CN101776488B - Method for measuring optical phase by using synchronous phase-shifting interference method and implementing device - Google Patents
Method for measuring optical phase by using synchronous phase-shifting interference method and implementing device Download PDFInfo
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Abstract
The invention discloses a method for acquiring an optical phase by using a synchronous phase-shifting interference method and an implementing light path, and relates to a method and a device for dynamically detecting wave surface information. According to the method, a light source is split into six beams by adopting a semi-transparent semi-reflective prism and a polarizing beam splitter prism, and meanwhile a polarizing interference method is combined to acquire six synchronous phase-shifting interference fringe patterns at one time in an air space, wherein the six interference fringe patterns are imaged on six CCD target surfaces respectively. The shape of a tested wave surface can be acquired by analyzing the six interference fringe patterns. Because the influence of vibration is consistent with the influence on the synchronous phase-shifting interference fringe patterns, the influence of the vibration can be eliminated by subtracting and deducting methods in a phase-shifting algorithm; therefore, the method is adaptive to high-precision wave surface measurement for more working environments, and does not need to perform PZT linear correction before each measurement. Moreover, the method is simple, the principle is clear, each component in the light path is easy to obtain, and the whole device is compact and easy to use.
Description
Technical field
The present invention relates to the method and apparatus of detection of dynamic corrugated information, relate in particular to a kind of method and realization light path of utilizing the simultaneous phase-shifting interference technique to obtain optical phase.
Background technology
In the optical wave-front interferometry, usually with laser as coherent source, method by minute amplitude produces two bundle corrugateds, a branch of corrugated is invested standard reference lens and is returned the back and forms with reference to the corrugated, a branch of corrugated is invested measured piece and is returned the back and forms the test corrugated, with reference to corrugated and the test corrugated formation interference field that meets in the space, by digital image acquisition device interference field is noted with the form of interference fringe picture, interference fringe picture is analyzed just can be drawn the shape of testing the corrugated.At present, in the commercialization laser wavefront interferometer, also be extensive use of the method that the optics phase shift is measured at home and abroad.This method is with the actuation device of piezoelectric ceramic transducer (PZT) as the optics phase shift, standard reference lens is bound up by elastic construction and PZT device, when adding stepped voltage to PZT, PzT produces step-wise displacement, this displacement passes to standard reference lens by elastic construction, thereby can staged change with reference to the phase place on corrugated that is realize optics phase shift (the phase shift step-length is 90 ° usually), in the phase shift process, gather interference field and can obtain some amplitude shift interference bar graphs.Can further improve the wavefront measurement precision by analysis to several movable phase interfere bar graphs.Yet, the phase shift of this PZT optics is a kind of time domain phase shift, and when there was vibration in test environment, the different phase-shift interferences of gathering constantly will be introduced phase error, this error is random variation and be difficult to eliminate normally, and it is the main source of error in the time domain phase-shifting interference measuring.Even do not consider the influence of ambient vibration, interferometer also will carry out linearity correction to the electric voltage displacement characteristic of PZT before each the measurement, to guarantee the accuracy of phase shift in the measuring process.Phase shift is not suitable for the on-the-spot interferometry of vibration in view of time domain PZT optics, and therefore the most direct thinking is to produce some movable phase interferes field simultaneously in the spatial domain, and these interference fields are carried out the transient state synchronous recording, just can obtain some width of cloth simultaneous phase-shifting interference fringe pictures.Because the influence of vibration is consistent to the influence of simultaneous phase-shifting interference fringe picture, just can eliminate the influence of vibration by subtracting each other the method for being divided by in the phase shift algorithm, so just realized adapting to more the multiplex (MUX) do the high precision wavefront measurement of environment and not needs before each the measurement, carrying out the PZT linearity correction.Research according to people such as calendar year 2001 JamesE.Millerd and NealJ.Brock, adopt holographic grating that light beam is carried out four beam splitting, and, having obtained the four amplitude shifts interference fringe picture of 90 degree mutually simultaneously in the space in conjunction with the polarization interference method, this method has obtained measurement result preferably.But owing to adopt holographic grating to carry out beam split, in order unnecessary diffraction light not occur, not change the corrugated of incident light, higher to the preparing grating technological requirement, the whole cost of therefore this interferometer is higher.
Summary of the invention
In order to overcome the drawback of conventional phase shift laser plane interferometer time domain measurement principle, the invention provides a kind of light path device that can utilize the simultaneous phase-shifting interference technique to measure optical phase, it adopts semi-transparent semi-reflecting prism, polarization splitting prism that light source is carried out six beam splitting, method in conjunction with polarization interference once collects six width of cloth simultaneous phase-shifting interference fringe pictures in the spatial domain simultaneously, and this six width of cloth interference fringe images in respectively on six CCD target surfaces.
To achieve these goals, the present invention has taked following method and the realization light path that obtains six width of cloth simultaneous phase-shifting interference fringe pictures:
Utilize the simultaneous phase-shifting interferometric method to measure the method for optical phase, method by minute amplitude produces two bundle corrugateds, a branch of corrugated is invested standard reference lens and is returned the back and forms with reference to the corrugated, another bundle corrugated is invested measured piece and is returned the back and forms the test corrugated, with reference to corrugated and the test corrugated formation interference field that meets in the space, by digital image acquisition device interference field is noted with the form of interference fringe picture, interference fringe picture is analyzed the shape that just can draw the test corrugated.Its concrete grammar is: as light source, light source is divided into the mutually perpendicular transmitted light I of two bundles by first semi-transparent semi-reflecting prism with the plane of linear polarization light source
1With reflected light I
2Transmitted light I wherein
1Be divided into the mutually perpendicular transmitted light I of two bundles again through second semi-transparent semi-reflecting prism
11With reflected light I
12Transmitted light I wherein
11Return by the measured lens reflection, be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism again
111With reflected light I
112Transmitted light I wherein
111Light is back to first semi-transparent semi-reflecting prism, is divided into two mutually perpendicular transmitted light of bundle and reflected light I by first semi-transparent semi-reflecting prism again
1112Reflected light I wherein
1112Return once more by first semi-transparent semi-reflecting prism by the canonical reference mirror reflection through 1/8th wave plates and to be divided into the mutually perpendicular transmitted light I of two bundles
11121With reflected light I
11122Transmitted light I wherein
11121Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by polarization splitting prism
111211With reflected light I
111212, reflected light I wherein
111212With reflected light I
2The reflected light I that is divided into through polarization splitting prism
22Stack interferes, and obtains first width of cloth interference fringe picture.Transmitted light I
111211With reflected light I
2The transmitted light I that is divided into through polarization splitting prism
21Stack interferes, and obtains second width of cloth interference fringe picture.Reflected light I
11122Be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism once more
111221With reflected light I
111222Transmitted light I wherein
111221Return by the measured lens reflection once more, be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism again
1112211With reflected light I
1112212Reflected light I wherein
1112212Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by polarization splitting prism
11122121With reflected light I
11122122, reflected light I wherein
11122122With reflected light I
112The reflected light I that is divided into through polarization splitting prism 11
1122Stack interferes, and obtains the 3rd width of cloth interference fringe picture.Transmitted light I
11122121With reflected light I
112The transmitted light I that is divided into through polarization splitting prism
1121Stack interferes, and obtains the 4th width of cloth interference fringe picture.Reflected light I
111222Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by polarization splitting prism
1112221With reflected light I
1112222, reflected light I wherein
1112222With reflected light I
12The reflected light I that is divided into through polarization splitting prism 11
122Stack interferes, and obtains the 5th width of cloth interference fringe picture.Transmitted light I
1112221With reflected light I
12The transmitted light I that is divided into through polarization splitting prism
121Stack interferes, and obtains the 6th width of cloth interference fringe picture.Above-mentioned first semi-transparent semi-reflecting prism, second semi-transparent semi-reflecting prism, polarization splitting prism, polarization splitting prism, polarization splitting prism all can be divided into a branch of light two mutually perpendicular transmittance light of bundle and reflected light; And there are half-wave loss in first semi-transparent semi-reflecting prism, second semi-transparent semi-reflecting prism reflection of light that reflection is returned to measured lens; The transmitted light that polarization splitting prism, polarization splitting prism, polarization splitting prism produce is vertical mutually with the polarization of reflected light attitude.Six CCD target surfaces of above-mentioned six width of cloth interference fringe pictures are once gathered in the spatial domain, utilize the phase shift algorithm that the interference light intensity value of each interference fringe picture is calculated optical phase.
The above-mentioned method of utilizing the simultaneous phase-shifting interferometric method to measure optical phase can realize with following light path: adopt the linear polarization frequency stabilized laser as light source, the laser of its output at first sees through rotatable half-wave plate, after enter beam-expanding system, obtain the plane of linear polarization light source.Place on the projecting direction of plane of linear polarization light source and become first semi-transparent semi-reflecting prism of-45 ° with throw light, on its transmitted ray direction, place to become+second semi-transparent semi-reflecting prism of 45 °, and on the transmitted ray direction of second semi-transparent semi-reflecting prism, place and become 90 ° measured lens with transmitted ray with transmitted ray.On the reflection ray direction of first semi-transparent semi-reflecting prism, place and become-45 ° polarization splitting prism with reflection ray, and in the opposite direction successively placement become 90 ° 1/8th wave plates and standard reference lens with reflection ray.On the reflection ray direction of second semi-transparent semi-reflecting prism 4, place to become+45 ° polarization splitting prism, and place in the opposite direction and become-45 ° polarization splitting prism with reflection ray with reflection ray.Wherein, first semi-transparent semi-reflecting prism is set to exist half-wave loss in the other direction when light is invested 1/8th wave plates and standard reference lens by first semi-transparent semi-reflecting prismatic reflection and throwed; Second semi-transparent semi-reflecting prism is set to exist half-wave loss in the other direction when light is invested polarization splitting prism by second semi-transparent semi-reflecting prismatic reflection and throwed; Polarization splitting prism, polarization splitting prism, polarization splitting prism are all and can make transmitted light and the orthogonal semi-transparent semi-reflecting prism of polarization of reflected light attitude; The fast axle of 1/8th wave plates is in the direction perpendicular to ray cast.
Described beam-expanding system is made up of two convex lens.
Method of the present invention is simple, and principle is clear, and each parts obtains easily in the light path, and whole device is compact, is easy to use.The method and apparatus of utilization introduction of the present invention can be realized the Dynamic High-accuracy measurement that high-precision optical is interfered.
Description of drawings
Fig. 1 is that the simultaneous phase-shifting interference technique of utilizing that the present invention proposes is measured the light path and the structural representation of beam split, imaging and the simultaneous phase-shifting device of optical phase.
Among the figure: the frequency stabilized laser that 1, is output as linear polarization laser, 2, half-wave plate, 3, beam-expanding system, 4, semi-transparent semi-reflecting prism, 5, polarization splitting prism, 6, standard reference lens, 7,1/8th wave plates, 8, polarization splitting prism, 9, semi-transparent semi-reflecting prism, 10, measured lens, 11, polarization splitting prism, the light intensity value of six width of cloth interference fringe pictures of mutual phase shift 90 degree that (1), (2) among the figure, (3), (4), (5), (6) record for the ccd detector by same model.
Embodiment
Below in conjunction with drawings and Examples, describe the simultaneous phase-shifting interference technique of utilizing proposed by the invention in detail and measure the method and apparatus of beam split in the optics phase device, imaging and simultaneous phase-shifting.
Embodiment: as shown in Figure 1, the linear polarization laser of frequency stabilized laser 1 output, utilize half-wave plate 2 that its direction of shaking is thoroughly adjusted on the horizontal direction, through beam-expanding system 3 laser beam is expanded again and restraint the linear polarization planar light source, import the polarization interference system that forms by semi-transparent semi-reflecting prism 4,9 and polarization splitting prism 5,8,11.Each parts is placed in optical table by the scalable optical bench, and each parts light path is transferred in together with surface level.Wherein, beam-expanding system 3 is made up of the convex lens that two focal lengths are respectively 5cm and 8cm, semi-transparent semi-reflecting prism 4,9 and polarization splitting prism 5,8,11 are respectively by two right-angle prism hypotenuse relative compositions, two right-angle prisms of semi-transparent semi-reflecting prism 4,9 adopt different media, make to have half-wave loss, have half-wave loss from the reflected light of the lower surface incident of semi-transparent semi-reflecting prism 9 from the reflected light of the upper surface incident of semi-transparent semi-reflecting prism 4; Polarization splitting prism 5,8,11 makes transmitted light vertical with the polarization of reflected light attitude.
First width of cloth interference fringe picture: beam-expanding system 3 emitting laser bundles evenly are divided into two bundles by semi-transparent semi-reflecting prism 4, transmitted light directive measured lens 10 behind semi-transparent semi-reflecting prism 9 wherein, the semi-transparent semi-reflecting prism 9 of transmission and through 4 reflections of semi-transparent semi-reflecting prism once more after returning, reflected light is invested standard reference lens 6 through 1/8th wave plates, 7 backs again, after returning through 1/8th wave plates 7, the last semi-transparent semi-reflecting prism 4 of transmission and interfere through another part light that polarization splitting prism 5 reflections and beam-expanding system 3 outgoing are reflected through semi-transparent semi-reflecting prism 4 reflections and polarization splitting prism 5 and to obtain first width of cloth interference fringe picture (1).
Second width of cloth interference fringe picture: beam-expanding system 3 emitting laser bundles evenly are divided into two bundles by semi-transparent semi-reflecting prism 4, transmitted light directive measured lens 10 behind semi-transparent semi-reflecting prism 9 wherein, the semi-transparent semi-reflecting prism 9 of transmission and through 4 reflections of semi-transparent semi-reflecting prism once more after returning, reflected light is invested standard reference lens 6 through 1/8th wave plates, 7 backs again, after returning through 1/8th wave plates 7, the last semi-transparent semi-reflecting prism 4 of transmission and reflect and another part light of polarization splitting prism 5 transmissions is interfered and obtained second width of cloth interference fringe picture (2) through semi-transparent semi-reflecting prism 4 through polarization splitting prism 5 transmissions and beam-expanding system 3 outgoing.
The 3rd width of cloth interference fringe picture: the first bundle light that forms this interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, reflect directives 1/8th wave plates through semi-transparent semi-reflecting prism 9 transmissions and semi-transparent semi-reflecting prism 4 once more after returning, directive standard reference lens 6 after the outgoing, be transmitted to measured lens 10 through 4 reflections of 1/8th wave plates 7 and semi-transparent semi-reflecting prism and semi-transparent semi-reflecting prism 9 once more after returning, obtain first through semi-transparent semi-reflecting prism 9 reflections and polarization splitting prism 11 reflections again after returning and restraint light; The second bundle light that forms interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, return after 9 reflections of semi-transparent semi-reflecting prism and polarization splitting prism 11 reflections obtain the second bundle light.This two-beam interference obtains the 3rd width of cloth interference fringe picture (3).
The 4th width of cloth interference fringe picture: the first bundle light that forms this interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, reflect directives 1/8th wave plates through semi-transparent semi-reflecting prism 9 transmissions and semi-transparent semi-reflecting prism 4 once more after returning, directive standard reference lens 6 after the outgoing, be transmitted to measured lens 10 through 4 reflections of 1/8th wave plates 7 and semi-transparent semi-reflecting prism and semi-transparent semi-reflecting prism 9 once more after returning, obtain first through semi-transparent semi-reflecting prism 9 reflections and polarization splitting prism 11 transmissions again after returning and restraint light; The second bundle light that forms interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, return after 9 reflections of semi-transparent semi-reflecting prism and polarization splitting prism 11 transmissions obtain the second bundle light.This two-beam interference obtains the 4th width of cloth interference fringe picture (4).
The 5th width of cloth interference fringe picture: the first bundle light that forms this interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, reflect directives 1/8th wave plates through semi-transparent semi-reflecting prism 9 transmissions and semi-transparent semi-reflecting prism 4 once more after returning, directive standard reference lens 6 after the outgoing, project polarization splitting prism 8 through 4 reflections of 1/8th wave plates 7 and semi-transparent semi-reflecting prism and 9 reflections of semi-transparent semi-reflecting prism once more after returning, obtain the first bundle light through polarization splitting prism 8 beam split reflection; The second bundle light that forms interference fringe picture is: beam-expanding system 3 emitting laser bundles project polarization splitting prism 8 through semi-transparent semi-reflecting prism 4 reflections and 9 reflections of semi-transparent semi-reflecting prism, obtain the second bundle light through polarization splitting prism 8 beam split reflection.This two-beam interference obtains the 5th width of cloth interference fringe picture (5).
The 6th width of cloth interference fringe picture: the first bundle light that forms this interference fringe picture is: beam-expanding system 3 emitting laser bundles are invested measured lens 10 behind semi-transparent semi-reflecting prism 4 and 9, reflect directives 1/8th wave plates through semi-transparent semi-reflecting prism 9 transmissions and semi-transparent semi-reflecting prism 4 once more after returning, directive standard reference lens 6 after the outgoing, project polarization splitting prism 8 through 4 reflections of 1/8th wave plates 7 and semi-transparent semi-reflecting prism and 9 reflections of semi-transparent semi-reflecting prism once more after returning, obtain the first bundle light through polarization splitting prism transmittance in 8 fens; The second bundle light that forms interference fringe picture is: beam-expanding system 3 emitting laser bundles project polarization splitting prism 8 through semi-transparent semi-reflecting prism 4 reflections and 9 reflections of semi-transparent semi-reflecting prism, obtain the second bundle light through polarization splitting prism transmittance in 8 fens.This two-beam interference obtains the 6th width of cloth interference fringe picture (6).
Utilize ccd detector to gather six width of cloth interference fringe pictures simultaneously.
Can utilize the phase shift algorithm to obtain optical phase by the interference light intensity value of each interference fringe picture at last, thereby analyze the situation of tested minute surface.
Claims (3)
1. utilize the simultaneous phase-shifting interferometric method to measure the method for optical phase, method by minute amplitude produces two bundle corrugateds, a branch of corrugated is invested standard reference lens and is returned the back and forms with reference to the corrugated, another bundle corrugated is invested measured lens and is returned the back and forms the test corrugated, with reference to corrugated and the test corrugated formation interference field that meets in the space, by digital image acquisition device interference field is noted with the form of interference fringe picture, interference fringe picture is analyzed the shape that just can draw the test corrugated; It is characterized in that: as light source, light source is divided into the mutually perpendicular transmitted light I of two bundles by first semi-transparent semi-reflecting prism (4) with the plane of linear polarization light source
1With reflected light I
2, transmitted light I wherein
1Be divided into the mutually perpendicular transmitted light I of two bundles again through second semi-transparent semi-reflecting prism
11With reflected light I
12, transmitted light I wherein
11Return by described measured lens (10) reflection, be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism (9) again
111With reflected light I
112, transmitted light I wherein
111Light is back to first semi-transparent semi-reflecting prism (4), is divided into two mutually perpendicular transmitted light of bundle and reflected light I by first semi-transparent semi-reflecting prism (4) again
1112, reflected light I wherein
1112Return once more by described standard reference lens (6) reflection through 1/8th wave plates and to be divided into the mutually perpendicular transmitted light I of two bundles by first semi-transparent semi-reflecting prism (4)
11121With reflected light I
11122, transmitted light I wherein
11121Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by first polarization splitting prism (5)
111211With reflected light I
111212, reflected light I wherein
111212With reflected light I
2The reflected light I that is divided into through first polarization splitting prism (5)
22Stack interferes, and obtains first width of cloth interference fringe picture; Transmitted light I
111211With reflected light I
2The transmitted light I that is divided into through first polarization splitting prism (5)
21Stack interferes, and obtains second width of cloth interference fringe picture; Reflected light I
11122Be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism (9) once more
111221With reflected light I
111222, transmitted light I wherein
111221Return by described measured lens (10) reflection once more, be divided into the mutually perpendicular transmitted light I of two bundles through second semi-transparent semi-reflecting prism (9) again
1112211With reflected light I
1112212, reflected light I wherein
1112212Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by the 3rd polarization splitting prism (11)
11122121With reflected light I
11122122, reflected light I wherein
11122122With reflected light I
112The reflected light I that is divided into through the 3rd polarization splitting prism (11)
1122Stack interferes, and obtains the 3rd width of cloth interference fringe picture; Transmitted light I
11122121With reflected light I
112The transmitted light I that is divided into through first polarization splitting prism (5)
1121Stack interferes, and obtains the 4th width of cloth interference fringe picture; Reflected light I
111222Be divided into the two bundle direction of propagation and all mutually perpendicular transmitted light I of polarization state by second polarization splitting prism (8)
1112221With reflected light I
1112222, reflected light I wherein
1112222With reflected light I
12The reflected light I that is divided into through the 3rd polarization splitting prism (11)
122Stack interferes, and obtains the 5th width of cloth interference fringe picture; Transmitted light I
1112221With reflected light I
12The transmitted light I that is divided into through polarization splitting prism (8)
121Stack interferes, and obtains the 6th width of cloth interference fringe picture; Above-mentioned first semi-transparent semi-reflecting prism (4), second semi-transparent semi-reflecting prism (9), first polarization splitting prism (5), the 3rd polarization splitting prism (11), second polarization splitting prism (8) all can be divided into a branch of light two mutually perpendicular transmittance light of bundle and reflected light, and first semi-transparent semi-reflecting prism (4), there is half-wave loss in second semi-transparent semi-reflecting prism (9) reflection of light that reflection is returned to described measured lens (10), first polarization splitting prism (5), the 3rd polarization splitting prism (11), the transmitted light that second polarization splitting prism (8) produces is vertical mutually with the polarization of reflected light attitude; Above-mentioned six width of cloth interference fringe pictures are once gathered in the spatial domain by six CCD target surfaces respectively, utilize the phase shift algorithm that the interference light intensity value of each interference fringe picture is calculated optical phase.
2. realize the device that utilizes the simultaneous phase-shifting interferometric method to measure the method for optical phase as claimed in claim 1, it is characterized in that: adopt the linear polarization frequency stabilized laser as light source, the laser of its output at first sees through rotatable half-wave plate, after enter beam-expanding system, obtain the plane of linear polarization light source; Place on the projecting direction of plane of linear polarization light source and become first semi-transparent semi-reflecting prism (4) of-45 ° with throw light, on its transmitted ray direction, place to become+second semi-transparent semi-reflecting prism (9) of 45 °, and on the transmitted ray direction of second semi-transparent semi-reflecting prism (9), place and become 90 ° measured lens (10) with transmitted ray with transmitted ray; On the reflection ray direction of first semi-transparent semi-reflecting prism (4), place and become first polarization splitting prism (5) of-45 ° with reflection ray, and on the direction opposite with the direct of travel of this reflection ray successively placement become 90 ° 1/8th wave plates and standard reference lens with reflection ray; On the reflection ray direction of second semi-transparent semi-reflecting prism (9), place to become+45 ° the 3rd polarization splitting prism (11), and on the direction opposite, place and become-45 ° polarization splitting prism (8) with reflection ray with the direct of travel of this reflection ray with reflection ray; Wherein, first semi-transparent semi-reflecting prism (4) is set to exist half-wave loss when light is invested 1/8th wave plates and described standard reference lens and reflection first polarization splitting prism of trend of purchasing (5) by first semi-transparent semi-reflecting prism (4) reflection, second semi-transparent semi-reflecting prism (9) is set to exist half-wave loss when light is invested the 3rd polarization splitting prism (11) and reflection second polarization splitting prism of trend of purchasing (8) by second semi-transparent semi-reflecting prism (9) reflection, first polarization splitting prism (5), the 3rd polarization splitting prism (11), second polarization splitting prism (8) is all and can makes transmitted light and the orthogonal semi-transparent semi-reflecting prism of polarization of reflected light attitude, and the fast axle of 1/8th wave plates is in the direction perpendicular to ray cast.
3. device as claimed in claim 2 is characterized in that: described beam-expanding system is made up of two convex lens.
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| CN102175333B (en) * | 2011-01-25 | 2014-06-18 | 北京工业大学 | Method and device for measuring laser pulse width and relative phase by simultaneous phase-shifting interferometry |
| CN102288104B (en) * | 2011-07-22 | 2014-02-12 | 中国科学院上海光学精密机械研究所 | Six-axis four-splitting interferometer |
| CN102507020B (en) * | 2011-11-01 | 2013-05-08 | 南京理工大学 | Microlens array-based synchronized phase-shifting interference test method and test device |
| CN103364090B (en) * | 2013-07-22 | 2015-10-21 | 北京工业大学 | Measure the device and method that ultra-short pulse laser propagates phase velocity in media as well |
| GB201313751D0 (en) | 2013-08-01 | 2013-09-18 | Renishaw Plc | Rotation Detection Apparatus |
| CN103630336B (en) * | 2013-12-02 | 2016-04-20 | 南京理工大学 | The dynamic interferometry method of array is postponed based on random phase retardation |
| CN106949853B (en) * | 2017-04-12 | 2019-02-05 | 北京理工大学 | Simultaneous phase-shifting interferometer measuration system and method based on liquid crystal computed hologram |
| CN109520428B (en) * | 2018-11-09 | 2020-01-31 | 中国科学院长春光学精密机械与物理研究所 | kinds of displacement measuring optical system |
| CN109765695B (en) * | 2019-03-29 | 2021-09-24 | 京东方科技集团股份有限公司 | Display system and display device |
| CN110361098B (en) * | 2019-08-26 | 2020-05-29 | 苏州大学 | Method for realizing random light field complex phase dryness measurement by utilizing light intensity correlation |
| CN112344878B (en) * | 2020-11-11 | 2022-02-22 | 北京理工大学 | Polarization synchronous phase-shifting interference measuring device and method |
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