CN102498374B - 光学单元 - Google Patents
光学单元 Download PDFInfo
- Publication number
- CN102498374B CN102498374B CN201080038143.1A CN201080038143A CN102498374B CN 102498374 B CN102498374 B CN 102498374B CN 201080038143 A CN201080038143 A CN 201080038143A CN 102498374 B CN102498374 B CN 102498374B
- Authority
- CN
- China
- Prior art keywords
- light
- filter member
- optical unit
- substrate
- protuberance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- 239000007769 metal material Substances 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 15
- 239000010931 gold Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 238000010183 spectrum analysis Methods 0.000 description 4
- 239000004408 titanium dioxide Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1086—Beam splitting or combining systems operating by diffraction only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009194369A JP4743917B2 (ja) | 2009-08-25 | 2009-08-25 | 光学ユニット |
JP2009-194369 | 2009-08-25 | ||
PCT/JP2010/062688 WO2011024590A1 (ja) | 2009-08-25 | 2010-07-28 | 光学ユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102498374A CN102498374A (zh) | 2012-06-13 |
CN102498374B true CN102498374B (zh) | 2015-02-18 |
Family
ID=43627700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080038143.1A Expired - Fee Related CN102498374B (zh) | 2009-08-25 | 2010-07-28 | 光学单元 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8570510B2 (zh) |
EP (1) | EP2472239A4 (zh) |
JP (1) | JP4743917B2 (zh) |
KR (1) | KR20120088654A (zh) |
CN (1) | CN102498374B (zh) |
WO (1) | WO2011024590A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103063299B (zh) * | 2012-12-27 | 2014-09-10 | 南京邮电大学 | 一种微型光谱仪 |
KR20160142426A (ko) * | 2015-06-02 | 2016-12-13 | 고려대학교 산학협력단 | 광학 필터링 유닛 및 이를 포함하는 분광 장치 |
TWI541493B (zh) * | 2015-09-01 | 2016-07-11 | 國立交通大學 | 一種分光器及其光譜儀 |
CN108458785A (zh) * | 2018-01-31 | 2018-08-28 | 云谷(固安)科技有限公司 | 光谱检测组件及其制备方法、光谱仪 |
FR3084459B1 (fr) * | 2018-07-30 | 2020-07-10 | Silios Technologies | Capteur d'imagerie multispectrale pourvu de moyens de limitation de la diaphonie |
EP3671310A1 (en) * | 2018-12-18 | 2020-06-24 | Thomson Licensing | Optical manipulation apparatus for trapping or moving micro or nanoparticles |
CN111141385B (zh) * | 2020-01-02 | 2022-05-24 | 暨南大学 | 窄带透射滤波器及片上光谱分析与成像*** |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05249032A (ja) * | 1992-03-09 | 1993-09-28 | Masaya Yabe | 半導体分光検出装置 |
JP2002296116A (ja) * | 2001-03-30 | 2002-10-09 | Yokogawa Electric Corp | マルチチャンネル分光器 |
CN1728909A (zh) * | 2004-06-26 | 2006-02-01 | 三星Sdi株式会社 | 有机电致发光显示装置及其制造方法 |
WO2007118895A1 (fr) * | 2006-04-19 | 2007-10-25 | Commissariat A L'energie Atomique | Filtre spectral micro-structure et capteur d'images |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002196123A (ja) * | 2000-12-26 | 2002-07-10 | Asahi Glass Co Ltd | 2波長用回折光学素子、2波長光源装置および光学ヘッド装置 |
WO2005089098A2 (en) * | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
US7395698B2 (en) * | 2005-10-25 | 2008-07-08 | Georgia Institute Of Technology | Three-dimensional nanoscale metrology using FIRAT probe |
JP4621270B2 (ja) * | 2007-07-13 | 2011-01-26 | キヤノン株式会社 | 光学フィルタ |
JP2009194369A (ja) | 2008-01-16 | 2009-08-27 | Renesas Technology Corp | 半導体装置 |
-
2009
- 2009-08-25 JP JP2009194369A patent/JP4743917B2/ja not_active Expired - Fee Related
-
2010
- 2010-07-28 WO PCT/JP2010/062688 patent/WO2011024590A1/ja active Application Filing
- 2010-07-28 EP EP10811641.9A patent/EP2472239A4/en not_active Withdrawn
- 2010-07-28 KR KR1020127004913A patent/KR20120088654A/ko not_active Application Discontinuation
- 2010-07-28 US US13/390,650 patent/US8570510B2/en not_active Expired - Fee Related
- 2010-07-28 CN CN201080038143.1A patent/CN102498374B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05249032A (ja) * | 1992-03-09 | 1993-09-28 | Masaya Yabe | 半導体分光検出装置 |
JP2002296116A (ja) * | 2001-03-30 | 2002-10-09 | Yokogawa Electric Corp | マルチチャンネル分光器 |
CN1728909A (zh) * | 2004-06-26 | 2006-02-01 | 三星Sdi株式会社 | 有机电致发光显示装置及其制造方法 |
WO2007118895A1 (fr) * | 2006-04-19 | 2007-10-25 | Commissariat A L'energie Atomique | Filtre spectral micro-structure et capteur d'images |
Also Published As
Publication number | Publication date |
---|---|
EP2472239A1 (en) | 2012-07-04 |
JP2011047693A (ja) | 2011-03-10 |
US8570510B2 (en) | 2013-10-29 |
KR20120088654A (ko) | 2012-08-08 |
JP4743917B2 (ja) | 2011-08-10 |
EP2472239A4 (en) | 2017-11-22 |
CN102498374A (zh) | 2012-06-13 |
WO2011024590A1 (ja) | 2011-03-03 |
US20120147373A1 (en) | 2012-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102498374B (zh) | 光学单元 | |
US7433552B2 (en) | Obtaining analyte information | |
US7315667B2 (en) | Propagating light to be sensed | |
US7522786B2 (en) | Transmitting light with photon energy information | |
US8594470B2 (en) | Transmittting light with lateral variation | |
EP1800752A1 (en) | Sensing photon energies of optical signals | |
JP2004354176A (ja) | 光検出器及びそれを用いた分光器 | |
EP2450693A1 (en) | An arrayed waveguide grating (AWG) | |
US20200363323A1 (en) | Spectrometer | |
US11326946B2 (en) | Integrated bound-mode spectral sensors with chirped gratings | |
JP2012013527A (ja) | 分光光度計 | |
JPH06229829A (ja) | 受光素子アレイ | |
KR101401491B1 (ko) | 분광 소자, 분광 장치 및 분광 방법 | |
CN113267257A (zh) | 一种红外成像模组、红外成像仪 | |
JP5884532B2 (ja) | フォトダイオード、波長センサ、波長測定装置 | |
US9285522B2 (en) | Tilt structure | |
JP5604959B2 (ja) | 光測定装置 | |
Chen et al. | Application of surface plasmon polaritons in cmos digital imaging | |
TWI452268B (zh) | 用於收光之光學頭及使用其之光學系統 | |
US11125618B1 (en) | Photonic integrated spectrometer with tunable dispersive element and method of using same | |
US20240230951A1 (en) | Devices including an optical metastructure, and methods for designing metastructures | |
TWI404922B (zh) | Spectral spectral measurement system | |
CN116609271A (zh) | 一种基于空芯波导芯片的微型红外气体传感装置 | |
JP2005266653A (ja) | 光学フィルタ及びバンドパスフィルタ | |
TWI503527B (zh) | 分光裝置及分光系統 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: JAPAN ELECTRICAL SCHEME INNOVATION CORPORATION Free format text: FORMER OWNER: NEC SYSTEM TECHNOLOGIES LTD. Effective date: 20141121 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20141121 Address after: Tokyo, Japan, Japan Applicant after: Japan Electrical Scheme Innovation Corporation Address before: Osaka Applicant before: NEC System Technologies, Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150218 Termination date: 20190728 |