CN104075655A - Fizeau synchronous phase-shifting interference test device adopting rotary radial grating - Google Patents
Fizeau synchronous phase-shifting interference test device adopting rotary radial grating Download PDFInfo
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- CN104075655A CN104075655A CN201310101855.9A CN201310101855A CN104075655A CN 104075655 A CN104075655 A CN 104075655A CN 201310101855 A CN201310101855 A CN 201310101855A CN 104075655 A CN104075655 A CN 104075655A
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Abstract
The invention provides a Fizeau synchronous phase-shifting interference test device adopting a rotary radial grating. The Fizeau synchronous phase-shifting interference test device comprises a Fizeau interference light path part and a Doppler frequency shifting tuning phase-shifting part, wherein the Fizeau interference light path part is positioned at the front end of the Doppler frequency shifting tuning phase-shifting part; the Fizeau interference light path part consists of a laser, a beam expanding lens, a beam splitter, a first collimator objective, a reference lens and a test lens through sequential arrangement; the Doppler frequency shifting tuning phase-shifting part comprises a second collimator objective, a motor, a radial grating, an imaging lens and a detector through sequential arrangement; and all optical devices are coaxial and have equal height relative to a substrate, i.e., the optical devices are coaxial and have equal height relative to an optical platform or an instrument base. The Fizeau synchronous phase-shifting interference test device adopting the rotary radial grating has the advantages that the surface shape dynamic measurement of large-caliber optical elements in long-cavity long test environment can be realized, and in addition, the cost is lower.
Description
Technical field
The present invention relates to interference of light metrology and measurement field, particularly a kind of striking rope type simultaneous phase-shifting interference testing device that uses rotation radial grating.
Background technology
Along with scientific and technical development, massive optics is used widely gradually in front line science fields such as astronomy, space flight, the energy, and increasing occasion needs to detect, calibrate big-and-middle-sized optical element or optical system.For example, in the God Light high power solid-state laser device that China is developing, there are thousands of optical elements of large caliber, according to application demand, wherein many optical elements need be measured under Brewster angle or low-angle, and now, interference cavity length is grown (being greater than 2 meters).When and for example the primary mirror in heavy caliber astronomical telescope or long-focus lens etc. are measured, interference cavity is long also often reaches several meters even longer.And these application scenarios are very high to the surface figure accuracy requirement of optical elements of large caliber, therefore, it is the key of assurance mirror finish quality that the high precision that how to realize the long lower optical elements of large caliber in long chamber detects, and is also the key of the whole optical system precision of raising.
Movable phase interfere measuring technology is by producing phase shift to the modulation of interference field, according to the some width phase-shift interferences that gather, recover measured physical quantity again, significantly promoted and interfered precision and the automaticity detecting, be widely used in the evaluation of optical component surface shape and optical system imaging quality.Yet it is the main error source of movable phase interfere measuring technology all the time that environmental perturbation especially vibrates.Simultaneous phase-shifting interference testing technology is the best interference testing technology of current antivibration effect, and this technology gathers three width or phase-shift interferences more than three width in moment simultaneously, and therefore, environmental perturbation is identical on the impact of these interferograms.
Existing simultaneous phase-shifting scheme is generally all based on polarization phase-shift theory, as patent < < is used the simultaneous phase-shifting interference testing method of microlens array and installs the > > (patent No.: CN201110338856.6), the reference light of interferometer and test light are divided into multichannel, the polarizer (polaroid or wave plate) of often leading up to is introduced different amount of phase shift, therefore can " instantaneous " collect required phase-shift interference, while having avoided vibrating this class, become the impact of error component on interferometry, but the method adopts safe graceful type interferometer structure, because light path part is less altogether for reference light and test light in safe graceful type structure, the reference light and the test light that easily in different light paths, obtain polarization direction quadrature realize polarization phase shift.And striking rope type interferometer is due to its common characteristics of optical path, its reference light and test light all contain p light and s light component, not easily separated, and how introducing polarization phase shift becomes difficult point.2008, the people such as the Xu Chen of Institutes Of Technology Of Nanjing propose a kind of short coherent source based on current-modulation semiconductor laser, use the striking rope type synchronous phase shift interferometer of grating beam splitting, in its PhD dissertation < < dynamic interference measuring technology and applied research > >, have a detailed description.But such scheme all adopts short coherent source to realize optical path difference coupling, cannot realize the interference testing under the length of long chamber.A kind of striking rope type simultaneous phase-shifting interference testing device of rotation radial grating that uses of the present invention can be tested optical elements of large caliber under the long test environment in long chamber, has made up the blank of testing optical elements of large caliber under the long environment in long chamber.
Summary of the invention
The object of the present invention is to provide a kind of striking rope type simultaneous phase-shifting interference testing device that uses rotation radial grating, can realize heavy-calibre planar optical elements and measure under the length of long chamber, measuring accuracy is high.
A kind of striking rope type simultaneous phase-shifting proving installation that uses rotation radial grating, comprise striking rope type optical interference circuit part and the tuning phase shifting part of Doppler shift, and striking rope type optical interference circuit is partly positioned at the front end of the tuning phase shifting part of Doppler shift, wherein striking rope type optical interference circuit part is arranged in order and is formed by laser instrument, beam expanding lens, spectroscope, the first collimator objective, reference mirror and test mirrors; The tuning phase shifting part of Doppler shift comprises that the second collimator objective, motor, radial grating, imaging len and detector are arranged in order composition, and above-mentioned all optical device are coaxially contour with respect to substrate, coaxially contour with respect to optical table or instrument base;
The light that laser instrument sends expands through beam expanding lens, see through spectroscope, through the first collimator objective, be collimated into directional light again, directional light incides on reference mirror, after part reflection, form reference light, another part sees through reference mirror and incides in test mirrors, forms test light after reflection, reference light and test light Yan Yuan road are reflected back spectroscope afterwards, after spectroscope reflection, enter in the tuning phase shifting part of follow-up Doppler shift;
Reference light and test light that striking rope type optical interference circuit partly obtains are collimated into directional light after the second collimator objective, through over-rotation radial grating, form 0 grade and ± 1 order diffraction light again, the diffraction light of three beams different frequency incides on imaging len with different angles, is imaged on the diverse location of detector image planes through imaging len.
Light and the second collimator objective common optical axis after spectroscope reflection, and enter the second collimator objective; Detector is area array CCD camera; The rotation of Electric Machine Control radial grating, the surfaces of revolution is perpendicular to optical axis.
Compared with prior art, its remarkable advantage is in the present invention:
(1) than existing simultaneous phase-shifting interference testing system, the present invention is without Polarization Modulation, and optical element is few, and system architecture is simple;
(2) can realize the surface shape measurement of optical elements of large caliber under the length of long chamber.
Accompanying drawing explanation
Fig. 1 is the striking rope type simultaneous phase-shifting optical system for testing structural representation that the present invention uses rotation radial grating.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
In conjunction with Fig. 1, a kind of striking rope type simultaneous phase-shifting interference testing device of rotation radial grating that uses is comprised of striking rope type optical interference circuit part 12 and tuning phase shifting part 13 two large divisions of Doppler shift, and striking rope type optical interference circuit part 12 is positioned at the front end of the tuning phase shifting part 13 of Doppler shift.
In striking rope type optical interference circuit part 12, each device is sequentially followed successively by by front and back: laser instrument 1, beam expanding lens 2, spectroscope 3, the first collimator objective 4, reference mirror 5 and test mirrors 6, all devices are coaxially contour with respect to substrate (optical table or instrument base).Its course of work is: the light that laser instrument 1 sends expands through beam expanding lens 2, see through spectroscope 3, through the first collimator objective 4, be collimated into directional light again, directional light incides on reference mirror 5, after part reflection, form reference light, another part sees through reference mirror 5 and incides in test mirrors 6, forms test light after reflection, reference light and test light Yan Yuan road are reflected back spectroscope 3 afterwards, after spectroscope reflection, enter the tuning phase shifting part 13 of follow-up Doppler shift.
In the tuning phase shifting part 13 of Doppler shift, each device is sequentially followed successively by by front and back: High Rotation Speed radial grating 9, imaging len 10 and detector 11 that the second collimator objective 7, motor 8 are controlled, all devices are coaxially contour with respect to substrate (optical table or instrument base).Its course of work is: reference light and test light that striking rope type optical interference circuit part 12 obtains are collimated into directional light after the second collimator objective 7, through over-rotation radial grating 9, form 0 grade and ± 1 order diffraction light (during grating design again, suppress the light beam of more senior time), the diffraction light of three beams different frequency incides on imaging len 10 with different angles, is imaged on the diverse location of detector 11 image planes through imaging len 10.Detector 11 is area array CCD cameras.
Claims (4)
1. one kind is used the striking rope type simultaneous phase-shifting interference testing device that rotates radial grating, it is characterized in that: comprise striking rope type optical interference circuit part [12] and the tuning phase shifting part of Doppler shift [13], and striking rope type optical interference circuit part [12] is positioned at the front end of the tuning phase shifting part of Doppler shift [13], wherein striking rope type optical interference circuit part [12] is arranged in order and is formed by laser instrument [1], beam expanding lens [2], spectroscope [3], the first collimator objective [4], reference mirror [5] and test mirrors [6]; The tuning phase shifting part of Doppler shift [13] comprises that the second collimator objective [7], motor [8], radial grating [9], imaging len [10] and detector [11] are arranged in order composition, above-mentioned all optical device are coaxially contour with respect to substrate, coaxially contour with respect to optical table or instrument base;
The light that laser instrument [1] sends expands through beam expanding lens [2], see through spectroscope [3], through the first collimator objective [4], be collimated into directional light again, directional light incides on reference mirror [5], after part reflection, form reference light, it is upper that another part incides test mirrors [6] through reference mirror [5], forms test light after reflection, reference light and test light Yan Yuan road are reflected back spectroscope [3] afterwards, after spectroscope [3] reflection, enter in the tuning phase shifting part of follow-up Doppler shift [13];
Reference light and test light that striking rope type optical interference circuit part [12] obtains are collimated into directional light after the second collimator objective [7], through over-rotation radial grating [9], form 0 grade and ± 1 order diffraction light again, it is upper that the diffraction light of three beams different frequency incides imaging len [10] with different angles, is imaged on the diverse location of detector [11] image planes through imaging len [10].
2. the striking rope type simultaneous phase-shifting interference testing device of radial grating is rotated in use according to claim 1, it is characterized in that: light and the second collimator objective [7] common optical axis after spectroscope [3] reflection, and enter the second collimator objective [7].
3. the striking rope type simultaneous phase-shifting interference testing device of use rotation radial grating according to claim 1, is characterized in that: detector [11] is area array CCD camera.
4. the striking rope type simultaneous phase-shifting interference testing device of use rotation radial grating according to claim 1, is characterized in that: motor [8] is controlled radial grating [9] rotation, and the surfaces of revolution is perpendicular to optical axis.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319769A (en) * | 2019-06-25 | 2019-10-11 | 南京理工大学 | Anti-vibration Feisuo interferometric measuring means and method |
| CN112902833A (en) * | 2021-03-04 | 2021-06-04 | 哈尔滨工业大学 | Anti-vibration short-coherence space-time hybrid phase-shifting Fizeau interferometer |
| CN114396887A (en) * | 2021-12-30 | 2022-04-26 | 南京光途科技有限公司 | Dynamic interferometer and measuring method |
| CN114812889A (en) * | 2022-05-06 | 2022-07-29 | 南京理工大学 | Large-caliber optical element stress detection device and detection method thereof |
| CN115523863A (en) * | 2022-10-18 | 2022-12-27 | 南京理工大学 | Large-caliber phase-shifting interference surface shape measuring device |
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319769A (en) * | 2019-06-25 | 2019-10-11 | 南京理工大学 | Anti-vibration Feisuo interferometric measuring means and method |
| CN112902833A (en) * | 2021-03-04 | 2021-06-04 | 哈尔滨工业大学 | Anti-vibration short-coherence space-time hybrid phase-shifting Fizeau interferometer |
| CN114396887A (en) * | 2021-12-30 | 2022-04-26 | 南京光途科技有限公司 | Dynamic interferometer and measuring method |
| CN114812889A (en) * | 2022-05-06 | 2022-07-29 | 南京理工大学 | Large-caliber optical element stress detection device and detection method thereof |
| CN115523863A (en) * | 2022-10-18 | 2022-12-27 | 南京理工大学 | Large-caliber phase-shifting interference surface shape measuring device |
| CN115523863B (en) * | 2022-10-18 | 2024-03-22 | 南京理工大学 | Large-caliber phase-shifting interferometry surface shape measuring device |
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
| CN116045836B (en) * | 2023-04-03 | 2023-06-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
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