CN102439410A - Pressure sensor and method of adjusting the same - Google Patents
Pressure sensor and method of adjusting the same Download PDFInfo
- Publication number
- CN102439410A CN102439410A CN2010800223137A CN201080022313A CN102439410A CN 102439410 A CN102439410 A CN 102439410A CN 2010800223137 A CN2010800223137 A CN 2010800223137A CN 201080022313 A CN201080022313 A CN 201080022313A CN 102439410 A CN102439410 A CN 102439410A
- Authority
- CN
- China
- Prior art keywords
- plate
- mentioned
- pressure transducer
- magnetic
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Provided is a pressure sensor wherein sensitivity can be adjusted by a simple structure. The peripheral portion of a diaphragm (20) is held between a joint body (10) and an upper body (30). A pressure receiving plate (24) provided with a permanent magnet (26) is installed on the diaphragm (20) and detects the displacement of the aforementioned permanent magnet (26), that is, the displacement of the diaphragm (20), by means of a linear Hall IC (34) installed in the aforementioned upper body (30). A plate (40) comprising a steel sheet provided with a square hole is installed on the outside of the linear Hall IC (34). By selecting a plate comprising a steel sheet located in a different position or a plate provided with a square hole having a different longitudinal dimension, or by removing the plate, adjustments are made so that the pressure sensor accuracy meets the accuracy requirement.
Description
Technical field
The present invention relates to use Hall element to detect pressure transducer and method of adjustment thereof with the displacement of the barrier film of the pressure servo-actuated of fluid.
Background technology
When the pressure of test fluid, with single of the pressure of this fluid guiding barrier film, the elastic force that antagonism is applied another face of barrier film and to make the masterpiece of the fluid that barrier film moves be that pressure detects.The known barrier film that is shifted through the pressure because of fluid makes mechanical switch work, and the situation that will become predetermined pressure is exported the product of signal as the displacement corresponding simulating of the product of signal output and output and barrier film.
As the product of the signal of the output size corresponding with the displacement of barrier film, known have piezoresistance (semiconductor) formula pressure transducer and a capacitance-type pressure sensor, still, and the two price height.
In addition, propose mounting permanent magnet on barrier film, used Hall element to detect the pressure transducer (patent documentation 1～7) of use Hall element of the displacement of above-mentioned barrier film.
When the magnetic density that acts on Hall element increased, the output voltage of Hall element rose.Through detecting this output voltage, can measure the pressure of the fluid of importing.At this moment, be in the zone of straight line during the magnet displacement with respect to the output voltage of the displacement of Hall element and Hall element at magnet, the displacement of magnet and the output of Hall element become proportionate relationship, can detect pressure accurately.
Though between the output voltage of Hall element and magnetic density, there is predetermined proportionate relationship; But the relation of the position of magnet and the output voltage of Hall element is different in each of each product because of each the fluctuation of distance of fluctuation, Hall element and magnet of Hall element and magnet.Even there is this type of various fluctuation, each product also need carry out the range adjustment so that have fixed pressure and output voltage characteristic.
The pressure transducer of record in the patent documentation 1 (spy opens clear 56-86324 communique); Variation through with the distance of the magnet of barrier film interlock and Hall IC comes detected pressures; Possess the first relative permanent magnet of homopolarity and second permanent magnet, come the set pressure operating point through inching screw or cap (cap).In addition, also can transfer to adjust through adjustment resistance is carried out laser micro.
The pressure transducer of patent documentation 2 (spy opens flat 09-170958 communique) record; It is the helical spring method of behind the spring constant that comes selected necessity through the range adjustment, inserting regulation; But; The fluctuation of the stable case of seat cushion or spring self is big, has load scale (range) problem of unstable.
The pressure transducer of patent documentation 3 (spy opens the 2000-18997 communique) record; Carry out the range adjustment through being adjusted at the variable resistor that is provided with on the substrate; But the parts price is high, owing to adopting leakage-proof structure to need to apply water-repellent paint; Therefore lose time the possibility that when applying, exists the resistance value of trimmer resistor to depart from.In addition, existence is used to adjust the problem that variable-resistance adjustment equipment expends expense.
The pressure transducer of patent documentation 4 (spy opens clear 56-155824 communique), patent documentation 5 (spy opens flat 08-327483 communique) and patent documentation 6 (spy opens the 2000-214036 communique) record be make same polarity pair of magnet relatively and in the mode of intermediate configurations Hall element, be to use big or small two structures that magnet carries out the adjustment of magnetic density.In addition, owing to use the magnet (terres rares neodymium, samarium cobalt (CoSm) etc.) of two high prices, therefore aspect cost, have problems.
Patent documentation 7 (spy opens flat 08-327484 communique), having put down in writing to reduce temperature deviation is the pressure transducer that purpose possesses magnetic plate (iron plate).
Patent documentation 1: the spy opens clear 56-86324 communique
Patent documentation 2: the spy opens flat 09-170958 communique
Patent documentation 3: the spy opens the 2000-18997 communique
Patent documentation 4: the spy opens clear 56-155824 communique
Patent documentation 5: the spy opens flat 08-327483 communique
Patent documentation 6: the spy opens the 2000-214036 communique
Patent documentation 7: the spy opens flat 08-327484 communique
Summary of the invention
The problem that the present invention will solve
As stated, in the pressure transducer of existing use Hall element, carry out the interior adjustment of specification of spacing (output voltage range) with variable resistor.Use the pressure transducer of Hall element less expensive, still, need be used to handle the electronic unit and the substrate of the signal of Hall element, exist to be used for the high problem of expense that circuit constitutes.
So, the purpose of this invention is to provide and can eliminate this adjustment resistance, realize that number of substrates is lacked and the pressure transducer and the method for adjustment thereof of the simplification of miniaturization and realization adjustment operation.
The means that are used to deal with problems
For addressing the above problem, pressure transducer of the present invention has: adapter body has the inflow entrance of determined fluid; The upside main body is provided with the guiding chamber of inserting compression plate in inside; Barrier film is by above-mentioned adapter body and upside main body clamping periphery; Compression plate is on the indoor upper surface that is arranged on above-mentioned barrier film sliding freely of the guiding of above-mentioned upside main body; Permanent magnet is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC; Side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively are provided with; Circuit with Hall element and the output of amplifying this Hall element; The opposition side with above-mentioned permanent magnet side at above-mentioned linear Hall IC is equipped with the magnetic plate, and this magnetic plate has is arranged to the space consistent with the center of above-mentioned linear Hall IC, center.
In addition, above-mentioned magnetic plate is with multi-disc resin plate and a slice magnetic plate stack and the magnetic plate in the plate that constitutes.
And, the plate of in the adjustment operation, from the different a plurality of plates in the position of above-mentioned range upon range of magnetic plate, selecting is installed.
In addition, the magnetic plate of in the adjustment operation, from the different a plurality of magnetic plates of the length of the longitudinal direction in above-mentioned space, selecting is installed.
In addition, the present invention provides a kind of method of adjustment of pressure transducer, and this pressure transducer has: adapter body has the inflow entrance of determined fluid; The upside main body is provided with the guiding chamber of inserting compression plate in inside; Barrier film, it is by above-mentioned adapter body and upside main body clamping periphery; Compression plate is on the indoor upper surface that is set at above-mentioned barrier film sliding freely of the guiding of above-mentioned upside main body; Permanent magnet is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC; Side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively are provided with; Have the circuit of Hall element and the output of amplifying this Hall element, wherein, the magnetic plate is installed at opposition side above-mentioned linear Hall IC and above-mentioned permanent magnet side; Measure the output voltage range of this pressure transducer; Measure the result not in predetermined scope the time at this, through changing above-mentioned magnetic plate, thereby the output voltage range of this pressure transducer is controlled in adjustment through the convergence of the magnetic flux of above-mentioned linear Hall IC.
In addition; Above-mentioned magnetic plate is the magnetic plate in the plate that multi-disc resin plate and a slice magnetic plate stack are constituted, and the adjustment of the convergence of the magnetic flux through above-mentioned linear Hall IC is through the different plate in the position that range upon range of magnetic plate is installed or takes off plate and carry out.
In addition, on above-mentioned magnetic plate, be provided with the space consistent with the center of above-mentioned linear Hall IC, center, the adjustment of the convergence of the magnetic flux through above-mentioned linear Hall IC is to carry out through the different magnetic plate of size that above-mentioned space is installed.
The effect of invention
According to this type of pressure transducer of the present invention and method of adjustment thereof, only, can carry out the range adjustment through the installation of plate for the use of linear Hall IC.Have again, make parallel magnetic field, can carry out more stable status (elimination positional fluctuation) range adjustment down thus, comprise the precision raising of linear characteristic through the installation of plate of band square hole.
Can omit and be used for electronic circuit that adjustment resistance etc. is adjusted, can make designs simplification, therefore can play the effect that reduces cost, reduces size.
In addition, can realize environment resistant, the exposed better pressure transducer of substrate article of durability ratio.Compare with the low substrate of antidrip property, also have the characteristic that relatively is easy to form antidrip structure etc.
Also have, range adjustment method is simple, does not need complicated adjustment equipment.
Have again, also have total cost and reduce, prevent to adjust resistance because the waterproof coating departs from and the effect of stay in grade.
Description of drawings
Fig. 1 is the figure of formation of first embodiment of expression pressure transducer of the present invention, is the cut-open view of the pressure transducer of this embodiment (a), (b) is the A-A line cut-open view of (a), (c) is side view.
Fig. 2 is the figure of an instance of the plate 40 that uses in first embodiment of the present invention of expression; (a) be the figure of structure of the plate (plate I) of expression first kind; (b) being the figure of structure of the plate (plate II) of expression second kind, (c) is the figure of structure of the plate (plate III) of the third type of expression.
Fig. 3 is the figure that is used to explain the state of the pressure transducer under each state of maximum pressurized state, magnet displacement zero position and atmospheric pressure state; (a) be the cut-open view of the state of the pressure transducer under the maximum pressurized state of expression; (b) be the cut-open view of the state of the pressure transducer under the expression magnet displacement zero position state; (c) being the cut-open view of the state of the pressure transducer under the expression atmospheric pressure state, (d) is the figure of expression magnetoelectricity conversion characteristics, (e) is the figure of expression displacement output characteristics.
Fig. 4 is used for the figure that the acting characteristic to the pressure transducer under the situation that do not have installing plate and the situation that different types of plate is installed describes; (a) be the cut-open view of pressure transducer of the present invention; (b)～(e) be to be used for the situation, the situation that plate I is installed that do not have installing plate, the situation of plate II to be installed and the figure that the magnetic line of force that passes through linear Hall IC under the situation of plate III describes is installed; (f) being the figure of the magnetoelectricity conversion characteristics under expression (b)～(e) each situation, (g) is the figure of the displacement output characteristics under expression (b)～(e) each situation.
Fig. 5 is the figure of the analog result of the flux density distribution of expression when making the variable in distance between magnet and the iron plate (SPCC); (a) being the figure of distance with the analog result of the relation of magnetic density of expression linear Hall IC and iron plate, (b)～(e) is that the distance of representing linear Hall IC and iron plate is the figure of the analog result of the flux density distribution under each situation of 3.2mm, 3.5mm, 4.2mm and the situation that does not have iron plate.
Fig. 6 is used for the figure that adjustment specifies to the range that the present invention relates to.
Fig. 7 is used for the figure that the size to the square hole of plate describes; (a) be the top cut-open view of pressure transducer of the present invention; (b) be the figure that amplifies the part of magnet and plate in the expression (a); (c) being the cut-open view of pressure transducer of the present invention, (d) is the figure that amplifies the part of magnet and plate in the expression (c).
Fig. 8 is used for the figure that second embodiment to pressure transducer of the present invention describes; (a) be the cut-open view of pressure transducer; (b)～(e) be to be used for the situation, the situation that plate I is installed that do not have installing plate, the situation of plate II to be installed and the figure that the magnetic line of force that passes through linear Hall IC under the situation of plate III describes is installed; (f) being the figure of the magnetoelectricity conversion characteristics under expression (b)～(e) each situation, (g) is the figure of the displacement output characteristics under expression (b)～(e) each situation.
Fig. 9 is the figure of the analog result of the flux density distribution when being illustrated in the size variation that makes the space that forms between iron plate; (a) be expression to make the gap be under the situation of 0.1mm, 0.4mm, 1.0mm and magnetic density under the situation of iron plate is not installed with respect to the curve map of the analog result of the relation of the displacement of magnet, (b)～(e) be that to make the gap length of iron plate be the figure of the analog result of the flux density distribution under 1.0mm, 0.4mm, 0.1mm and each situation that does not have iron plate in expression.
Figure 10 is the figure of instance of the plate in the expression space that is provided with slit-like, (a) is the figure that expression is formed with the plate of square hole, (b) is the figure of formation example of the plate in the expression space that is formed with slit-like.
Figure 11 is the figure of instance that representes not to be provided with the plate in space, (a) is the figure of structure of the plate (plate I) of expression first kind, (b) is the figure of structure of the plate (plate II) of expression second kind, (c) is the figure of structure of the plate (plate III) of the third type of expression.
Embodiment
Fig. 1 is the figure of formation of first embodiment of expression pressure transducer of the present invention, is the cut-open view of the pressure transducer of this embodiment (a), (b) is the A-A line cut-open view of (a), (c) is side view.The micro-pressure sensor that pressure transducer of the present invention is used as for example electric cooker is arranged again.
In the figure, the 10th, adapter body, the 20th, barrier film, the 30th, upside main body.Central authorities in the bottom surface of above-mentioned adapter body 10 possess connector portions 11, and this connector portions 11 has the introducing port that is used to import determined fluid, and is formed with stage portion 12 at the upper surface of adapter body 10.Above-mentioned barrier film 20 for example is the high silicon rubber system of hardness, is formed with compression plate support portion 21 at central part, is formed with the elastic force that forms heavy wall with ring-type around it and applies portion 22, is formed with flange part 23 at circumference.As shown in the figure; The teat of the lower surface of the lower end flange portion 31 of above-mentioned upside main body 30 cooperates with the stage portion 12 that forms at the upper surface of above-mentioned adapter body 10, and the stage portion 12 through adapter body 10 and the lower end flange portion 31 of upside main body 30 grip the flange part 23 of above-mentioned barrier film 20.
Be provided with guiding cylindraceous chamber 32 substantially in the inside of above-mentioned upside main body 30.The part of the wall of guiding chamber 32 becomes par 33, on this par 33, linear Hall IC34 is installed.Linear Hall IC34 is with the IC of Hall element with the amplifying circuit one packetized of the output signal that amplifies this Hall element, the signal after output will be amplified with the simulating signal that is in proportion in the magnetic field of exporting from Hall element.To output to the device outside from external connection terminals 35 from the analog output signal of this linear Hall IC34.
In the guiding chamber 32 of above-mentioned upside main body 30, dispose compression plate 24 cylindraceous substantially on the above-below direction in the drawings sliding freely.The lower end of compression plate 24 is fixed on the compression plate support portion 21 of above-mentioned barrier film 20.Above-mentioned par this compression plate 24 and above-mentioned guidance part 32 33 relative parts become par 25, and through both cooperations, compression plate 24 does not rotate, and can move up and down.And the relative stationkeeping of linear Hall IC34 with in par 33 configurations of the guiding chamber 32 of above-mentioned upside main body 30 in the par 25 of compression plate 24 has permanent magnet 26.As this permanent magnet (being designated hereinafter simply as " magnet ") 26, can use for example Nd (neodymium) or the CoSm constant magnet of magnetoconductivity such as (samarium cobalts).
In addition, the outside in the position of the above-mentioned linear Hall IC34 of being equipped with of above-mentioned upside main body 30 is provided with the plate incorporating section 36 of rectangle box-formed shape.In plate incorporating section 36, take in plate 40, this plate 40 is installed in the recess 37 on being located at upper body 30 with magnetic plate.Thus, with magnet 26 opposition sides plate 40 is installed in linear Hall IC 34.As after state; Prepare to have the plate of a plurality of kinds in the present invention; When the adjustment of this pressure transducer, select the plate of individual optimal kind to be accommodated in the above-mentioned plate incorporating section 36 with it, be fixed on through bonding or thermal weld etc. in the recess 37 of upside main body 30.Have again, also have the situation that does not have installing plate 40.
The upper surface of above-mentioned compression plate 24, the volute spring 27 that supports through the adjustment screw that screwed togather by the top in upside main body 30 28 is pressed, and applies portion's 22 formed Spring balanceds with the above-mentioned elastic force of barrier film 20.Have again, can adjust the initial position of magnet 26 through adjustment screw 28.
In addition, on above-mentioned guiding chamber 32, be provided with bleeder vent 38, the area B that will be formed by the inside of above-mentioned barrier film 20 and above-mentioned upside main body 30 remains atmospheric pressure.
Fig. 2 is the figure of an instance of the plurality of plate 40 used in first embodiment of the present invention of expression.
In the instance shown in this figure, as shown in the figure, plate 40 all becomes a slice magnetic plate 41 that is formed with the square hole 44 of growing crosswise at central portion and two resin plates 42 and 43 range upon range of structures.As magnetic plate 41, so long as the high material of magnetoconductivity gets final product, but the magnetic plate (following abbreviate the magnetic plate as " iron plate ") of iron plate (SPCC) is used in explanation here.And its rightmost side of the plate of first kind shown in Fig. 2 (a) (plate I) is an iron plate 41, and its central authorities of the plate of second kind shown in Fig. 2 (b) (plate II) are iron plate 41, and its leftmost side of the plate of the third type shown in Fig. 2 (c) (plate III) is an iron plate 41.
Through this plate 40 is inserted in the above-mentioned plate incorporating section 36, and be installed in the recess 37 of upside main body 30, plate 40 is installed in the center of above-mentioned square hole 44 and the consistent location place, center of above-mentioned linear Hall IC34.
Through selecting a certain being installed in the above-mentioned plate incorporating section 36 in these three kinds of plates (plate I, plate II, plate III), can select the distance between above-mentioned linear Hall IC34 and the iron plate 41.
In the pressure transducer 1 that as above-mentioned, constitutes, the connector portions 11 that will on above-mentioned adapter body 10, be provided with is connected with the pipe that imports determined fluid.When not having determined fluid in the pipe, the elastic force that above-mentioned compression plate 24 self is had through above-mentioned barrier film 20 comes the deadweight of dipscrews spring 27 and compression plate 24, keeps predetermined initial position.In pipe, there is fluid and when regional A imported fluid, fluid pressure action rose compression plate 24 at the downside of barrier film 20.Thus, above-mentioned magnet 26 also rises, and its displacement is detected by above-mentioned linear Hall IC34 as the variation of magnetic density, thus but the pressure of test fluid.
The (a) and (b) of Fig. 3 and (c) be respectively the cut-open view of state of the above-mentioned pressure transducer under each state of expression maximum pressurized state, magnet displacement zero position and atmospheric pressure state; (d) being the figure of expression magnetoelectricity conversion characteristics, (e) is the figure of expression displacement output characteristics.
In the present invention, magnet 26 is mounted to DOM is the above-below direction among the figure, the Hall element among the linear Hall IC34 only detects and the N utmost point of the magnet magnetic-field component vertical with the installed surface of the boundary vicinity of the S utmost point.In the detected magnetic field of boundary of the N utmost point and the S utmost point is zero, and near it, with respect to moving of magnet, magnetic density changes linearly, therefore can obtain the good output of rectilinearity.
Shown in Fig. 3 (c); Under atmospheric pressure state (C); As stated, the elastic force of barrier film 20 and compression plate 24 balances of pushing by volute spring 27, the center of magnet 26 becomes than the position of the center decline 0.5mm of linear Hall IC34 (displacement-0.5mm).At this moment, in this pressure transducer, the magnetic density of linear Hall IC34 is-23 [mT], and output voltage is 1.0 [V].
In the magnet displacement zero position (B) shown in Fig. 3 (b), displacement (with respect to the center of the magnet of the center of linear Hall IC) is 0mm, and the magnetic density of this moment is 0 [mT], and output voltage is 2.5 [V].
When the maximum shown in Fig. 3 (a) is pressurizeed (A); The central part of barrier film 20 and compression plate 24 rises and the position that the center of magnet 26 become rise 0.5mm on the center than linear Hall IC34 (displacement+0.5mm); Magnetic density is 23 [mT], and output voltage is 4.0 [V].
Thus, with such shown in (e) the displacement output characteristics, can use the output voltage test fluid pressure of the good part basis of rectilinearity and the pressure servo-actuated of fluid like the magnetoelectricity conversion characteristics of Fig. 3 (d).
But; As stated; The relation of the position of magnet and the output voltage of Hall element is different in each of each product because of each the fluctuation of distance of fluctuation, Hall element and magnet of Hall element and magnet, so each product needed is carried out the range adjustment so that have fixed pressure and output voltage characteristic.
So, in the present invention, select the most suitable its individual plate to install or installing plate not according to the characteristic of each pressure transducer, do not use adjustment resistance ground to carry out range adjustment thus.
Fig. 4 is used for the figure that the acting characteristic to the pressure transducer under situation that above-mentioned plate is not installed and the situation that different types of plate is installed describes.
(a) of Fig. 4 is identical with (a) of above-mentioned Fig. 1; It is the cut-open view of pressure transducer of the present invention; (b), (c), (d) and (e) be respectively to be used for the situation, the situation that plate I is installed that do not have installing plate, the situation of plate II to be installed and the figure that the magnetic line of force that passes through linear Hall IC34 under the situation of plate III describes is installed; (f) being the figure of the magnetoelectricity conversion characteristics of expression under above-mentioned (b)～(e) each situation (with respect to the displacement and the output voltage characteristic of the magnet of magnetic density), (g) is the figure of the displacement output characteristics (with respect to the output voltage and the magnetic density characteristic of the displacement of magnet) under expression above-mentioned (b)～(e) each situation.
(b) of Fig. 4 be used under the situation that above-mentioned plate 40 is not installed from magnet 26 sends and the magnetic line of force through linear Hall IC34 describes figure; Amplify in the left side near the plate incorporating section 36 of the above-mentioned cut-open view of expression, represent to send and pass through from magnet 26 in this case the magnetic line of force of linear Hall IC34 on the right side.
As shown in the drawing, under the situation that does not have installing plate 40 (be equivalent to the distance of plate for infinitely great), the magnetic line of force disperses most, we can say the convergence that does not have the magnetic line of force.In this case, with after state (c) the situation that plate I is installed compare, the scope of output voltage (range) diminishes.
Fig. 4 (c) is the figure that expression is equipped with the situation of plate I.Be made as normal condition to this state that plate I is installed.As shown in the figure, in this case, the iron plate 41 in the plate 40 is mounted to and is positioned at off-line property Hall IC 34 position farthest, can make to compare less from the degree of the convergence of the magnetic line of force of magnet 26 with the situation that other plates are installed.
Fig. 4 (d) is the figure that expression is equipped with the situation of plate II.In this case, iron plate 41 is positioned at the central portion of plate 40, compares with the situation of the plate I of (c), in the position near linear Hall IC34 iron plate 41 is installed.The convergence of the magnetic flux under this situation can be described as moderate, and the situation of range ratio above-mentioned (c) increases.
Fig. 4 (e) is the figure that expression is equipped with the situation of plate III.Under this situation, the iron plate 41 in the plate 40 is mounted to and is positioned at the nearest position of off-line property Hall IC 34.Thus, maximum, promptly big than other situation from the convergence of the magnetic flux of magnet 26 through the magnetic density of Hall element, the range maximum.
Above result, in the magnetoelectricity conversion characteristics of Fig. 4 (f), (among the figure, I) compare, under not having the situation of installing plate (among the figure, not having), the displaced plate of magnet becomes big for the slope of magnetic density with the situation that plate I is installed.In addition, (among the figure, II) compare with the situation that plate I is installed, diminish with respect to the slope of the variation of the magnet of magnetic density, (among the figure, III), slope further diminishes under the situation that plate III is installed the situation of plate II to be installed.
And in the displacement output characteristics of Fig. 4 (g), under not having the situation of installing plate (among the figure, not having), (among the figure, I) compare, output voltage diminishes with respect to the slope of the displacement of magnet with the situation that plate I is installed.In addition, (among the figure, II) compare with the situation that plate I is installed, output voltage becomes big with respect to the slope of the displacement of magnet, and (among the figure, III) slope further becomes big under the situation that plate III is installed the situation of plate II to be installed.
Like this, through being benchmark with the situation that plate I is installed, and after estimating characteristic, taking off plate or be replaced by plate II or plate III, can adjust becomes desired characteristic with the fluctuation of absorption characteristic.
The flux density distribution that Fig. 5 is expression when making magnet and the variable in distance between the iron plate in space is arranged is carried out the figure of Simulation result.
In the figure; (a) being the curve map of distance with the analog result of the relation of magnetic density of expression linear Hall IC34 and iron plate, (b)～(e) is that the distance of representing linear Hall IC34 and iron plate is the figure of the analog result of the flux density distribution under each situation of 3.2mm, 3.5mm, 4.2mm and the situation that does not have iron plate.
As shown in the drawing, the distance of iron plate and linear Hall IC is more little, and the magnetic flux of convergence shown in (a), can know that the variation of magnetic density is big with respect to the slope change of magnet displacement more through linear Hall IC.That is, confirmed the result shown in above-mentioned Fig. 4 (g).
Like this, according to the iron plate that is provided with the space the position is set, be the distance between iron plate and the linear Hall IC, change by the convergence of the detected magnetic flux of Hall element, can adjust range.
Method of adjustment to pressure transducer involved in the present invention describes.
Finish with the assembling of likewise supposing above-mentioned pressure transducer shown in Figure 1 in the past.But, at this constantly, be mounted for the plate I of benchmark in above-mentioned plate incorporating section 36 temporarily.
Under this state, adjust above-mentioned adjustment screw 28 and measure the characteristic of this pressure transducer.
Its result in the time of in output voltage range gets into predetermined scope, directly is fixed on plate I on the upside main body 30, finishes the adjustment operation.
On the other hand, when output voltage range does not have to get in the predetermined scope, take off above-mentioned plate I and perhaps replace with other plate II or plate III, carry out the mensuration of characteristic.Its result under the situation in output voltage range gets into predetermined scope, when taking off plate, this plate being fixed on the upside main body 30 during at installing plate under this state, finishes the adjustment operation.
Like this, can not use electronic circuit ground carry out precision adjustment, be the adjustment of range.
Use Fig. 6 that the range adjustment that the present invention relates to is more specifically explained.
The desired precision of pressure transducer, for example the deviation accuracy requirement under the normal temperature is ± 6%FS (full scale (full scale)), the accuracy requirement of sensitivity is+12%FS/-8%FS.
Major reason as sensitivity error have the magnetic density of distance (with 1mm is 100% range, when departing from 50 μ m, is 5%FS) between (1) sensor (Hall element) and magnet, (2) magnet fluctuation (magnetoconductivity, magnet size) ± 3%FS, (3) spring load (+4%FS/-2%FS), (4) transducer sensitivity (virtual rating of sensor ± 5%FS) etc.
Calculate the maximum that produces 31% range from 5+3+4+5=17%, 5+3+2+5=-15% and amount to error.In this example, the sensitivity accuracy requirement allows to+12%/-8%, if therefore have+5%/-7% setting range, then can get into precision prescribed in theory.
Since as the present invention its limit of control of the sensitivity carried out of insertion iron plate be+about 10%; Therefore the design object value is set in-5% point after descending; Being lower than at measured value under the situation of desired value, can be in the allowed band with sensitivity adjustment through inserting iron plate.
That is, as shown in Figure 6, surpassing under the situation of allowed band, the mechanical means of the application of the invention compensates, and can become the precision in the allowed band.
Have again, in foregoing, aim at slave board I～these three kinds of plates of plate III, through install wherein some plates or not the installing plate situation of carrying out the range adjustment be illustrated, but be not limited to this, the kind of the plate of preparation is arbitrarily.For example only prepare a certain plate, (perhaps installing) plate is not installed is carried out the mensuration of characteristic, (or taking off) plate can be installed according to its result.
Here, with reference to Fig. 7 the size of above-mentioned square hole 44 is described.
Fig. 7 (a) and above-mentioned Fig. 1 (b) likewise are the top cut-open views of pressure transducer of the present invention, (b) are the figure that amplifies the part of its magnet 26 of expression and plate 40.
At the lateral dimension that makes magnet 26 is A, and when making the lateral dimension of square hole 40 be X, the lateral dimension X of square hole 40 preferably becomes from end about magnet 26 and is respectively more than the magnet width (A), i.e. X >=A+ (2A) is not so that produce the disorder in horizontal magnetic field.For example, be under the situation of 2mm at magnet width (A), the lateral dimension of square hole 40 (X) is to get final product more than the 6mm.
(c) of Fig. 7 and (a) of above-mentioned Fig. 1 likewise are the cut-open views of pressure transducer of the present invention, (d) are the figure that amplifies the part of its magnet 26 of expression and plate 40.
At the longitudinal size that makes magnet 26 is B; When making the longitudinal size of square hole 44 be Y; The longitudinal size Y of square hole 44 does not have special provision, and still, value preferably has the size about the path increment (in above-mentioned instance shown in Figure 2, being 1mm) of magnet 26 as a reference; On the other hand, the preferred inhibition for less than 1/2 of the longitudinal size (B) of magnet 26.Thus, when the longitudinal size (B) of magnet 26 was 4mm, the longitudinal size of square hole 44 (Y) can be for about 1mm～2mm.
Secondly, second embodiment to pressure transducer of the present invention describes.
In above-mentioned first embodiment of the present invention; That selects different types of plate I～plate III somely carries out the range adjustment; So that linear Hall IC34 and iron plate (SPCC) distance between 41 is different, still, in this embodiment; Plate through installation is selected from the different plurality of plate of the size of vertical (direction identical with the DOM of magnet 26) of set square hole 44 likewise carries out the range adjustment with the situation of first embodiment.
Fig. 8 is used for figure that second embodiment of the present invention is described; (a) (a) with above-mentioned Fig. 1 is the cut-open view of pressure transducer equally; (b), (c), (d) and (e) be respectively to be used for the situation, the situation that plate I is installed that do not have installing plate, the situation of plate II to be installed and the figure that the magnetic line of force that passes through linear Hall IC34 under the situation of plate III describes is installed; (f) being the figure of the magnetoelectricity conversion characteristics of expression under (b)～(e) each situation (with respect to the displacement and the output voltage characteristic of the magnet of magnetic density), (g) is the figure of the displacement output characteristics (with respect to the output voltage and the magnetic density characteristic of the displacement of magnet) under expression (b)～(e) each situation.
In this embodiment, shown in Fig. 4 (c)～(e), use the different three kinds of plates 40 (plate I, plate II, plate III) of size (size in gap) of the longitudinal direction of the square hole 44 that on the iron plate (SPCC) 41 of plate 40, forms.Be made as the distance between iron plate in each plate 41 and the linear Hall IC34 fixing.
And the size in the gap that makes plate I is a, and making the size in the gap of plate II is b, when making the size in the gap of plate III be c, becomes c＜b＜a.And the plate I that the size in gap is maximum is made as datum plate.
As shown in the figure, the gap of plate is more little, and the convergence of the magnetic flux through linear Hall IC34 is high more.Thus, like Fig. 4 (f) with (g), the gap of plate becomes more little, and range (scope of output voltage) becomes big more.In addition, under the situation that does not have installing plate 40 of (b), the convergence of magnetic flux diminishes, and range diminishes.
Fig. 9 is Simulation result is carried out in expression to the flux density distribution when making the size variation in the space (gap) that forms between iron plate figure.
In the figure; (a) be expression make the gap be magnetic density under the situation of 0.1mm, 0.4mm, 1.0mm and the situation that iron plate (SPCC) is not installed with respect to the curve map of the analog result of the relation of the displacement of magnet, (b)～(e) be that to make the size in the gap of iron plate be the figure of the analog result of the flux density distribution under the situation of 1.0mm, 0.4mm, 0.1mm and the situation that does not have iron plate in expression.
As shown in the drawing, can know that the convergence of magnetic flux is high more under the more little situation of the size in gap, promptly the convergence with the order magnetic flux of (e), (b), (c), (d) increases.
Like this, through the plate from the different one or more plates of the length (size in gap) of the longitudinal direction of the square hole 44 that forms onboard, selected or installing plate not are installed, can likewise carry out the range adjustment with the situation of above-mentioned first embodiment.
In Fig. 8, the stationkeeping of the iron plate in the different plate of the length of the longitudinal direction of square hole, still, with the situation of above-mentioned Fig. 4 likewise, the position of iron plate is also changed.The position that for example can as Fig. 4 (e), make iron plate is near the plate III of linear Hall IC34 ground installation diagram 8 (e).Thus, can carry out more accurate adjustment.
Have again, in above-mentioned each embodiment, on plate 40, formed square hole 44, but be not limited to this.
For example can replace square hole 44 and the space of slit-like is set.
(a) of Figure 10 is expression has formed square hole 44 as above-mentioned the figure of plate, (b) is that expression replaces square hole and formed the routine figure of formation of plate in the space of slit-like.Shown in (b), can use two long slabs to constitute above-mentioned various plate across space Y configuration.
Perhaps, also can replace square hole 44 and form the hole portion that ellipse waits other shapes.
Have, can possess iron plate, this iron plate possesses part rather than hole or the space of magnetoconductivity near 1 medium.
Also have, used the plate that possesses iron plate in the above-described embodiment, this iron plate has square hole or space, but also square hole or space can be set.
Figure 11 is the figure of instance of the plate of this embodiment of expression, and the plate I shown in Figure 11 (a) disposes the rightmost side in the drawings with iron plate 41, and when on this direction, being installed on above-mentioned plate incorporating section 36,41 distance is compared farthest with other plates from linear Hall IC34 to iron plate.(b) the plate II shown in is configured in central part with iron plate 41, and 41 distance is middle value from linear Hall IC34 to iron plate.(c) the plate III shown in disposes the leftmost side in the drawings with iron plate 41, and when on this direction, being installed on above-mentioned plate incorporating section 36,41 distance is compared with other plates recently from linear Hall IC34 to iron plate.
Because the distance of linear Hall IC34 and iron plate 41 is different; Convergence from the magnetic density of magnet is different; Therefore install through the plate shown in the selection (a)～(c) some or installing plate not; Can change scope, can likewise carry out the range adjustment with above-mentioned embodiment from the output voltage of linear Hall IC34.But, to compare with the situation that forms square hole 44 in this case, adjustment amount tails off.
In the above-described embodiment, with adopt with two resin plates 42 with 43 and the plate of the range upon range of structure of a slice iron plate 41 be that example describes, still be not limited to this, also can use the plate of the structure that three above resin plates and a slice iron plate 41 is range upon range of.Thus, can more critically carry out the range adjustment.
The explanation of symbol:
The 10-adapter body, the 11-connector portions, the 12-stage portion, the 20-barrier film, 21-compression plate support portion, 22-elastic force applies portion; The 23-flange part, the 24-compression plate, the 25-par, the 26-permanent magnet, the 27-volute spring, 28-adjusts screw; 30-upside main body, the 31-flange part, 32-guides the chamber, 33-par, 34-linear Hall IC, 35-external connection terminals; 36-plate incorporating section, 37-recess, 40-plate, 41-magnetic plate (iron plate), 42, the 43-resin plate, 44-square hole.
Claims (7)
1. pressure transducer is characterized in that having:
Adapter body has the inflow entrance of determined fluid;
The upside main body is provided with the guiding chamber of inserting compression plate in inside;
Barrier film is by above-mentioned adapter body and upside main body clamping periphery;
Compression plate is on the indoor upper surface that is arranged on above-mentioned barrier film sliding freely of the guiding of above-mentioned upside main body;
Permanent magnet is fixed on the slipping plane of above-mentioned compression plate; With
Linear Hall IC, side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively are provided with, and have the circuit of Hall element and the output of amplifying this Hall element,
The opposition side with above-mentioned permanent magnet side at above-mentioned linear Hall IC is equipped with the magnetic plate, and this magnetic plate has is arranged to the space consistent with the center of above-mentioned linear Hall IC, center.
2. pressure transducer according to claim 1 is characterized in that,
Above-mentioned magnetic plate is with multi-disc resin plate and a slice magnetic plate stack and the magnetic plate in the plate that constitutes.
3. pressure transducer according to claim 2 is characterized in that,
The plate of in the adjustment operation, from the different a plurality of plates in the position of above-mentioned range upon range of magnetic plate, selecting is installed.
4. pressure transducer according to claim 1 is characterized in that,
The magnetic plate of in the adjustment operation, from the different a plurality of magnetic plates of the length of the longitudinal direction in above-mentioned space, selecting is installed.
5. the method for adjustment of a pressure transducer, this pressure transducer has: adapter body has the inflow entrance of determined fluid; The upside main body is provided with the guiding chamber of inserting compression plate in inside; Barrier film is by above-mentioned adapter body and upside main body clamping periphery; Compression plate is on the indoor upper surface that is set at above-mentioned barrier film sliding freely of the guiding of above-mentioned upside main body; Permanent magnet is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC, side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively are provided with, and have the circuit of Hall element and the output of amplifying this Hall element, and the method for adjustment of said pressure transducer is characterised in that,
At opposition side above-mentioned linear Hall IC and above-mentioned permanent magnet side the magnetic plate is installed, is measured the output voltage range of this pressure transducer,
Measure the result not in predetermined scope the time at this, through changing above-mentioned magnetic plate, thereby the output voltage range of this pressure transducer is controlled in adjustment through the convergence of the magnetic flux of above-mentioned linear Hall IC.
6. the method for adjustment of pressure transducer according to claim 5 is characterized in that,
Above-mentioned magnetic plate is the magnetic plate in the plate that multi-disc resin plate and a slice magnetic plate stack are constituted, and the adjustment of the convergence of the magnetic flux through above-mentioned linear Hall IC is through the different plate in the position that range upon range of magnetic plate is installed or takes off plate and carry out.
7. the method for adjustment of pressure transducer according to claim 5 is characterized in that,
On above-mentioned magnetic plate, be provided with the space consistent with the center of above-mentioned linear Hall IC, center, the adjustment of the convergence of the magnetic flux through above-mentioned linear Hall IC is to carry out through the different magnetic plate of size that above-mentioned space is installed.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-178990 | 2009-07-31 | ||
| JP2009178990A JP5027191B2 (en) | 2009-07-31 | 2009-07-31 | Pressure sensor and adjustment method thereof |
| PCT/JP2010/060015 WO2011013451A1 (en) | 2009-07-31 | 2010-06-14 | Pressure sensor and method of adjusting the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102439410A true CN102439410A (en) | 2012-05-02 |
| CN102439410B CN102439410B (en) | 2014-04-16 |
Family
ID=43529115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080022313.7A Expired - Fee Related CN102439410B (en) | 2009-07-31 | 2010-06-14 | Pressure sensor and method of adjusting the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5027191B2 (en) |
| CN (1) | CN102439410B (en) |
| WO (1) | WO2011013451A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107404612A (en) * | 2016-05-20 | 2017-11-28 | 鸿富锦精密工业（深圳）有限公司 | Image head controlling device |
| CN108139315A (en) * | 2015-09-18 | 2018-06-08 | 热电科学仪器有限公司 | Path length calibration system and method |
| CN108375447A (en) * | 2012-06-13 | 2018-08-07 | 株式会社鹭宫制作所 | Pressure sensor |
| CN108414132A (en) * | 2018-06-04 | 2018-08-17 | 陈荣国 | A kind of Fluid pressure detection sensor |
| CN110401433A (en) * | 2019-07-04 | 2019-11-01 | 贵州航天林泉电机有限公司 | A kind of linear hall element mounting structure of fanjet oil supply system |
| CN111855069A (en) * | 2019-04-26 | 2020-10-30 | 株式会社鹭宫制作所 | Pressure sensor |
| CN112113689A (en) * | 2020-09-15 | 2020-12-22 | 智能移动机器人(中山)研究院 | Spring plantar sensor system based on Hall |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6180752B2 (en) * | 2012-04-27 | 2017-08-16 | エスアイアイ・セミコンダクタ株式会社 | Sensor device |
| JP6101597B2 (en) * | 2013-08-09 | 2017-03-22 | アルプス電気株式会社 | Pressure detection device |
| JP6101596B2 (en) * | 2013-08-09 | 2017-03-22 | アルプス電気株式会社 | Pressure detection device |
| CN106441063B (en) * | 2016-10-21 | 2021-05-14 | 惠州市铂蓝德科技有限公司 | Displacement sensor and pressure cooker thereof |
| JP7137531B2 (en) * | 2019-06-04 | 2022-09-14 | 株式会社鷺宮製作所 | Pressure sensor with corrosion resistant magnet |
| CN110595665A (en) * | 2019-09-09 | 2019-12-20 | 上海钧嵌传感技术有限公司 | Pressure detection sensor and detection method |
| CN114167325B (en) * | 2021-12-09 | 2022-08-26 | 山东大学 | Controllable trigger non-magnetic heating method for atomic magnetometer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH036477A (en) * | 1989-06-05 | 1991-01-11 | Nikon Corp | Apparatus for detecting magnetic flux density |
| JP2000018997A (en) * | 1998-04-28 | 2000-01-21 | Saginomiya Seisakusho Inc | Water level sensor using hall element |
| JP2000283277A (en) * | 1999-03-31 | 2000-10-13 | Kyocera Corp | Gear shift position detecting device of automobile |
| US20040239313A1 (en) * | 2003-02-14 | 2004-12-02 | Mikhail Godkin | Position sensor utilizing a linear hall-effect sensor |
| US20090146649A1 (en) * | 2007-12-11 | 2009-06-11 | Niles Co., Ltd. | Non-contact rotational angle detecting sensor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06149474A (en) * | 1992-11-12 | 1994-05-27 | Minebea Co Ltd | Magnetic coordinate position indicating device |
| EP0772046B1 (en) * | 1995-10-30 | 2002-04-17 | Sentron Ag | Magnetic field probe and current or energy probe |
| JP2007183221A (en) * | 2006-01-10 | 2007-07-19 | Denso Corp | Electric current sensor |
-
2009
- 2009-07-31 JP JP2009178990A patent/JP5027191B2/en not_active Expired - Fee Related
-
2010
- 2010-06-14 CN CN201080022313.7A patent/CN102439410B/en not_active Expired - Fee Related
- 2010-06-14 WO PCT/JP2010/060015 patent/WO2011013451A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH036477A (en) * | 1989-06-05 | 1991-01-11 | Nikon Corp | Apparatus for detecting magnetic flux density |
| JP2000018997A (en) * | 1998-04-28 | 2000-01-21 | Saginomiya Seisakusho Inc | Water level sensor using hall element |
| JP2000283277A (en) * | 1999-03-31 | 2000-10-13 | Kyocera Corp | Gear shift position detecting device of automobile |
| US20040239313A1 (en) * | 2003-02-14 | 2004-12-02 | Mikhail Godkin | Position sensor utilizing a linear hall-effect sensor |
| US20090146649A1 (en) * | 2007-12-11 | 2009-06-11 | Niles Co., Ltd. | Non-contact rotational angle detecting sensor |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375447A (en) * | 2012-06-13 | 2018-08-07 | 株式会社鹭宫制作所 | Pressure sensor |
| CN108139315A (en) * | 2015-09-18 | 2018-06-08 | 热电科学仪器有限公司 | Path length calibration system and method |
| CN108139315B (en) * | 2015-09-18 | 2021-03-05 | 热电科学仪器有限公司 | Path length calibration system and method |
| CN107404612A (en) * | 2016-05-20 | 2017-11-28 | 鸿富锦精密工业（深圳）有限公司 | Image head controlling device |
| CN107404612B (en) * | 2016-05-20 | 2020-02-28 | 鸿富锦精密工业（深圳）有限公司 | Camera control device |
| CN108414132A (en) * | 2018-06-04 | 2018-08-17 | 陈荣国 | A kind of Fluid pressure detection sensor |
| CN111855069A (en) * | 2019-04-26 | 2020-10-30 | 株式会社鹭宫制作所 | Pressure sensor |
| CN111855069B (en) * | 2019-04-26 | 2022-03-22 | 株式会社鹭宫制作所 | Pressure sensor |
| CN110401433A (en) * | 2019-07-04 | 2019-11-01 | 贵州航天林泉电机有限公司 | A kind of linear hall element mounting structure of fanjet oil supply system |
| CN110401433B (en) * | 2019-07-04 | 2023-07-11 | 贵州航天林泉电机有限公司 | Linear Hall element mounting structure of turbofan engine oil supply system |
| CN112113689A (en) * | 2020-09-15 | 2020-12-22 | 智能移动机器人(中山)研究院 | Spring plantar sensor system based on Hall |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102439410B (en) | 2014-04-16 |
| WO2011013451A1 (en) | 2011-02-03 |
| JP2011033443A (en) | 2011-02-17 |
| JP5027191B2 (en) | 2012-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102439410A (en) | Pressure sensor and method of adjusting the same | |
| KR102401761B1 (en) | Micro-position gap sensor assembly | |
| US8555918B2 (en) | Flow rate control valve and spool position detection device for the flow rate control valve | |
| CN1678886B (en) | Position sensor using a compound magnetic flux source | |
| US9267779B2 (en) | Flexible mount for coupling force actuator to caliper jaw | |
| EP1999437B1 (en) | Modular sensor system for measuring multiple measurands in a common package | |
| CN105466625B (en) | Physical amount measuring device | |
| US7989714B2 (en) | High capacity and high resolution scale | |
| US20170089738A1 (en) | Absolute position encoder including a redundant spatial phase signal | |
| US7377176B1 (en) | Nano-particle modified fill fluid for pressure transmitters | |
| EP1977207B1 (en) | Accurate pressure sensor | |
| CN102288516A (en) | Integrated fluid sensor capable of simultaneously measuring density, pressure and temperature of fluid based on micro-electromechanical system (MEMS) technology | |
| DK1977207T3 (en) | Precise pressure sensor | |
| KR102437326B1 (en) | Inkjet printer with board height position control | |
| EP1596165B1 (en) | Magnetic absolute angular position sensor for valves with electric actuators | |
| JPH09170958A (en) | Pressure sensor using hall element and its assembling method | |
| KR20100111086A (en) | Pressure measuring apparatus | |
| CN102128701B (en) | Micro-differential voltage gauge based on eddy current displacement measuring technology | |
| CN101382440B (en) | Magnetic position sensor with integrated hall effect switch | |
| GB2094982A (en) | Flow-meter for fluids with constant pressure loss | |
| US8242791B2 (en) | Area-variable type capacitive displacement sensor having mechanical guide | |
| CN201613477U (en) | Temperature rise measuring and compensating device of feeding system | |
| US9772243B2 (en) | Differential pressure sensor | |
| CN113299166A (en) | Experimental device for be used for studying magnetic liquid suspension characteristic and buoyancy measurement |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140416 Termination date: 20210614 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |