CN102565082A - 对位装置及对位方法 - Google Patents

对位装置及对位方法 Download PDF

Info

Publication number: CN102565082A
Authority: CN; China
Prior art keywords: image; mentioned; processing procedure; procedure program; power processing
Prior art date: 2010-11-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

CN2011103530218A

Other languages

English (en)

Chinese (zh)

Inventor

加藤阳治

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Olympus Corp

Original Assignee

Olympus Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-11-09

Filing date

2011-11-09

Publication date

2012-07-11

2011-11-09 Application filed by Olympus Corp filed Critical Olympus Corp

2012-07-11 Publication of CN102565082A publication Critical patent/CN102565082A/zh

Status Pending legal-status Critical Current

Links

Images

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Image Processing (AREA)
Image Analysis (AREA)
Length Measuring Devices By Optical Means (AREA)

CN2011103530218A 2010-11-09 2011-11-09 对位装置及对位方法 Pending CN102565082A (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2010-250948		2010-11-09
JP2010250948A JP5653724B2 (ja)	2010-11-09	2010-11-09	位置合わせ装置、位置合わせ方法および位置合わせプログラム

Publications (1)

Publication Number	Publication Date
CN102565082A true CN102565082A (zh)	2012-07-11

Family

ID=46267519

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CN2011103530218A Pending CN102565082A (zh)	2010-11-09	2011-11-09	对位装置及对位方法

Country Status (4)

Country	Link
JP (1)	JP5653724B2 (ja)
KR (1)	KR20120049826A (ja)
CN (1)	CN102565082A (ja)
TW (1)	TW201229500A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN106353318A (zh) *	2015-07-15	2017-01-25	通用汽车环球科技运作有限责任公司	使用手持式检查设备的安装的部件的引导检查
CN110268266A (zh) *	2017-02-08	2019-09-20	富士胶片株式会社	免疫检查装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN113125434A (zh) *	2019-12-31	2021-07-16	深圳迈瑞生物医疗电子股份有限公司	图像分析***和控制拍摄样本图像的方法
JP2023032759A (ja) *	2021-08-27	2023-03-09	株式会社Ｓｃｒｅｅｎホールディングス	描画システム、描画方法およびプログラム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0634233B2 (ja) *	1987-05-26	1994-05-02	株式会社安川電機	階層化構造的テンプレ−ト・マッチング方法
JP3246616B2 (ja) *	1992-10-01	2002-01-15	株式会社ニコン	位置合わせ方法
JP2001201338A (ja) *	2000-01-20	2001-07-27	Jeol Ltd	座標リンク機構
JP3993817B2 (ja) *	2002-12-11	2007-10-17	株式会社日立製作所	欠陥組成分析方法及び装置
JP4847685B2 (ja) *	2004-04-16	2011-12-28	株式会社日立ハイテクノロジーズ	パターンサーチ方法
JP5059297B2 (ja) *	2005-05-09	2012-10-24	株式会社日立ハイテクノロジーズ	電子線式観察装置
JP2008152555A (ja) *	2006-12-18	2008-07-03	Olympus Corp	画像認識方法及び画像認識装置
JP2008311668A (ja) *	2008-07-07	2008-12-25	Hitachi High-Technologies Corp	基板又は半導体ウエーハに形成されたパターンの，重ね合わせ誤差検査装置及び重ね合わせ誤差検査方法
JP2010107412A (ja) *	2008-10-31	2010-05-13	Toshiba Corp	欠陥観察装置、欠陥観察方法
JP5315076B2 (ja) *	2009-02-06	2013-10-16	株式会社日立ハイテクノロジーズ	電子線の影響を考慮した半導体検査方法及び装置

2010
- 2010-11-09 JP JP2010250948A patent/JP5653724B2/ja not_active Expired - Fee Related
2011
- 2011-10-24 TW TW100138492A patent/TW201229500A/zh unknown
- 2011-11-08 KR KR1020110115802A patent/KR20120049826A/ko not_active Application Discontinuation
- 2011-11-09 CN CN2011103530218A patent/CN102565082A/zh active Pending

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN106353318A (zh) *	2015-07-15	2017-01-25	通用汽车环球科技运作有限责任公司	使用手持式检查设备的安装的部件的引导检查
CN106353318B (zh) *	2015-07-15	2019-11-15	通用汽车环球科技运作有限责任公司	使用手持式检查设备的安装的部件的引导检查
CN110268266A (zh) *	2017-02-08	2019-09-20	富士胶片株式会社	免疫检查装置

Also Published As

Publication number	Publication date
TW201229500A (en)	2012-07-16
JP5653724B2 (ja)	2015-01-14
KR20120049826A (ko)	2012-05-17
JP2012103072A (ja)	2012-05-31

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Legal Events

Date	Code	Title	Description
2012-07-11	C06	Publication
2012-07-11	PB01	Publication
2014-07-02	C02	Deemed withdrawal of patent application after publication (patent law 2001)
2014-07-02	WD01	Invention patent application deemed withdrawn after publication	Application publication date: 20120711