CN102513687A - Welding wire machine and anti-oxidation structure thereof - Google Patents
Welding wire machine and anti-oxidation structure thereof Download PDFInfo
- Publication number
- CN102513687A CN102513687A CN2011104229779A CN201110422977A CN102513687A CN 102513687 A CN102513687 A CN 102513687A CN 2011104229779 A CN2011104229779 A CN 2011104229779A CN 201110422977 A CN201110422977 A CN 201110422977A CN 102513687 A CN102513687 A CN 102513687A
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- gas
- hole
- communication pipeline
- oxidation structure
- ball
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Pipeline Systems (AREA)
Abstract
The invention discloses a welding wire machine and an anti-oxidation structure thereof, the anti-oxidation structure comprises a gas flow pipeline, a fire rod independently situated at the outside of the gas flow pipeline, and a fire rod fixing seat used for fixing the fire rod; the gas flow pipeline is provided with a gas inlet and a gas outlet, a ball burning area is arranged at a position close to the gas outlet in the gas flow pipeline, a first through hole for enabling the welding wire of a ball to be burnt to enter the ball burning area and a second through hole for stretching the end part of the fire rod into the ball burning area are respectively arranged on the pipe wall of the gas flow pipeline corresponding to the ball burning area. When in use, a shielding gas flows toward the ball burning area from the gas inlet to protect the ball burning environment, and the shielding gas can flow toward the welding wire position via the gas outlet to simultaneously protect the welding wire environment. According to the invention, one gas pipeline can be used for protecting the ball burning and the welding wire environment to reduce the dosage of the shielding gas; furthermore, the fire rod is separate from the pipeline, so that the fire rod is more convenient for change and maintenance.
Description
Technical field
The present invention relates to bonding wire equipment, relate in particular to a kind of bonding equipment and anti-oxidation structure thereof.
Background technology
Ultrasonic wave bonding wire machine is a kind of inner leading bonding device of semiconductor device.Metal wire is understood elder generation through the burning ball, and then is welded in metal wire on the lead frame with ultrasonic wave and heat energy.Bonding equipment on the market generally all comes bonding wire with gold thread.In order to reduce cost, gold thread begins to be replaced by copper cash.Because copper cash can oxidation cause weldering not reached the standard grade when burning ball and bonding wire, therefore need protect the environment that burns ball and bonding wire with inert gases such as nitrogen.
For the environment of effectively protection burning ball and bonding wire, bit copper line nitrogen blowing structure is very important.Bit copper line nitrogen blowing structure on the market generally needs to protect respectively burning ball and bonding wire environment with two nitrogen tube, and for example the disclosed bonding equipment of disclosed Chinese invention patent CN200710101222.2 on October 31st, 2007 has promptly adopted two independent gas supply pipes respectively soldered ball (burning ball) and bonding wire to be carried out anti-oxidation processing.Under this technical scheme, need to consume more nitrogen.
Then only protect burning ball border with a nitrogen tube in some bit copper line nitrogen blowing structure, ignored the bonding wire environment, oxidation-protective effect is undesirable.
In addition, the sparking bar in the bit copper line nitrogen blowing structure on the market generally all wraps in nitrogen blowing structure the inside, changes or must pull down whole nitrogen blowing structure when safeguarding, and is very consuming time.
Summary of the invention
The present invention mainly provides a kind of bonding equipment and anti-oxidation structure thereof, solves at present and need protect ball and the big problem of bonding wire environment nitrogen use amount of burning respectively with two separate duct, and solving at present simultaneously, the sparking bar is difficult for changing the problem of safeguarding.
For solving the problems of the technologies described above; The technical scheme that the present invention adopts is: a kind of anti-oxidation structure that is used for bonding equipment is provided, comprises the gas communication pipeline, be independent of the outer sparking bar of said gas communication pipeline and be used for fixing the sparking bar holder of the bar of striking sparks; Said gas communication pipeline has air inlet and gas outlet; In said gas communication pipeline, be provided with burning ball district, be respectively arranged with on the gas communication pipe wall corresponding to said burning ball district and supply to wait that the bonding wire that burns ball stretches into second through hole that burning ball district is stretched in first through hole that burns the ball district and the end that supplies said sparking bar near the position, gas outlet.
Wherein, said first through hole and the radian of second through hole on circumference differ 90 °.
Wherein, said gas communication pipeline has corner near the position, gas outlet, and said burning ball district is positioned at said corner.
Wherein, said first through hole and the coaxial setting in said gas outlet, the axial line of said second through hole is vertical with the axial line of said first through hole.
Wherein, said corner inwall is provided with the straight line chamfering.
Wherein, said gas communication pipeline is being provided with the magnetic valve that is used for conducting or ends gas channel near the air inlet position.
Wherein, the material of said gas communication pipeline is the refractory glass fibre epoxy glue.
Wherein, said sparking bar holder is provided with the breach that is used for ccontaining said sparking bar, and said sparking bar is fixed on the said sparking bar holder through jackscrew
For solving the problems of the technologies described above, another technical scheme that the present invention adopts is: a kind of bonding equipment is provided, comprises above-mentioned anti-oxidation structure.
The invention has the beneficial effects as follows: be different from that prior art need be used two independent gas pipelines to protect respectively to burn ball and the bonding wire environment is big to the consumption of protective gas; Anti-oxidation structure of the present invention will be burnt the ball district and placed the gas communication pipeline; Protective gas is protected burning the ball border in the flow process in the gas communication pipeline; In addition, gas also can be used for protecting the bonding wire environment after from the gas communication pipeline, deriving, and reaches to adopt a gas communication pipeline to protect burning ball and bonding wire environment simultaneously; Reduce the use amount of protective gas, and improve bonding wire efficient.Compare existing sparking bar and the gas pipeline inconvenient disassembling, assembling and replacing that is integrated in addition; In the anti-oxidation structure of the present invention; The sparking bar is independent of outside the gas communication pipeline; Only the needs boom end of will striking sparks is taken out the bar integral body of will striking sparks again from second through hole of gas communication pipeline and from holder, is taken out and get final product when needing dismounting, maintains easily.
Description of drawings
Fig. 1 is the three-dimensional structure diagram of the anti-oxidation structure of one embodiment of the invention bonding equipment;
Fig. 2 is the front view of the anti-oxidation structure of one embodiment of the invention bonding equipment;
Fig. 3 is the local cutaway view that amplifies in A place among Fig. 2.
Among the figure:
1, gas communication pipeline; 11, air inlet; 12, gas outlet; 13, first through hole; 14, second through hole; 15, burn the ball district; 2, sparking bar; 3, sparking bar holder; 31, breach; 32, jackscrew; 5, porcelain mouth
The specific embodiment
By specifying technology contents of the present invention, structural feature, realized purpose and effect, give explanation below in conjunction with embodiment and conjunction with figs. are detailed.
See also Fig. 1 to Fig. 3, the present invention provides a kind of anti-oxidation structure that is used for bonding equipment, comprises gas communication pipeline 1, is independent of the outer sparking bar 2 of said gas communication pipeline 1 and is used for fixing the sparking bar holder 3 of the bar 2 of striking sparks.Said gas communication pipeline 1 has air inlet 11 and gas outlet 12; In said gas communication pipeline 1, be provided with burning ball district 15, be respectively arranged with on gas communication pipeline 1 tube wall corresponding to said burning ball district 15 and supply to wait that the bonding wire that burns ball stretches into second through hole 14 that burning ball district 15 is stretched in first through hole 13 that burns ball district 15 and the end that supplies said sparking bar 2 near 12 positions, gas outlet.
In use; Be fixed in the sparking bar holder 3 sparking bar 2 and the end that makes sparking bar 2 is stretched into through second through hole 14 of gas communication pipeline 1 and burnt ball district 15; In order to make sparking bar 2 and gas communication pipeline 1 position relative fixed, preferably, can also gas communication pipeline 1 is also fixing with sparking bar holder 3; The bonding wire (copper cash) that 5 clampings of porcelain mouth wait to burn ball makes bonding wire stretch into burning ball district 15 from first through hole 13 of gas communication pipeline 1, and 2 pairs of bonding wires of sparking bar burn ball; Protective gas such as nitrogen, argon gas is from air inlet 11 entering gas communication pipelines 1 and along pipeline flow-direction gas outlet 12; Carry out protection against oxidation by way of burning ball district 15 to burning the ball border; And protective gas also can be through the gas outlet 12 flows to position of bonding wire, can protect simultaneously and burns ball and bonding wire environment thereby reach the pure gas pipeline.Need to prove that burning ball regional boundary limit in the accompanying drawing only is in order to explain, is not that its scope is done qualification, in theory, the position (needing corresponding with first through hole 13 and second through hole 14) that can burn ball in the gas communication pipeline 1 all is considered to burn the ball district.
Be different from that prior art need be used two independent gas pipelines to protect respectively to burn ball and the bonding wire environment is big to the consumption of protective gas; Anti-oxidation structure of the present invention will be burnt the ball district and placed the gas communication pipeline; Protective gas is protected burning the ball border in the flow process in the gas communication pipeline; In addition, gas also can be used for protecting the bonding wire environment after from the gas communication pipeline, deriving, and reaches to adopt a gas communication pipeline to protect burning ball and bonding wire environment simultaneously; Reduce the use amount of protective gas, and improve bonding wire efficient.Compare existing sparking bar and the gas pipeline inconvenient disassembling, assembling and replacing that is integrated in addition; In the anti-oxidation structure of the present invention; The sparking bar is independent of outside the gas communication pipeline; Only the needs boom end of will striking sparks is taken out the bar integral body of will striking sparks again from second through hole of gas communication pipeline and from holder, is taken out and get final product when needing dismounting, maintains easily.
Shown in the view of Fig. 1, first through hole 13 is positioned at the top of gas communication pipeline 1, and second through hole 14 is positioned at the side of gas communication pipeline 1, and first through hole 13 and the radian of second through hole 14 on circumference differ 90 °, convenient operation of burning ball.
Consult Fig. 3, gas communication pipeline 1 has corner near 12 positions, gas outlet, and said burning ball district 15 is positioned at said corner, has bigger burning spherical space than rectilinear duct; First through hole 13 is coaxial setting with gas outlet 12 basically, and the axial line approximate vertical of the axial line of second through hole and first through hole, that is the described two through hole of the preceding paragraph radian on circumference differs 90 °.
In structure shown in Figure 3, the corner inwall of gas communication pipeline 1 is provided with straight line chamfering 16, when protective gas flows to the corner, makes its nature flow to gas outlet 12 downwards along corner through the reflection drainage of this straight line chamfering 16, reduces the gas flow loss.
For practicing thrift gas, this anti-oxidation structure is closed magnetic valve by the solenoid control switch when machine pauses, and nitrogen avoids waste.Particularly; On gas communication pipeline 1, be provided with and be used for conducting or by the magnetic valve of gas channel near air inlet 11 positions, in use, the normal air inlet of solenoid control gas and along pipeline flow-direction gas outlet 12; When not in use; Magnetic valve is by gas channel, and the gas that gets into from air inlet 11 is stopped by magnetic valve can not flow to 12 positions, gas outlet, avoids waste.Magnetic valve is arranged at then can be so that the gas flow that when not using, flows in the gas communication pipeline 1 reduces to minimum degree near air inlet 11 positions.
Preferably, gas communication pipeline 1 material adopts the refractory glass fibre epoxy glue, and therefore portion is provided with burning ball district within it, adopts this material to make this structural design light small and exquisite, thereby reduces vibrations, improves bonding wire efficient.
Consult Fig. 1, sparking bar holder 3 is provided with the breach 31 that is used for ccontaining said sparking bar, and sparking bar 2 is fixed on the sparking bar holder 3 through jackscrew 32, only need unclamp the jackscrew 32 of sparking bar holder 3 when safeguarding, takes out from breach 31 again, simply saves time.
Except above-mentioned anti-oxidation structure; The present invention also provides a kind of bonding equipment that adopts this anti-oxidation structure, when concrete the use, the corresponding position of bonding wire in gas outlet of gas communication pipeline in this anti-oxidation structure is got final product; Make protective gas except that the burning ball border in the gas communication pipeline is protected; Can also protect in butt welding wire loop border, concrete structure those skilled in the art can be provided with according to the description of drawings of this paper introduction and anti-oxidation structure, and this specification omits sketch map.
The above is merely embodiments of the invention; Be not so limit claim of the present invention; Every equivalent structure or equivalent flow process conversion that utilizes specification of the present invention and accompanying drawing content to be done; Or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present invention.
Claims (9)
1. an anti-oxidation structure that is used for bonding equipment is characterized in that, comprises the gas communication pipeline, is independent of the outer sparking bar of said gas communication pipeline and is used for fixing the sparking bar holder of the bar of striking sparks;
Said gas communication pipeline has air inlet and gas outlet; In said gas communication pipeline, be provided with burning ball district, be respectively arranged with on the gas communication pipe wall corresponding to said burning ball district and supply to wait that the bonding wire that burns ball stretches into second through hole that burning ball district is stretched in first through hole that burns the ball district and the end that supplies said sparking bar near the position, gas outlet.
2. the anti-oxidation structure that is used for bonding equipment according to claim 1 is characterized in that: said first through hole and the radian of second through hole on circumference differ 90 °.
3. the anti-oxidation structure that is used for bonding equipment according to claim 1 is characterized in that: said gas communication pipeline has corner near the position, gas outlet, and said burning ball district is positioned at said corner.
4. the anti-oxidation structure that is used for bonding equipment according to claim 3 is characterized in that: said first through hole and the coaxial setting in said gas outlet, the axial line of said second through hole is vertical with the axial line of said first through hole.
5. the anti-oxidation structure that is used for bonding equipment according to claim 3 is characterized in that: said corner inwall is provided with the straight line chamfering.
6. according to each described anti-oxidation structure that is used for bonding equipment of claim 1-5, it is characterized in that: said gas communication pipeline is being provided with the magnetic valve that is used for conducting or ends gas channel near the air inlet position.
7. according to each described anti-oxidation structure that is used for bonding equipment of claim 1-5, it is characterized in that: the material of said gas communication pipeline is the refractory glass fibre epoxy glue.
8. according to each described anti-oxidation structure that is used for bonding equipment of claim 1-5, it is characterized in that: said sparking bar holder is provided with the breach that is used for ccontaining said sparking bar, and said sparking bar is fixed on the said sparking bar holder through jackscrew.
9. a bonding equipment is characterized in that, comprises each described anti-oxidation structure like claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110422977.9A CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110422977.9A CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN102513687A true CN102513687A (en) | 2012-06-27 |
| CN102513687B CN102513687B (en) | 2014-03-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110422977.9A Active CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104511703A (en) * | 2013-09-30 | 2015-04-15 | 北京中电科电子装备有限公司 | Ceramic head and lead wire bonder |
| CN104538512A (en) * | 2015-01-09 | 2015-04-22 | 木林森股份有限公司 | Wire welding technology for horizontal LED chip with small electrodes |
| CN112756827A (en) * | 2020-12-26 | 2021-05-07 | 上海仪电智能电子有限公司 | Discharge gas protection device for wire bonding lead welding and welding method |
| CN116160105A (en) * | 2023-04-18 | 2023-05-26 | 宁波尚进自动化科技有限公司 | Bonding welding device and pressure welding equipment comprising same |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104511703A (en) * | 2013-09-30 | 2015-04-15 | 北京中电科电子装备有限公司 | Ceramic head and lead wire bonder |
| CN104511703B (en) * | 2013-09-30 | 2017-02-15 | 北京中电科电子装备有限公司 | Ceramic head and lead wire bonder |
| CN104538512A (en) * | 2015-01-09 | 2015-04-22 | 木林森股份有限公司 | Wire welding technology for horizontal LED chip with small electrodes |
| CN112756827A (en) * | 2020-12-26 | 2021-05-07 | 上海仪电智能电子有限公司 | Discharge gas protection device for wire bonding lead welding and welding method |
| CN116160105A (en) * | 2023-04-18 | 2023-05-26 | 宁波尚进自动化科技有限公司 | Bonding welding device and pressure welding equipment comprising same |
| CN116160105B (en) * | 2023-04-18 | 2023-07-25 | 宁波尚进自动化科技有限公司 | Bonding welding device and pressure welding equipment comprising same |
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| Publication number | Publication date |
|---|---|
| CN102513687B (en) | 2014-03-05 |
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