverter circuit comprises a first inductor L1 and a first capacitor C1 which are connected in series with an input loop. The power supply further comprises a voltage sensor A and a current sensor B which are used for sensing output voltage value and current value respectively, as well as a programmable singlechip S, and a working state setting and displaying detection system. The inverter circuit further comprises an electronic switch K. In the constant-power-output magnetron sputtering coating power supply, the programmable singlechip is adopted to control the electronic switch, the pulse width of an inverter is continually adjusted according to variation of output voltage and current, so as to enable the product of the voltage (effective value) and current to be constant, thereby ensuring constant output power, avoiding defects of a conventional constant-current-output magnetron sputtering coating power supply or a constant-voltage-output magnetron sputtering coating power supply, and enabling the power supply system to work more reasonably and efficiently.
Description
Technical field
The present invention relates to a kind of permanent power output magnetron sputtering plating power supply, relate in particular to a kind of can making and export the power supply that is always the work of setting power value according to the selected use of user performance number.
Background technology
Domestic common magnetron sputtering plating power supply has direct current and intermediate frequency to export two kinds at present, and control mode has two kinds of constant voltage, constant currents.Electric power output voltage kept inconvenience when the operation principle of constant voltage source was the operating load variation; Electric current changes power protection cut-out out-put supply when electric current surpasses maximum permissible value thereupon; Protect and to set suitable operating voltage according to target in order to prevent power supply from exceeding peak power output; And the maximum current will consider work the time will make and leave certain variation space between operating current and the maximum current must exempt to protect, and uses cumbersome.For the shortcoming that overcomes constant voltage source has produced constant current plated film power supply; Constant-current supply has overcome the shortcoming of constant voltage source, and electric current is constant but constant-current supply voltage when the load of when work increases descends makes output power of power supply significantly descend to cause the plated film operating time to prolong quality descend (power output P=I * V, I are that output current, V are output voltage).
Summary of the invention
The objective of the invention is to propose a kind of permanent power output magnetron sputtering plating power supply, it has solved existing magnetron sputtering plating power supply constant voltage and there is the unsettled technical problem of power output in the constant current control mode.
Technical solution of the present invention:
A kind of permanent power output magnetron sputtering plating power supply, its special character is:
Comprise with three-phase alternating voltage change into single-phase DC voltage the input rectifying filter circuit, direct voltage is changed into the inverter circuit of intermediate frequency pulsating voltage, the intermediate frequency pulsating voltage of inverter output is transformed to high frequency transformer, the output rectifier and filter of output voltage values; Said inverter circuit comprises first inductance L 1 and first capacitor C 1 that is connected in the input circuit, it is characterized in that: also comprise voltage sensor A and current sensor B, programmable single chip computer S, the operating state setting that is used for responsive output voltage values and current value and show detection system; Said inverter circuit also comprises electronic switch K; Electronic switch K is serially connected between first inductance L 1 of input rectifying filter circuit and inverter circuit; The output termination programmable single chip computer S of voltage sensor A and current sensor B; Programmable single chip computer S can be according to the break-make of the feedback signal control electronic switch K of the voltage and current signal of voltage sensor A and current sensor B and electronic switch.
Above-mentioned electronic switch K is the VMOS switching tube, and the source electrode of said electronic switch K connects input voltage, and drain electrode connects first inductance L 1, and grid connects the control end of programmable single chip computer S.
The advantage that the present invention has is:
1, the permanent power output of the present invention magnetron sputtering plating power supply adopts programmable single chip computer control electronic switch; The pulsewidth of constantly adjusting inverter according to output voltage and change in current makes that the voltage (effective value) and the product of electric current are definite value; Thereby guarantee that power output is constant; Avoided the shortcoming of existing constant current output magnetron sputtering plating power supply or constant voltage output magnetron sputtering plating power supply, power-supply system is rationally worked more efficiently.
But 2, systems such as the present invention's extensive use magnetron sputtering plating power supply, permanent power heating.
Description of drawings
Fig. 1 is the theory diagram of the permanent power output of the present invention magnetron sputtering plating power supply;
Fig. 2 is the circuit theory diagrams of the inverter circuit of the permanent power output of the present invention magnetron sputtering plating power supply.
Embodiment
The permanent power output of the present invention magnetron sputtering plating power supply; Comprise with three-phase alternating voltage change into single-phase DC voltage the input rectifying filter circuit, with direct voltage change the inverter circuit of the adjustable intermediate frequency pulsating voltage of the pulsewidth of 20K or 40K into, high frequency transformer, output rectifier and filter, voltage sensor A, current sensor B, programmable single chip computer S, operating state that the intermediate frequency pulsating voltage of inverter output is transformed to output voltage values set and show detection system; Inverter circuit comprises electronic switch K, is connected on first inductance L 1 and first capacitor C 1 in the input circuit; Electronic switch K adopts the VMOS switching tube; The source electrode of VMOS switching tube connects input voltage; Drain electrode connects first inductance L 1, and grid connects the control end of programmable single chip computer S; Voltage sensor A and current sensor B are used for responsive output voltage values and current value, the output termination programmable single chip computer S of voltage sensor A and current sensor B; Programmable single chip computer S can be according to the break-make of the feedback signal control electronic switch K of the voltage and current signal of voltage sensor A and current sensor B and electronic switch;
Operation principle of the present invention: power supply of the present invention is through the Single-chip Controlling electronic switch, and according to output voltage and current value, the pulsewidth of constantly adjusting inverter makes that the voltage (effective value) and the product of electric current are certain value.Be equivalent to different choice different working power according to target; The voltage of the output of power supply and electric current change maintenance power output inconvenience (product of voltage and electric current is a set point) simultaneously when operating load changes, and the system that makes works under a constant power output.
Claims (2)
1. a permanent power is exported the magnetron sputtering plating power supply; It is characterized in that: comprise with three-phase alternating voltage change into single-phase DC voltage the input rectifying filter circuit, direct voltage is changed into the inverter circuit of intermediate frequency pulsating voltage, the intermediate frequency pulsating voltage of inverter output is transformed to high frequency transformer, the output rectifier and filter of output voltage values; Said inverter circuit comprises first inductance L 1 and first capacitor C 1 that is connected in the input circuit, it is characterized in that: also comprise voltage sensor A and current sensor B, programmable single chip computer S, the operating state setting that is used for responsive output voltage values and current value and show detection system; Said inverter circuit also comprises electronic switch K; Electronic switch K is serially connected between first inductance L 1 of input rectifying filter circuit and inverter circuit; The output termination programmable single chip computer S of voltage sensor A and current sensor B; Programmable single chip computer S can be according to the break-make of the feedback signal control electronic switch K of the voltage and current signal of voltage sensor A and current sensor B and electronic switch.
2. permanent power output magnetron sputtering plating power supply according to claim 1; It is characterized in that: said electronic switch K is the VMOS switching tube; The source electrode of said electronic switch K connects input voltage, and drain electrode connects first inductance L 1, and grid connects the control end of programmable single chip computer S.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105976411A CN102570853A (en) | 2010-12-20 | 2010-12-20 | Constant-power-output magnetron sputtering coating power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105976411A CN102570853A (en) | 2010-12-20 | 2010-12-20 | Constant-power-output magnetron sputtering coating power supply |
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| Publication Number | Publication Date |
|---|---|
| CN102570853A true CN102570853A (en) | 2012-07-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010105976411A Pending CN102570853A (en) | 2010-12-20 | 2010-12-20 | Constant-power-output magnetron sputtering coating power supply |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014121472A1 (en) * | 2013-02-05 | 2014-08-14 | 深圳市华星光电技术有限公司 | Power source system and control method therefor |
| CN104506042A (en) * | 2014-12-23 | 2015-04-08 | 刘孝涛 | High-reliability constant-current vehicle-mounted DC (direct current)-DC converter and control method thereof |
| CN105024353A (en) * | 2015-07-24 | 2015-11-04 | 佛山市绿系真空科技有限公司 | Automatic arc extinguishing method and system for high-voltage power supply system of vacuum coating electronic gun |
| CN110867825A (en) * | 2019-10-30 | 2020-03-06 | 许继电源有限公司 | Overvoltage protection circuit of constant power output power supply |
| CN111800041A (en) * | 2020-08-06 | 2020-10-20 | 广东电网有限责任公司电力科学研究院 | Constant-power de-excitation device and method, storage medium and terminal equipment |
| CN114337302A (en) * | 2021-12-30 | 2022-04-12 | 广东福德电子有限公司 | High-power sputtering power supply |
-
2010
- 2010-12-20 CN CN2010105976411A patent/CN102570853A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014121472A1 (en) * | 2013-02-05 | 2014-08-14 | 深圳市华星光电技术有限公司 | Power source system and control method therefor |
| GB2524450A (en) * | 2013-02-05 | 2015-09-23 | Shenzhen China Star Optoelect | Power source system and control method therefor |
| GB2524450B (en) * | 2013-02-05 | 2020-07-29 | Shenzhen China Star Optoelect | Power source system and control method thereof |
| CN104506042A (en) * | 2014-12-23 | 2015-04-08 | 刘孝涛 | High-reliability constant-current vehicle-mounted DC (direct current)-DC converter and control method thereof |
| CN105024353A (en) * | 2015-07-24 | 2015-11-04 | 佛山市绿系真空科技有限公司 | Automatic arc extinguishing method and system for high-voltage power supply system of vacuum coating electronic gun |
| CN105024353B (en) * | 2015-07-24 | 2018-09-04 | 佛山市绿系真空科技有限公司 | For the automatic arc-suppressing method of vacuum coating electron gun high voltage power supply and system |
| CN110867825A (en) * | 2019-10-30 | 2020-03-06 | 许继电源有限公司 | Overvoltage protection circuit of constant power output power supply |
| CN111800041A (en) * | 2020-08-06 | 2020-10-20 | 广东电网有限责任公司电力科学研究院 | Constant-power de-excitation device and method, storage medium and terminal equipment |
| CN111800041B (en) * | 2020-08-06 | 2021-09-14 | 广东电网有限责任公司电力科学研究院 | Constant-power de-excitation device and method, storage medium and terminal equipment |
| CN114337302A (en) * | 2021-12-30 | 2022-04-12 | 广东福德电子有限公司 | High-power sputtering power supply |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120711 |