CN102323300A - Polyelectrolyte and graphene composite resistive moisture sensor and manufacturing method thereof - Google Patents

Polyelectrolyte and graphene composite resistive moisture sensor and manufacturing method thereof Download PDF

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Publication number
CN102323300A
CN102323300A CN201110200092A CN201110200092A CN102323300A CN 102323300 A CN102323300 A CN 102323300A CN 201110200092 A CN201110200092 A CN 201110200092A CN 201110200092 A CN201110200092 A CN 201110200092A CN 102323300 A CN102323300 A CN 102323300A
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polyelectrolyte
graphene
humidity
gold electrode
humidity sensitive
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CN201110200092A
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李扬
邓超
杨慕杰
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention discloses a polyelectrolyte and graphene composite resistive moisture sensor and a manufacturing method thereof. The polyelectrolyte and graphene composite resistive moisture sensor uses a ceramic as a substrate on which a plurality of pairs of interdigital gold electrodes are arranged; a moisture sensitive film is coated on the ceramic substrate and the interdigital gold electrode surfaces, the moisture sensitive film is a polyelectrolyte poly (diallyldimethylammonium chloride) and graphene composite. The moisture sensor has the advantages of moderate impedance value, high sensitivity, good linearity, small dampness and can be detected at room temperature in a wide humidity range, in particular in a low humidity environment, can be widely applied to the accurate measurement and control of the environmental humidity in the fields of industrial and agricultural production, storage, atmospheric environment monitoring and the like, in particular the humidity in a low humidity environment.

Description

A kind of polyelectrolyte and Graphene compound resistor type humidity sensitive element and preparation method thereof
Technical field
The present invention relates to a kind of polyelectrolyte and Graphene compound resistor type humidity sensitive element and preparation method thereof.
Background technology
Humidity Detection has the effect that becomes more and more important in industrial and agricultural production and the environmental monitoring in modern times.As detecting the most commonly used and effective method of humidity, the research of humidity sensor also thereby receive various countries and generally pay attention to.In recent years; The increasing various aspects that are applied in productive life of high voltage electric equipment; And the medium sulfur hexafluoride gas moisture that is used for the high-tension transformation equipment insulation has appreciable impact for its insulating property; And influencing equipment life and safety, the monitoring of therefore low wet environment also receives very big concern.Macromolecule resistance type humidity sensor have response sensitivity height, preparation easy, cheap, be easy to advantage such as modification regulation and control performance, become the emphasis of humidity sensor research and development.Current macromolecule resistance type humidity sensor is main with polyelectrolyte mainly, and this type material response remolding sensitivity is higher, but simultaneously this type material has very high resistance under low wet environment, be difficult to measure, big limitations its application in low humidity detects.For this reason, be necessary to carry out modification for humidity sensing polymer materials,, enlarge and detect range, improve its low humidity response characteristic to reduce its low wet electric resistance through chemical modification, method such as compound.Polyelectrolyte and macromolecule and inorganic conductive material etc. is compound through methods such as copolymerization, blend, can reduce the resistance of compound substance to a certain extent, be expected to prepare the resistance type humidity sensor that can detect low wet environment.
People such as Geim found grapheme material in 2004, had evoked huge great waves in scientific circles, only spent for six years, promptly obtained Nobel Prize in physics in 2010 years.It is found that this novel two-dimensional nano material of Graphene has unusual electric conductivity, exceeds the intensity of tens of times of iron and steel and fabulous light transmission, be expected to electronics technology field initiation one in modern times and take turns revolution.Graphene is the thinnest a kind of in the known materials, very rigid; As simple substance, it is all faster than known conductor that it at room temperature transmits the speed of electronics: its conduction electrons can not only be in lattice moves without barrier, and speed is exceedingly fast, considerably beyond the translational speed of electronics in metallic conductor or semiconductor.Can be used for preparing room temperature trajectory field effect transistor thus; Single-electron device and integrated circuit, it also has a good application prospect in fields such as compound substance, battery electrode material, hydrogen storage material, field emmision material, quantum computer and hypersensors in addition.
Summary of the invention
The purpose of this invention is to provide a kind of in wide humidity range, but particularly under low wet environment, have polyelectrolyte that response sensitivity height, the little room temperature of humidity hysteresis detect and Graphene compound resistor type humidity sensitive element and preparation method thereof.
The electric resistance type humidity sensitive element that polyelectrolyte of the present invention and Graphene are compound; Has ceramic matrix; Have many at ceramic matrix photomask surface and evaporation to interdigital gold electrode; On interdigital gold electrode, be connected with lead-in wire, be coated with humidity sensitive thin film at ceramic matrix and interdigital gold electrode surfaces, humidity sensitive thin film is diallyl dimethyl ammoniumchloride and the compound humidity-sensitive material of Graphene.
The method for making of the electric resistance type humidity sensitive element that polyelectrolyte and Graphene are compound may further comprise the steps:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the diallyl dimethyl ammoniumchloride solution that 1-5 is restrained 25%wt dilutes with the 5-15 ml deionized water;
3) 5-25 milligram graphene oxide is added in the 5-15 ml water; Sonic oscillation was handled 15-45 minute; Dropwise join step 2 then) in the diallyl dimethyl ammoniumchloride solution of preparation, continue sonic oscillation and handle after 15-45 minute, add 0.1-0.5 milliliter mass content and be 85% hydrazine hydrate; Heated 5-15 hour down at 65-125 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 0.5-2 minute; After lifting taking-up; Heated 1-10 hour down at 60-120 ℃, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
The invention has the advantages that:
1) cationic polyelectrolyte diallyl dimethyl ammoniumchloride (PDDA) is a kind of common polyelectrolyte material, and its humidity hysteresis is little, and response sensitivity is high.But there is the high shortcoming of resistance under the low humidity, is difficult to use in low wet environment and measures, limited the scope of its practical application.Graphene is as a kind of two-dimensional nano conductive material with superior electrical conductivity; Obviously reduced the resistance of element under dry environment with polyelectrolyte PDDA after compound; Make it under low humidity, still have good linear response; It does not influence other excellent wet quick response characteristic of polyelectrolyte humidity-sensitive material PDDA simultaneously, and compound still embodies very little humidity hysteresis.
2) Graphene has good electrical conductivity, but it is insoluble not molten, is difficult to directly realize with polyelectrolyte well compound.For this reason, select for use the graphene oxide and the polyelectrolyte PDDA that in solution, have good dispersion directly to carry out solution blending.Through dip-coating method, complex thin film is deposited on the interdigital gold electrode, carry out a step electronation again, can make Graphene and polyelectrolyte composite film electric resistance type humidity sensitive element.Method is simple for this; Avoided common nano material and polymkeric substance compound tense, need carry out complicated chemical modification modification for nano material, adopted the element high conformity of dip-coating method preparation in order to improve its dispersing characteristic; Yield rate is high, is particularly suited for producing in batches;
3) electric conductivity of Graphene is very high, and not influenced by ambient humidity, and itself and polyelectrolyte are compound, can significantly reduce humidity-sensitive element at low wet environment resistance down, thereby realizes low wet environment mensuration easily; And as the two-dimensional nano material, itself and polyelectrolyte PDDA are compound, can significantly improve the specific surface area of humidity sensing film, thereby add fast-response and increase response sensitivity, and the chemical stability that Graphene is good in addition also helps the raising of humidity-sensitive element stability;
4) to have a volume little for humidity-sensitive element of the present invention, low cost, advantage such as easy to use.Adopting substrate is the interdigital gold electrode structure of porous ceramics, can improve the contact of humidity sensitive thin film and electrode basement, improves the stability of element.When can being widely used in industrial and agricultural production process, storage, atmosphere environment supervision, accurately measures and control this humidity-sensitive element, particularly the Humidity Detection of low wet environment for ambient humidity.
Description of drawings
Fig. 1 is the structural representation of humidity-sensitive element of the present invention;
Fig. 2 is the humidity hysteresis curve of the compound electric resistance type humidity sensitive element of polyelectrolyte and Graphene;
Fig. 3 is the low humidity response curve of the compound electric resistance type humidity sensitive element of polyelectrolyte and Graphene;
Fig. 4 is the response time curve of the compound electric resistance type humidity sensitive element of polyelectrolyte and Graphene.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing and embodiment.
With reference to Fig. 1; The electric resistance type humidity sensitive element that polyelectrolyte of the present invention and Graphene are compound; Have ceramic matrix 1, have manyly in ceramic matrix photomask surface and evaporation, on interdigital gold electrode, be connected with lead-in wire 4 interdigital gold electrode 2; Be coated with humidity sensitive thin film 3 at ceramic matrix and interdigital gold electrode surfaces, humidity sensitive thin film 3 is diallyl dimethyl ammoniumchloride (PDDA) and the compound humidity-sensitive material of Graphene.
The interdigital interdigital width of said potsherd matrix surface is 20-200 μ m, and interdigital gap is 20-200 μ m.
Embodiment 1:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the PDDA solution with 5 gram 25%wt dilutes with 5 ml deionized water;
3) 5 milligrams of graphene oxides are added in 5 ml waters; Sonic oscillation was handled 15 minutes; Dropwise join step 2 then) in the PDDA solution of preparation, continue sonic oscillation and handle after 15 minutes, add 0.1 milliliter of mass content and be 85% hydrazine hydrate; Heated 5 hours down at 65 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 0.5 minute, lift taking-up after, 60 ℃ of heating 1 hour down, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
Embodiment 2:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the PDDA solution with 3 gram 25%wt dilutes with 7 ml deionized water;
3) 7 milligrams of graphene oxides are added in 7 ml waters; Sonic oscillation was handled 20 minutes; Dropwise join step 2 then) in the PDDA solution of preparation, continue sonic oscillation and handle after 20 minutes, add 0.2 milliliter of mass content and be 85% hydrazine hydrate; Heated 7 hours down at 125 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 0.8 minute, lift taking-up after, 70 ℃ of heating 2 hours down, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
Embodiment 3:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the PDDA solution with 1 gram 25%wt dilutes with 10 ml deionized water;
3) 15 milligrams of graphene oxides are added in 10 ml waters; Sonic oscillation was handled 30 minutes; Dropwise join step 2 then) in the PDDA solution of preparation, continue sonic oscillation and handle after 30 minutes, add 0.4 milliliter of mass content and be 85% hydrazine hydrate; Heated 10 hours down at 80 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 1.5 minutes, lift taking-up after, 90 ℃ of heating 5 hours down, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
Embodiment 4:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the PDDA solution with 5 gram 25%wt dilutes with 15 ml deionized water;
3) 25 milligrams of graphene oxides are added in 15 ml waters; Sonic oscillation was handled 45 minutes; Dropwise join step 2 then) in the PDDA solution of preparation, continue sonic oscillation and handle after 45 minutes, adding 0.5 milliliter of mass content is 85% hydrazine hydrate; Heated 15 hours down at 125 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 2 minutes, lift taking-up after, 120 ℃ of heating 10 hours down, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
The humidity hysteresis curve of this humidity-sensitive element is seen Fig. 2, and by the figure finding, the humidity hysteresis of the electric resistance type humidity sensitive element that polyelectrolyte PDDA and Graphene are compound is very little, is about 1%RH;
Visible by Fig. 3, under the low wet environment of 0.25-30%RH, composite humidity sensor has good response linearity under semilog coordinate, and response sensitivity is higher, embodies well wet quick response characteristic;
Visible by Fig. 4, when the composite humidity sensor of the present invention's preparation was changed under the height wet environment of 84%RH and 11%RH, element moisture absorption response was very fast, and the response time is merely 9 seconds, but dehumidification is slower, and the response time is 150 seconds.

Claims (2)

1. polyelectrolyte and the compound electric resistance type humidity sensitive element of Graphene; It is characterized in that: it has ceramic matrix ⑴; Have many at ceramic matrix photomask surface and evaporation to interdigital gold electrode ⑵; On interdigital gold electrode, be connected with lead-in wire ⑷, be coated with humidity sensitive thin film ⑶ at ceramic matrix and interdigital gold electrode surfaces, humidity sensitive thin film is diallyl dimethyl ammoniumchloride and graphene complex.
2. the method for making of polyelectrolyte according to claim 1 and Graphene compound resistor type humidity sensitive element is characterized in that may further comprise the steps:
1) clean surface photoetching and evaporation have the ceramic substrate of interdigital gold electrode, dry for standby;
2) the diallyl dimethyl ammoniumchloride solution that 1-5 is restrained 25%wt dilutes with the 5-15 ml deionized water;
3) 5-25 milligram graphene oxide is added in the 5-15 ml water; Sonic oscillation was handled 15-45 minute; Dropwise join step 2 then) in the diallyl dimethyl ammoniumchloride solution of preparation, continue sonic oscillation and handle after 15-45 minute, add 0.1-0.5 milliliter mass content and be 85% hydrazine hydrate; Heated 5-15 hour down at 65-125 ℃, obtain precursor solution;
4) the ceramic interdigital gold electrode of step 1) impregnated in the precursor solution of step 3) preparation 0.5-2 minute; After lifting taking-up; Heated 1-10 hour down at 60-120 ℃, obtain being coated with the electric resistance type humidity sensitive element of polyelectrolyte and the compound humidity sensitive thin film of Graphene.
CN201110200092A 2011-07-18 2011-07-18 Polyelectrolyte and graphene composite resistive moisture sensor and manufacturing method thereof Pending CN102323300A (en)

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CN102636522A (en) * 2012-03-29 2012-08-15 浙江大学 Graphene/ stannic oxide nanometer compounding resistance type film gas sensor and manufacturing method thereof
CN102944597A (en) * 2012-12-11 2013-02-27 天津工业大学 Deliquescent-polyelectrolyte-based full-solid-state ethanol gas sensor enzyme electrode and manufacturing method thereof
CN103149246A (en) * 2012-09-27 2013-06-12 中国石油大学(华东) Graphene film humidity sensor
WO2014135745A1 (en) 2013-03-04 2014-09-12 Nokia Corporation Apparatus and method for water protection of an electronic device
CN104569052A (en) * 2014-12-17 2015-04-29 东南大学 Method for preparing graphene oxide sensor
CN104849324A (en) * 2015-05-25 2015-08-19 吉林大学 Resistance-type gas sensor based on graphene/multi-walled carbon nano-tube/zinc oxide composite material, and manufacturing method of resistance-type gas sensor
CN104914138A (en) * 2015-07-03 2015-09-16 深圳市共进电子股份有限公司 Humidity sensor, humidity sensor array and preparation method thereof
EP2943782A4 (en) * 2013-01-11 2016-08-24 Nokia Technologies Oy An apparatus for temperature and fluid relative vapour pressure measurement and accociated methods
CN106124574A (en) * 2016-06-16 2016-11-16 西南交通大学 Graphene oxide quantum dot humidity sensor and preparation method thereof
CN108414583A (en) * 2018-03-05 2018-08-17 华中科技大学 Humidity sensor and the improvement based on graphene oxide humidity sensor and preparation
CN111234275A (en) * 2020-01-14 2020-06-05 武汉理工大学 Multilayer humidity-sensitive film based on activated carbon combined with inorganic material doped polyimide and composite humidity-sensitive element
CN112611787A (en) * 2020-12-15 2021-04-06 无锡豪帮高科股份有限公司 High-molecular resistance type humidity sensitive element and preparation method thereof
EP3992622A1 (en) 2020-11-03 2022-05-04 Institutul National de Cercetare-Dezvoltare Pentru Microtehnolgie - IMT Bucuresti INCD Quaternary hydrophilic nanohybrid composition for resistive humidity sensors
CN114917771A (en) * 2022-04-28 2022-08-19 浙江大学 Hollow fiber membrane flexible humidity sensor and efficient preparation method thereof

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Cited By (21)

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CN102636522A (en) * 2012-03-29 2012-08-15 浙江大学 Graphene/ stannic oxide nanometer compounding resistance type film gas sensor and manufacturing method thereof
CN103149246A (en) * 2012-09-27 2013-06-12 中国石油大学(华东) Graphene film humidity sensor
CN102944597A (en) * 2012-12-11 2013-02-27 天津工业大学 Deliquescent-polyelectrolyte-based full-solid-state ethanol gas sensor enzyme electrode and manufacturing method thereof
CN102944597B (en) * 2012-12-11 2014-12-10 天津工业大学 Deliquescent-polyelectrolyte-based full-solid-state ethanol gas sensor enzyme electrode and manufacturing method thereof
EP2943782A4 (en) * 2013-01-11 2016-08-24 Nokia Technologies Oy An apparatus for temperature and fluid relative vapour pressure measurement and accociated methods
CN105190298A (en) * 2013-03-04 2015-12-23 诺基亚技术有限公司 Apparatus and method for water protection of an electronic device
WO2014135745A1 (en) 2013-03-04 2014-09-12 Nokia Corporation Apparatus and method for water protection of an electronic device
EP2965071A4 (en) * 2013-03-04 2016-10-26 Nokia Technologies Oy Apparatus and method for water protection of an electronic device
CN104569052A (en) * 2014-12-17 2015-04-29 东南大学 Method for preparing graphene oxide sensor
CN104569052B (en) * 2014-12-17 2017-02-22 东南大学 Method for preparing graphene oxide sensor
CN104849324A (en) * 2015-05-25 2015-08-19 吉林大学 Resistance-type gas sensor based on graphene/multi-walled carbon nano-tube/zinc oxide composite material, and manufacturing method of resistance-type gas sensor
CN104849324B (en) * 2015-05-25 2017-05-31 吉林大学 A kind of resistor-type gas sensor and preparation method based on Graphene/multi-walled carbon nano-tubes/zinc oxide composite
CN104914138A (en) * 2015-07-03 2015-09-16 深圳市共进电子股份有限公司 Humidity sensor, humidity sensor array and preparation method thereof
CN106124574A (en) * 2016-06-16 2016-11-16 西南交通大学 Graphene oxide quantum dot humidity sensor and preparation method thereof
CN106124574B (en) * 2016-06-16 2019-04-12 西南交通大学 Graphene oxide quantum dot humidity sensor and preparation method thereof
CN108414583A (en) * 2018-03-05 2018-08-17 华中科技大学 Humidity sensor and the improvement based on graphene oxide humidity sensor and preparation
CN111234275A (en) * 2020-01-14 2020-06-05 武汉理工大学 Multilayer humidity-sensitive film based on activated carbon combined with inorganic material doped polyimide and composite humidity-sensitive element
EP3992622A1 (en) 2020-11-03 2022-05-04 Institutul National de Cercetare-Dezvoltare Pentru Microtehnolgie - IMT Bucuresti INCD Quaternary hydrophilic nanohybrid composition for resistive humidity sensors
CN112611787A (en) * 2020-12-15 2021-04-06 无锡豪帮高科股份有限公司 High-molecular resistance type humidity sensitive element and preparation method thereof
CN114917771A (en) * 2022-04-28 2022-08-19 浙江大学 Hollow fiber membrane flexible humidity sensor and efficient preparation method thereof
CN114917771B (en) * 2022-04-28 2023-09-29 浙江大学 Hollow fiber membrane flexible humidity sensor and efficient preparation method thereof

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Application publication date: 20120118