CN102513687B - Welding wire machine and anti-oxidation structure thereof - Google Patents
Welding wire machine and anti-oxidation structure thereof Download PDFInfo
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- CN102513687B CN102513687B CN201110422977.9A CN201110422977A CN102513687B CN 102513687 B CN102513687 B CN 102513687B CN 201110422977 A CN201110422977 A CN 201110422977A CN 102513687 B CN102513687 B CN 102513687B
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- oxidation structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Pipeline Systems (AREA)
Abstract
The invention discloses a welding wire machine and an anti-oxidation structure thereof, the anti-oxidation structure comprises a gas flow pipeline, a fire rod independently situated at the outside of the gas flow pipeline, and a fire rod fixing seat used for fixing the fire rod; the gas flow pipeline is provided with a gas inlet and a gas outlet, a ball burning area is arranged at a position close to the gas outlet in the gas flow pipeline, a first through hole for enabling the welding wire of a ball to be burnt to enter the ball burning area and a second through hole for stretching the end part of the fire rod into the ball burning area are respectively arranged on the pipe wall of the gas flow pipeline corresponding to the ball burning area. When in use, a shielding gas flows toward the ball burning area from the gas inlet to protect the ball burning environment, and the shielding gas can flow toward the welding wire position via the gas outlet to simultaneously protect the welding wire environment. According to the invention, one gas pipeline can be used for protecting the ball burning and the welding wire environment to reduce the dosage of the shielding gas; furthermore, the fire rod is separate from the pipeline, so that the fire rod is more convenient for change and maintenance.
Description
Technical field
The present invention relates to bonding equipment, relate in particular to a kind of bonding equipment and Anti-oxidation structure thereof.
Background technology
Ultrasonic wire welding machine is a kind of inner leading bonding device of semiconductor device.Metal wire can be first through burning ball, and then with ultrasonic wave and heat energy, metal wire is welded on lead frame.Bonding equipment on market generally all carrys out bonding wire with gold thread.In order to reduce costs, gold thread starts to be replaced by copper cash.Because copper cash can be oxidized when burning ball and bonding wire, cause weldering not reached the standard grade, therefore need to protect the environment that burns ball and bonding wire with inert gases such as nitrogen.
For the environment of effectively protection burning ball and bonding wire, bit copper line nitrogen blowing structure is very important.Bit copper line nitrogen blowing structure on market generally need be protected respectively and burn ball and bonding wire environment by two nitrogen tube, and for example the disclosed bonding equipment of disclosed Chinese invention patent CN200710101222.2 on October 31st, 2007 has adopted two independent gas supply pipes respectively soldered ball (burning ball) and bonding wire to be carried out to anti-oxidation processing.Under this technical scheme, need to consume more nitrogen.
In some bit copper line nitrogen blowing structure, only by a nitrogen tube, protect and burn ball border, ignored bonding wire environment, oxidation-protective effect is undesirable.
In addition, the sparking bar in the bit copper line nitrogen blowing structure on market generally all wraps in nitrogen blowing structure the inside, when changing or safeguarding, whole nitrogen blowing structure must be pulled down, very consuming time.
Summary of the invention
The present invention mainly provides a kind of bonding equipment and Anti-oxidation structure thereof, solves at present and need to protect respectively ball and the large problem of bonding wire environment nitrogen use amount of burning with two independent pipelines, solves sparking bar at present simultaneously and is difficult for changing the problem of safeguarding.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: a kind of Anti-oxidation structure for bonding equipment is provided, comprises gas communication pipeline, be independent of sparking bar outside described gas communication pipeline and for the sparking bar holder of fixing sparking bar; Described gas communication pipeline has air inlet and gas outlet, in described gas communication pipeline, near gas outlet position, be provided with Shao Qiu district, on the gas communication pipe wall corresponding to described Shao Qiu district, be respectively arranged with the second through hole that bonding wire for ball to be burnt stretches into first through hole in Shao Qiu district and stretches into Shao Qiu district for the end of described sparking bar.
Wherein, described the first through hole and the radian of the second through hole on circumference differ 90 °.
Wherein, described gas communication pipeline has corner near position, gas outlet, and described Shao Qiu district is positioned at described corner.
Wherein, described the first through hole and described gas outlet coaxially arrange, and the axial line of described the second through hole is vertical with the axial line of described the first through hole.
Wherein, described corner inwall is provided with straight line chamfering.
Wherein, described gas communication pipeline is at the magnetic valve being provided with near air inlet position for conducting or cut-off gas channel.
Wherein, the material of described gas communication pipeline is refractory glass fibre epoxy glue.
Wherein, on described sparking bar holder, be provided with the breach for accommodating described sparking bar, described sparking bar is fixed on described sparking bar holder by jackscrew
For solving the problems of the technologies described above, another technical solution used in the present invention is: a kind of bonding equipment is provided, comprises above-mentioned Anti-oxidation structure.
The invention has the beneficial effects as follows: be different from prior art need to two independent gas pipelines protect respectively burn ball and bonding wire environment large to the amount of expending of protective gas; Anti-oxidation structure Jiang Shaoqiu of the present invention district is placed in gas communication pipeline; protective gas is protected burning ball border in flow process in gas communication pipeline; in addition; gas also can be used for protecting bonding wire environment after deriving from gas communication pipeline; reach and adopt a gas communication pipeline to burning ball and bonding wire environment, to protect simultaneously; reduce the use amount of protective gas, and improve bonding wire efficiency.Compare in addition existing sparking bar and the gas pipeline inconvenient disassembling, assembling and replacing that is integrated, in Anti-oxidation structure of the present invention, sparking bar is independent of outside gas communication pipeline, when needing dismounting, only sparking boom end need to be taken out to the bar integral body of striking sparks again from the second through hole of gas communication pipeline and take out from holder, maintain easily.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure diagram of one embodiment of the invention bonding equipment Anti-oxidation structure;
Fig. 2 is the front view of one embodiment of the invention bonding equipment Anti-oxidation structure;
Fig. 3 is the local cutaway view amplifying in A place in Fig. 2.
In figure:
1, gas communication pipeline; 11, air inlet; 12, gas outlet; 13, the first through hole; 14, the second through hole; 15,Shao Qiu district; 2, sparking bar; 3, sparking bar holder; 31, breach; 32, jackscrew; 5, porcelain mouth
The specific embodiment
By describing technology contents of the present invention, structural feature in detail, being realized object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be explained in detail.
Refer to Fig. 1 to Fig. 3, the invention provides a kind of Anti-oxidation structure for bonding equipment, comprise gas communication pipeline 1, be independent of sparking bar 2 outside described gas communication pipeline 1 and for the sparking bar holder 3 of fixing sparking bar 2.Described gas communication pipeline 1 has air inlet 11 and gas outlet 12, near gas outlet 12 positions, be provided with Shao Qiu district 15 described gas communication pipeline 1 is interior, on gas communication pipeline 1 tube wall corresponding to described Shao Qiu district 15, be respectively arranged with the second through hole 14 that bonding wire for ball to be burnt stretches into first through hole 13 in Shao Qiu district 15 and stretches into Shao Qiu district 15 for the end of described sparking bar 2.
In use, sparking bar 2 is fixed in sparking bar holder 3 and Shao Qiu district 15 is stretched into through the second through hole 14 of gas communication pipeline 1 in the end of the bar 2 that makes to strike sparks, for the bar 2 that makes to strike sparks relative fixing with gas communication pipeline 1 position, preferably, can also gas communication pipeline 1 is also fixing with sparking bar holder 3, the bonding wire (copper cash) that porcelain mouth 5 clamps ball to be burnt makes bonding wire stretch into Shao Qiu district 15 from the first through hole 13 of gas communication pipeline 1, and 2 pairs of bonding wires of sparking bar burn ball; The protective gas such as nitrogen, argon gas enters gas communication pipeline 1 and along pipeline flow-direction gas outlet 12 from air inlet 11; by way of Shao Qiu district 15, to burning ball border, carry out protection against oxidation; and protective gas also can be through gas outlet 12 flows to position of bonding wire, thereby reach pure gas pipeline, can protect simultaneously and burn ball and bonding wire environment.It should be noted that, in accompanying drawing, burning ball regional boundary limit is only in order to explain, and not its scope is limited, and in theory, the interior position (need be corresponding with the first through hole 13 and the second through hole 14) that can burn ball of gas communication pipeline 1 is all considered to Shao Qiu district.
Be different from prior art need to two independent gas pipelines protect respectively burn ball and bonding wire environment large to the amount of expending of protective gas; Anti-oxidation structure Jiang Shaoqiu of the present invention district is placed in gas communication pipeline; protective gas is protected burning ball border in flow process in gas communication pipeline; in addition; gas also can be used for protecting bonding wire environment after deriving from gas communication pipeline; reach and adopt a gas communication pipeline to burning ball and bonding wire environment, to protect simultaneously; reduce the use amount of protective gas, and improve bonding wire efficiency.Compare in addition existing sparking bar and the gas pipeline inconvenient disassembling, assembling and replacing that is integrated, in Anti-oxidation structure of the present invention, sparking bar is independent of outside gas communication pipeline, when needing dismounting, only sparking boom end need to be taken out to the bar integral body of striking sparks again from the second through hole of gas communication pipeline and take out from holder, maintain easily.
As shown in the view of Fig. 1, the first through hole 13 is positioned at the top of gas communication pipeline 1, and the second through hole 14 is positioned at the side of gas communication pipeline 1, and the first through hole 13 and the radian of the second through hole 14 on circumference differ 90 °, convenient operation of burning ball.
Consult Fig. 3, gas communication pipeline 1 has corner near 12 positions, gas outlet, and described Shao Qiu district 15 is positioned at described corner, than rectilinear duct, has larger burning spherical space; The first through hole 13 is coaxial setting with gas outlet 12 substantially, and the axial line of the second through hole is substantially vertical with the axial line of the first through hole, that is the radian on circumference of the two through hole described in the preceding paragraph differs 90 °.
In the structure shown in Fig. 3, the corner inwall of gas communication pipeline 1 is provided with straight line chamfering 16, when protective gas flows to corner, through the reflection drainage of this straight line chamfering 16, makes its nature flow to gas outlet 12 downwards along corner, reduces gas flow loss.
For saving gas, this Anti-oxidation structure is by solenoid control switch, shut electromagnetic valve when machine pauses, and nitrogen avoids waste.Particularly, on gas communication pipeline 1, near air inlet 11 positions, be provided with the magnetic valve for conducting or cut-off gas channel, in use, the normal air inlet of solenoid control gas along pipeline flow-direction gas outlet 12, when not in use, magnetic valve cut-off gas channel, the gas entering from air inlet 11 is stopped and can not flow to 12 positions, gas outlet by magnetic valve, avoids waste.Magnetic valve is arranged at can be so that the gas flow flowing in gas communication pipeline 1 when not using reduces to minimum degree near air inlet 11 positions.
Preferably, gas communication pipeline 1 material adopts refractory glass fibre epoxy glue, and therefore portion arranges Shao Qiu district within it, adopts this material to make this structural design light small and exquisite, thereby reduces vibrations, improves bonding wire efficiency.
Consult Fig. 1, on sparking bar holder 3, be provided with the breach 31 for accommodating described sparking bar, sparking bar 2 is fixed on sparking bar holder 3 by jackscrew 32, only need unclamp the jackscrew 32 of sparking bar holder 3, then take out from breach 31 while safeguarding, simply saves time.
Except above-mentioned Anti-oxidation structure; the present invention also provides a kind of bonding equipment that adopts this Anti-oxidation structure; when concrete use; make the corresponding position of bonding wire in gas outlet of gas communication pipeline in this Anti-oxidation structure; make protective gas except the burning ball border in gas communication pipeline is protected; can also protect by butt welding thread environment, concrete structure those skilled in the art can be according to introducing and the accompanying drawing explanation of Anti-oxidation structure arranges herein, and this description omits schematic diagram.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes description of the present invention and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (6)
1. for an Anti-oxidation structure for bonding equipment, it is characterized in that, comprise gas communication pipeline, be independent of sparking bar outside described gas communication pipeline and for the sparking bar holder of fixing sparking bar;
Described gas communication pipeline has air inlet and gas outlet, in described gas communication pipeline, near gas outlet position, be provided with Shao Qiu district, on the gas communication pipe wall corresponding to described Shao Qiu district, be respectively arranged with the second through hole that bonding wire for ball to be burnt stretches into first through hole in Shao Qiu district and stretches into Shao Qiu district for the end of described sparking bar;
Described gas communication pipeline has corner near position, gas outlet, and described Shao Qiu district is positioned at described corner;
Described the first through hole and described gas outlet coaxially arrange, and the axial line of described the second through hole is vertical with the axial line of described the first through hole;
Described corner inwall is provided with straight line chamfering.
2. the Anti-oxidation structure for bonding equipment according to claim 1, is characterized in that: described the first through hole and the radian of the second through hole on circumference differ 90 °.
3. according to the Anti-oxidation structure for bonding equipment described in claim 1-2 any one, it is characterized in that: described gas communication pipeline is at the magnetic valve being provided with near air inlet position for conducting or cut-off gas channel.
4. according to the Anti-oxidation structure for bonding equipment described in claim 1-2 any one, it is characterized in that: the material of described gas communication pipeline is refractory glass fibre epoxy glue.
5. according to the Anti-oxidation structure for bonding equipment described in claim 1-2 any one, it is characterized in that: on described sparking bar holder, be provided with the breach for accommodating described sparking bar, described sparking bar is fixed on described sparking bar holder by jackscrew.
6. a bonding equipment, is characterized in that, comprises the Anti-oxidation structure as described in claim 1-5 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110422977.9A CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110422977.9A CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102513687A CN102513687A (en) | 2012-06-27 |
| CN102513687B true CN102513687B (en) | 2014-03-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110422977.9A Active CN102513687B (en) | 2011-12-16 | 2011-12-16 | Welding wire machine and anti-oxidation structure thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104511703B (en) * | 2013-09-30 | 2017-02-15 | 北京中电科电子装备有限公司 | Ceramic head and lead wire bonder |
| CN104538512A (en) * | 2015-01-09 | 2015-04-22 | 木林森股份有限公司 | Wire welding technology for horizontal LED chip with small electrodes |
| CN112756827A (en) * | 2020-12-26 | 2021-05-07 | 上海仪电智能电子有限公司 | Discharge gas protection device for wire bonding lead welding and welding method |
| CN116160105B (en) * | 2023-04-18 | 2023-07-25 | 宁波尚进自动化科技有限公司 | Bonding welding device and pressure welding equipment comprising same |
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| CN102513687A (en) | 2012-06-27 |
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