CN102528638A - 一种铜化学机械研磨方法及设备 - Google Patents
一种铜化学机械研磨方法及设备 Download PDFInfo
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- CN102528638A CN102528638A CN201010620262XA CN201010620262A CN102528638A CN 102528638 A CN102528638 A CN 102528638A CN 201010620262X A CN201010620262X A CN 201010620262XA CN 201010620262 A CN201010620262 A CN 201010620262A CN 102528638 A CN102528638 A CN 102528638A
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CN201010620262XA CN102528638A (zh) | 2010-12-29 | 2010-12-29 | 一种铜化学机械研磨方法及设备 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105097425A (zh) * | 2014-04-18 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨的方法 |
CN106384725A (zh) * | 2016-10-11 | 2017-02-08 | 天津华海清科机电科技有限公司 | 硅通孔晶圆平坦化方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6555477B1 (en) * | 2002-05-22 | 2003-04-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for preventing Cu CMP corrosion |
US6830504B1 (en) * | 2003-07-25 | 2004-12-14 | Taiwan Semiconductor Manufacturing Company | Barrier-slurry-free copper CMP process |
CN1618569A (zh) * | 2003-11-17 | 2005-05-25 | 台湾积体电路制造股份有限公司 | 化学机械研磨的流程与基底上铜层氧化物研磨制程 |
CN1682354A (zh) * | 2002-09-25 | 2005-10-12 | 清美化学股份有限公司 | 研磨剂组合物、其制备方法及研磨方法 |
CN101456152A (zh) * | 2007-12-13 | 2009-06-17 | 中芯国际集成电路制造(上海)有限公司 | 化学机械研磨的方法 |
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- 2010-12-29 CN CN201010620262XA patent/CN102528638A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6555477B1 (en) * | 2002-05-22 | 2003-04-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for preventing Cu CMP corrosion |
CN1682354A (zh) * | 2002-09-25 | 2005-10-12 | 清美化学股份有限公司 | 研磨剂组合物、其制备方法及研磨方法 |
US6830504B1 (en) * | 2003-07-25 | 2004-12-14 | Taiwan Semiconductor Manufacturing Company | Barrier-slurry-free copper CMP process |
CN1618569A (zh) * | 2003-11-17 | 2005-05-25 | 台湾积体电路制造股份有限公司 | 化学机械研磨的流程与基底上铜层氧化物研磨制程 |
CN101456152A (zh) * | 2007-12-13 | 2009-06-17 | 中芯国际集成电路制造(上海)有限公司 | 化学机械研磨的方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105097425A (zh) * | 2014-04-18 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨的方法 |
CN106384725A (zh) * | 2016-10-11 | 2017-02-08 | 天津华海清科机电科技有限公司 | 硅通孔晶圆平坦化方法 |
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