CN102439410B - Pressure sensor and method of adjusting the same - Google Patents
Pressure sensor and method of adjusting the same Download PDFInfo
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- CN102439410B CN102439410B CN201080022313.7A CN201080022313A CN102439410B CN 102439410 B CN102439410 B CN 102439410B CN 201080022313 A CN201080022313 A CN 201080022313A CN 102439410 B CN102439410 B CN 102439410B
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- 238000000034 method Methods 0.000 title claims description 13
- 230000004888 barrier function Effects 0.000 claims description 30
- 238000007906 compression Methods 0.000 claims description 30
- 230000006835 compression Effects 0.000 claims description 28
- 230000004907 flux Effects 0.000 claims description 21
- 239000012530 fluid Substances 0.000 claims description 20
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 34
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 229910000831 Steel Inorganic materials 0.000 abstract 2
- 239000010959 steel Substances 0.000 abstract 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 102
- 229910052742 iron Inorganic materials 0.000 description 52
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 150000002505 iron Chemical class 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008485 antagonism Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Provided is a pressure sensor wherein sensitivity can be adjusted by a simple structure. The peripheral portion of a diaphragm (20) is held between a joint body (10) and an upper body (30). A pressure receiving plate (24) provided with a permanent magnet (26) is installed on the diaphragm (20) and detects the displacement of the aforementioned permanent magnet (26), that is, the displacement of the diaphragm (20), by means of a linear Hall IC (34) installed in the aforementioned upper body (30). A plate (40) comprising a steel sheet provided with a square hole is installed on the outside of the linear Hall IC (34). By selecting a plate comprising a steel sheet located in a different position or a plate provided with a square hole having a different longitudinal dimension, or by removing the plate, adjustments are made so that the pressure sensor accuracy meets the accuracy requirement.
Description
Technical field
The present invention relates to detect with Hall element pressure transducer and the method for adjustment thereof of the displacement of the barrier film servo-actuated with the pressure of fluid.
Background technology
When the pressure of test fluid, by single of the pressure guiding barrier film of this fluid, the elastic force will antagonism another face of barrier film being applied and to make the masterpiece of the fluid that barrier film moves be that pressure detects.Knownly by the barrier film being shifted because of the pressure of fluid, make mechanical switch work, the product of the product using the situation that becomes predetermined pressure as signal output and the output analog output signal corresponding with the displacement of barrier film.
As the product of the output big or small signal corresponding with the displacement of barrier film, known have piezoresistance (semiconductor) formula pressure transducer and a capacitance-type pressure sensor, and still, the two price is high.
In addition, propose mounting permanent magnet on barrier film, with Hall element, detected the pressure transducer (patent documentation 1～7) of the use Hall element of the displacement of above-mentioned barrier film.
When the magnetic density that acts on Hall element increases, the output voltage of Hall element rises.By detecting this output voltage, can measure the pressure of the fluid of importing.Now, in the region that is straight line with respect to the displacement of Hall element and the output voltage of Hall element at magnet, during magnet displacement, the displacement of magnet and the output of Hall element become proportionate relationship, can detect pressure accurately.
Although there is predetermined proportionate relationship between the output voltage of Hall element and magnetic density, but the relation of the position of magnet and the output voltage of Hall element is because the fluctuation of the distance of each fluctuation, Hall element and the magnet of Hall element and magnet is in the each middle difference of each product.Even if there is this type of various fluctuation, each product also needs to carry out range adjustment to have fixing pressure and output voltage characteristic.
The pressure transducer of recording in patent documentation 1 (JP 56-86324 communique), by carrying out detected pressures with the variation of the magnet of barrier film interlock and the distance of Hall IC, possess the first permanent magnet and the second permanent magnet that homopolarity is relative, by inching screw or cap (cap), carry out set pressure operating point.In addition also can adjust by adjusting resistance is carried out to laser trimming.
The pressure transducer that patent documentation 2 (Unexamined Patent 09-170958 communique) is recorded, it is the helical spring method of inserting regulation after selecting necessary spring constant by range adjustment, but, the fluctuation of the stable case of seat cushion or spring self is large, has the unsettled problem of load scale (range).
The pressure transducer that patent documentation 3 (JP 2000-18997 communique) is recorded, by being adjusted at the variable resistor arranging on substrate, carry out range adjustment, but, parts price is high, owing to adopting leakage-proof structure, need to apply water-repellent paint, therefore lose time, the possibility that exists the resistance value of trimmer resistor to depart from when coating.In addition, there is the problem that expends expense for adjusting variable-resistance adjustment equipment.
The pressure transducer that patent documentation 4 (JP 56-155824 communique), patent documentation 5 (Unexamined Patent 08-327483 communique) and patent documentation 6 (JP 2000-214036 communique) are recorded is to make the pair of magnet of same polarity relative and in the mode of intermediate configurations Hall element, is by big or small two structures that magnet carries out the adjustment of magnetic density.In addition, owing to using the magnet (terres rares neodymium, samarium cobalt (CoSm) etc.) of two high prices, therefore existing problems aspect cost.
At patent documentation 7 (Unexamined Patent 08-327484 communique), recorded to reduce temperature deviation and possessed the pressure transducer of magnetic plate (iron plate) as object.
Patent documentation 1: JP 56-86324 communique
Patent documentation 2: Unexamined Patent 09-170958 communique
Patent documentation 3: JP 2000-18997 communique
Patent documentation 4: JP 56-155824 communique
Patent documentation 5: Unexamined Patent 08-327483 communique
Patent documentation 6: JP 2000-214036 communique
Patent documentation 7: Unexamined Patent 08-327484 communique
Summary of the invention
The problem to be solved in the present invention
As mentioned above, in the pressure transducer of existing use Hall element, with variable resistor, carry out interior adjustment of specification of spacing (output voltage range).Use the pressure transducer of Hall element less expensive, still, need to, for the treatment of the electronic unit of the signal of Hall element and substrate, have the high problem of expense forming for circuit.
So, the object of this invention is to provide and can eliminate this adjusting resistance, realize number of substrates less and pressure transducer and the method for adjustment thereof of the simplification of miniaturization and realization adjustment operation.
For the means of dealing with problems
For addressing the above problem, pressure transducer of the present invention has: adapter body, has the inflow entrance of determined fluid; Upside main body, is provided with the guiding chamber of inserting compression plate in inside; Barrier film, by above-mentioned adapter body and upside main body clamping periphery; Compression plate, on the indoor upper surface that is arranged on sliding freely above-mentioned barrier film of guiding of above-mentioned upside main body; Permanent magnet, is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC, side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively arrange, there is Hall element and amplify the circuit of the output of this Hall element, the opposition side with above-mentioned permanent magnet side at above-mentioned linear Hall IC is provided with magnetic plate, and this magnetic plate has is arranged to the space consistent with the center of above-mentioned linear Hall IC, center.
In addition, above-mentioned magnetic plate is the magnetic plate in plate multi-disc resin plate and a slice magnetic flaggy is folded and that form.
And, the plate of selecting from the different multiple plates in the position of above-mentioned stacked magnetic plate in operation adjusting is installed.
In addition, the magnetic plate of selecting adjusting in operation is installed from the different multiple magnetic plates of the length of the longitudinal direction in above-mentioned space.
In addition, the invention provides a kind of method of adjustment of pressure transducer, this pressure transducer has: adapter body, has the inflow entrance of determined fluid; Upside main body, is provided with the guiding chamber of inserting compression plate in inside; Barrier film, it is by above-mentioned adapter body and upside main body clamping periphery; Compression plate, on the indoor upper surface that is arranged on sliding freely above-mentioned barrier film of guiding of above-mentioned upside main body; Permanent magnet, is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC, side and above-mentioned permanent magnet in the guiding chamber of above-mentioned upside main body relatively arrange, there is Hall element and amplify the circuit of the output of this Hall element, wherein, in opposition side above-mentioned linear Hall IC and above-mentioned permanent magnet side, magnetic plate is installed, measure the output voltage range of this pressure transducer, when this measurement result is not in predetermined scope, by changing above-mentioned magnetic plate, thereby the output voltage range of this pressure transducer is controlled in adjustment by the convergence of the magnetic flux of above-mentioned linear Hall IC.
In addition, above-mentioned magnetic plate is the magnetic plate in plate multi-disc resin plate and a slice magnetic flaggy is folded and that form, and the adjustment of the convergence of the magnetic flux by above-mentioned linear Hall IC is the different plate in the position by stacked magnetic plate is installed or takes off plate and carry out.
In addition, be provided with the space consistent with the center of above-mentioned linear Hall IC, center on above-mentioned magnetic plate, the adjustment of the convergence of the magnetic flux by above-mentioned linear Hall IC is that the different magnetic plate of size by above-mentioned space is installed is carried out.
The effect of invention
According to this type of pressure transducer of the present invention and method of adjustment thereof, only, for the use of linear Hall IC, can carry out range adjustment by the installation of plate.Have, by the installation of the plate with square hole, manufacture parallel magnetic field, can carry out thus the range adjustment under more stable state (elimination positional fluctuation), the precision that comprises linear characteristic improves.
Can omit the electronic circuit for adjusting resistance etc. is adjusted, can make designs simplification, therefore can play and reduce costs, subtract undersized effect.
In addition, can realize pressure transducer environment resistant, that durability is better than exposed substrate product.Compared with the substrate low with antidrip property, also there is the feature that is relatively easy to form antidrip structure etc.
Further, it is simple that range is adjusted method, do not need complicated adjustment equipment.
Have again, also there is total cost and reduce, prevent that adjusting resistance from departing from because waterproof applies and the effect of stay in grade.
Accompanying drawing explanation
Fig. 1 is the figure that represents the formation of the first embodiment of pressure transducer of the present invention, is (a) cut-open view of the pressure transducer of this embodiment, is (b) the A-A line cut-open view of (a), (c) is side view.
Fig. 2 is the figure that represents an example of the plate 40 using in the first embodiment of the present invention, (a) be the figure of the structure of the plate (plate I) that represents the first kind, (b) being the figure of the structure of the plate (plate II) that represents the second kind, is (c) figure of the structure of the plate (plate III) that represents the third class.
Fig. 3 is the figure of the state of the pressure transducer under the each state for maximum pressurized state, magnet displacement zero position and atmospheric pressure state are described, (a) be the cut-open view that represents the state of the pressure transducer under maximum pressurized state, (b) be the cut-open view that represents the state of the pressure transducer under magnet displacement zero position state, (c) be the cut-open view that represents the state of the pressure transducer under atmospheric pressure state, (d) being the figure that represents magnetoelectricity conversion characteristics, is (e) figure that represents displacement output characteristics.
Fig. 4 is the figure describing for the acting characteristic of the pressure transducer in the situation of the situation that there is no installing plate and the different types of plate of installation, (a) be the cut-open view of pressure transducer of the present invention, (b)～(e) be for to the situation that there is no installing plate, the situation of plate I is installed, the situation of plate II is installed and the figure that the magnetic line of force that passes through linear Hall IC in the situation of plate III describes is installed, (f) be the figure that represents the magnetoelectricity conversion characteristics in (b)～(e) each situation, (g) be the figure that represents the displacement output characteristics in (b)～(e) each situation.
Fig. 5 is the figure of the analog result of the flux density distribution while representing to make the variable in distance between magnet and iron plate (SPCC), (a) be the figure that represents the analog result of the distance of linear Hall IC and iron plate and the relation of magnetic density, (b)～(e) be that the distance that represents linear Hall IC and iron plate is the figure of the analog result of the flux density distribution in each situation of 3.2mm, 3.5mm, 4.2mm and the situation that there is no iron plate.
Fig. 6 is the figure being specifically described for the range adjustment to the present invention relates to.
Fig. 7 is the figure describing for the size of the square hole to plate, (a) be the top cut-open view of pressure transducer of the present invention, (b) be the figure that amplifies the part of the magnet that represents in (a) and plate, (c) being the cut-open view of pressure transducer of the present invention, is (d) figure that amplifies the part of the magnet that represents in (c) and plate.
Fig. 8 is the figure for the second embodiment of pressure transducer of the present invention is described, (a) be the cut-open view of pressure transducer, (b)～(e) be for to the situation that there is no installing plate, be provided with plate I situation, the situation of plate II is installed and the figure that the magnetic line of force that passes through linear Hall IC in the situation of plate III describes is installed, (f) being the figure that represents the magnetoelectricity conversion characteristics in (b)～(e) each situation, is (g) figure that represents the displacement output characteristics in (b)～(e) each situation.
Fig. 9 is the figure of the analog result of the flux density distribution while being illustrated in the size variation that makes the space forming between iron plate, (a) be that to represent to make gap be in the situation of 0.1mm, 0.4mm, 1.0mm and magnetic density in the situation of the iron plate curve map with respect to the analog result of the relation of the displacement of magnet is not installed, (b)～(e) be to represent that making the gap length of iron plate is the figure of the analog result of the flux density distribution in 1.0mm, 0.4mm, 0.1mm and the each situation that there is no iron plate.
Figure 10 is the figure that represents the example of the plate in the space that is provided with slit-like, is (a) figure that represents the plate that is formed with square hole, is (b) figure that represents the configuration example of the plate in the space that is formed with slit-like.
Figure 11 is the figure that represents the example of the plate that space is not set, (a) be the figure of the structure of the plate (plate I) that represents the first kind, (b) being the figure of the structure of the plate (plate II) that represents the second kind, is (c) figure of the structure of the plate (plate III) that represents the third class.
Embodiment
Fig. 1 is the figure that represents the formation of the first embodiment of pressure transducer of the present invention, is (a) cut-open view of the pressure transducer of this embodiment, is (b) the A-A line cut-open view of (a), (c) is side view.There is again the micro-pressure sensor that pressure transducer of the present invention is used as for example electric cooker.
In the figure, the 10th, adapter body, the 20th, barrier film, the 30th, upside main body.Central authorities in the bottom surface of above-mentioned adapter body 10 possess connector portions 11, and this connector portions 11 has the introducing port for importing determined fluid, and is formed with stage portion 12 at the upper surface of adapter body 10.Above-mentioned barrier film 20 is for example the silicon rubber system that hardness is high, is formed with compression plate support portion 21, around it, is formed with the elastic force applying unit 22 that becomes heavy wall with ring-type at central part, at circumference, is formed with flange part 23.As shown in the figure, the teat of the lower surface of the lower end flange portion 31 of above-mentioned upside main body 30 coordinates with the stage portion 12 that the upper surface in above-mentioned adapter body 10 forms, and by the stage portion 12 of adapter body 10 and the lower end flange portion 31 of upside main body 30, the flange part of above-mentioned barrier film 20 23 is gripped.
In the inside of above-mentioned upside main body 30, be provided with guiding cylindraceous chamber 32 substantially.A part for the wall of guiding chamber 32 becomes par 33, on this par 33, linear Hall IC34 is installed.Linear Hall IC34 is by the IC of the amplifying circuit integral packaging of the output signal of Hall element and this Hall element of amplification, and output is by the signal amplifying with the simulating signal being in proportion in the magnetic field of exporting from Hall element.To from external connection terminals 35, output to device outside from the analog output signal of this linear Hall IC34.
In the guiding chamber 32 of above-mentioned upside main body 30, on above-below direction in the drawings, dispose sliding freely compression plate 24 cylindraceous substantially.The lower end of compression plate 24 is fixed on the compression plate support portion 21 of above-mentioned barrier film 20.The part relative with the above-mentioned par 33 of above-mentioned guidance part 32 of this compression plate 24 becomes par 25, and by both cooperations, compression plate 24 does not rotate, and can move up and down.And the relative position of linear Hall IC34 configuring in the par 25 and par 33 of guiding chamber 32 in above-mentioned upside main body 30 of compression plate 24 is fixed with permanent magnet 26.As this permanent magnet (being designated hereinafter simply as " magnet ") 26, can use the constant magnet of magnetoconductivity such as such as Nd (neodymium) or CoSm (samarium cobalt).
In addition,, in the outside of the position of the above-mentioned linear Hall IC34 of being provided with of above-mentioned upside main body 30, be provided with the plate incorporating section 36 of rectangle box-formed shape.In plate incorporating section 36, storage has the plate 40 of magnetic plate, and this plate 40 is installed in the recess 37 of being located in upper body 30.Thus, in linear Hall IC 34, with magnet 26 opposition sides, plate 40 is installed.As described later, prepare to have in the present invention the plate of multiple kinds, when the adjustment of this pressure transducer, select the plate of individual optimal kind with it to be accommodated in above-mentioned plate incorporating section 36, by bonding or thermal weld etc., be fixed in the recess 37 of upside main body 30.Have again, also have the situation that there is no installing plate 40.
The upper surface of above-mentioned compression plate 24, the volute spring 27 supporting by the adjustment screw 28 by screwing togather on the top of upside main body 30 is pressed, the Spring balanced forming with the above-mentioned elastic force applying unit 22 of barrier film 20.Have again, can adjust by adjusting screw 28 initial position of magnet 26.
In addition, on above-mentioned guiding chamber 32, be provided with bleeder vent 38, the region B being formed by the inside of above-mentioned barrier film 20 and above-mentioned upside main body 30 is remained to atmospheric pressure.
Fig. 2 is the figure that represents an example of the plurality of plate 40 of using in the first embodiment of the present invention.
In the example shown in this figure, as shown in the figure, plate 40 all becomes and will at central portion, be formed with a slice magnetic plate 41 and two resin plates 42 and the 43 stacked structures of the square hole 44 of growing crosswise.As magnetic plate 41, as long as the high material of magnetoconductivity, but the magnetic plate (below by magnetic plate referred to as " iron plate ") of iron plate (SPCC) is used in explanation here.And, its rightmost side of plate (plate I) of the first kind shown in Fig. 2 (a) is iron plate 41, its central authorities of the plate (plate II) of the second kind shown in Fig. 2 (b) are iron plate 41, and its leftmost side of plate (plate III) of the third class shown in Fig. 2 (c) is iron plate 41.
By this plate 40 is inserted in above-mentioned plate incorporating section 36, and be arranged in the recess 37 of upside main body 30, plate 40 is installed in the position consistent with the center of above-mentioned linear Hall IC34, center of above-mentioned square hole 44.
By selecting a certain being arranged in above-mentioned plate incorporating section 36 in these three kinds of plates (plate I, plate II, plate III), can select the distance between above-mentioned linear Hall IC34 and iron plate 41.
In the pressure transducer 1 forming as described above, the connector portions 11 arranging in above-mentioned adapter body 10 is connected with the pipe that imports determined fluid.When there is not determined fluid in pipe, the elastic force that above-mentioned compression plate 24 self has by above-mentioned barrier film 20 carrys out the deadweight of dipscrews spring 27 and compression plate 24, maintains predetermined initial position.When having fluid and importing fluid to region A in pipe, fluid pressure action, at the downside of barrier film 20, rises compression plate 24.Thus, above-mentioned magnet 26 also rises, and its displacement is as the variation of magnetic density and detected by above-mentioned linear Hall IC34, thus pressure that can test fluid.
Fig. 3 (a), (b) and (c) be respectively the cut-open view that represents the state of the above-mentioned pressure transducer under each state of maximum pressurized state, magnet displacement zero position and atmospheric pressure state, (d) being the figure that represents magnetoelectricity conversion characteristics, is (e) figure that represents displacement output characteristics.
In the present invention, it is the above-below direction in figure that magnet 26 is mounted to direction of magnetization, the Hall element in linear Hall IC34 only detect with the N utmost point of magnet and the border of the S utmost point near the vertical magnetic-field component of installed surface.The magnetic field detecting at the boundary of the N utmost point and the S utmost point is zero, and in its vicinity, with respect to the movement of magnet, magnetic density changes linearly, therefore can obtain the output that rectilinearity is good.
As shown in Fig. 3 (c), under atmospheric pressure state (C), as mentioned above, the elastic force of barrier film 20 and compression plate 24 balances of being pressed by volute spring 27, the center of magnet 26 becomes than the position (displacement-0.5mm) of the center decline 0.5mm of linear Hall IC34.Now, in this pressure transducer, the magnetic density of linear Hall IC34 is-23[mT], output voltage is 1.0[V].
In the magnet displacement zero position (B) shown in Fig. 3 (b), displacement (with respect to the center of the magnet of the center of linear Hall IC) is 0mm, and magnetic density is now 0[mT], output voltage is 2.5[V].
When the maximum pressurization shown in Fig. 3 (a) (A), the central part of barrier film 20 and compression plate 24 rise and the center of magnet 26 are become than the position (displacement+0.5mm) that rises 0.5mm on the center of linear Hall IC34, magnetic density is 23[mT], output voltage is 4.0[V].
Thus, as shown in the magnetoelectricity conversion characteristics of Fig. 3 (d) and displacement output characteristics (e), can use the good part of rectilinearity according to the output voltage test fluid pressure servo-actuated with the pressure of fluid.
But, as mentioned above, the relation of the position of magnet and the output voltage of Hall element is because the fluctuation of the distance of each fluctuation, Hall element and the magnet of Hall element and magnet is in the each middle difference of each product, and therefore each product needed is carried out range adjustment to have fixing pressure and output voltage characteristic.
So, in the present invention, according to the characteristic of each pressure transducer, select the most applicable its individual plate to install or installing plate not, do not use thus adjusting resistance and carry out range adjustment.
Fig. 4 is the figure describing for the acting characteristic of the pressure transducer in the situation of the situation that above-mentioned plate is not installed and the different types of plate of installation.
(a) of Fig. 4 is identical with (a) of above-mentioned Fig. 1, it is the cut-open view of pressure transducer of the present invention, (b), (c), (d) be respectively and (e) for to the situation that there is no installing plate, the situation of plate I is installed, the situation of plate II is installed and the figure that the magnetic line of force that passes through linear Hall IC34 in the situation of plate III describes is installed, (f) be the figure that represents magnetoelectricity conversion characteristics in above-mentioned (b)～(e) each situation (with respect to displacement and the output voltage characteristic of the magnet of magnetic density), (g) be the figure that represents displacement output characteristics in above-mentioned (b)～(e) each situation (with respect to output voltage and the magnetic density characteristic of the displacement of magnet).
(b) of Fig. 4 is for the figure that sends and describe by the magnetic line of force of linear Hall IC34 from magnet 26 in the situation that above-mentioned plate 40 is not installed, in left side, amplify and represent near the plate incorporating section 36 of above-mentioned cut-open view, on right side, represent in this case to send and by the magnetic line of force of linear Hall IC34 from magnet 26.
As shown in the drawing, in the situation that there is no installing plate 40, (be equivalent to the distance of plate as infinitely great), the magnetic line of force disperses most, there is no the convergence of the magnetic line of force.In this case, compare with the situation that plate I is installed of aftermentioned (c), the scope (range) of output voltage diminishes.
Fig. 4 (c) is the figure that represents the situation that plate I is installed.This state that plate I is installed is made as to normal condition.As shown in the figure, in this case, the iron plate 41 in plate 40 is mounted to and is positioned at off-line Hall IC 34 position farthest, can make to compare little from the degree of the convergence of the magnetic line of force of magnet 26 with the situation that other plates are installed.
Fig. 4 (d) is the figure that represents the situation that plate II is installed.In this case, iron plate 41 is positioned at the central portion of plate 40, compared with the situation of the plate I of (c), in the position near linear Hall IC34, iron plate 41 is installed.The convergence of the magnetic flux in this situation can be described as moderate, and the situation of range ratio above-mentioned (c) increases.
Fig. 4 (e) is the figure that represents the situation that plate III is installed.In this situation, the iron plate 41 in plate 40 is mounted to and is positioned at the nearest position of off-line Hall IC 34.Thus, from the convergence maximum of the magnetic flux of magnet 26, that is, larger than other situations by the magnetic density of Hall element, range maximum.
Above result, in the magnetoelectricity conversion characteristics of Fig. 4 (f), with the situation that plate I is installed (in figure, I) compare, not having in the situation of installing plate (in figure, without), the displacement of magnet becomes large with respect to the slope of magnetic density.In addition, the situation (in figure, II) of plate II is installed compared with the situation of plate I is installed, with respect to the slope of the variation of the magnet of magnetic density, diminishes, in the situation that plate III is installed (in figure, III), slope further diminishes.
And, in the displacement output characteristics of Fig. 4 (g), in the situation of installing plate (in figure, without), to compare with the situation (in figure, I) that plate I is installed not having, output voltage diminishes with respect to the slope of the displacement of magnet.In addition, the situation (in figure, II) of plate II is installed compared with the situation of plate I is installed, output voltage becomes large with respect to the slope of the displacement of magnet, and in the situation that plate III is installed, (in figure, III) slope further becomes large.
Like this, by the situation so that plate I to be installed, be benchmark, and take off plate or be replaced by plate II or plate III after evaluation characteristic, can adjust and with the fluctuation of absorption characteristic, become desired characteristic.
Fig. 5 is the figure of the result that represents that the flux density distribution when making magnet and having the variable in distance between the iron plate in space simulates.
In the figure, (a) be the curve map that represents the analog result of the distance of linear Hall IC34 and iron plate and the relation of magnetic density, (b)～(e) be that the distance that represents linear Hall IC34 and iron plate is the figure of the analog result of the flux density distribution in each situation of 3.2mm, 3.5mm, 4.2mm and the situation that there is no iron plate.
As shown in the drawing, the distance of iron plate and linear Hall IC is less, and the magnetic flux of convergence is more by linear Hall IC, and as shown in (a), the variation of known magnetic density becomes large with respect to the slope of magnet displacement.That is, confirmed the result shown in above-mentioned Fig. 4 (g).
Like this, according to the distance being provided with between setting position, i.e. iron plate and the linear Hall IC of iron plate in space, the convergence of the magnetic flux being detected by Hall element changes, and can adjust range.
Method of adjustment to pressure transducer involved in the present invention describes.
The assembling of supposing the pressure transducer shown in above-mentioned Fig. 1 finishes samely.But, in this moment, in above-mentioned plate incorporating section 36, be mounted for the plate I of benchmark temporarily.
Under this state, adjust above-mentioned adjustment screw 28 and measure the characteristic of this pressure transducer.
Its result, in the time of in output voltage range enters predetermined scope, is directly fixed on plate I in upside main body 30, finishes to adjust operation.
On the other hand, in the time of in output voltage range does not enter predetermined scope, take off above-mentioned plate I or replace with other plate II or plate III, carry out the mensuration of characteristic.Its result in the case of in output voltage range enters predetermined scope, when taking off plate, is fixed on this plate in upside main body 30 under this state when installing plate, finishes to adjust operation.
Like this, can not use electronic circuit and carry out the adjustment of precision, the i.e. adjustment of range.
Use Fig. 6 to be described more specifically the range adjustment the present invention relates to.
The desired precision of pressure transducer, for example deviation accuracy requirement under normal temperature is ± 6%FS (full scale (full scale)) that the accuracy requirement of sensitivity is+12%FS/-8%FS.
Major reason as sensitivity error has fluctuation (magnetoconductivity, magnet size) ± 3%FS, (3) spring load (+4%FS/-2%FS), (4) transducer sensitivity (virtual rating ± 5%FS of sensor) of the magnetic density of distance (take 1mm as 100% range, being 5%FS when departing from 50 μ m) between (1) sensor (Hall element) and magnet, (2) magnet etc.
From 5+3+4+5=17%, 5+3+2+5=-15%, calculate the maximum total error that produces 31% range.In this example, sensitivity accuracy requirement allows to+12%/-8%, if therefore have+5%/-7% setting range can enter precision prescribed in theory.
Because its limit of control of inserting as the present invention the sensitivity that iron plate carries out is+10% left and right, therefore design object value is set in to the point after-5% decline, at measured value, lower than desired value in the situation that, by inserting iron plate, can be in allowed band by sensitivity adjustment.
That is, as shown in Figure 6, in the situation that exceeding allowed band, the mechanical means of the application of the invention compensates, and can become the precision in allowed band.
Have, in foregoing, aim at these three kinds of plates of slave board I～plate III, be illustrated, but be not limited to this by some plates wherein or situation that installing plate does not carry out range adjustment are installed, the kind of the plate of preparation is arbitrarily.For example only prepare a certain plate, (or installation) plate is not installed and is carried out the mensuration of characteristic, (or taking off) plate can be installed according to its result.
Here, with reference to Fig. 7, the size of above-mentioned square hole 44 is described.
Fig. 7 (a) and above-mentioned Fig. 1 (b) are similarly the top cut-open views of pressure transducer of the present invention, are (b) figure that amplifies the part that represents its magnet 26 and plate 40.
At the lateral dimension that makes magnet 26, be A, while making the lateral dimension of square hole 40 be X, more than the lateral dimension X of square hole 40 preferably becomes and is respectively magnet width (A) from the left and right end of magnet 26, i.e. X >=A+ (2A), to do not produce the disorder in horizontal magnetic field.For example, in the situation that magnet width (A) is 2mm, the lateral dimension (X) of square hole 40 be 6mm above.
(c) of Fig. 7 and (a) of above-mentioned Fig. 1 are similarly the cut-open views of pressure transducer of the present invention, are (d) figure that amplifies the part that represents its magnet 26 and plate 40.
At the longitudinal size that makes magnet 26, be B, while making the longitudinal size of square hole 44 be Y, the longitudinal size Y of square hole 44 does not have special provision, but, as reference value, preferably there is the size of path increment (the being 1mm) left and right of magnet 26 in the example shown in above-mentioned Fig. 2, on the other hand, preferably suppress for 1/2 of the longitudinal size (B) less than magnet 26.Thus, when the longitudinal size (B) of magnet 26 is 4mm, the longitudinal size (Y) of square hole 44 can be 1mm～2mm left and right.
Secondly, the second embodiment of pressure transducer of the present invention is described.
In above-mentioned the first embodiment of the present invention, that selects different types of plate I～plate III somely carries out range adjustment, so that the distance difference between linear Hall IC34 and iron plate (SPCC) 41, but, in this embodiment, by the plate of selecting the installation plurality of plate different from the size of longitudinal (direction identical from the direction of magnetization of magnet 26) of set square hole 44, similarly carry out range adjustment with the situation of the first embodiment.
Fig. 8 is the figure for the second embodiment of the present invention is described, (a) same with (a) of above-mentioned Fig. 1 is the cut-open view of pressure transducer, (b), (c), (d) be respectively and (e) for to the situation that there is no installing plate, the situation of plate I is installed, the situation of plate II is installed and the figure that the magnetic line of force that passes through linear Hall IC34 in the situation of plate III describes is installed, (f) be the figure that represents magnetoelectricity conversion characteristics in (b)～(e) each situation (with respect to displacement and the output voltage characteristic of the magnet of magnetic density), (g) be the figure that represents displacement output characteristics in (b)～(e) each situation (with respect to output voltage and the magnetic density characteristic of the displacement of magnet).
In this embodiment, as shown in Fig. 4 (c)～(e), use the different three kinds of plates 40 (plate I, plate II, plate III) of size (size in gap) of the longitudinal direction of the square hole 44 forming on the iron plate (SPCC) 41 of plate 40.Distance between iron plate in each plate 41 and linear Hall IC34 is made as fixing.
And, in the size in the gap that makes plate I, be a, making the size in the gap of plate II is b, while making the size in the gap of plate III be c, becomes c < b < a.And, the plate I of the size maximum in gap is made as to datum plate.
As shown in the figure, the gap of plate is less, and the convergence of the magnetic flux by linear Hall IC34 is higher.Thus, as Fig. 4 (f) with (g), the gap of plate becomes less, and range (scope of output voltage) becomes larger.In addition, in the case of not having installing plate 40 of (b), the convergence of magnetic flux diminishes, and range diminishes.
Fig. 9 is the figure that represents the result that the flux density distribution when the size variation in the space that makes to form between iron plate (gap) is simulated.
In the figure, (a) be that to represent to make gap be magnetic density in the situation of 0.1mm, 0.4mm, 1.0mm and the situation that iron plate (SPCC) is not the installed curve map with respect to the analog result of the relation of the displacement of magnet, (b)～(e) be to represent that the size in the gap that makes iron plate is the figure of the analog result of the flux density distribution in the situation of 1.0mm, 0.4mm, 0.1mm and the situation that there is no iron plate.
As shown in the drawing, the known size in gap is less, the convergence of magnetic flux is higher, with the convergence of the order magnetic flux of (e), (b), (c), (d), increases.
Like this, by the plate selected one or more plates that the length (size in gap) of longitudinal direction of the square hole 44 from forming is onboard different or installing plate are not installed, can similarly carry out range adjustment with the situation of above-mentioned the first embodiment.
In Fig. 8, the position of the iron plate in the different plate of the length of the longitudinal direction of square hole is fixed, still, with the situation of above-mentioned Fig. 4 similarly, can also make the position of iron plate also change.For example can as (e) of Fig. 4, make the position of iron plate approach the plate III of linear Hall IC34 ground installation diagram 8 (e) most.Thus, can carry out more accurate adjustment.
Have again, in the respective embodiments described above, on plate 40, formed square hole 44, but be not limited to this.
For example can replace square hole 44 and the space of slit-like is set.
(a) of Figure 10 is the figure that has represented to form as described above the plate of square hole 44, is (b) to represent to replace square hole and the figure that formed the configuration example of the plate in the space of slit-like.As shown in (b), can use across two long slabs of space Y configuration and form above-mentioned various plate.
Or, also can replace square hole 44 and the oval hole portion that waits other shapes of formation.
Have, can possess iron plate, this iron plate possesses magnetoconductivity and approaches part rather than hole or the space of 1 medium.
Further, used in the above-described embodiment the plate that possesses iron plate, this iron plate has square hole or space, but square hole or space also can be set.
Figure 11 is the figure that represents the example of the plate of this embodiment, plate I shown in Figure 11 (a) configures the rightmost side in the drawings by iron plate 41, when the party is upwards installed on above-mentioned plate incorporating section 36, the distance from linear Hall IC34 to iron plate 41 compared with other plates farthest.(b) the plate II shown in is configured in central part by iron plate 41, and the distance from linear Hall IC34 to iron plate 41 is middle value.(c) the plate III shown in configures the leftmost side in the drawings by iron plate 41, and when the party is upwards installed on above-mentioned plate incorporating section 36, the distance from linear Hall IC34 to iron plate 41 is nearest compared with other plates.
Because linear Hall IC34 is different with the distance of iron plate 41, from the convergence difference of the magnetic density of magnet, therefore by some the installation or installing plate not of selecting the plate shown in (a)～(c), can change the scope from the output voltage of linear Hall IC34, can similarly carry out range adjustment with above-mentioned embodiment.But compared with forming the situation of square hole 44, adjustment amount tails off in this case.
In the above-described embodiment, take adopt by two resin plates 42 and 43 and the plate of the stacked structure of a slice iron plate 41 describe as example, but be not limited to this, also can use the plate of more than three resin plate and the stacked structure of a slice iron plate 41.Thus, can more critically carry out range adjustment.
The explanation of symbol:
10-adapter body, 11-connector portions, 12-stage portion, 20-barrier film, 21-compression plate support portion, 22-elastic force applying unit, 23-flange part, 24-compression plate, 25-par, 26-permanent magnet, 27-volute spring, 28-adjusts screw, 30-upside main body, 31-flange part, 32-guides chamber, 33-par, 34-linear Hall IC, 35-external connection terminals, 36-plate incorporating section, 37-recess, 40-plate, 41-magnetic plate (iron plate), 42,43-resin plate, 44-square hole.
Claims (6)
1. a pressure transducer, is characterized in that, has:
Adapter body, has the inflow entrance of determined fluid;
Upside main body, is provided with the guiding chamber of inserting compression plate in inside;
Barrier film, by above-mentioned adapter body and upside main body clamping periphery;
Compression plate, on the indoor upper surface that is arranged on sliding freely above-mentioned barrier film of guiding of above-mentioned upside main body;
Permanent magnet, is fixed on the slipping plane of above-mentioned compression plate; With
Linear Hall IC, relatively arranges at side and the above-mentioned permanent magnet of the guiding chamber of above-mentioned upside main body, and there is Hall element and amplify the circuit of the output of this Hall element,
The opposition side with above-mentioned permanent magnet side at above-mentioned linear Hall IC is provided with magnetic plate, and this magnetic plate has is arranged to the space consistent with the center of above-mentioned linear Hall IC, center.
2. pressure transducer according to claim 1, is characterized in that,
Above-mentioned magnetic plate is the magnetic plate in plate multi-disc resin plate and a slice magnetic flaggy is folded and that form.
3. pressure transducer according to claim 2, is characterized in that,
The plate of selecting from the different multiple plates in the position of above-mentioned stacked magnetic plate in operation adjusting is installed.
4. pressure transducer according to claim 1, is characterized in that,
The magnetic plate of selecting from the different multiple magnetic plates of the length of the longitudinal direction in above-mentioned space adjusting in operation is installed.
5. a method of adjustment for pressure transducer, this pressure transducer has: adapter body, has the inflow entrance of determined fluid; Upside main body, is provided with the guiding chamber of inserting compression plate in inside; Barrier film, by above-mentioned adapter body and upside main body clamping periphery; Compression plate, on the indoor upper surface that is arranged on sliding freely above-mentioned barrier film of guiding of above-mentioned upside main body; Permanent magnet, is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC, at side and the above-mentioned permanent magnet of the guiding chamber of above-mentioned upside main body, relatively arrange, there is Hall element and amplify the circuit of the output of this Hall element, the method for adjustment of described pressure transducer is characterised in that,
In contrary with an above-mentioned permanent magnet side side of above-mentioned linear Hall IC, the plate that multi-disc resin plate and a slice magnetic plate are laminated is installed, is measured the output voltage range of this pressure transducer,
When this measurement result is not in predetermined scope, by other different plates of the stacked position of above-mentioned magnetic plate being installed or being taken off above-mentioned plate, thereby the convergence of adjusting the magnetic flux by above-mentioned linear Hall IC is controlled the output voltage range of this pressure transducer.
6. a method of adjustment for pressure transducer, this pressure transducer has: adapter body, has the inflow entrance of determined fluid; Upside main body, is provided with the guiding chamber of inserting compression plate in inside; Barrier film, by above-mentioned adapter body and upside main body clamping periphery; Compression plate, on the indoor upper surface that is arranged on sliding freely above-mentioned barrier film of guiding of above-mentioned upside main body; Permanent magnet, is fixed on the slipping plane of above-mentioned compression plate; With linear Hall IC, at side and the above-mentioned permanent magnet of the guiding chamber of above-mentioned upside main body, relatively arrange, there is Hall element and amplify the circuit of the output of this Hall element, the method for adjustment of described pressure transducer is characterised in that,
A side contrary with above-mentioned permanent magnet side at above-mentioned linear Hall IC installed magnetic plate, measures the output voltage range of this pressure transducer, wherein on above-mentioned magnetic plate, is provided with the space consistent with the center of above-mentioned linear Hall IC, center,
When this measurement result is not in predetermined scope, by the different magnetic plate of size that above-mentioned magnetic plate is changed to above-mentioned space, thereby the output voltage range of this pressure transducer is controlled in adjustment by the convergence of the magnetic flux of above-mentioned linear Hall IC.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-178990 | 2009-07-31 | ||
| JP2009178990A JP5027191B2 (en) | 2009-07-31 | 2009-07-31 | Pressure sensor and adjustment method thereof |
| PCT/JP2010/060015 WO2011013451A1 (en) | 2009-07-31 | 2010-06-14 | Pressure sensor and method of adjusting the same |
Publications (2)
| Publication Number | Publication Date |
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| CN102439410A CN102439410A (en) | 2012-05-02 |
| CN102439410B true CN102439410B (en) | 2014-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201080022313.7A Expired - Fee Related CN102439410B (en) | 2009-07-31 | 2010-06-14 | Pressure sensor and method of adjusting the same |
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| Country | Link |
|---|---|
| JP (1) | JP5027191B2 (en) |
| CN (1) | CN102439410B (en) |
| WO (1) | WO2011013451A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6180752B2 (en) * | 2012-04-27 | 2017-08-16 | エスアイアイ・セミコンダクタ株式会社 | Sensor device |
| KR101567938B1 (en) * | 2012-06-13 | 2015-11-10 | 가부시키가이샤 사기노미야세이사쿠쇼 | Pressure sensor |
| JP6101597B2 (en) * | 2013-08-09 | 2017-03-22 | アルプス電気株式会社 | Pressure detection device |
| JP6101596B2 (en) * | 2013-08-09 | 2017-03-22 | アルプス電気株式会社 | Pressure detection device |
| CN108139315B (en) * | 2015-09-18 | 2021-03-05 | 热电科学仪器有限公司 | Path length calibration system and method |
| CN107404612B (en) * | 2016-05-20 | 2020-02-28 | 鸿富锦精密工业（深圳）有限公司 | Camera control device |
| CN106441063B (en) * | 2016-10-21 | 2021-05-14 | 惠州市铂蓝德科技有限公司 | Displacement sensor and pressure cooker thereof |
| CN108414132A (en) * | 2018-06-04 | 2018-08-17 | 陈荣国 | A kind of Fluid pressure detection sensor |
| JP6968121B2 (en) * | 2019-04-26 | 2021-11-17 | 株式会社鷺宮製作所 | Pressure sensor |
| JP7137531B2 (en) * | 2019-06-04 | 2022-09-14 | 株式会社鷺宮製作所 | Pressure sensor with corrosion resistant magnet |
| CN110401433B (en) * | 2019-07-04 | 2023-07-11 | 贵州航天林泉电机有限公司 | Linear Hall element mounting structure of turbofan engine oil supply system |
| CN110595665A (en) * | 2019-09-09 | 2019-12-20 | 上海钧嵌传感技术有限公司 | Pressure detection sensor and detection method |
| CN112113689A (en) * | 2020-09-15 | 2020-12-22 | 智能移动机器人(中山)研究院 | Spring plantar sensor system based on Hall |
| CN114167325B (en) * | 2021-12-09 | 2022-08-26 | 山东大学 | Controllable trigger non-magnetic heating method for atomic magnetometer |
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| JPH036477A (en) * | 1989-06-05 | 1991-01-11 | Nikon Corp | Apparatus for detecting magnetic flux density |
| JPH06149474A (en) * | 1992-11-12 | 1994-05-27 | Minebea Co Ltd | Magnetic coordinate position indicating device |
| EP0772046B1 (en) * | 1995-10-30 | 2002-04-17 | Sentron Ag | Magnetic field probe and current or energy probe |
| JP2000018997A (en) * | 1998-04-28 | 2000-01-21 | Saginomiya Seisakusho Inc | Water level sensor using hall element |
| JP2000283277A (en) * | 1999-03-31 | 2000-10-13 | Kyocera Corp | Gear shift position detecting device of automobile |
| KR101173519B1 (en) * | 2003-02-14 | 2012-08-14 | 베이 센서스 앤드 시스템즈 캄파니, 인코포레이티드 | Position sensor utilizing a linear hall-effect sensor, having a magnet arrangement for an increased linearity |
| JP2007183221A (en) * | 2006-01-10 | 2007-07-19 | Denso Corp | Electric current sensor |
| JP4960209B2 (en) * | 2007-12-11 | 2012-06-27 | ナイルス株式会社 | Non-contact rotation angle detection sensor |
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2009
- 2009-07-31 JP JP2009178990A patent/JP5027191B2/en not_active Expired - Fee Related
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- 2010-06-14 CN CN201080022313.7A patent/CN102439410B/en not_active Expired - Fee Related
- 2010-06-14 WO PCT/JP2010/060015 patent/WO2011013451A1/en active Application Filing
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| JP平3-6477A 1991.01.11 |
| JP特开2000-18997A 2000.01.21 |
| JP特开2000-283277A 2000.10.13 |
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| Publication number | Publication date |
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| CN102439410A (en) | 2012-05-02 |
| WO2011013451A1 (en) | 2011-02-03 |
| JP2011033443A (en) | 2011-02-17 |
| JP5027191B2 (en) | 2012-09-19 |
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