CN102457014A - Laser source - Google Patents
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- CN102457014A CN102457014A CN2010105279662A CN201010527966A CN102457014A CN 102457014 A CN102457014 A CN 102457014A CN 2010105279662 A CN2010105279662 A CN 2010105279662A CN 201010527966 A CN201010527966 A CN 201010527966A CN 102457014 A CN102457014 A CN 102457014A
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Abstract
The invention relates to a laser source, which is provided with a structure for effectively inhibiting the occurrence of a light surge when the pulsed light is suspended to output and restarted; the laser source comprises a first light source, a second light source, optical amplification fibres and a control unit, wherein the first light source is used for outputting light taken as the pulsed light and having a first wavelength, the second light source is used for outputting the light having a second wavelength different from the first wavelength, the optical amplification fibres are taken as an optical amplifier and used for amplifying the pulsed light from the first light source and the light from the second light source, and the control unit for controlling a light output from the second light source according to the light output from the first light source; the first light source is provided with an ON state which starts to output the pulsed light repeatedly at a fixed period and continues the output, and an OFF state for suspending to output the pulsed light during a duration not smaller than the fixed period; and the control unit, when the first light source is within the duration of the OFF state, controls the second light source to output the light to the optical amplification fibres, thereby inhibiting population inversion of rare-earth elements added to the optical amplification fibres from increasing.
Description
Technical field
The present invention relates to a kind of high output lasing light emitter, the pulsed light of its output through using optical amplifier to amplify, and the present invention is applicable to processed and applied, medical application, or the like.
Background technology
In many fields such as laser treatment, medical treatment, measurements, need have short pulse width and high impulse peak power and allow the pulse laser of very fast repetition rate.In the laser treatment field, pulse laser is normally realized through Q switching.Yet, in the Q-switched pulse lasing light emitter, aspect the short pulse generation, there is restriction, but also is being difficult to realize quick repetition rate, because equaling light, pulse duration in optical resonator, comes the transmission back duration repeatedly.For this reason, considering to use the lasing light emitter of MOPA (master-oscillator power amplifier) system, in the MOPA system, seed light source is pulse modulation semiconductor laser or analog, and optical amplifier is positioned at its downstream.Be known that; When adopting the MOPA system to be used for lasing light emitter; Through being that a kind of fiber amplifier that is doped with the optical fiber of rare earth element is formed the optical amplifier part with optics amplifying medium wherein, its effect is to realize high-gain and stable diffraction limited beam quality easily.
Yet; When suspending pulse operation in the pulsed laser source that is using the MOPA system; Termination is brought up to a limiting value with population inversion from the pulsed light output meeting of seed light source optical fiber, said optical fiber is the optics amplifying medium that comprises in the fiber amplifier and be doped with rare earth element.Therefore, in case just can produce when restarting pulse operation as the temporary transient light surge of increase of the luminous power of output light.Prevent method as being used to, studying the method that after restarting to export, stops pulse laser, for example be seen in open this paper of Japanese patent application 2001-358087 number with the laser radiation workpiece of consequent smooth surge.
Summary of the invention
The inventor has studied above-mentioned traditional lasing light emitter in great detail, and the result has found following point.
That is, also possibly influence will be by some things outside the workpiece of laser radiation in the generation of above-mentioned smooth surge.For example, the generation of light surge can cause the fault of lasing light emitter.It will also be appreciated that and adopt the method for operating that stops fiber amplifier, but be difficult to realize stable operation at short notice that this is because the warm-up operation before the heat balance needs to consume the regular hour in the process of pumping once more (pumping) fiber amplifier.As stated, expectation provides a kind of like this lasing light emitter, and it can suppress the generation of light surge after restarting, and can suspend the pulsed light of stably exporting constant intensity under the situation of exporting pulsed light from the lasing light emitter that uses the MOPA system.
The present invention proposes in order to eliminate the problems referred to above.The purpose of this invention is to provide a kind of lasing light emitter, its structure suppresses the generation of light surge effectively when being used for restarting after suspending the output pulsed light.
In order to realize top purpose, lasing light emitter according to the present invention comprises first light source, secondary light source, optical amplifier and control unit.The light that said first light source output has first wavelength is as pulsed light.Secondary light source output has the light of second wavelength that is different from first wavelength.Said optical amplifier is to amplifying from the light of first light source output and the light of exporting from secondary light source.Said control unit is exported from the light of secondary light source according to the light output control from first light source.
Especially, in lasing light emitter according to the present invention, said first light source has beginning and continues and repeats to export ON (unlatchings) state of pulsed light and at the OFF state of the output of the duration time-out pulsed light that is no less than the said fixed cycle with the fixed cycle.Said control unit is given said optical amplifier at the duration control secondary light source output light that said first light source is in OFF (closing) state.
Aforesaid according to lasing light emitter of the present invention in; For example when adopting fiber amplifier as optical amplifier; Be in the OFF state (under this state at first light source; Pulsed light output from first light source is suspended at the duration that is no less than the said fixed cycle) in, will export to an optical amplifying fiber from the light of secondary light source.In this case; The optics that population inversion comprises in said optical amplifier is suppressed in amplifying; Therefore when first light source becomes ON state (under this state, beginning also continues to repeat to export pulsed light from first light source with the fixed cycle), can prevent the generation of light surge effectively.
Also can comprise a filter according to lasing light emitter of the present invention.Said filter sees through the light with said first wavelength, but stops the light that from the amplification light of said optical amplifier output, has second wavelength.When said lasing light emitter further comprises aforesaid filter, can effectively prevent to output to the outside of lasing light emitter from secondary light source output and through the light that optical amplifier amplifies.
Said control unit can be configured to the control secondary light source and when OFF becomes ON or at the duration that first light source is in the ON state, end light output at the state of first light source.When as stated when first light source is under the ON state light output of ending from secondary light source, can be under the situation of the peak power of the pulsed light that not have to suppress to export laser be outputed to the outside of lasing light emitter from first light source.
Said optical amplifier is configured to preferably comprise that the optical fiber that is doped with optics amplification element is as the optics amplifying medium.Said optical amplifier preferably is configured and makes from the rise time of the light of secondary light source output and be set to time of 50%-200% that said optics amplifies the pumping state life period of element.
Description of drawings
Fig. 1 is the view of expression according to the structure of first embodiment of lasing light emitter of the present invention;
Fig. 2 is the view of the LWPF 26 that comprises in the lasing light emitter (Fig. 1) of expression according to first embodiment;
Fig. 3 A and Fig. 3 B are the view of the multiplexer 23 that comprises in the lasing light emitter (Fig. 1) of expression according to first embodiment;
Fig. 4 A and Fig. 4 B for expression from view according to the laser output of the lasing light emitter (Fig. 1) of first embodiment;
Fig. 5 for expression through view according to the laser treatment of the lasing light emitter (Fig. 1) of first embodiment;
Fig. 6 for expression with galvano scanner on the X-direction and the view of the example of the relation between the existence/deletion condition that is scanning on the Y direction and existence/disappearance (ON state and the OFF state) situation exported from the laser of first light source 17 and secondary light source 21;
Fig. 7 for expression with galvano scanner on the X-direction and the view of another example of the relation between the existence/deletion condition that is scanning on the Y direction and existence/disappearance (ON state and the OFF state) situation exported from the laser of first light source 17 and secondary light source 21; With
Fig. 8 is the view of expression according to the structure of second embodiment of lasing light emitter of the present invention.
Embodiment
Below, will specify embodiment with reference to Fig. 1, Fig. 2, Fig. 3 A to Fig. 4 B and Fig. 5 to Fig. 8 according to lasing light emitter of the present invention.In the explanation of accompanying drawing, identical or corresponding parts are referred to by identical reference symbol, and omit the explanation of repetition.
(first embodiment)
With first embodiment of explanation according to lasing light emitter of the present invention.Fig. 1 is the view of expression according to the structure of the lasing light emitter 1 of first embodiment.As shown in Figure 1, lasing light emitter 1 comprises optical amplifying fiber 11,12, pump light source 13,14; Combiner 15,16, the first light sources 17, optical isolator 18,20; Band pass filter 19, secondary light source 21, control unit 22; WDM (Wave division multiplexing) coupler 23, end cap 24, lens 25 and LWPF (long wavelength's transmission filter) 26.
In lasing light emitter 1, when the pumping light beams from pump light source 13,14 outputs was imported into the optical amplifying fiber 11,12, each optical amplifying fiber 11,12 all became the pumping state.This causes the light of first light source, 17 outputs of the seed light source in light amplification fiber 11,12 is amplified, and the light of said amplification is exported from lasing light emitter 1.That is, lasing light emitter 1 has MOPA (master-oscillator power amplifier) structure.
There is not particular restriction for first light source 17, as long as it is the light source that can export the pulsed light of seed light; Yet YAG lasing light emitter or analog are suitable the application.First light source 17 in the present embodiment is under the situation of supplying with about 200mA drive current, with the pulsed light (seed light) of about 700mW output 1064nm wavelength.In the 1060nm of seed light wavelength period, each optical amplifying fiber 11,12 all has a gain.
Be used for preferably element Yb of active medium that optics amplifies; Its with the compatible 1060nm wavelength of existing YAG lasing light emitter near have a gain; And it is favourable aspect power-conversion efficiencies, because the pumping light wavelength is near the light wavelength that will amplify.What therefore, optical amplifying fiber 11,12 was desirable is doped with the YbDF (being doped with the optical fiber of Yb) of Yb for core.Optics amplifier section in the lasing light emitter 1 partly is made up of preamplifier part that comprises optical amplifying fiber 11 and the booster amplifier that comprises optical amplifying fiber 12.
Said preamplifier is partly by optical amplifying fiber 11, pump light source 13 be used for pumping light is directed to from pump light source 13 that the combiner 15 of optical amplifying fiber 11 forms.Said booster amplifier is partly by optical amplifying fiber 12, a plurality of pump light source 14 be used for pumping light is formed from the combiner 16 that pump light source 14 is directed to optical amplifying fiber 12.
In said preamplifier part, 11 pairs of seed light from first light source 17 of optical amplifying fiber are amplified, and said seed light transmission is continuously passed through optical isolator 18 and combiner 15, and arrive optical amplifying fiber 11.On the other hand, the pumping light of exporting from the pump light source 13 that comprises pumping LD module is provided to the optical amplifying fiber 11 through combiner 15 on forward direction.Said pumping light has the wavelength of 975nm and the power of 5W level.Said optical amplifying fiber 11 is based on phosphatic YbDF, and its core is doped with the phosphorus that concentration is 26.4wt% (P) and concentration is the aluminium (Al) of 0.8wt%, and said core is by pumping.The core diameter of optical amplifying fiber 11 is 10 μ m, and the diameter of first covering is about 125 μ m, and the unsaturated absorption coefficient under the 915nm wavelength is 1.8dB/m, and length is 3.4m.Band pass filter 19 is positioned at the downstream of optical amplifying fiber 11, so that suppress except the wavelength from the light of seed light source (first light source 17) output.
In said booster amplifier part, 12 pairs of optical amplifying fibers amplify through the light of combiner 16.On forward direction, has the wavelength of 975nm and the power of 5W level through the pumping light beams that combiner 16 is provided to the optical amplifying fiber 12 from each pump light source 14.That is the power that, is provided to the pumping light beams in the optical amplifying fiber 12 is 30W.Optical amplifying fiber 12 the has been codopes silica-based YbDF of Al, its core are doped with the aluminium (Al) of 1.5wt% concentration and by pumping.The core diameter of optical amplifying fiber 12 is 10 μ m, and the diameter of first covering is about 125 μ m, and the unsaturated absorption coefficient under the 915nm wavelength is 1.5dB/m, and length is 4m.
Fig. 3 A and 3B are the view of expression multiplexer 23.Fig. 3 A and 3B represent the situation as multiplexer 23 with WDM.Especially, shown in Fig. 3 A, be arranged in about the opposite position of multiplexer 23 from first light source 17 with from the input port of the light beam of secondary light source 21.Fig. 3 B is the view of expression WDM filter characteristic.In Fig. 3 B, curve S 1 is illustrated in the optical transmission rate under each wavelength of WDM filter, and curve S 2 is illustrated in the reflection of light rate under each wavelength of said filter.Shown in Fig. 3 B, be that the luminous energy of 1064nm is by multiplexer 23 transmission and export to an output port from the wavelength of first light source 17 output.On the other hand, be that the light of 1030nm is reflected the WDM filter and exports to said output port from the wavelength of secondary light source 21 output, there is little light to be transmitted to input port from the light of first light source 17.For this reason, shown in Fig. 3 A,, can export in identical direction from the light beam that first light source 17 and secondary light source 21 are exported though that first light source 17 and secondary light source 21 are arranged to about multiplexer 23 is relative.It is multiplexed that this structure allows multiplexer 23 to carry out from first light source 17 light of exporting and the light of exporting from secondary light source 21, and multiplexed light is exported to optical isolator 20.Replace the WDM filter, multiplexer 23 also can be the WDM coupler.Said WDM coupler is a fused optical fibre coupler, and wherein optical fiber is melted and engages, and it is cheap and fine and close.
As shown in Figure 1, to control through galvano scanner 100 and so on from the irradiation direction of the laser of lasing light emitter 1 output, said galvano scanner 100 is arranged in the downstream of end cap 24, and lens 25 and LWPF 26 are arranged between end cap 24 and galvano scanner 100.Control unit 22 also receives the operation information of galvano scanner 100 through circuit 180a.
To use Fig. 4 A, 4B and 5 explanations and regularly below from the output of each light beam of secondary light source 21 from first light source 17.Fig. 4 A and 4B are the view of expression from the power output of each laser beam of lasing light emitter 1 output.Fig. 5 uses lasing light emitter 1 for expression and handles the view of the example of workpiece.
As shown in Figure 5, present embodiment will be explained the situation of use from the surface of the laser treatment workpiece P of lasing light emitter 1 output.Especially, use the laser L that exports from lasing light emitter 1 surface of a plate shaped workpiece P being handled along a plurality of ranges of linearity (part A Fig. 5 is the target area) that are parallel to the direction of X axle.The irradiation area of lasing light emitter 1 upward moves in the zone (the part B among Fig. 5) that connects between the adjacent part A end, and the end of said adjacent part is positioned at the lateral margin of the Y direction of workpiece P.In this layout, the irradiation area of lasing light emitter 1 can use laser L that a plurality of processing sections (part A) that are parallel to the X axle are handled on as the part A of processing target and as alternately moving on the part B of the target that is untreated thus.In this operation, the irradiation area of lasing light emitter 1 move on on the part B during need to end to shine with laser L.
In order to handle workpiece P, shown in Fig. 4 A, the pulsed light (ON state) of first light source 17 output 1064nm wavelength, and lasing light emitter 1 is with in the ON time (in Fig. 4 A by time T l
1Shown time band) output is amplified the pulse laser L1 that obtains from said pulsed light, and the irradiation area of the laser of exporting from lasing light emitter 1 in be with in the said ON time is arranged on the part A of Fig. 5.Next, the irradiation area of the laser that comes self-excitation light source 1 be arranged in (OFF state) on the part B of Fig. 5 during galvano scanner 100 end from first light source, 17 output pulsed lights.This causes suspending from lasing light emitter 1 output pulse laser L1.Yet during this pause period, the population inversion meeting of adding the rare earth element in the optical amplifying fiber 12 to is elevated to extreme value, and this will cause restarting to be used for point (the time T l that the pulse laser L1 of self-excitation light source 1 shines
2Starting point) power output of locating pulse laser L1 has a temporary transient rapid rising, comes the irradiation area of the laser L of self-excitation light source 1 to come once more on the part A among Fig. 5 at the said point of irradiation place of restarting; Above-mentionedly will cause producing a light surge.When producing huge light surge, just possibly in each part of lasing light emitter 1, cause fault, breakage etc.
In contrast; Shown in Fig. 4 B; Be configured to be with in the OFF time during (by the time band of time T 2 indications) from secondary light source 21 output light according to the lasing light emitter 1 of present embodiment, the output from the seed light (pulsed light) of first light source 17 in being with in the said OFF time is suspended a time period (it is in the OFF state) that is no less than the pulse period of said pulsed light.Then, the light from secondary light source 21 outputs is amplified by optical amplifying fiber 12.The laser L2 that is amplified by optical amplifying fiber 12 is directed among the LWPF 26 through end cap 24 and lens 25.Stopped by LWPF 26 from the major part of the laser L2 of secondary light source 21 output.In processes such as processing, utilize laser L2 or laser L2 under the harmless situation of irradiation target, the filter of similar LWPF 26 can be omitted.As stated; During the OFF time is with, be imported into the optical amplifying fiber 12 from the light of secondary light source 21 output and be input to the pumping light in the optical amplifying fiber 12, and this can suppress to add to the remarkable rising of the population inversion of the rare earth element in the optical amplifying fiber 12 with consumption.As a result, restarting from point (the time T l of first light source, 17 output pulsed lights
2Starting point) locate can suppress to produce the huge smooth surge of pulse laser L1.
Suspending after first light source, 17 output pulsed lights, preferably under the situation in not free gap, begin from secondary light source 21 output light.From the time out of first light source 17 output pulsed lights and under the situation in free gap between the time started of secondary light source 21 output light (promptly; Have a situation of all not exporting the time band of light from two light sources), the population inversion of the rare earth element that in optics amplifying fiber 12, adds will raise during said gap.Under the situation of that kind, Once you begin just possibly produce the light surge from secondary light source 21 output light.In order to prevent this situation, preferably suspending after first light source, 17 output pulsed lights, to come from secondary light source 21 output light smaller or equal to time slot since output cycle of the pulsed light of first light source, 17 outputs.More particularly; Repetition rate at the pulsed light of exporting from first light source 17 is under the situation of 100kHz; The time of a pulse period is 10 μ s; And preferably in the time of a pulse period or in the 10 μ s that suspend after first light source, 17 output pulsed lights, begin to export laser thus from secondary light source 21.
Can also adopt such pattern: wherein want the pumping state of the rare earth element that Zao 50-200% adds in optical amplifying fiber 12 to exist the time of phase to begin from secondary light source 21 output laser with the time point that gets into the ON states than first light source 17, the pumping state that promptly adopts rise time of the light of exporting from secondary light source 21 to be set to said rare earth element exists the pattern of the 50%-200% of time phase to begin to export laser from secondary light source 21.
Under the situation of secondary light source 21 output laser, the required time (rise time) that arrives a fixed value when the output intensity up to laser may cause the light surge very much in short-term.When rise time too late the time, will be difficult to suppress satisfactorily the rising of the population inversion of rare earth element.For this reason; Preferably be approximately equal to the 100 μ s that have the phase for the pumping state of Yb ion with the rise time that is associated from secondary light source 21 output laser (it is the required time of state of strength from the required output intensity of the intensity attitude to 90% of 10% required output intensity), amplify action in optical amplifying fiber 12, to cause optics.Yet, can be set to the 50-200% that there is the phase in said pumping state with the rise time that is associated from secondary light source 21 output laser.
About control from first light source 17 and secondary light source 21 output laser preferably combines execution with controling of galvano scanner 100.For example; When the control unit 22 of lasing light emitter 1 sends control signal about the operation of galvano scanner 100 when scanning said beam with the irradiation position through control laser after the amplification of lasing light emitter 1 output to galvano scanner 100, the relevant control signal while of exporting from the laser of first light source 17 and secondary light source 21 also is sent out to lasing light emitter 1.More special; When the scanning direction of the laser that comes self-excitation light source 1 in Fig. 5 from X-direction (as the part A in processing target zone) when changing Y direction (as the part B of untreated areas) into; The control signal that is associated with the output of laser also is sent out to control unit 22 and exports from the laser beam of first light source 17 and secondary light source 21 with control, can control thus from the output of the laser beam of first light source 17 and secondary light source 21.Another kind of available method is a kind of like this pattern; Wherein with the actuating (scanning mode) of the motor of galvano scanner with end to be associated to be exported to the outside with the signal that is controlled at each autokinesis on X-direction and the Y direction, and wherein with said actuating with end to control explicitly the output termination of carrying out laser beam from first light source 17 and secondary light source 21.
For the workpiece P shown in Fig. 5 is carried out laser treatment, galvano scanner 100 on X-direction and Y direction scanning existence/deletion condition and can for example connect from the existence/deletion condition (ON state and OFF state) of first light source 17 and secondary light source 21 outgoing laser beams based on Fig. 6.In Fig. 6, the scanning mode of " 1 " expression galvano scanner 100 on relevant direction, and " 0 " expression galvano scanner 100 terminates in the state that scans on the relevant direction.It all is that the situation of " 0 " all is the situation of " 1 " with them that Fig. 6 also is illustrated in scanning on the X-direction and on Y direction.Its reason is that galvano scanner 100 is formed by the signal of telecommunication is reacted slower solenoid motor or analog, and said two kinds of situation are provided for the state that takes place owing to slow preparation.That is, they are illustrated in galvano scanner 100 control to each light source under the situation that between scanning and end on the X-direction or on Y direction, causes transient state relaxation oscillation (relaxation oscillation) with the signal of telecommunication in the handoff procedure.In this case; Purpose for fear of the light surge; Scanning on the X-direction and on Y direction all is that " 0 " and said scanning all are in two kinds of situation of " 1 ", preferably first light source 17 is set to the ON state so that two light sources are all exported laser with secondary light source 21.
The pattern that as shown in Figure 6 and first light source 17 and secondary light source 21 all switch between ON state and OFF state is opposite, can also for example adopt first light source 17 wherein always to be maintained at the ON state and the pattern that only has secondary light source 21 between ON state and OFF state, to switch.Fig. 7 is illustrated in the scanning direction of galvano scanner in this case and from the relation between the output of the laser beam of first light source 17 and secondary light source 21.
As shown in Figure 7, in addition at first light source 17 always under the situation of ON state, also can suppress from the peak value of the pulsed light of lasing light emitter 1 output through using secondary light source.Especially; Under the situation that workpiece is made up of the material that can not be influenced by heat; Can adopt the relation shown in Fig. 7 to control the laser beam output from first light source 17 and secondary light source 21, when the irradiation position of laser on Y direction scanned, suppressing thus to become from the peak value of pulse of the pulsed light of lasing light emitter 1 output is more prone to.Above embodiment explained that first light source 17 is in the situation of ON state, but just in case for a certain reason pumping light under the OFF of first light source state and by being driven, effect of the present invention can be through becoming effective at said ON state use secondary light source.
(second embodiment)
Second embodiment according to lasing light emitter of the present invention will be described below.Fig. 8 is the view of expression according to the formation of the lasing light emitter 2 of second embodiment.Lasing light emitter 2 is these points with the difference of lasing light emitter 1.Promptly; Its difference is that lasing light emitter 2 has the 3rd light source 30 with the wavelength output pulsed light that is different from first light source 17 and secondary light source 21 as seed light; And from the pulsed light beam of first light source 17 output and from the pulsed light beam of the 3rd light source 30 outputs through multiplexer 31 by multiplexed; Multiplexed then light beam is imported in the optical isolator 18, and is input in the optical amplifying fiber 11 through combiner 15.Desirable, the wavelength of secondary light source is different from the wavelength band of the wavelength separately that comprises first light source and the 3rd light source.Here the multiplexer 31 that is suitable for is above-mentioned WDM coupler.
In this mode, can be the laser beam of multi-wavelength's type from the seed light of the pulsed light of lasing light emitter 2 output.As in first embodiment; Control unit 22 receives such as from first light source 17 with from the information the beginning (OFF state → ON state) of seed light (pulsed light) output of the 3rd light source 30 and the termination (ON state → OFF state) through circuit 170b; And according to of laser (for example, the CW light) output of said information Control from secondary light source 21.Control unit 22 also receives the operation information of galvano scanner 100 through circuit 180b.Therefore; In a second embodiment; Also can suspend in be with in the said OFF time from first light source and the 3rd light source and export pulsed light at the light surge that when first light source and the 3rd light source restart to export pulsed light beam, occurs through being inhibited from secondary light source 21 output light during being with in the OFF time.Here should be noted that at the various modification embodiment described in first embodiment also applicable to second embodiment.
The various forms that is used for the preferred embodiment of the present invention has been described above, but the present invention is not limited to top pattern.For example, above embodiment the pattern of using the optical amplifying fiber 11,12 that is doped with Yb has been described, but replace Yb also can use the optical amplifying fiber that is doped with Er.In this case, preferably adopt the wavelength of 1550nm for pulsed light from 17 outputs of first light source, and for the wavelength of the gloss of exporting from secondary light source 21 with 1530nm.Yet when the intensity of the laser of exporting from lasing light emitter 1 was higher, the preferred use was doped with the optical amplifying fiber of Yb, so that make the pumping light wavelength closer to each other with the wavelength of the light (seed light) that will amplify, as stated.
Preferred with exporting the wavelength that the light wavelength of exporting from secondary light source 21 the OFF state of seed light is confirmed as natural emission spectra peak in two kinds of situation that the rare earth element of approaching interpolation optical amplifying fiber 11,12 is one of Yb and Er from first light source 17 in termination.In this case, become more effective through suppressing the light surge from secondary light source 21 output light.
Top embodiment has explained the form of in optical amplifier, using optical amplifying fiber 11,12, but also can adopt the pattern that is suitable for solid-state laser.
As stated; The present invention offers optical amplifier so that keep under the thermally equilibrated state of optical amplifier with pumping light during being provided at the OFF state of light source, the lasing light emitter of huge smooth surge when becoming the ON state with the output pulsed light from light source OFF state, can not occur.
Claims (4)
1. lasing light emitter comprises:
First light source, the light that output has first wavelength is as pulsed light;
Secondary light source, output has the light of second wavelength that is different from first wavelength;
Optical amplifier is to amplifying from the light of first light source output and the light of exporting from secondary light source; With
Control unit is exported from the light of secondary light source according to the light output control from first light source,
Wherein said first light source have beginning and continue with the fixed cycle repeat to export the ON state of pulsed light and suspend at the duration that is no less than the said fixed cycle pulsed light output the OFF state and
Wherein, said control unit is given said optical amplifier at the duration control secondary light source output light that said first light source is in the OFF state.
2. lasing light emitter according to claim 1 also comprises filter, and it sees through the light with said first wavelength, but stops the light that from the amplification light of said optical amplifier output, has second wavelength.
3. lasing light emitter according to claim 1, wherein said control unit control secondary light source is ended light output at the state of first light source when OFF becomes ON or at the duration that first light source is in the ON state.
4. lasing light emitter according to claim 1, wherein said optical amplifier comprise be doped with optics amplify element as the optical fiber of optics amplifying medium and
Wherein be set to time of 50%-200% that said optics amplifies the pumping state life period of element from rise time of the light of secondary light source output.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105119134A (en) * | 2014-03-13 | 2015-12-02 | 恩耐激光技术有限公司 | Algorithms for rapid gating of seed suspendable pulsed fiber laser amplifiers |
| CN105940575A (en) * | 2014-02-13 | 2016-09-14 | 斯佩克卓尼克斯株式会社 | Laser light-source apparatus and laser pulse light generating method |
| CN110421251A (en) * | 2018-05-01 | 2019-11-08 | 株式会社岛津制作所 | Laser processing device |
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| CN105940575A (en) * | 2014-02-13 | 2016-09-14 | 斯佩克卓尼克斯株式会社 | Laser light-source apparatus and laser pulse light generating method |
| CN105119134A (en) * | 2014-03-13 | 2015-12-02 | 恩耐激光技术有限公司 | Algorithms for rapid gating of seed suspendable pulsed fiber laser amplifiers |
| CN110421251A (en) * | 2018-05-01 | 2019-11-08 | 株式会社岛津制作所 | Laser processing device |
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