CN102565653B - 一种晶圆测试方法 - Google Patents
一种晶圆测试方法 Download PDFInfo
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- CN102565653B CN102565653B CN201010620289.9A CN201010620289A CN102565653B CN 102565653 B CN102565653 B CN 102565653B CN 201010620289 A CN201010620289 A CN 201010620289A CN 102565653 B CN102565653 B CN 102565653B
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CN201010620289.9A CN102565653B (zh) | 2010-12-29 | 2010-12-29 | 一种晶圆测试方法 |
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CN201010620289.9A CN102565653B (zh) | 2010-12-29 | 2010-12-29 | 一种晶圆测试方法 |
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CN102565653A CN102565653A (zh) | 2012-07-11 |
CN102565653B true CN102565653B (zh) | 2015-11-25 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI570654B (zh) * | 2014-01-15 | 2017-02-11 | Signality System Engineering Co Ltd | Use the test data for quality control |
TWI621191B (zh) * | 2016-06-02 | 2018-04-11 | 南茂科技股份有限公司 | 晶圓測試機台的遠端監控方法及系統 |
CN107544010B (zh) * | 2016-06-28 | 2020-05-01 | 中芯国际集成电路制造(上海)有限公司 | 测试设备及测试方法 |
TWI639846B (zh) * | 2018-02-12 | 2018-11-01 | 黃彥凱 | 晶圓再驗之方法 |
CN109741779B (zh) * | 2018-12-29 | 2020-10-16 | 西安紫光国芯半导体有限公司 | 一种在晶圆测试过程中动态调整测试条件的方法 |
CN109860069B (zh) * | 2019-01-31 | 2022-03-08 | 上海华虹宏力半导体制造有限公司 | 晶圆的测试方法 |
CN111257715B (zh) * | 2020-02-19 | 2022-06-24 | 上海韦尔半导体股份有限公司 | 一种晶圆测试方法及装置 |
CN113488401B (zh) * | 2021-06-30 | 2022-10-14 | 海光信息技术股份有限公司 | 一种芯片测试方法及装置 |
CN116666248B (zh) * | 2023-07-26 | 2023-11-17 | 北京象帝先计算技术有限公司 | 测试结果异常确定方法、装置、电子设备及可读存储介质 |
Citations (2)
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CN101359015A (zh) * | 2007-07-30 | 2009-02-04 | 中芯国际集成电路制造(上海)有限公司 | 检测半导体器件的方法及装置 |
CN101561474A (zh) * | 2008-04-14 | 2009-10-21 | 京元电子股份有限公司 | 可动态变更测试流程的测试方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN101359015A (zh) * | 2007-07-30 | 2009-02-04 | 中芯国际集成电路制造(上海)有限公司 | 检测半导体器件的方法及装置 |
CN101561474A (zh) * | 2008-04-14 | 2009-10-21 | 京元电子股份有限公司 | 可动态变更测试流程的测试方法 |
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