CN102299036A - Array X-ray source based on field emission cold cathode - Google Patents
Array X-ray source based on field emission cold cathode Download PDFInfo
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- CN102299036A CN102299036A CN2011102010837A CN201110201083A CN102299036A CN 102299036 A CN102299036 A CN 102299036A CN 2011102010837 A CN2011102010837 A CN 2011102010837A CN 201110201083 A CN201110201083 A CN 201110201083A CN 102299036 A CN102299036 A CN 102299036A
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Abstract
The invention discloses an array X-ray source based on a field emission cold cathode. The array X-ray source comprises a cathode substrate (1), a cathode (11), a field emitter (12) for emitting electron beams (7) and a reflecting anode target (13), wherein the cathode substrate (1) is provided with the cathode (11) which is provided with the field emitter (12); the reflecting anode target (13) is arranged above and corresponds to as well as is parallel to the cathode (1); and the field emitter (12) emits the electron beams (7) to bombard on the reflecting anode target (13) so as to generate an X-ray (8) which is emergent by passing through the cathode substrate (1). The array X-ray source based on the field emission cold cathode is applied to a miniaturized portable X-ray diagnostic apparatus and also applied to the scanning imaging of the array X-ray source.
Description
Technical field
The present invention is a kind of novel array X radiographic source, relates to the generation of design, preparation and the X ray of planar array x-ray source.
Background technology
X-ray source has important use in medical image and industry detection, and X-ray tube is the core component of X ray image system.Present employed X-ray tube mostly adopts hot cathode, and electronics is heated and obtains the energy effusion, and is focused and quickens, and bombards anode with very high energy at last.Anode is made of the metal with high atomic number, when anode is subjected to producing X ray after the high energy electron bombardment.X ray is to the transmission performance difference of different biological tissues or material, so the radioscopy image can reflect the internal structure of object to be detected.
Because the X-ray tube that uses adopts hot cathode at present, its cathode power loss is bigger, can not adapt to the requirement of miniaturization; In the X ray image system, the bundle spot size the when resolution of image depends on beam bombardment to metal anode.Because the electronics that hot cathode is launched has more scattered initial velocity, need to adopt complicated focusing system to reduce beam diameter.Existing X-ray tube adopts perspective formula anode or two kinds of forms of reflective anode, adopt transmission anode shown in Figure 1, the metal level 4 ' of anode is thinner, electronics 7 ' bombards anode 4 ' from the side's high energy near negative electrode, the X ray that is produced sees through anode metal layer 4 ' and substrate 5 ' outgoing, and therefore anode substrate is held concurrently as the outgoing window in this mode of operation.Because anode metal layer is thinner, so its electric current that bears is less.The metal level of perspective formula anode is the absorption portion X ray in addition, so its X ray produces efficient and reduces.
Adopt reflective anode shown in Figure 2, electron beam 7 ' bombards anode target surface 9 ', and X ray 8 ' is to the cathode direction outgoing.But owing to blocking of hot cathode filament and focusing system, most of X ray can not directly pass the cathode assembly outgoing.In order to obtain the output of effective X ray, the anode target surface is certain inclination angle with cathode base usually, forms an output window 10 ' like this between anode and negative electrode, and X ray passes through the output window outgoing.Because output window need be set, requiring has certain distance between cathode base and the anode substrate, and this has limited the miniaturization of X-ray tube.Simultaneously, the anode target surface of inclination has also limited the position of cathodic electricity component, uses single electron source or bielectron source usually.
Summary of the invention
Technical problem:Purpose of the present invention provides a kind of array X radiographic source based on field emission cold-cathode, and it can be used for miniaturization and Portable X-ray diagnostic equipment, also can be applied to the scanning imagery of array X radiographic source.
Technical scheme:For solving the problems of the technologies described above, the present invention proposes a kind of array X radiographic source based on field emission cold-cathode, it is characterized in that: this x-ray source comprises cathode base, cathode electrode, is used for the field emitter of divergent bundle, reflective plate target; Wherein be provided with cathode electrode on cathode base, be provided with field emitter on cathode electrode, reflective plate target is positioned at the cathode base top and is oppositely arranged with cathode base, and reflective plate target is parallel with cathode base; The beam bombardment that field emitter is launched is to reflective plate target, and the X ray of generation passes the cathode base outgoing.
Preferably, reflective plate target is made by the metal thick plate of high atomic number, and reflective plate target is a fixed anode.
Preferably, field emission body constitutes by X ray is absorbed less nano material.
Preferably, X ray being absorbed less nano material is carbon nano-tube, nano zine oxide.
Preferably, cathode electrode constitutes by X ray is absorbed less metal or conducting film.
Preferably, less metal or the conducting film of described X ray absorption is tin indium oxide, aluminium.
Preferably, cathode base is to be made of the little glass of lead tolerance.
Beneficial effect:The array X radiographic source based on field emission cold-cathode that the present invention proposes adopts the less glass of lead tolerance as cathode base, has avoided the absorption of cathode base to X ray.Common Coolidge tube is compared, and the array X radiographic source based on field emission cold-cathode that the present invention proposes does not need the filament heating, has improved the reliability of device work; Owing to do not need the filament heating, avoided of the absorption of parts such as cathode filament to X ray, therefore can adopt reflective anode, X ray is by the cathode base outgoing.This mode of operation does not require special outgoing window is set between negative electrode and anode, so can realize the miniaturization of X-ray tube.In addition, anode is parallel with cathode base under this mode of operation, has avoided oblique anode to the electron source limited in number, can realize the array electronic source, and then realizes array X radiographic source scanning output.
Description of drawings
Fig. 1 is the hot cathode x-ray source structure that adopts transmission anode
Fig. 2 is the hot cathode x-ray source structure that adopts reflective anode
Fig. 3 is the array X radiographic source based on field emission cold-cathode proposed by the invention.
Fig. 4 is a plurality of field emission electron source structures in the array X radiographic source based on field emission cold-cathode proposed by the invention
Wherein have: cathode base 1, hot cathode filament 2, electron focusing groove 3, transmission anode metal level 4, anode substrate 5, shell 6, electron beam 7, X-ray beam 8, inclined reflection-type anode 9, X ray output window 10, cathode electrode 11, field emission body 12, flat reflective anode 13.
Embodiment
The present invention will be described below with reference to accompanying drawings.
At the technological difficulties of common X-ray tube, the present invention proposes a kind of array X radiographic source based on field emission cold-cathode.The array X radiographic source based on field emission cold-cathode that the present invention proposes does not need the filament heating, has improved the reliability of device work; Owing to do not need the filament heating, avoided of the absorption of parts such as cathode filament to X ray, therefore can adopt reflective anode, X ray is by the cathode base outgoing.This mode of operation does not require special outgoing window is set between negative electrode and anode, so can realize the miniaturization of X-ray tube.In addition, anode is parallel with cathode base under this mode of operation, has avoided oblique anode to the electron source limited in number, can realize the array electronic source, and then realizes array X radiographic source scanning output.
The array X radiographic source based on field emission cold-cathode that the present invention proposes is to prepare cathode electrode on cathode base; On cathode electrode, prepare field emitter; Anode substrate is positioned at the scan electrode top, and with it at a distance of certain distance.
The array X radiographic source based on field emission cold-cathode that the present invention proposes adopts reflective anode, and it is made by the metal thick plate of high atomic number, and parallel with cathode base.It is bigger to cause emission current then and there, and the operating time, reflective anode can be rotarting anode when longer.It is less to cause emission current then and there, and the operating time, more reflective anode can be fixed anode.
The array X radiographic source based on field emission cold-cathode that the present invention proposes adopts X ray is absorbed less nano material, as carbon nano-tube, nano zine oxide etc., as field emission body, has avoided the absorption of field emission body to X ray.
Referring to Fig. 3-4, the array X radiographic source based on field emission cold-cathode provided by the invention, this x-ray source comprise cathode base 1, cathode electrode 11, are used for the field emitter 12 of divergent bundle 7, reflective plate target 13.
Be provided with cathode electrode 11 on cathode base 1, be provided with field emitter 12 on cathode electrode 11, reflective plate target 13 is positioned at cathode base 1 top and is oppositely arranged with cathode base 1, and reflective plate target 13 is parallel with cathode base 1; The electron beam 7 that field emitter 12 is launched bombards on the reflective plate target 13, and the X ray 8 of generation passes cathode base 1 outgoing.
It is carbon nano-tube, nano zine oxide that X ray is absorbed less nano material.
It is tin indium oxide ITO, aluminium Al that described X ray absorbs less metal or conducting film.
Array X radiographic source structure based on field emission cold-cathode of the present invention is a preparation cathode electrode 11 on cathode base 1; Preparation field emitter 12 on cathode electrode 11; Reflective anode target surface 13 is positioned at the cathode base top, and with it at a distance of certain distance.The electron beam 7 that field emitter 12 is launched bombards on the reflective plate target 13, and the X ray 8 of generation passes cathode base 1 outgoing.
Array X radiographic source based on field emission cold-cathode of the present invention adopts CNT (carbon nano-tube), and nano zine oxide etc. absorb materials with smaller as field emitter to X ray.Cathode electrode (by X ray is absorbed less metal or conducting film, as formations such as ITO, Al, has been avoided the absorption to X ray of field emission body and cathode electrode.Cathode base is to be made of the less glass of lead tolerance, has avoided the absorption of cathode base to X ray.Reflective plate target is made by the metal thick plate of high atomic number, as the alloy of tungsten, molybdenum or different metal, and parallel with cathode base.It is bigger to cause emission current then and there, and the operating time, reflective anode can be rotarting anode when longer.It is less to cause emission current then and there, and the operating time, more reflective anode can be fixed anode.The present invention can adopt a plurality of field emitting electronic sources, and each field emitting electronic source can work alone.Therefore can form the X ray outgoing of array scanning.
The method of preparation is: adopt the method for printing, sintering or plated film, photoetching to prepare cathode electrode on cathode base; On cathode electrode, preparing field emission body by methods such as printing, spraying, plated film, coated or autonomous growths on the cathode electrode; Adopt the preparation of machine cuts method than the metal thick plate of high atomic number as anode substrate, the parallel assembling of this anode substrate with cathode base.With cathode base and anode substrate sealing-in exhaust, form the vacuum working environment in the device.
In the array X radiographic source structure based on field-transmitting cathode proposed by the invention, on the negative electrode data electrode, apply varying voltage signal, can control the operating state of electron source.Selected electron source goes into operation and does and emission current, thereby produces the x ray on the corresponding anode position, realizes the radiogenic array scanning process of x.
The array X radiographic source based on field emission cold-cathode that the present invention proposes adopts X ray is absorbed less metal or conducting film, as ITO, Al etc., as cathode electrode, has avoided the absorption of cathode electrode to X ray.The above only is a better embodiment of the present invention; protection scope of the present invention is not exceeded with above-mentioned execution mode; as long as the equivalence that those of ordinary skills do according to disclosed content is modified or changed, all should include in the protection range of putting down in writing in claims.
Claims (7)
1. array X radiographic source based on field emission cold-cathode is characterized in that: this x-ray source comprises cathode base (1), cathode electrode (11), is used for the field emitter (12) of divergent bundle (7), reflective plate target (13); Wherein
On cathode base (1), be provided with cathode electrode (11), on cathode electrode (11), be provided with field emitter (12), reflective plate target (13) is positioned at cathode base (1) top and is oppositely arranged with cathode base (1), and reflective plate target (13) is parallel with cathode base (1); The electron beam (7) that field emitter (12) is launched bombards on the reflective plate target (13), and the X ray of generation (8) passes cathode base (1) outgoing.
2. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: reflective plate target (13) is made by the metal thick plate of high atomic number, and reflective plate target (13) is rotarting anode or fixed anode.
3. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: field emission body (12) constitutes by X ray is absorbed less nano material.
4. the array X radiographic source based on field emission cold-cathode according to claim 3 is characterized in that: it is carbon nano-tube, nano zine oxide that X ray is absorbed less nano material.
5. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: cathode electrode (11) constitutes by X ray is absorbed less metal or conducting film.
6. the array X radiographic source based on field emission cold-cathode according to claim 5 is characterized in that: it is tin indium oxide, aluminium that described X ray absorbs less metal or conducting film.
7. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: cathode base (1) is to be made of the little glass of lead tolerance.
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| CN2011102010837A CN102299036A (en) | 2011-07-18 | 2011-07-18 | Array X-ray source based on field emission cold cathode |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104470171A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470172A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470173A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470177A (en) * | 2013-09-18 | 2015-03-25 | 同方威视技术股份有限公司 | X-ray device and CT device with same |
| WO2015039603A1 (en) * | 2013-09-18 | 2015-03-26 | 清华大学 | X-ray device and ct equipment having same |
| CN106409638A (en) * | 2016-11-22 | 2017-02-15 | 中山大学 | Flat-plate type X ray source device with double surfaces radiating X rays simultaneously |
| CN109256310A (en) * | 2018-10-10 | 2019-01-22 | 中山大学 | Addressable nanometer of cold cathode X-ray plane source of one kind and preparation method thereof |
| CN110211856A (en) * | 2019-04-23 | 2019-09-06 | 昆山市中医医院 | A kind of X-ray bulb |
| CN110211856B (en) * | 2019-04-23 | 2024-05-03 | 昆山市中医医院 | X-ray bulb tube |
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| CN101728151A (en) * | 2009-12-31 | 2010-06-09 | 海洋王照明科技股份有限公司 | Field emission light source and manufacturing method thereof |
| US20100189222A1 (en) * | 2006-02-16 | 2010-07-29 | Steller Micro Devices | Panoramic irradiation system using flat panel x-ray sources |
| WO2011044199A1 (en) * | 2009-10-06 | 2011-04-14 | Stellarray, Inc. | Digitally addressed flat panel x-ray sources |
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| US20100189222A1 (en) * | 2006-02-16 | 2010-07-29 | Steller Micro Devices | Panoramic irradiation system using flat panel x-ray sources |
| CN1971835A (en) * | 2006-11-10 | 2007-05-30 | 东南大学 | Array X radiographic source based on nanophase materials electronic emission |
| WO2011044199A1 (en) * | 2009-10-06 | 2011-04-14 | Stellarray, Inc. | Digitally addressed flat panel x-ray sources |
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| CN202142495U (en) * | 2011-07-18 | 2012-02-08 | 东南大学 | Array X-ray source based on cold cathode of field emission |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104470171A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470172A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470173A (en) * | 2013-09-18 | 2015-03-25 | 清华大学 | X-ray device and CT device provided with same |
| CN104470177A (en) * | 2013-09-18 | 2015-03-25 | 同方威视技术股份有限公司 | X-ray device and CT device with same |
| WO2015039603A1 (en) * | 2013-09-18 | 2015-03-26 | 清华大学 | X-ray device and ct equipment having same |
| WO2015039594A1 (en) * | 2013-09-18 | 2015-03-26 | 同方威视技术股份有限公司 | X-ray device and ct device having said x-ray device |
| US9653247B2 (en) | 2013-09-18 | 2017-05-16 | Nuctech Company Limited | X-ray apparatus and a CT device having the same |
| US9653251B2 (en) | 2013-09-18 | 2017-05-16 | Temple University | X-ray apparatus and a CT device having the same |
| CN106409638A (en) * | 2016-11-22 | 2017-02-15 | 中山大学 | Flat-plate type X ray source device with double surfaces radiating X rays simultaneously |
| CN109256310A (en) * | 2018-10-10 | 2019-01-22 | 中山大学 | Addressable nanometer of cold cathode X-ray plane source of one kind and preparation method thereof |
| CN110211856A (en) * | 2019-04-23 | 2019-09-06 | 昆山市中医医院 | A kind of X-ray bulb |
| CN110211856B (en) * | 2019-04-23 | 2024-05-03 | 昆山市中医医院 | X-ray bulb tube |
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Application publication date: 20111228 |