CN102507020B - Microlens array-based synchronized phase-shifting interference test method and test device - Google Patents
Microlens array-based synchronized phase-shifting interference test method and test device Download PDFInfo
- Publication number
- CN102507020B CN102507020B CN 201110338856 CN201110338856A CN102507020B CN 102507020 B CN102507020 B CN 102507020B CN 201110338856 CN201110338856 CN 201110338856 CN 201110338856 A CN201110338856 A CN 201110338856A CN 102507020 B CN102507020 B CN 102507020B
- Authority
- CN
- China
- Prior art keywords
- light
- phase
- wave plate
- interference
- microlens array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention provides a microlens array-based synchronized phase-shifting interference test method and test device, relating to the field of optical interferometry test. The method comprises the following steps of: firstly, obtaining a pair of reference light and test light from a Twyman type interference testing light path, wherein the polarization directions of the reference light and the test light are orthogonal; secondly, using a microlens array for carrying out phase shift by using a wavefront splitting method, wherein optical interference signals are received by a detector; and finally, rearranging data obtained by the detector so obtain four phase-shifted interferograms, wherein the tested phases can be recovered by using a universal four-step phase-shifting algorithm. The relative spatial position relationship of the four phase-shifted interferograms obtained by the method provided by the invention is known and unique, position matching errors cannot be generated, and the cost is lower.
Description
Technical field
The present invention relates to interference of light metrology and measurement field, particularly a kind of simultaneous phase-shifting interference testing method and device that uses microlens array.
Background technology
The movable phase interfere art is widely used optical surface shape measuring technology now, and this utilization interferometer gathers one group of phase-shift interference, has specific phase differential between every width figure, can recover tested phase place according to interferogram.Tradition movable phase interfere art gathers phase-shift interference in turn within a period of time, so the impact of its measuring accuracy changing environment factor when being subject to vibrating etc.In order to overcome this problem, invented and to have obtained the simultaneous phase-shifting interference testing system of one group of phase-shift interference in synchronization, different spatial.
Existing simultaneous phase-shifting interference testing system is divided into two classes, and a class uses grating or spectroscope to tell several Zhi Guanglu, uses polarizer to introduce different amount of phase shift in every light path, realizes phase shift, obtains one group of phase-shift interference in different spatial at last.In this class scheme, the relative tertiary location relation between each phase-shift interference is unknown, and its relative position lacks the calibration technique of mature and reliable, easily causes the location matches error, affects measuring accuracy.The not light splitting of another kind of scheme, but some pixels adjacent on detector are formed a unit, make corresponding polarizer on the different pixels in each unit, by being recombinated, the data on detector just can obtain one group of phase-shift interference at last.The spatial relation of the phase-shift interference that this scheme obtains is known and unique, but the pixel mask device needs the high photoetching process of service precision requirement to make, and its difficulty and cost are all very high.
Summary of the invention
The object of the present invention is to provide a kind of solution interferogram location matches error, measuring accuracy is high, the simultaneous phase-shifting interference testing method of lower-cost use microlens array.
The technical solution that realizes the object of the invention is: a kind of simultaneous phase-shifting interference testing method of using microlens array comprises the following steps:
Step 1: the reference light and the test light that obtain a pair of polarization direction quadrature in Tai Manshi interference testing light path;
Step 2: utilize the method for wavefront division to carry out phase shift, that is, make the reference light of a pair of polarization direction quadrature that obtains in step 1 and test light become the circularly polarized light of pair of orthogonal by a quarter wave plate; Corrugated to the circularly polarized light of this pair of orthogonal is cut apart, and introduces different amount of phase shift in the light path of dispersing that each wavelet face forms by a four-quadrant polarizer group, is then assembled dispersing light path by a main lens, is detected at last device and receives; Wherein, the element of wavefront division phase shifting part is followed successively by along the light path trend: the 3rd quarter wave plate, microlens array, polarizer group, main lens and detector; After the reference light that the Tai Manshi optical interference circuit partly obtains and test light enter the wavefront division phase shifting part jointly, at first through the 3rd quarter wave plate, both become the circularly polarized light of quadrature; Again by microlens array, before wavefront both is split into many wavelets; At the microlens array rear, all produce one the road before each wavelet and converge light, this converges illumination and is mapped on a polarizer group, and four quadrants of this polarizer group differ successively 45 polaroids of spending by the printing opacity direction respectively and consist of; , by a main lens to disperse light path assembled, finally be detected device and receive thereafter;
Step 3: the data that detector is obtained rearrange and obtain four amplitude shift interference figure, and recycling four step phase shift algorithms recover tested phase places; Wherein, the image that detector receives is the unit that forms before each wavelet, each inside, unit is divided into again four subelements, the subelement that is in first quartile in each unit need to be formed the second amplitude shift interference figure with the subelement that original relative position relation forms the first amplitude shift interference figure, the second quadrant, by that analogy, be the tested phase place of restructural with four amplitude shift interference figure according to four step phase-shifting method computing formula at last.
A kind of simultaneous phase-shifting interference testing device that uses microlens array be comprised of Tai Manshi optical interference circuit part and wavefront division phase shifting part two large divisions, and the Tai Manshi optical interference circuit partly is positioned at the front end of wavefront division phase shifting part; In Tai Manshi optical interference circuit part, each device is followed successively by laser instrument, beam expanding lens, polaroid, 1/2 wave plate, polarization splitting prism along light path trend, transmitted light one side of polarization splitting prism place successively the first quarter wave plate, standard lens and measured piece, reflected light one side place successively the second quarter wave plate after and reference mirror; In the wavefront division phase shifting part, each device time is the 3rd quarter wave plate, microlens array, polarizer group, main lens and detector along light path trend, and wherein four of polarizer group quadrants are made of the polaroids that the printing opacity direction differs 45 degree successively respectively; All devices are coaxial contour with respect to substrate, and are namely coaxial contour with respect to optical table or instrument base.
The present invention compared with prior art, its remarkable advantage:
(1) than the simultaneous phase-shifting interference testing system of beam-splitting structure, the four amplitude shift interference figure relative tertiary location relations that the present invention obtains are known and unique, therefore do not have advantages of to produce the location matches error.
(2) than the simultaneous phase-shifting interference testing system of the pixel mask structure that can not produce equally the location matches error, this invention has huge advantage on cost.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Description of drawings
Fig. 1 is the simultaneous phase-shifting interference testing light channel structure schematic diagram that uses microlens array.
Fig. 2 is the schematic diagram that the subelement data rearrange mode.
Embodiment
Step of the present invention is as follows:
Step 1: the reference light and the test light that obtain a pair of polarization direction quadrature in Tai Manshi interference testing light path;
Step 2: utilize the method for wavefront division to carry out phase shift, that is, make the reference light of a pair of polarization direction quadrature that obtains in step 1 and test light become the circularly polarized light of pair of orthogonal by a quarter wave plate; Corrugated to the circularly polarized light of this pair of orthogonal is cut apart, and introduces different amount of phase shift in the light path of dispersing that each wavelet face forms by a four-quadrant polarizer group, is then assembled dispersing light path by a main lens, is detected at last device and receives;
Step 3: the data that detector is obtained rearrange and obtain four amplitude shift interference figure, and recycling four step phase shift algorithms recover tested phase places.
In conjunction with Fig. 1, the test macro that simultaneous phase-shifting interference testing technology of the present invention is used is comprised of Tai Manshi optical interference circuit part 16 and wavefront division phase shifting part 17 two large divisions, and Tai Manshi optical interference circuit part 16 is positioned at the front end of wavefront division phase shifting part 17.
In Tai Manshi optical interference circuit part 16, each device sequentially is followed successively by laser instrument 1, beam expanding lens 2, polaroid 3,1/2 wave plate 4, polarization splitting prism 5 by front and back, transmitted light one side of polarization splitting prism 5 place successively the first quarter wave plate 6, standard lens 7 and measured piece 8, reflected light one side place successively the second quarter wave plate 9 after and reference mirror 10, all devices are coaxial contour with respect to substrate (optical table or instrument base).Its course of work is: light that laser instrument 1 sends becomes collimated light through beam expanding lens 2, then obtains the polarized light of pair of orthogonal through polaroid 3 and 1/2 wave plate 4: p light and s light, the light intensity ratio between p light and s light can be adjusted by rotation 1/2 wave plate 4.After p light and s light incide polarization splitting prism 5, p light is transmitted, becoming spherical wave through the first quarter wave plate 6 and standard lens 7 incides on measured piece 8 and becomes test light, test light is reflected back polarization splitting prism 5 along former road afterwards, due to twice process quarter wave plate, its polarization state changes over s light, reflexes to follow-up wavefront division phase shifting part 17; And after 5 reflections of former s light process polarization splitting prism, by inciding on reference mirror 10 after the second quarter wave plate 9, become reference light, reference light is reflected back polarization splitting prism [5] along former road, due to twice process quarter wave plate, its polarization state changes over p light, after polarization splitting prism 5 transmissions, jointly enters follow-up wavefront division phase shifting part 17 with test light.
In wavefront division phase shifting part 17, each device sequentially is followed successively by the 3rd quarter wave plate 11, microlens array 12, polarizer group 13, main lens 14 and detector 15 by front and back, and all devices are coaxial contour with respect to substrate (optical table or instrument base).Its course of work is: the reference light that Tai Manshi optical interference circuit part 16 obtains and test light both all become the circularly polarized light of quadrature through the 3rd quarter wave plate 11.Again by microlens array 12, before wavefront both is split into many wavelets.At the microlens array rear, all produce one the road before each wavelet and converge light, this converges illumination and is mapped on a polarizer group 13, four quadrants of this polarizer group differ successively 45 polaroids of spending by the printing opacity direction respectively and consist of, therefore converge on the four-quadrant of light xsect at each, the phase place of reference light and test light differs 90 degree successively.Thereafter, it is front through a main lens 14 that all converge wavelet, finally is detected device 15 and receives.Detector 15 can be CCD or cmos imaging device.
In conjunction with Fig. 2, in test macro provided by the present invention, as follows to the image processing method that detector receives: the image that detector receives is the unit that forms before each wavelet; Each inside, unit is divided into again four subelements, and the phase place between each subelement differs 90 degree successively.Shown first module, second unit, Unit the 3rd, unit, four of Unit the 4th in figure as left in Fig. 2, each inside, unit is divided into again A, B, C, four subelements of D separately.Therefore, by rearranging in such a way of antithetical phrase sequence of unit, can obtain four complete phase-shift interferences: the subelement A that is in first quartile in each unit is formed the second amplitude shift interference figure with the subelement B that original relative position relation forms the first amplitude shift interference figure, the second quadrant, by that analogy.Figure as right in Fig. 2, all subelements that are in the A position have consisted of the first amplitude shift interference figure figure by original relative position relation, and the disposal route of B, C, D location subunit is identical with it.
In each complete phase-shift interference, the phase differential of reference light and test light differs 90 degree successively, thus can recover tested phase place by four step phase shift algorithms, that is:
Wherein φ represents tested phase place, and I1, I2, I3, I4 are respectively the intensity profile of first, second, third, fourth amplitude shift interference figure, and x, y are volume coordinate.
Claims (3)
1. a simultaneous phase-shifting interference testing method of using microlens array, is characterized in that, step is as follows:
Step 1: the reference light and the test light that obtain a pair of polarization direction quadrature in Tai Manshi interference testing light path;
Step 2: utilize the method for wavefront division to carry out phase shift, that is, make the reference light of a pair of polarization direction quadrature that obtains in step 1 and test light become the circularly polarized light of pair of orthogonal by a quarter wave plate; Corrugated to the circularly polarized light of this pair of orthogonal is cut apart, and introduces different amount of phase shift in the light path of dispersing that each wavelet face forms by a four-quadrant polarizer group, is then assembled dispersing light path by a main lens, is detected at last device and receives; Wherein, the element of wavefront division phase shifting part is followed successively by along the light path trend: the 3rd quarter wave plate (11), microlens array (12), polarizer group (13), main lens (14) and detector (15); After the reference light that Tai Manshi optical interference circuit part (16) obtains and test light enter wavefront division phase shifting part (17) jointly, at first through the 3rd quarter wave plate (11), both become the circularly polarized light of quadrature; Again by microlens array (12), before wavefront both is split into many wavelets; At the microlens array rear, all produce one the road before each wavelet and converge light, this converges illumination and is mapped on a polarizer group (13), and four quadrants of this polarizer group differ successively 45 polaroids of spending by the printing opacity direction respectively and consist of; , by a main lens to disperse light path assembled, finally be detected device (15) and receive thereafter;
Step 3: the data that detector is obtained rearrange and obtain four amplitude shift interference figure, and recycling four step phase shift algorithms recover tested phase places; Wherein, the image that detector receives is the unit that forms before each wavelet, each inside, unit is divided into again four subelements, the subelement that is in first quartile in each unit need to be formed the second amplitude shift interference figure with the subelement that original relative position relation forms the first amplitude shift interference figure, the second quadrant, by that analogy, be the tested phase place of restructural with four amplitude shift interference figure according to four step phase-shifting method computing formula at last.
2. a kind of simultaneous phase-shifting interference testing method of using microlens array according to claim 1, it is characterized in that: the Tai Manshi interference testing light path inner member of step 1 is followed successively by laser instrument (1) along the light path trend, polaroid (2), 1/2 wave plate (3), beam expanding lens (4), polarization splitting prism (5), after this light path is divided into two of reference light and test light, test light is successively through the first quarter wave plate (6), standard lens (7) and measured piece (8), reference light passes through and the second quarter wave plate (9) and reference mirror (10) successively, reference light and test light are after measured piece (8) and reference mirror (10) reflection, jointly enter wavefront division phase shifting part (17).
3. simultaneous phase-shifting interference testing device that uses microlens array, it is characterized in that: formed by Tai Manshi optical interference circuit part (16) and wavefront division phase shifting part (17) two large divisions, and Tai Manshi optical interference circuit part (16) is positioned at the front end of wavefront division phase shifting part (17); In Tai Manshi optical interference circuit part (16), each device is followed successively by laser instrument (1), beam expanding lens (2), polaroid (3), 1/2 wave plate (4), polarization splitting prism (5) along light path trend, places successively the first quarter wave plate (6), standard lens (7) and measured piece (8) in transmitted light one side of polarization splitting prism [5], reflected light one side is placed the second quarter wave plate (9) afterwards and reference mirror (10) successively; In wavefront division phase shifting part (17), each device is followed successively by the 3rd quarter wave plate (11), microlens array (12), polarizer group (13), main lens (14) and detector (15) along light path trend, and wherein four of polarizer group quadrants differ successively 45 polaroids of spending by the printing opacity direction respectively and consist of; All devices are coaxial contour with respect to substrate, and are namely coaxial contour with respect to optical table or instrument base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110338856 CN102507020B (en) | 2011-11-01 | 2011-11-01 | Microlens array-based synchronized phase-shifting interference test method and test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110338856 CN102507020B (en) | 2011-11-01 | 2011-11-01 | Microlens array-based synchronized phase-shifting interference test method and test device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102507020A CN102507020A (en) | 2012-06-20 |
| CN102507020B true CN102507020B (en) | 2013-05-08 |
Family
ID=46219127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110338856 Expired - Fee Related CN102507020B (en) | 2011-11-01 | 2011-11-01 | Microlens array-based synchronized phase-shifting interference test method and test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102507020B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103489186A (en) * | 2013-09-16 | 2014-01-01 | 南京理工大学 | Spatial position matching method of dynamic interferometer child interferograms |
| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103630336B (en) * | 2013-12-02 | 2016-04-20 | 南京理工大学 | The dynamic interferometry method of array is postponed based on random phase retardation |
| CN103743707B (en) * | 2013-12-24 | 2017-11-14 | 浙江大学 | The microscopic method and device of controllable high-speed layer phase separation position |
| CN103712573B (en) * | 2013-12-27 | 2016-04-20 | 华南师范大学 | The spatial match bearing calibration of array image sensor in binary channels interferometry |
| CN104359563B (en) * | 2014-11-11 | 2017-06-06 | 北京理工大学 | A kind of two-dimentional interference pattern phase extraction method based on four-way vignette grid |
| CN107024338B (en) * | 2016-02-01 | 2020-04-21 | 南京理工大学 | Common-path point diffraction synchronous phase-shifting interference testing device using prism light splitting |
| CN107024173B (en) * | 2016-02-01 | 2019-05-31 | 南京理工大学 | Use the total optical path point diffraction simultaneous phase-shifting interference testing device of pinhole difiration plate |
| CN106840027B (en) * | 2017-01-20 | 2019-10-18 | 南京理工大学 | The astigmatic compensation type interference checking device and detection method of freeform optics surface |
| CN108387172A (en) * | 2018-02-07 | 2018-08-10 | 中国科学院光电研究院 | Polarization phase shift dynamic interferometer based on optical field detection device |
| CN111397506B (en) * | 2020-04-13 | 2021-07-30 | 剑桥大学南京科技创新中心有限公司 | Full-automatic phase error correction method and system for holographic interferometer |
| CN111751012B (en) * | 2020-06-03 | 2021-12-14 | 中国科学院西安光学精密机械研究所 | Dynamic high-resolution optical wavefront phase measurement method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5835217A (en) * | 1997-02-28 | 1998-11-10 | The Regents Of The University Of California | Phase-shifting point diffraction interferometer |
| CN101776488B (en) * | 2010-01-21 | 2011-06-08 | 北京工业大学 | Method for measuring optical phase by using synchronous phase-shifting interference method and implementing device |
| CN102175332B (en) * | 2011-01-21 | 2012-06-06 | 南京理工大学 | Method for recovering phases from interferograms containing phase-shift error |
-
2011
- 2011-11-01 CN CN 201110338856 patent/CN102507020B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102507020A (en) | 2012-06-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102507020B (en) | Microlens array-based synchronized phase-shifting interference test method and test device | |
| US7230717B2 (en) | Pixelated phase-mask interferometer | |
| US7777895B2 (en) | Linear-carrier phase-mask interferometer | |
| CN101270975B (en) | Combined interference device for aspheric surface measurement | |
| US8351048B2 (en) | Linear-carrier phase-mask interferometer | |
| CN110017793B (en) | Double-channel anti-vibration interference measurement device and method | |
| CN102589414B (en) | Synchronous phase-shifting Fizeau interference device capable of measuring in real time | |
| CN102435136A (en) | Spatial phase-shifting unit, interferometry system applying same and phase-correcting unit | |
| US7561279B2 (en) | Scanning simultaneous phase-shifting interferometer | |
| CN108061515B (en) | Phase shift interferometer | |
| CN102889853B (en) | Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method | |
| CN104713494B (en) | The dual wavelength tuning interference testing device and method of Fourier transformation phase shift calibration | |
| CN110017794B (en) | Dynamic phase deformation interference measurement device and method | |
| CN110319769B (en) | Anti-vibration Fizeau interferometry device and method | |
| CN103292740A (en) | Three-dimensional scanner measuring method and device | |
| CN109163673A (en) | A kind of multi-wavelength and the bisynchronous surface method for real-time measurement of phase shift interference and system | |
| CN103968961A (en) | Loop radial shearing N-step phase-shift interferometer based on polarization phase-shift principle | |
| CN103712554B (en) | Based on the Dual-channel space-time mixing phase shift fizeau interferometer of crossed polarized light | |
| CN103245423A (en) | Common-optical path polarization point diffraction phase-shift interference wavefront sensor | |
| CN111929036A (en) | Double Fizeau cavity dynamic short coherence interferometry device and method | |
| CN102680117B (en) | Common-path radial cutting liquid crystal phase shift interference wave-front sensor | |
| CN102865810B (en) | Orthogonal double-grating based detecting device for synchronous phase shift common-light path interference and detecting method therefor | |
| CN106441152B (en) | Asymmetric optical interferometry method and device | |
| CN104075655A (en) | Fizeau synchronous phase-shifting interference test device adopting rotary radial grating | |
| CN102914259A (en) | Interference detection device based on light-splitting synchronous phase shifting and detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130508 Termination date: 20151101 |
|
| EXPY | Termination of patent right or utility model |