CN102505112A - Device and method for sticking graphene film - Google Patents
Device and method for sticking graphene film Download PDFInfo
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- CN102505112A CN102505112A CN2011104430560A CN201110443056A CN102505112A CN 102505112 A CN102505112 A CN 102505112A CN 2011104430560 A CN2011104430560 A CN 2011104430560A CN 201110443056 A CN201110443056 A CN 201110443056A CN 102505112 A CN102505112 A CN 102505112A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 239000007788 liquid Substances 0.000 claims abstract description 39
- 210000005056 cell body Anatomy 0.000 claims description 57
- 239000012530 fluid Substances 0.000 claims description 25
- 230000001105 regulatory effect Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 230000001788 irregular Effects 0.000 claims description 3
- 238000009827 uniform distribution Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 abstract 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 14
- 239000004926 polymethyl methacrylate Substances 0.000 description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 239000011889 copper foil Substances 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 4
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000009997 thermal pre-treatment Methods 0.000 description 2
- 230000005492 condensed matter physics Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- -1 graphite alkene Chemical class 0.000 description 1
- 229910001867 inorganic solvent Inorganic materials 0.000 description 1
- 239000003049 inorganic solvent Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
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Abstract
The invention relates to a device for sticking a graphene film and an application method thereof, wherein the flow speed of liquid is adjusted so as to control the liquid surface height and the lowering speed, and thus a graphene film floating on the liquid surface is flatly stuck on a substrate surface. The method can stably complete zero-defect sticking of the graphene film and the substrate, and is applicable to the production of large-scale graphene composite films.
Description
Technical field
The present invention relates to a kind of device and method that graphene film and substrate are sticked of being used to.
Background technology
Graphene is owing to have excellent machinery, optics, calorifics, electricity and magnetic performance; Be expected to obtain widespread use, become one of Materials science and Condensed Matter Physics hot research fields in recent years rapidly in fields such as high-performance nano electron device, matrix material, field emmision material, gas sensor, store energy.
2008, U.S. scientific research personnel found can in the copper and mickel substrate, successfully grow large-sized graphene film with chemical Vapor deposition process (CVD method), thereby makes the scale operation of Graphene become possibility.
The CVD process of growth is following: with Copper Foil 1000 ℃ of thermal pretreatment 1.5 hours under argon gas and hydrogen environment; Feed methane then, carry out carbon and decompose, growth time is about 20 minutes.The first step will be controlled the nucleation density of Graphene through gas flow and pressure in the process of growth, and second step strengthened in the gas flow concentration of methane again and obtains continuously single-layer graphene uniformly, and vapour deposition takes place on the graphene film two sides simultaneously.
After growth has the Copper Foil of graphene film to take out, graphene film surface applied polymethylmethacrylate (PMMA) the gum resist in the front.Because graphene film thickness has only 1 atomic shell (about 0.35 nanometer), in the presence of capillary, graphene film itself can shrink group's bunch molecule of one-tenth.Therefore, use the protection of PMMA gum usually at the Graphene back side, prevent that graphene film loses support and becomes particulate state in Copper Foil corrosion back.Through oxygen plasma etch, make the copper substrate come out thereby remove the unwanted Graphene in the Copper Foil back side, in particular solution, corrode Copper Foil then.
After copper base material had been corroded and has cleaned, because the surface tension of solution, film can open and be tiled in solution surface, picks up from solution with particular substrate material then, and film is sticked on substrate surface.Through model ylid bloom action power, film is closely sticked on base material.
In the prior art, adopt manual method to drag for film usually, but there is following defective in manual method:
Manual method is unstable; Because the deviation and the unpredictability of manual operation; Normal generation film is wrinkling when the contact substrate; Stay bubble and make and stick failure, thereby influence the yield rate and the Key Performance Indicator (for example bubble or fold can make graphene film break, thereby reduce electric conductivity greatly) of graphene film;
In addition, the manual method inefficiency has greatly limited the scale operation of Graphene laminated film.
Summary of the invention
The invention provides a kind of device that graphene film and substrate are sticked of being used to, it comprises: the cell body of a contain fluid is distributed in one or more pod apertures of this cell body bottom surface and/or sidewall and one or more intravital support of this groove that is positioned at.
The present invention also provides a kind of the inventive method through using the invention described above device and liquid discharge method that graphene film and substrate are sticked, and it comprises:
(1) substrate is fixed on the intravital support of said groove,
(2) a kind of graphene film buoyant liquid that makes is packed in the said cell body,
(3) make said graphene film float on this fluid surface,
(4) make liquid pass through pod apertures and flow out, thereby make this film not have the gap, entirely stick in this substrate along with fluid surface descends.
Apparatus and method of the present invention make graphene film stably not have gap, smooth sticking with substrate, thereby improve the yield rate and the Key Performance Indicator (for example electric conductivity) of graphene film.In addition, device of the present invention can be enhanced productivity, thereby more helps the scale operation of Graphene laminated film.
Description of drawings
Do further detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Fig. 1 is a kind of skeleton view that is used to make apparatus of the present invention that graphene film and substrate stick;
Fig. 2 is a kind of sectional view that is used to make apparatus of the present invention that graphene film and substrate stick.
Embodiment
A kind of apparatus of the present invention that graphene film and substrate are sticked of being used to comprise: the cell body of a contain fluid is distributed in one or more pod apertures of this cell body bottom surface and/or sidewall and one or more intravital support of this groove that is positioned at.
In a kind of preferred embodiment; Apparatus of the present invention also comprise and are positioned at one or more pipelines that cell body is connected in pod apertures outward, the regulating valve that is used for the controlled liq take-off rate is installed on one or more therein pipelines and/or is used for oppositely injecting the regulating pump of liquid.The liquid take-off rate of the different pod apertures of said variable valve may command, thereby the flow direction and the flow velocity of the interior liquid of control flume, and then control angle and the speed that graphene film contacts with substrate.Said regulating pump can be used for oppositely injecting solution, lifts solution height, thereby the process of sticking is played correcting.
In one aspect of the invention, can a pod apertures connect a pipeline, also can the shared pipeline of a plurality of pod apertures.In one aspect of the invention, in the pipeline, said regulating valve and regulating pump be exist singly separately, also can exist simultaneously.
In another kind of preferred embodiment, the support in apparatus of the present invention and this cell body sidewall angle especially preferably can be adjusted in 0-90 degree scope, more preferably in 20-60 degree scope, thereby realize sticking of graphene film and substrate.Can be optimized this angle, thereby further improve the effect that sticks of graphene film and substrate.
In a kind of preferred embodiment, the pod apertures in apparatus of the present invention is positioned on the bottom surface of this cell body.
In a kind of preferred embodiment, the pod apertures in apparatus of the present invention according to a certain percentage and distribution design, thereby more effectively liquid flow direction and flow velocity in the control flume.
In a kind of preferred embodiment, the per-cent that the total area of pod apertures described in apparatus of the present invention accounts for the cell body wall total area of living in is 1%-35%, preferred especially 5%-25%.
In a kind of preferred embodiment, but the uniform distribution of pod apertures described in apparatus of the present invention, symmetrical distribution or irregular distribution.
The inventive method through using the invention described above device and liquid discharge method that graphene film and substrate are sticked comprises:
(1) substrate is fixed on the intravital support of said groove,
(2) a kind of graphene film buoyant liquid that makes is packed in the said cell body,
(3) make said graphene film float on this fluid surface,
(4) make liquid pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick in this substrate along with fluid surface descends.
In a kind of preferred embodiment; In the inventive method in step (4); The flow velocity that flows through pod apertures liquid through adjusting control liquid in the cell body flow direction and flow velocity and/or raise liquid height through reverse injection liquid, thereby realize graphene film and the no gap of substrate, smooth sticking.
Preferably make an end of graphene film at first contact and progressively all stick in substrate surface with substrate.Particularly preferably, wherein said adjusting is flow through the flow velocity of pod apertures liquid through aforementioned regulating valve realization, and said reverse injection liquid is realized through aforementioned regulating pump.
In another kind of preferred embodiment, this graphene film is contacted with the sidewall of said cell body.
Used graphene film can be soft graphite alkene film in the inventive method, does not preferably conform to the graphene film of other materials, the graphene film and the Graphene/polyethyleneterephthalate laminated film of band polymethylmethacrylate gum.
Used liquid is preferably selected from: organic solvent, for example acetone for all can make graphene film buoyant liquid in the inventive method; Inorganic solvent, for example water, iron nitrate aqueous solution, ferric chloride in aqueous solution, hydrochloric acid, nitric acid etc.
Used substrate is metallic substance or non-metallic material in the inventive method, preferred glass, silica glass, polyethyleneterephthalate, silicon-dioxide, silicon single crystal, polysilicon, tetrafluoroethylene.
Below in conjunction with attaching Fig. 1 and 2, two kinds of preferred specific embodiments of the present invention are carried out example description, but and be not intended to scope of the present invention is carried out the restriction of any way.
Fig. 1 is a kind of skeleton view that is used to make apparatus of the present invention that graphene film 4 and substrate 1 stick.Fig. 2 is a kind of sectional view that is used to make apparatus of the present invention that graphene film 4 and substrate 1 stick.Said device comprises: the cell body 3 of contain fluid 2 is distributed in one or more pod apertures 5 of these cell body 3 bottom surfaces and/or sidewall (as shown in Figure 2) and one or more support 6 that is positioned at this cell body 3.Said pod apertures according to a certain percentage and distribution design.Preferably, the per-cent that the total area of said pod apertures accounts for the cell body wall total area of living in is 1%-35%, preferred especially 5%-25%.Preferably, but said pod apertures uniform distribution, symmetrical distribution or irregular distribution.Outside the cell body of this device, be connected in one or more pipeline (not shown) of pod apertures, the regulating valve (not shown) that is used for the controlled liq take-off rate be installed on one or more therein pipelines and/or be used for oppositely injecting the regulating pump (not shown) of liquid.Said support 6 can be adjusted in 0-90 degree scope with this cell body sidewall angle, preferably in 20-60 degree scope.
Below in conjunction with embodiment the present invention is carried out example description in more detail.
The graphene film of band polymethylmethacrylate gum is provided through following method:
1. the Graphene process of growth is carried out as follows: at first with 5 * 20cm
2The Copper Foil of area is (Ar wherein: about 95 parts by volume, H under argon gas and hydrogen environment
2: about 5 parts by volume) in
In the enclosed system of (length) in 1000 ℃ of thermal pretreatment 1.5 hours.Feed methane then, carry out carbon and decompose, mixed gas flow is 500cm
3PM (Ar wherein: about 95 parts by volume, H
2: about 5 parts by volume, CH
4: about 0.03 parts by volume), growth time is about 20 minutes.The first step will be controlled the nucleation density of Graphene through gas flow and pressure in the process of growth; The concentration (to about 0.05 parts by volume) that second step was strengthened methane in the gas flow again obtains continuously single-layer graphene uniformly, and vapour deposition takes place on the two sides of Copper Foil simultaneously;
2. on the Graphene in Copper Foil front, apply PMMA gum resist, coat-thickness is about 200～300 nanometers;
3. then remove the unwanted Graphene in the Copper Foil back side through oxygen plasma etch.The above-mentioned graphene film that has the polymethylmethacrylate gum is used for the following embodiment of the invention and Comparative Examples.
Embodiment 1
A kind of like this device that graphene film and substrate are sticked of being used to below the employing, it comprises: the 50L cell body of a contain fluid (high 0.1m * wide 0.5m * long 1m), 8 equirotal pod apertures that are distributed in this cell body bottom surface (are divided into 4 row; Two holes of every row; Welt two row, all the other two row are evenly distributed, and each Kong Jun is positioned at the bottom margin place; And wherein four are positioned at the bight); And one be positioned at the intravital support of this groove, and wherein this support becomes miter angle with this cell body sidewall, and the pod apertures total area accounts for 8% of cell body bottom surface.
A substrate of glass (wide 0.4m * long 0.9m) is fixed on the intravital support of groove; 45L acetone liquid is packed in the said cell body; Make the graphene film (wide 0.35m * long 0.8m) that has the polymethylmethacrylate gum float on this fluid surface; Make acetone pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick on this substrate of glass along with the acetone solution surface descends.
A kind of like this device that graphene film and substrate are sticked of being used to below the employing; It comprises: the 75L cell body of a contain fluid (high 0.1m * wide 0.75m * long 1m); 12 equirotal pod apertures that are distributed in this cell body bottom surface (are divided into 4 row; 3 holes of every row, welt two row, all the other two row are evenly distributed; In every row, two holes are positioned at the bottom margin place, one be positioned in the middle of), and one be positioned at the intravital support of this groove, wherein this support becomes 60 degree angles with this cell body sidewall, the pod apertures total area accounts for 12% of cell body bottom surface.
A polyethyleneterephthalate substrate (wide 0.6m * long 0.9m) is fixed on the intravital support of groove; 70L water liquid is packed in the said cell body; Make the graphene film (wide 0.5m * long 0.8m) that has the polymethylmethacrylate gum float on this fluid surface; Make water pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick in this polyethyleneterephthalate substrate along with the water fluid surface descends.
Embodiment 3
A kind of like this device that graphene film and substrate are sticked of being used to below the employing; It comprises: the 25L cell body of a contain fluid (high 0.1m * wide 0.25m * long 1m); Be distributed in 10 equirotal pod apertures (4 holes on the sidewall, every sidewall subsides hole of centre, base of this cell body bottom surface and sidewall; 6 holes on the bottom surface, two holes of every row, welt two row; All the other delegation are distributed in bottom surface central authorities; Each Kong Jun is positioned at the bottom margin place, and wherein four be positioned at the bight), and one be positioned at the intravital support of this groove; Wherein this support becomes 50 degree angles with this cell body sidewall, and the pod apertures total area accounts for 15% of cell body bottom surface and sidewall.
A silica-primed (wide 0.2m * long 0.9m) is fixed on the intravital support of groove; 22.5L iron nitrate aqueous solution (concentration is 20 weight %) liquid is packed in the said cell body; Make the graphene film (wide 0.15m * long 0.8m) of band polymethylmethacrylate gum float on this fluid surface; Make iron nitrate aqueous solution pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick on this silica-primed along with the iron nitrate aqueous solution fluid surface descends.
Embodiment 4
A kind of like this device that graphene film and substrate are sticked of being used to below the employing; It comprises: and the 100L cell body of a contain fluid (high 0.1m * 1m * 1m); Be distributed in 5 equirotal pod apertures (four holes lay respectively at the place, four angles of bottom surface, a centermost that is positioned at the bottom surface) of this cell body bottom surface, and one is positioned at the intravital support of this groove; Wherein this support becomes 55 degree angles with this cell body sidewall, and the pod apertures total area accounts for 12% of cell body bottom surface.
A monocrystal silicon substrate (wide 0.9m * long 0.9m) is fixed on the intravital support of groove; 95L hydrochloric acid (concentration is 20 weight %) liquid is packed in the said cell body; Make the graphene film (wide 0.8m * long 0.8m) that has the polymethylmethacrylate gum float on this fluid surface; Make hydrochloric acid pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick on this monocrystal silicon substrate along with the hydrochloric acid solution surface descends.
Embodiment 5
A kind of like this device that graphene film and substrate are sticked of being used to below the employing; It comprises: the 50L cell body of a contain fluid (high 0.1m * wide 0.5m * long 1m); 9 equirotal pod apertures that are distributed in this cell body bottom surface (are divided into 3 row; 3 holes of every row, welt two row, all the other delegation are distributed in bottom surface central authorities; In every row, two holes are positioned at the bottom margin place, one be positioned in the middle of), and one be positioned at the intravital support of this groove, wherein this support becomes miter angle with this cell body sidewall, the pod apertures total area accounts for 5% of cell body bottom surface.
A polysilicon substrate (wide 0.4m * long 0.9m) is fixed on the intravital support of groove; 45L ferric chloride in aqueous solution (concentration is 30 weight %) liquid is packed in the said cell body; Make the graphene film (wide 0.35m * long 0.8m) of band polymethylmethacrylate gum float on this fluid surface; Make ferric chloride in aqueous solution pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick in this polysilicon substrate along with the ferric chloride in aqueous solution fluid surface descends.
A kind of like this device that graphene film and substrate are sticked of being used to below the employing; It comprises: the 50L cell body of a contain fluid (high 0.1m * wide 0.5m * long 1m); Be distributed in 4 equirotal pod apertures (4 holes lay respectively at the central authorities on 4 sidewall bases of cell body) of this cell body sidewall; And one be positioned at the intravital support of this groove, and wherein this support becomes 30 degree angles with this cell body sidewall, and the pod apertures total area accounts for cell body lateral 10%.
A tetrafluoroethylene substrate (wide 0.45m * long 0.9m) is fixed on the intravital support of groove; 45L aqueous nitric acid (concentration is 45 weight %) liquid is packed in the said cell body; Make the graphene film (wide 0.4m * long 0.8m) of band polymethylmethacrylate gum float on this fluid surface; Make nitric acid pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick in this tetrafluoroethylene substrate along with the nitric acid liquid surface descends.
Comparative Examples
The graphene film (wide 0.8m * long 0.8m) that uses manual method well known in the prior art to drag for to have the polymethylmethacrylate gum also sticks it on this substrate of glass (wide 1m * long 1m).
At first, the film of the acquisition of each embodiment and Comparative Examples is sticked in the product of substrate of glass estimate comparison; Secondly, the film of measuring the acquisition of each embodiment and Comparative Examples sticks in the square resistance of the product of substrate of glass.The result is shown in following table.
Can know by last table data: use device of the present invention to adopt the inventive method can make that graphene film and substrate are seamlessly more smooth and stick, and can make that the graphene film electric conductivity is higher.
And use device of the present invention to adopt the inventive method can help the scale operation of Graphene laminated film.
Should be understood that the present invention is not limited to said embodiment.Under the situation of spirit that does not depart from the application's claim and scope, can carry out multiple modification and improvement to the present invention, for example can be to selecting combination between the above-mentioned preferred feature.
Claims (10)
1. one kind is used to device that graphene film and substrate are sticked, and it comprises: the cell body of a contain fluid is distributed in one or more pod apertures of this cell body bottom surface and/or sidewall and one or more intravital support of this groove that is positioned at.
2. the device of claim 1; It also comprises and is positioned at one or more pipelines that cell body is connected in pod apertures outward, the regulating valve that is used for the controlled liq take-off rate is installed on one or more therein pipelines and/or is used for oppositely injecting the regulating pump of liquid.
3. claim 1 or 2 device, wherein said support and this cell body sidewall angle can be adjusted in 0-90 degree scope, preferably in 20-60 degree scope.
4. each device among the claim 1-3, the per-cent that the total area of wherein said pod apertures accounts for the cell body wall total area of living in is 1%-35%, preferred 5%-25%.
5. each device among the claim 1-4, but wherein said pod apertures uniform distribution, symmetrical distribution or irregular distribution.
6. each device among the claim 1-5, wherein said pod apertures is positioned on this cell body bottom surface.
7. one kind through using the method that each described device and liquid discharge method stick graphene film and substrate in the claim 1 to 6, and it comprises:
(1) substrate is fixed on the intravital support of said groove,
(2) a kind of graphene film buoyant liquid that makes is packed in the said cell body,
(3) make said graphene film float on this fluid surface,
(4) make liquid pass through pod apertures and flow out, thereby make this graphene film not have the gap, entirely stick in this substrate along with fluid surface descends.
8. the method for claim 7; Wherein in step (4); The flow velocity that flows through pod apertures liquid through adjusting control liquid in the cell body flow direction and flow velocity and/or raise liquid height through reverse injection liquid; Thereby realize the graphene film and the no gap of substrate, smooth sticking, preferably make an end of graphene film at first contact and progressively all stick in substrate surface with substrate.
9. the flow velocity that the method for claim 8, wherein said adjusting flow through pod apertures liquid is realized through each described regulating valve in the claim 2 to 6.
10. the method for claim 8, wherein said reverse injection liquid is realized through each described regulating pump of claim 2 to 6.
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| CN104029431A (en) * | 2014-06-23 | 2014-09-10 | 南开大学 | Preparation method of twist angle-controllable multilayer graphene structure |
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| CN104485385A (en) * | 2014-11-21 | 2015-04-01 | 广西智通节能环保科技有限公司 | Preparation method for transparent graphene membrane electrode of solar cell |
| CN104609416A (en) * | 2015-02-15 | 2015-05-13 | 重庆墨希科技有限公司 | Carrier used for graphene growth and method for preparing graphene |
| CN106927068A (en) * | 2017-01-13 | 2017-07-07 | 北京卫星制造厂 | A kind of Graphene film Rapid Implementation device and process |
| TWI600611B (en) * | 2014-01-29 | 2017-10-01 | 奈創國際控股有限公司 | Apparatus and method for formatting graphene film, and graphene film structure |
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| TWI600611B (en) * | 2014-01-29 | 2017-10-01 | 奈創國際控股有限公司 | Apparatus and method for formatting graphene film, and graphene film structure |
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