CN104470171A - X-ray device and CT device provided with same - Google Patents

X-ray device and CT device provided with same Download PDF

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Publication number
CN104470171A
CN104470171A CN201310600016.1A CN201310600016A CN104470171A CN 104470171 A CN104470171 A CN 104470171A CN 201310600016 A CN201310600016 A CN 201310600016A CN 104470171 A CN104470171 A CN 104470171A
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CN
China
Prior art keywords
electron emission
emission unit
anode
negative electrode
vacuum box
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Application number
CN201310600016.1A
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Chinese (zh)
Inventor
唐传祥
唐华平
陈怀璧
黄文会
张化一
郑曙昕
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Tsinghua University
Nuctech Co Ltd
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Tsinghua University
Nuctech Co Ltd
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Application filed by Tsinghua University, Nuctech Co Ltd filed Critical Tsinghua University
Priority to CN201310600016.1A priority Critical patent/CN104470171A/en
Priority to KR1020167008295A priority patent/KR101855931B1/en
Priority to RU2016114671A priority patent/RU2655916C2/en
Priority to JP2016543304A priority patent/JP6526014B2/en
Priority to PCT/CN2014/086743 priority patent/WO2015039603A1/en
Priority to US14/490,526 priority patent/US9653251B2/en
Priority to ES14185376T priority patent/ES2749725T3/en
Priority to EP14185376.2A priority patent/EP2858087B1/en
Priority to PL14185376T priority patent/PL2858087T3/en
Publication of CN104470171A publication Critical patent/CN104470171A/en
Priority to HK15104555.2A priority patent/HK1204199A1/en
Pending legal-status Critical Current

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Abstract

The invention discloses an external thermionic cathode distributed X-ray device. The X-ray device is provided with a vacuum box, multiple electron emission units, an anode and a power supply and control system, wherein the periphery of the vacuum box is sealed, the inside of the vacuum box is in a high vacuum state, the electron emission units are mutually independent and are arranged to form a linear array and installed on the side wall of the vacuum box, the anode is installed in the middle inside the vacuum box and is parallel to the arrangement lines of the electron emission units in the length direction, the anode and the installing plane for the electron emission units form a preset included angle in the width direction, and the power supply and control system is provided with a high-voltage power supply, a focusing power supply, an emission control device and a control system. Each electron emission unit is provided with a heating lamp filament, a cathode connected with the heating lamp filament, an insulation supporting part surrounding the cathode and the lamp filament, a focusing electrode located above the cathode and configured at the top end of the insulation supporting part and a connecting fixing part arranged above the focusing electrode and connected with the box wall of the vacuum box in a sealed mode, wherein a lamp filament lead penetrates through the insulation supporting part to be connected with the emission control device.

Description

X-ray apparatus and there is the CT equipment of this X-ray apparatus
Technical field
The present invention relates to a kind of device producing distributed X ray, particularly in an X-ray source equipment, arrange multiple independently hot-cathode electric transmitter unit by external mode and utilize grid to control or cathodic control produce according to the X ray of predefined procedure shift the focus position the distributed X-ray apparatus of external hot negative electrode and there is the CT equipment of this device.
Background technology
Usually, X-ray source refers to the equipment producing X ray, and be usually made up of servicing units etc. such as X-ray tube, power supply and control system, cooling and shieldings, its core is X-ray tube.X-ray tube is made up of negative electrode, anode, glass or ceramic package usually.Negative electrode is directly-heated type helical tungsten filament, operationally, by electric current, is heated to a kind of condition of high temperature, and produce the electronic beam current of heat emission, negative electrode is surrounded by the metal cap slotted in a front end, and metal cap makes electron focusing.Anode is the tungsten target inlayed at copper billet end face, operationally, is applied with high pressure between the anode and cathode, and anode is flown in electronics accelerated motion under electric field action that negative electrode produces, and clashes into target surface, thus produces X ray.
X ray has a wide range of applications in fields such as industrial nondestructive testing, safety inspection, medical diagnosis and treatments.Particularly, the radioscopy imaging device utilizing the high-penetration ability of X ray to make plays an important role in the every aspect of people's daily life.The plane perspective imaging device of what this kind equipment was early stage is film type, current advanced technology is digitlization, various visual angles and high-resolution stereoscopic imaging apparatus, such as CT(computed tomography), can obtain three-dimensional graph or the sectioning image of high definition, be advanced high-end applications.
In existing CT equipment, x-ray source and detector need to move on slip ring, in order to improve inspection speed, the movement velocity of usual x-ray source and detector is very high, the reliability and stability of Whole Equipment are caused to reduce, in addition, by the restriction of movement velocity, the inspection speed of CT is also restricted.Therefore, need a kind ofly just can not to produce the x-ray source at multiple visual angle in shift position in CT equipment.
In order to solve reliability, stability problem and the inspection speed issue and the heat-resisting problem of anode target spot that in existing CT equipment, slip ring brings, in existing patent documentation, provide certain methods.Such as rotary target x-ray source, can solve the overheated problem of plate target to a certain extent, but, its complex structure and produce that the target spot of X ray is overall relative to x-ray source remains a target position determined.Such as, some technology in order to realize maintaining static x-ray source multiple visual angle and one circumferentially the multiple independently conventional X-ray source of close-packed arrays to replace the motion of x-ray source, also various visual angles can be realized although it is so, but cost is high, and, the target spot spacing of different visual angles is large, and image quality (three-dimensional resolution) is very poor.In addition, at patent documentation 1(US4926452) in propose a kind of light source and the method that produce distributed X ray, plate target has very large area, alleviates the problem that target is overheated, and target position circumferentially changes, and can produce multiple visual angle.Although patent documentation 1 carries out scan deflection to obtaining the high energy electron beam accelerated, existence control difficulty is large, target position is not discrete and the problem of poor repeatability, but still is a kind of effective ways that can produce distributed light source.In addition, such as at patent documentation 2(US20110075802) with patent documentation 3(WO2011/119629) in propose a kind of light source and the method that produce distributed X ray, plate target has very large area, alleviate the problem that target is overheated, and, target position dispersion is fixed and array arrangement, can produce multiple visual angle.In addition, adopt carbon nano-tube as cold cathode, and array arrangement is carried out to cold cathode, utilize the voltage control Flied emission of cathode grid interpolar, thus control each negative electrode electron emission in order, by respective sequence position bombardment target spot on anode, become distributed X-ray source.But, there is complex manufacturing, the emissivities of carbon nano-tube and life-span not high weak point.
Summary of the invention
The present invention proposes to solve above-mentioned problem, its object is to provide a kind of just can produce multiple visual angle without the need to mobile light source and be conducive to simplified structure, the raising stability of a system, reliability, raising checking efficiency the distributed X-ray apparatus of external hot negative electrode and there is the CT equipment of the distributed X-ray apparatus of this external hot negative electrode.
To achieve these goals, the invention provides the distributed X-ray apparatus of a kind of external hot negative electrode, it is characterized in that possessing: vacuum box, surrounding seals and inside is high vacuum; Multiple electron emission unit, each electron emission unit is mutually independent and line up linear array and be arranged on the sidewall of described vacuum box; Anode, is arranged on the centre position of described vacuum box inside, and, parallel with the orientation of described electron emission unit in the longitudinal direction and form the angle of predetermined angular with the mounting plane of described electron emission unit in the direction of the width; Power supply and control system, have be connected with described anode high voltage source, with each launch control unit be connected of described multiple electron emission unit, the control system for controlling each power supply, described electron emission unit has: heat filament; The negative electrode be connected with described heat filament; From the double-end heater lead of described heat filament; Insulated support, surrounds described heat filament and described negative electrode; Focusing electrode, is configured in the top of described insulated support in the mode of the top being positioned at described negative electrode; Connection fixture, is configured in the top of described focusing electrode, is tightly connected with the box wall of described vacuum box, and described heater lead is connected with described launch control unit through described insulated support.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, also have: high voltage source jockey, the cable of described anode with described high voltage source is connected, be arranged on the sidewall of one end of the close described anode of described vacuum box; Launch control unit jockey, for connecting described heat filament and described launch control unit; Vacuum power, is included in described power supply and control system; Vacuum plant, is arranged on the sidewall of described vacuum box, utilizes described vacuum power to carry out work, maintains the high vacuum in described vacuum box.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described electron emission unit also has: grid, to be arranged between described negative electrode and described focusing electrode and to be close to negative electrode; Grid lead, is connected with described grid, through described insulated support, is connected with described launch control unit.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described electron emission unit also has: focus on section, be arranged between described focusing electrode and described connection fixture; Focusing arrangement, configures in the mode of surrounding described focusing section.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, also have: focusing power supply, be included in described power supply and control system; Focusing arrangement jockey, for connecting described focusing arrangement and described focusing power supply.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described electron emission unit divides two rows to be arranged on the relative sidewall of two of described vacuum box.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described vacuum box is made up of glass or pottery.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described vacuum box is made up of metal material.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described multiple electron emission unit is arranged in a straight line shape or segmented linear shape.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, described multiple electron emission unit is arranged in circular arc or sectional circular arc.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, the arrangement pitch of described multiple electron emission unit is uniform.
In addition, in the distributed X-ray apparatus of external hot negative electrode in the present invention, the arrangement pitch of described multiple electron emission unit is heterogeneous.
In addition, the invention provides a kind of CT equipment, it is characterized in that, the x-ray source used is the distributed X-ray apparatus of external hot negative electrode as above.
According to the present invention, mainly provide a kind of external hot negative electrode distributed X-ray apparatus, in a light source, produce the X ray by certain order periodic transformation focal position.Electron emission unit of the present invention adopts hot cathode, has relative to other design the advantage that emission current is large, the life-span is long; Multiple electron emission unit is independently fixed on vacuum box separately, and directly can use two small-sized poles or triode gun, technology maturation, and cost is low, applying flexible; Adopt the design of the large anode of long strip type, effectively alleviate the problem that anode is overheated, be conducive to the power improving light source; Electron emission unit can linear array, and entirety becomes the distributed X-ray apparatus of linear pattern, and electron emission unit also can annular array, and entirety becomes ring-like distributed X-ray apparatus, applying flexible; By the design of focusing electrode, and the design of outside focusing arrangement, electron beam realizes very little focus.Relatively other distributed X-ray source equipment, electric current of the present invention is large, and target spot is little, and target position is evenly distributed and reproducible, and power output is high, and structure is simple, and it is convenient to control, and cost is low.
Distributed X-ray source of the present invention is applied to CT equipment, just can produces multiple visual angle without the need to mobile light source, therefore can omit link motion, be conducive to simplified structure, improve the stability of a system, reliability, improve checking efficiency.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot negative electrode of the present invention.
Fig. 2 is the schematic diagram of the position relationship of anode in the present invention and electron emission unit.
Fig. 3 is the schematic diagram of the structure of a kind of electron emission unit in the present invention.
Fig. 4 is the schematic diagram of the structure of a kind of emission controlling unit in the present invention.
Fig. 5 is a kind of schematic diagram with the structure of the electron emission unit of grid and focusing arrangement in the present invention.
Fig. 6 is a kind of schematic diagram with the structure of grid-controlled emission controlling unit in the present invention.
Fig. 7 is the structural representation of the another kind of electron emission unit in the present invention.
Fig. 8 is the vertical view of the structure of cylindrical electron emission unit in the present invention, and (A) is the situation of circular gate hole, and (B) is the situation of rectangle gate hole.
Fig. 9 is the structure vertical view of the cuboid electron emission unit in the present invention, and (A) is the situation of circular gate hole, and (B) is the situation of rectangle gate hole.
Figure 10 is the structural representation of the negative electrode in the present invention, and (A) is the negative electrode of planar rondure, and (B) is the negative electrode of flat rectangular, and (C) is the negative electrode of spherical arc shape, and (D) is the negative electrode of cylinder arc surfaced.
Figure 11 is the structural representation of the aperture plate in the present invention, and (A) is plane aperture plate, and (B) is spherical aperture plate, and (C) is U grooved aperture plate.
Figure 12 is the self-focusing schematic diagram utilizing the control of grid to carry out of the present invention.
Figure 13 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot negative electrode of the double opposed layout of a kind of linear pattern in the present invention, (A) be the figure of position relationship of electron emission unit, anode and vacuum box, (B) is the figure of the position relationship of electron emission unit and anode.
Figure 14 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot negative electrode of the double opposed layout of a kind of circular arc type in the present invention.
Figure 15 is the schematic diagram of the primary structure of Two dimensional Distribution formula X-ray apparatus of the present invention.
Figure 16 is the upward view of the anode construction of Two dimensional Distribution formula X-ray apparatus in the present invention.
Figure 17 is the schematic diagram of the electron emission unit array that the grid in the present invention is separated with negative electrode, and (A) is end view, and (B) is the vertical view of each grid independence control model, and (C) is each gate interconnection and the vertical view of cathodic control pattern.
Figure 18 is the distributed X-ray apparatus of the filament series connection in the present invention.
Figure 19 is the schematic diagram of the structure of the distributed X-ray apparatus of curved array of the present invention.
Figure 20 is the end view of the structure of the distributed X-ray apparatus of curved array of the present invention.
Figure 21 is the schematic diagram of the different structure of anode in the present invention.
Figure 22 is the schematic diagram of the electron emission unit of ring-like distributed X-ray apparatus in the present invention and the arrangement relation of anode.
Description of reference numerals:
1 electron emission unit
2 anodes
3 vacuum boxs
4 high voltage source jockeys
5 launch control unit jockeys
6 focusing arrangement jockeys
7 power supplys and control system
8 vacuum plants
E electronic beam current
X X ray
The center of circle of O circular arc
101 heat filaments
102 negative electrodes
103 insulated supports
104 focusing electrodes
105 connection fixtures
106 heater leads
107 grids
108 grid leads
109 focus on section
110 focusing arrangements
701 control system
702 high voltage sourcies
703 launch control units
704 focusing power supplies
70301 negative high voltage modules
70302 DC Modules
70303 high voltage isolating transformers
70304 negative voltage modules
70305 positive voltage modules
70306 switch modules
801 vacuum pumps
802 vacuum valves.
Embodiment
Below, with reference to accompanying drawing, the present invention will be described in detail.
Fig. 1 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot negative electrode of the present invention.As shown in Figure 1, the distributed X-ray apparatus of external hot negative electrode of the present invention comprises multiple electron emission unit 1(at least two, be also called particularly later electron emission unit 11,12,13,14 ...), anode 2, vacuum box 3, high voltage source jockey 4, launch control unit jockey 5 and power supply and control system 7.In addition, electron emission unit 1 is made up of heat filament 101, negative electrode 102, insulated support 103, focusing electrode 104, connection fixture 105, heater lead 106 etc.Anode 2 is arranged on the centre of vacuum box 3 inside, and the box wall that electron emission unit 1 and high voltage source jockey 4 are arranged on vacuum box 3 forms integral seal structure with vacuum box 3.
Fig. 2 is the anode 2 of the distributed X-ray apparatus of external hot negative electrode of the present invention and the schematic diagram of the relative position relation of electron emission unit 1.As shown in Figure 2, multiple electron emission unit 1 arranges point-blank, anode 2 is elongate in shape corresponding with the arrangement of electron emission unit 1, and, anode 2 in the longitudinal direction with the straight line parallel arranged by multiple electron emission unit 1, in the direction of the width, the surface towards electron emission unit 1 of anode 2 and electron emission unit 1 towards anode 2 surface between form the angle of predetermined angular.
Electron emission unit 1 is for producing electronic beam current on request, be arranged on the sidewall of vacuum box 3, hermetically-sealed construction is formed by connection fixture 105 and the sidewall of vacuum box 3, electron emission unit 1 entirety is in outside vacuum box 3, and it is inner that electronic beam current enters vacuum box 3 by the perforate in the middle of connection fixture 105.In addition, figure 3 illustrates a kind of structure of electron emission unit 1, electron emission unit 1 comprises heat filament 101, negative electrode 102, insulated support 103, focusing electrode 104, connection fixture 105, heater lead 106.Negative electrode 102 and heat filament 101 link together, and heat filament 101 adopts tungsten filament usually, and negative electrode 102 adopts the material that thermal electron ability is strong usually, such as, and barium monoxide, scandate, lanthanum hexaboride etc.Insulated support 103 surrounds heat filament 101 and negative electrode 102, is equivalent to the partial shell of electron emission unit 1, adopts insulating material, is generally pottery.Heater lead 106 is drawn out to the outside of electron emission unit 1 through insulated support 103, be hermetically-sealed construction between heater lead 106 and insulated support 103.Focusing electrode 104 is arranged on the upper end of insulated support 103, and focusing electrode 104 is nose conical design, and there is perforate centre, and the center consistency from top to bottom of the center of this perforate and negative electrode 102.Connection fixture 105 is for being tightly connected electron emission unit 1 and vacuum box 3, and be generally edge of a knife flange, there is perforate centre, enters into vacuum box 3 for making electronic beam current E from electron emission unit 1.Insulated support 103, focusing electrode 104, connection fixture 105 compact siro spinning technology together, make other parts except the center drilling of connection fixture 105 of electron emission unit 1 form a vacuum seal structure.
In addition, power supply and control system 7 comprise control system 701, high voltage source 702, launch control unit 703 etc.High voltage source 702 is connected with anode 2 by the high voltage source jockey 4 be arranged on the box wall of vacuum box 3.Launch control unit 703 is connected with the heater lead 106 of each electron emission unit 1 respectively by launch control unit jockey 5, usually has the emission controlling unit with the number of electron emission unit 1.Figure 4 illustrates a kind of structure of emission controlling unit, launch control unit 703 comprises multiple emission controlling unit, and each emission controlling unit comprises negative high voltage module 70301, low-voltage direct module 70302, high voltage isolating transformer 70303.Wherein, negative high voltage module 70301 for producing negative high-voltage pulse under the control of control system 701, and it exports the former limit being connected to high voltage isolating transformer 70303; Low-voltage direct module 70302 supplies electrically heated electric current for generation of to heat filament 106, it exports the low-pressure end of the two groups of secondary in parallel being connected to high voltage isolating transformer 70303, and through Transformer Winding, output to heater lead 106 from the high-pressure side of two groups of secondary in parallel.Launch control unit jockey 5 is generally the cable of band connector, and quantity is identical with the quantity of electron emission unit 1.In addition, the operating state of control system 701 pairs of high voltage sourcies 702, launch control unit 703 controls.
In addition, vacuum box 3 is cavity housings of surrounding sealing, and its inside is high vacuum, and housing can be made up of insulating material such as glass or potteries.On the sidewall of vacuum box 3, (see Fig. 1) is provided with multiple electron emission unit 1, these electron emission unit 1 are arranged in a straight line, be provided with the anode 2 of strip at inner (see Fig. 1), anode 2 is parallel with the orientation of electron emission unit 1 in the longitudinal direction.The enough electronic beam currents in space of vacuum box 3 inside motion in the electric field and any stop can not be produced.High vacuum in vacuum box 3 is obtained by baking exhaust in high-temperature exhaust air stove, and its vacuum degree is better than 10 usually -3pa, the vacuum degree of recommendation is better than 10 -5pa.
In addition, the housing of the vacuum box 3 recommended is metal materials, when adopting metal material, electron emission unit 1 carries out the connection of edge of a knife flange sealing means by its connection fixture 105 and the wall of vacuum box 3, anode 2 utilizes insulating supporting material to be fixed installation in vacuum box 3, further, between the housing of anode 2 and vacuum box 3, keep enough distances, can not high voltage arc be produced.
In addition, high voltage source jockey 4, for being connected by the cable of anode 2 with high voltage source 702, is arranged on the sidewall of vacuum box 3.High voltage source jockey 4 is generally the conic ceramic structure of inner band metal column, and one end is connected with anode 2, and the box wall compact siro spinning technology of the other end and vacuum box 3, forms vacuum seal structure together.The metal column of high voltage source jockey 4 inside is connected for making anode 2 form circuit with the cable joint of high voltage source 702.Plug type structure is designed between usual high voltage source jockey 4 and cable joint.
In addition, in the distributed X-ray apparatus of external hot negative electrode of the present invention, electron emission unit 1 can also comprise grid 107 and grid lead 108.Figure 5 illustrates a kind of structure with the electron emission unit 1 of grid and focusing arrangement.As shown in Figure 5, grid 107 is arranged between negative electrode 102 and focusing electrode 104, next-door neighbour's negative electrode 102, grid 107 is generally network structure, profile is usually identical with the shape of negative electrode 102, grid lead 108 is connected to grid 107 and is drawn out to the outside of electron emission unit 1 through insulated support 103, and be tightly connected between grid lead 108 and insulated support 103, grid lead 108 is connected to launch control unit 703 by launch control unit jockey 5.
In addition, in the distributed X-ray apparatus of external hot negative electrode of the present invention, the emission controlling unit of launch control unit 703 can also comprise back bias voltage module 70304, positive bias module 70305, selector switch 70306.Figure 6 illustrates a kind of structure with grid-controlled emission controlling unit.As shown in Figure 6, negative high voltage module 70301 is for generation of negative high voltage, and it exports the former limit being connected to high voltage isolating transformer 70303; City is electrically connected to the low-pressure end of two groups of secondary in parallel of high voltage isolating transformer 70303, and through Transformer Winding, export from the high-pressure side of two groups of secondary in parallel the power supply be suspended in high pressure, be supplied to DC Module 70302, back bias voltage module 70304 and positive bias module 70305 respectively.DC Module 70302 produces heat filament 101 for electrically heated electric current; Back bias voltage module 70304 and positive bias module 70305 produce a negative voltage and a positive voltage respectively and output to two inputs of selector switch 70306, selector switch 70306 selects a voltage to output to grid lead 108 under the effect of control device 701, and is finally applied on grid 107.
In addition, in the distributed X-ray apparatus of external hot negative electrode of the present invention, electron emission unit 1 can also comprise focusing section 109 and focusing arrangement 110.As shown in Figure 5, focusing on section 109 is connected between focusing electrode 104 and connection fixture 105, focusing electrode 104, focusing section 109 and connection fixture 105 can be the entirety that a metalwork processes, also can three metal partss by being welded together, focusing arrangement 110 is arranged on and focuses on outside section 109, and focusing arrangement 110 is focal line bag normally.Focusing arrangement 110 is connected to focusing power supply 704 by focusing arrangement jockey 6, and focusing arrangement 110 works under the driving of focusing power supply 704, and the operating state of focusing power supply 704 is subject to the control of power supply and control system 7.Correspondingly, the distributed X-ray apparatus of external hot negative electrode also comprises focusing arrangement jockey 6, and power supply and control system 7 also comprise focusing power supply 704.
In addition, the distributed X-ray apparatus of external hot negative electrode of the present invention can also comprise vacuum plant 8 and vacuum power 705, and vacuum plant 8 comprises vacuum pump 801 and vacuum valve 802, and vacuum plant 8 is arranged on the sidewall of vacuum box 3.Vacuum pump 801 carries out work under the effect of vacuum power 705, for maintaining the high vacuum in vacuum box 3.Usually, operationally, electron beam bombardment anode 2, anode 2 can generate heat and discharge a small amount of gas the distributed X-ray apparatus of external hot negative electrode, by using vacuum pump 801, this part gas can be extracted out fast, thus maintains the condition of high vacuum degree of vacuum box 3 inside.Vacuum pump 801 preferably uses vacuum ion pump.The all-metal vacuum valve that can bear high-temperature baking selected usually by vacuum valve 802, as all-metal hand operated gate valve.Vacuum valve 802 is in closed condition usually.Correspondingly, the power supply of the distributed X-ray apparatus of external hot negative electrode and control system 7 also comprise the vacuum power (Vacc PS) 705 of vacuum plant 8.
In addition, the electron emission unit of other structures can also be used in the present invention.Fig. 7 is the structural representation of the another kind of electron emission unit that can use in the present invention.As shown in Figure 7, electron emission unit 1 is made up of heat filament 101A, negative electrode 102A, grid 103A, insulated support 104A, connection fixture 109A etc.
Electron emission unit 1 utilizes the wall of connection fixture 109A and vacuum box 3 to form integral seal structure, but be not limited to this, as long as the box wall that electron emission unit 1 can be arranged on vacuum box 3 makes its entirety be in outside vacuum box 3 (namely, the cathode terminal (comprising heat filament 101A, negative electrode 102A, grid 103A) of electron emission unit 1 and the lead end of electron emission unit 1 are all in (comprising heater lead 105A, grid lead 108A, connection fixture 109A) outside of vacuum box 3), alternate manner also can be utilized to install.Electron emission unit 1 comprises heat filament 101A, negative electrode 102A, grid 103A, insulated support 104A, heater lead 105A, connection fixture 109A, and grid 103A is made up of grid frame 106A, aperture plate 107A, grid lead 108A.Negative electrode 102A and heat filament 101A links together, and heat filament 101A adopts tungsten filament usually, and negative electrode 102A adopts the material that thermal electron ability is strong usually, such as, and barium monoxide, scandate, lanthanum hexaboride etc.Insulated support 104A surrounds heat filament 101A and negative electrode 102A, is equivalent to the housing of electron emission unit 1, adopts insulating material, is generally pottery.Heater lead 105A is drawn out to the lower end (but being not limited thereto, as long as be drawn out to the outside of electron emission unit 1) of electron emission unit 1 through insulated support 104A, be hermetically-sealed construction between heater lead 105A and insulated support 104A.Grid 103A is arranged on the upper end (that is, being configured on the opening of insulated support 104A) of insulated support 104A and opposed with negative electrode 102A, the center consistency from top to bottom of preferred grid 103A and negative electrode 102A.In addition, grid 103A comprises grid frame 106A, aperture plate 107A, grid lead 108A, and grid frame 106A, aperture plate 107A, grid lead 108A are metal and make, and usual grid frame 106A is stainless steel material, aperture plate 107A is Mo, and grid lead 108A is for can cut down (alloy) material.Grid lead 108A is drawn out to the lower end (but being not limited thereto, as long as be drawn out to the outside of electron emission unit 1) of electron emission unit 1 through insulated support 104A, be hermetically-sealed construction between grid lead 108A and insulated support 104A.Heater lead 105A and grid lead 108A is connected to launch control unit 703.
In addition, particularly, about the structure of grid 103A, its main body be one piece of metallic plate (such as, stainless steel material) i.e. grid frame 106A, perforate is formed in the centre of grid frame 106A, the shape of this perforate can be square or circular etc., woven wire is fixed with (such as in the position of this perforate, Mo) i.e. aperture plate 107A, and, draw a lead-in wire from certain position of metallic plate (such as, kovar alloy material) i.e. grid lead 108A, thus grid 103A can be connected to a current potential.In addition, grid 103A is positioned at directly over negative electrode 102A, and the center of the above-mentioned perforate of grid 103A is aimed at the center of negative electrode 102A (that is, up and down on a vertical line), the shape of perforate is corresponding with the shape of negative electrode 102A, and the size of usual perforate is less than the area of negative electrode 102A.But as long as electronic beam current can pass through grid 103A, the structure of grid 103A is not limited to said structure.In addition, carry out relative position by insulated support 104A between grid 103A and negative electrode 102A to fix.
In addition, particularly, about the structure of connection fixture 109A, recommendation, its main body is a circular knife edge flange, centre is formed with perforate, and the shape of this perforate can be square or circular etc., is tightly connected in the outer, upper end of the position of perforate and insulated support 104A, as being welded to connect, the outer of edge of a knife flange is formed with screw hole, can be bolted and be fixed on the wall of vacuum box 3 by electron emission unit 1, form vacuum seal and be connected between its edge of a knife and the wall of vacuum box 3.This is a kind of flexible structure for convenience detach, when some in multiple electron emission unit 1 breaks down, can change flexibly.It is to be noted, the function of connection fixture 109A realizes being tightly connected between insulated support 104A and vacuum box 3, multiple mode flexibly can be had, as the welding by metal flange transition, or glass high-temperature fusion is tightly connected, or after ceramic metallization with the mode such as to weld of metal.
In addition, electron emission unit 1 can be columniform structure, that is, insulated support 104A is cylindrical, and negative electrode 102A, grid frame 106A, aperture plate 107A can be circular simultaneously or be rectangle simultaneously.Figure 8 illustrates a kind of vertical view of columniform electron emission unit 1, wherein, (A) show negative electrode 102A, grid frame 106A, aperture plate 107A is circular structure simultaneously, and (B) shows negative electrode 102A, grid frame 106A, aperture plate 107A is rectangular structure simultaneously.In addition, for circular cathode, in order to the electronics making the surface of negative electrode 102A produce realizes better convergence effect, the preferred Surface Machining by negative electrode 102A becomes sphere circular arc (as Suo Shi Figure 10 (C)) usually.The surface of negative electrode 102A typically have a diameter from a few mm, such as diameter 2mm, the perforate of the aperture plate 107A that grid frame 106A installs typically have a diameter from a few mm, such as diameter 1mm.In addition, zero point a few mm is generally such as, to a few mm, 2mm from grid 103A to the distance on the surface of negative electrode 102A.In addition, for rectangular cathode, in order to the electronics making the surface of negative electrode 102A produce realizes better convergence effect, preferably cylinder arc surfaced usually, the electronic beam current being conducive to narrow edge direction is like this assembled further.Usual arc length be a few mm to tens mm, width is a few mm, such as long 10mm, wide 2mm.Correspondingly, aperture plate 107A is rectangle, and preferably its width is 1mm, length is 10mm.Figure 10 illustrates the situation that negative electrode 102A is respectively planar rondure, flat rectangular, spherical arc shape, these four kinds of structures of cylinder arc surfaced.
In addition, electron emission unit 1 also can be cuboid-type structure, that is, insulated support 104A is cuboid, and negative electrode 102A, grid frame 106A, aperture plate 107A can be circular simultaneously, or is rectangle simultaneously.Figure 9 illustrates a kind of vertical view of electron emission unit 1 of cuboid, wherein (A) shows negative electrode 102A, grid frame 106A, aperture plate 107A is circular structure simultaneously, and (B) shows negative electrode 102A, grid frame 106A, aperture plate 107A is rectangular structure simultaneously.It is pointed out that the twill line in Fig. 8 and Fig. 9 is for the ease of distinguishing each different parts, is not represent section.
In addition, particularly, about the structure of aperture plate 107A, as shown in figure 11, can be plane, also can be spherical, can also be U grooved, it is recommended that spherical, this is because the aperture plate of spherical can make electron beam have better focusing effect.
In addition, if launch control unit 703 changes the state of the grid of an electron emission unit in adjacent electron emission unit, at synchronization, when adjacent electron emission unit only has one carry out electron emission and form electronic beam current, then the electric field of the grid both sides of this electron emission unit has self-focusing effect to this electronic beam current.As shown in figure 12, the direction (inverse power line direction) representing electron motion with the arrow between electron emission unit 1 and anode 2 in figure.In fig. 12, anode 2 is high voltage+160kV, and the arrow between electron emission unit 1 and anode 2 of large electric field is all point to anode 2 from electron emission unit 1, that is, as long as electron emission unit 1 launches electronic beam current, then electronic beam current all can anode 2 move.Investigate internal field's state on the surface of electron emission unit 1, in adjacent electron emission unit 12, 13, in 14, the voltage of the grid 103A of electron emission unit 13 becomes+2000V from-500V, then electron emission unit 13 enters electron emission state, the voltage of adjacent electron emission unit 12 and the grid 103A of electron emission unit 14 is still-500V, if electron emission unit 12, 14 exist electron emission, then electronics moves from the grid 103A of electron emission unit 12 and electron emission unit 14 to the grid 103A of electron emission unit 13, but, due in electron emission unit 12, 14 do not exist electron emission, so, the electron beam emitted from electron emission unit 13 receives and points to the effect of the electric field of adjacent electron emission unit 12 and electron emission unit 14 from electron emission unit 13 and be squeezed, therefore, there is automatic focus effect.
It is to be noted, the distributed X-ray apparatus of external hot negative electrode of the present invention works in high vacuum state, acquisition and the maintenance method of high vacuum can be: anode 2 is completed installation in vacuum box 3, high voltage source jockey 4 and vacuum plant 8 are completed on the wall of vacuum box 3 and is tightly connected, in the electron emission unit junction of vacuum box 3 sidewall first with blank flange sealing, vacuum box 3 entirety is made to form a hermetically-sealed construction; Then this structure is placed in vacuum furnace baking to degas, vacuum valve 802 connects external vacuum extract system, and object is the gas that the material removing each parts adsorbs; Then, in normal temperature clean environment, from vacuum valve 802 to nitrogen injection in vacuum box 3, form protection of the environment, then open the blank flange of electron emission unit junction and electron emission unit is installed, carry out one by one; After all electron emission unit install, connect external vacuum extract system from vacuum valve 802 and bleed, and again carry out baking exhaust, make the inside of vacuum box 3 be high vacuum; The activation of the negative electrode of each electron emission unit can be carried out in the process of baking exhaust; After baking exhaust completes, close vacuum valve 802, make vacuum box 3 inside keep high vacuum; In the distributed X-ray apparatus course of work of external hot negative electrode, a small amount of gas of anode release is extracted by vacuum pump 801, maintains the high vacuum of vacuum box 3 inside.When damaging when some electron emission unit or need to the life-span to change, form protection from vacuum valve 802 toward the inner nitrogen injection of vacuum box 3; Within the shortest time, pull down the electron emission unit needing to change, new electron emission unit is installed; Vacuum valve 802 connects external vacuum air-extractor, vacuumizes vacuum box 3; When vacuum box 3 inside reaches high vacuum again, close vacuum valve 802, make vacuum box 3 inside keep high vacuum.
In addition, it needs to be noted, in the distributed X-ray apparatus of external hot negative electrode of the present invention, electron emission unit 1 can be arranged on a sidewall of vacuum box 3, also can arrange by identical extension direction in two of vacuum box 3 opposing sidewalls simultaneously.Figure 13 illustrates the structure of the distributed X-ray apparatus of external hot negative electrode of the double opposed layout of a kind of linear, (A) be the figure of electron emission unit 1, anode 2 and the position relationship of vacuum box 3, (B) is electron emission unit 1 and the figure of the position relationship of anode 2.As shown in Figure 13 (A), multiple electron emission unit 1 point two row be arranged in two opposing sidewalls of vacuum box 3, and anode 2 is arranged in the middle part in vacuum box 3.As shown in Figure 13 (B), the face that anode 2 and two arranges electron emission unit 1 relative is inclined-plane, the electronic beam current E that electron emission unit 1 produces is subject to the electric field acceleration between electron emission unit 1 and anode 2, the inclined-plane of bombardment anode 2, produce X ray, the exit direction of useful X ray is the incline direction on anode 2 inclined-plane.Because two row's electron emission unit 1 are positioned opposite, so anode 2 has two inclined-planes, the X ray of two inclined-plane generations is to identical direction outgoing.
In addition, it is important to note that the distributed X-ray apparatus of external hot negative electrode of the present invention can be linear pattern, also can be circular arc type arrangement, thus meet different application demands.Figure 14 illustrates the schematic diagram of the electron emission unit 1 of the distributed X-ray apparatus of circular arc type external hot negative electrode of the present invention and the position relationship of anode 2.Two row's electron emission unit 1 are circumferentially arranged, be arranged on two opposite flanks of vacuum box 3, these two sides are parallel to each other, and the extension direction that electron emission unit 1 arranges is camber line, and the radian size of layout can be determined as required.Anode 2 is arranged in the middle part in vacuum box 3, i.e. the centre of the electron emission unit 1 that two rows are relative, and anode 2 is inclined-plane in the face of the surface of two row's electron emission unit 1, and the incline direction on two inclined-planes all points to the center O of circular arc.Electronic beam current E emits from the upper surface of electron emission unit 1, the high voltage electric field be subject between anode 2 and electron emission unit 1 accelerates, final bombardment anode 2, two inclined-planes of anode 2 are formed the Series X-ray target spot of two row's circular arc arrangements, and the exit direction of useful X ray points to the center of circular arc.About the vacuum box 3 of the distributed X-ray apparatus of circular arc type external hot negative electrode, be also circular arc type accordingly with the layout of electron emission unit 1 and the shape of anode 2, or be called annular.The exit Xray of the distributed X-ray apparatus of circular arc type all points to the center of circle of circular arc, can be applied to the situation needing radiographic source circular arrangement.
In addition, it needs to be noted, in the distributed X-ray apparatus of external hot cathode, the arrangement of each electron emission unit can be linear, also can be such as L shape or U-shaped equal segments linear, in addition, the arrangement of each electron emission unit can be arc, can also be segmentation arc line shaped, such as, the combination etc. of the curve be formed by connecting by the segmental arc of different-diameter or straightway and arc.
In addition, it is important to note that in the distributed X-ray apparatus of external hot negative electrode of the present invention, the arrangement pitches of each electron emission unit can be uniform, also can be heterogeneous.
In addition, mode that two-dimensional array distributes also can be adopted in the present invention to configure electron emission unit, thereby, it is possible to obtain the distributed X-ray apparatus of two-dimensional array.As Figure 15, shown in 16, the distributed X-ray apparatus of two-dimensional array has multiple electron emission unit 1(at least four, also be called electron emission unit 11a particularly later, 12a, 13a, 14a, electron emission unit 11b, 12b, 13b, 14b, ), electron emission unit can be any one of foregoing electron emission unit, anode 2 is by positive plate 201 and to be arranged on positive plate 201 and the multiple targets 202 that arrange corresponding to electron emission unit 1 form, but, anode 2 is not limited to this structure, use common anode in this area.In addition, multiple electron emission unit 1 is configured on a sidewall of vacuum box 3 in the mode of two-dimensional arrangements, and parallel to each other with the plane at positive plate 201 place.In addition, as described above, electron emission unit 1 entirety is in the outside of vacuum box 3, and anode 2 is arranged on the inside of vacuum box 3.
The structural representation (, eliminating the diagram of vacuum box 3 herein) that the space that figure 15 illustrates electron emission unit 1 and anode 2 is arranged.Electron emission unit 1 is divided into two rows and is arranged in a plane (namely, a sidewall of vacuum box 3) on, and the electron emission unit 1 of front and rear row is staggered (see Figure 15), but be not limited to this, even if the electron emission unit of front and rear row is not interlaced with each other also passable.Target 202 on anode 2 and electron emission unit 1 one_to_one corresponding, the end face of target 202 points to electron emission unit 1, the line at the center of electron emission unit 1 and the center of target 202 is perpendicular to the plane of positive plate 201, and this line is also the motion path of the electronic beam current E that electron emission unit 1 is launched.Electronics bombardment target produces X ray, and the exit direction of useful X ray is parallel to the plane of positive plate 201, and each useful X ray is parallel to each other.
Figure 16 illustrates a kind of structure of anode 2.Anode 2 comprises: positive plate 201; Multiple targets 202 of two-dimensional array distribution.Positive plate 201 is dull and stereotyped, be made up of metal material, and preferably resistant to elevated temperatures metal material, completely parallel with the plane that the upper surface of electron emission unit 1 is formed, when being applied with positive high pressure on anode 2, be generally tens kV to hundreds of kV, typically such as 180kV, thus form parallel high voltage electric field between positive plate 201 and electron emission unit 1.Target 202 is arranged on positive plate 201, and its position is arranged in mode corresponding with the position of electron emission unit 1 respectively, and the surface of target 202 uses resistant to elevated temperatures heavy metal material usually, such as tungsten or tungsten alloy.Target 202 is circular frustum structure, highly be generally a few mm, such as 3mm, the bottom surface that diameter is larger is connected with positive plate 201, and the diameter of end face is less, is generally a few mm, such as 2mm, end face is not parallel with positive plate 201, usually has the little angle that several years to tens are spent, and is convenient to the useful X ray that electronic target produces and emits.All targets 202 are arranged in the mode that top surface inclination direction is consistent, and the exit direction of also namely all useful X ray is consistent.This structural design of target, be equivalent to the kick grown on positive plate 201, change internal field's distribution on the surface of positive plate 201, make electron beam have self-focusing effect before bombardment target, target spot is diminished, is conducive to improving picture quality.In the design of anode, positive plate 201 uses common metal, only has the surface of target 202 to be tungsten or tungsten alloy, because this reducing cost.
In addition, in the present invention, electron emission unit can be the structure that grid is separated with negative electrode.Figure 17 illustrates the electron emission unit array that a kind of grid is separated with negative electrode.In fig. 17, dull and stereotyped grid 9 is made up of insulation framework plate 901, screen 902, aperture plate 903, grid lead 904.As shown in the figure, screen 902 is arranged at insulation framework plate 901, and aperture plate 903 is arranged at the position of the perforate formed on screen 902, and grid lead 904 is drawn from screen 902.Cathode array 10 is made up of multiple cathode construction close-packed arrays, and each cathode construction is made up of filament 1001, negative electrode 1002, insulated support 1004.Dull and stereotyped grid 9 be in cathode array 10 top and both distance very little, be generally a few mm, such as 3mm.The grid structure be made up of screen 902, aperture plate 903, grid lead 904 and cathode construction one_to_one corresponding, and observe from vertical direction, the round center of each aperture plate 903 overlaps between two with the round center of each negative electrode 1002.
In addition, as shown in Figure 17 (B), in the present invention, grid structure can be that each grid lead is independently drawn and independently carried out the structure of state control by grid control device.Each negative electrode 1002 of cathode array 10 can be in same potential such as ground connection, each grid switches in negative a few hectovolt and just several kilovolts of two states, such as switch between-500V and+2000V, thus control the operating state of each electron emission unit, such as, certain grid is-500V in certain moment, electric field then between this grid and corresponding negative electrode is negative electric field, the surface of negative electrode is limited in from the electronics of cathode emission, when subsequent time grid voltage becomes+2000V, electric field between this grid with corresponding negative electrode becomes positive electric field, move from the electronics of cathode emission to grid and pass aperture plate, be transmitted in the accelerating field between grid and anode, obtain and accelerate and finally bombard anode, X ray is produced in the target position of correspondence.
In addition, as shown in Figure 17 (C), grid also can be that each grid lead is in parallel, is in same current potential, is controlled the operating state of each electron emission unit by filament supply.Such as all grids are in-500V, and each cathode filament is independently drawn, and the voltage difference between two end points of each cathode filament is constant, and the global voltage of each negative electrode switches between 0V and-2500V two states.In certain moment, negative electrode is in 0V current potential, be negative electric field between grid and negative electrode, be limited in the surface of negative electrode from the electronics of cathode emission, at subsequent time, the voltage of negative electrode becomes-2500V, electric field between grid with corresponding negative electrode becomes positive electric field, moves and through aperture plate, be transmitted in the accelerating field between grid and anode from the electronics of cathode emission to grid, obtain and accelerate and finally bombard target, produce X ray in the target position of correspondence.
In addition, in Two dimensional Distribution formula X-ray apparatus of the present invention, the heater lead of each electron emission unit can be each output being independently connected to filament supply separately, also can be connected in series after be integrally connected to an output of filament supply.The heater lead of a kind of electron emission unit shown in Figure 18 is connected in series to the schematic diagram of filament supply.In the system that the heater lead of electron emission unit is connected in series, usual negative electrode is all in identical current potential, and each grid lead needs independent extraction, is controlled the operating state of electron emission unit by grid control device.
In addition, in the present invention, the array of electron emission unit can be two rows also can be many rows.
In addition, in of the present invention, the target of anode can be circular frustum structure, also can be column structure, can square platform structure, can also be many terrace with edges structure, or other polygon is protruding, or the structure such as other irregular projection.
In addition, in the present invention, the end face of the target of anode can be plane, also can be inclined-plane, can also be sphere or other irregular surface.
In addition, in the present invention, the two-dimensional array arrangement of electron emission unit can be that both direction is straight line stretching, extension, also can be a direction be, and straight line stretches and to be camber line stretch in another direction, also can be a direction be, and straight line stretches and to be segmented linear stretch in another direction, and can also to be a direction be, and straight line stretches and another direction is the multiple combination forms such as segmentation arc stretching, extension.
In addition, in the present invention, the two-dimensional array arrangement of electron emission unit can be both direction interval uniformity, can be interval, each direction evenly and both direction interval is inconsistent, also can be interval, a direction evenly and another interval, direction is uneven, can also be that the interval of both direction is all uneven.
In addition, in the present invention, electron emission unit also can be arranged, thereby, it is possible to obtain the distributed X-ray apparatus of curved array in the mode of curved array distribution.Figure 19 is the structural representation of the distributed X-ray apparatus of curved array of the present invention.Figure 20 is the end view of the distributed X-ray apparatus internal structure of curved array of the present invention.Figure 21 is the schematic diagram of the different structure of anode of the present invention.
As shown in the figure, multiple electron emission unit 1(at least four, also be called particularly later electron emission unit 11a, 11b, 12a, 12b, 13a, 13b, 14a, 14b ...) on curved surface, along axis direction towards axes O, arrangement is arranged more, in addition, anode 2 is arranged in the axes O of curved surface.In addition, as described above, electron emission unit 1 is arranged on the box wall of vacuum box 3, and entirety is in the outside of vacuum box 3, and anode 2 is arranged in vacuum box.
In addition, above-mentioned curved surface comprises the face of cylinder and anchor ring.Figure 20 is the end view of the internal structure of the distributed X-ray apparatus of a kind of curved array of the present invention, specifically, figure 20 illustrates the schematic diagram of the internal structure of the array distributed X-ray apparatus in a kind of face of cylinder.Electron emission unit 1 is arranged along axis direction arrangement on the face of cylinder, and the upper surface (electron emission face) of electron emission unit 1 is towards axes O.Anode 2 is arranged in the axes O of cylinder.Usually, electron emission unit 1 is in identical electronegative potential, anode 2 is in high potential, positive electric field is formed between anode 2 and electron emission unit 1, electric field converges from the axis of the surperficial anode 2 of each electron emission unit 1, electronic beam current E is from the axial-movement of electron emission unit 1 anode 2, and bombardment anode 2, finally produces X ray.
In addition, above-mentioned electron emission unit 1 arranges many rows on curved surface along axis direction towards axis, many rows electron emission unit can be front and rear row alignment, also can be stagger in the front and rear row position of recommending, the position of the beam bombardment anode that each electron emission unit is produced overlap.
In addition, anode 2 has the structure of hollow pipeline shape, and cooling agent can be made therein to flow.Figure 21 illustrates the structure of a kind of anode in the present invention and strutting piece thereof.Anode 2 is made up of anode 201A, anode pipe 202A, anode target surface 203A.Anode 201A is arranged on anode pipe 202A and with the top (small end) of high voltage source jockey 4 and links together, and carries out supporting and fixing for antianode 2.Anode pipe 202A is the agent structure of anode 2, and two ends are connected with one end of two cooling jockey 9A respectively, and inside is communicated with cooling jockey 9A, becomes the passage circulated of cooling agent.Anode pipe 202A selects resistant to elevated temperatures metal material usually, has various structures mode, is recommended as circular pipeline.In addition, in some cases, such as, when anode thermal power is less, anode 2 also can be the column construction of non-hollow pipeline.In addition, anode target surface 203A is the position of beam bombardment anode pipe 202A, fine structure has multiple design, such as, as shown in Figure 21 (1), the periphery of anode pipe 202A is exactly the bombardment position of electron beam, in such cases, anode pipe 202A entirety adopts high temperature resistant heavy metal material, such as, tungsten or tungsten alloy, as shown in Figure 21 (2), the cut part of cylindrical of anode pipe 202A and form a little tapered plane, this tapered plane becomes the bombardment position of electron beam, the incline direction of this tapered plane is the exit direction of useful X ray, the direction that this structural design is conducive to useful X ray is unanimously drawn, preferably, as shown in Figure 21 (3), anode target surface 203A is had in the outer surface specialized designs of anode pipe 202A, anode target surface 203A adopts high temperature resistant heavy metal material, such as tungsten or tungsten alloy, thickness is not less than 20 μm (microns), by plating, paste, on the little tapered plane that the outer that welding or alternate manner are fixed on anode pipe 202A processes, in such cases, anode pipe 202A can adopt ordinary metallic material, thus can reduce costs.
In addition, in the present invention, above-mentioned axis can be straight line, also can be circular arc, and entirety becomes the distributed X-ray apparatus of wire or annular distribution formula X-ray apparatus, to meet different application demands.Figure 22 illustrates a kind of electron emission unit of annular distribution and the design sketch of anode arrangement.Anode 2 is arranged in a planar circumferential, electron emission unit 1 is arranged in the below of anode 2, the direction that two row's electron emission unit 1 press anode 2 becomes circumferential arrangement, be arranged in on the arc surface that is axis of the center of anode 2, namely the axis of anode 2 is pointed on the surface of each electron emission unit 1 simultaneously.Electronic beam current E emits from electron emission unit 1, the high voltage electric field be subject between anode 2 and electron emission unit 1 accelerates, bombard the lower to target surface of anode 2, anode 2 is formed the array X radiographic target spot of circular arrangement, and the exit direction of useful X ray all points to the center of circle of anode 2 place circumference.The vacuum box 3 of annular distribution formula X-ray apparatus is corresponding with the layout of the electron emission unit 1 of its inside and the shape of anode 2 is also a kind of ring type structure.Annular distribution formula X-ray apparatus can be a complete ring, also can be that one section of ring is long, can be applied to the occasion needing radiographic source circular arrangement.
In addition, in the present invention, the array of electron emission unit can be two rows also can be many rows.
In addition, in the present invention in the description of electron emission unit, " independence " refers to that each electron emission unit has the ability of independent transmission electronic beam current, concrete structure can be discrete structure, also can be the structure of certain associated connection.
In addition, in the description of the distributed X-ray apparatus of curved array of the present invention, " curved surface " refers to various forms of curved surface, comprise the curved surface that the face of cylinder, anchor ring, ellipsoid or segmented linear are formed, the curved surface etc. that such as regular polygon cylinder or segmentation camber line are formed, it is recommended that the face of cylinder and anchor ring as elucidated before.
In addition, in the present invention antianode position description in, " axis " refers to true axis or the form axis of the various forms of curved surfaces that electron emission unit is arranged, the axis on the such as face of cylinder refers to the central axis of cylinder, the axis of anchor ring refers to the central axis of annulus inside, the axis of oval calotte refers to that the axis of regular polygon cylinder refers to the axis that the center of regular polygon is formed near this section of oval paraxial axis.
In addition, in the present invention, anode interior pipeline tangent plane can be circular port, the internal tooth colyliform hole of square opening, polygonal hole, band heat radiating fin structure or other shape of area of dissipation can be increased.
In addition, in the present invention, the curved array of electron emission unit is arranged in an orientation and is curve and is the combination of straight line, segmented linear, camber line, segmentation camber line or straightway and arc in another orientation.
In addition, in the present invention, the curved array arrangement of electron emission unit can be both direction interval uniformity, can be that interval, each direction is even, both direction interval is inconsistent, also can be that interval, a direction is even, another interval, direction be uneven, can also be that the interval of both direction is all uneven.
In addition, in the present invention, the appearance integral of vacuum box can be cuboid, also can be cylindrical, also can be the annulus bodily form, can also be that other does not affect other structure of the relative arrangement of electron emission unit and anode.
Embodiment
(system composition)
As shown in Fig. 1 ~ Fig. 6, the distributed X-ray apparatus of external hot negative electrode of the present invention is made up of multiple electron emission unit 1, anode 2, vacuum box 3, high voltage source jockey 4, launch control unit jockey 5, focusing arrangement jockey 6, vacuum plant 8 and power supply and control system 7.Multiple electron emission unit 1 is lined up linear array and is arranged on a sidewall of vacuum box 3, each electron emission unit 1 is independent mutually, the anode 2 of strip is arranged on the middle part in vacuum box 3, in line style orientation, anode 2 is parallel to each other with the arranging line of electron emission unit 1, at the plumb cut of linear array, anode 2 and the upper surface of electron emission unit 1 form a little angle.Electron emission unit 1 comprises heat filament 101, negative electrode 102, grid 107, insulated support 103, focusing electrode 104, focuses on section 109, connection fixture 105, heater lead 106, grid lead 108, focusing arrangement 110.High voltage source jockey 4 is arranged on the sidewall of vacuum box 3, and inside is connected with anode 2, outside with pluggable form connection high-tension cable.The heater lead 106 of each electron emission unit 1 and grid lead 108 are connected to each emission controlling unit of launch control unit 703 by launch control unit jockey 5.Vacuum plant 8 is arranged on the sidewall of vacuum box 3, and vacuum plant 8 comprises vacuum pump 801 and vacuum valve 802.Power supply and control system 7 comprise multiple modules such as control system 701, high voltage source 702, launch control unit 703, focusing power supply 704, vacuum power 705, are connected by the heat filament 101 of power cable and control cable and multiple electron emission unit 1 of system, grid 107 and the parts such as anode 2, vacuum plant 8.Wherein launch control unit 703 is made up of multiple (identical with the quantity of electron emission unit 1) identical emission controlling unit, and each emission controlling unit is made up of negative high voltage module 70301, DC Module 70302, high voltage isolating transformer 70303, back bias voltage module 70304, positive bias module 70305, selector switch 70306.
(operation principle)
In the distributed X-ray apparatus of external hot negative electrode of the present invention, power supply and control system 7 pairs of focusing power supplies 704, launch control unit 703 and high voltage source 702 control.The unit of launch control unit 703 is started working, negative high voltage module 70301 produces the former limit that negative high voltage outputs to high voltage isolating transformer 70303, one group of parallel connected end of high voltage isolating transformer 70303 secondary is made to be suspended on high pressure, i.e. DC Module 70302, back bias voltage module 70304, positive bias module 70305, selector switch 70306 is all on an identical negative high voltage, DC Module 70302 produces a direct current be suspended on this negative high voltage and is supplied to heat filament 101, negative electrode 102 is heated to high temperature (such as by heat filament 101, 500 ~ 2000 DEG C) emission state, negative electrode 102 produces a large amount of electronics on its surface.Back bias voltage module 70304 and positive bias module 70305 produce one respectively and are suspended in negative voltage on negative high voltage and positive voltage, and negative voltage gating is connected to grid 107 by selector switch 70306 usually.In electron emission unit 1, filament 101, negative electrode 102 are all in negative high voltage with grid 107, be generally negative several kilovolts negative to negative tens, and focusing electrode 104 is connected and focuses on section 109 and be connected to the sidewall of vacuum box 3 by connection fixture 105, be in earthing potential, so, between grid 107 and focusing electrode 104, form a little accelerating field.But grid 107 opposing cathode 102 also has a lower negative voltage, therefore, the electronics that negative electrode 102 produces, not by grid 107, is limited in the surface of negative electrode 102 by grid 107.High voltage source 702 makes anode 2 be in very high positive high voltage, be generally positive tens kilovolts to hundreds of kilovolt, at the sidewall of electron emission unit 1(also i.e. vacuum box 3, usual earthing potential) and anode 2 between form positive large accelerating field.
When needs produce X ray, power supply and control system 7 make the output of the selector switch 70306 of some emission controlling unit of launch control unit 703 switch to positive voltage by negative voltage according to instruction or pre-set program, and convert the output signal of the selector switch 70306 of each emission controlling unit be connected with each electron emission unit 1 respectively according to sequential.Such as, in the moment 1, the output of the selector switch 70306 of the first emission controlling unit of launch control unit 703 switches to positive voltage by negative voltage, in the electron emission unit 11 of correspondence, electric field between grid 107 and negative electrode 102 becomes positive electric field, electronics moves from the surface of negative electrode 102 to grid 107, obtain through the aperture plate accelerating field entered between grid 107 and focusing electrode 104 and accelerate for the first time, the nose cone shape of focusing electrode 104 makes electron beam automatically assemble in first time accelerator, the diameter of electron beam diminishes, after electron beam enters and focuses on section 109 inside, be subject to the focusing magnetic field effect that outside focusing arrangement 110 applies, the diameter of electron beam diminishes further.The electron beam of minor diameter enters vacuum box 3 inside by the hole at connection fixture 105 center, be subject to the large acceleration electric field acceleration between electron emission unit 11 and anode 2, obtain energy, bombardment anode 2, anode 2 produces a target spot 21, further, the transmitting of X ray is produced in the position of target spot 21.In the moment 2, the output of the selector switch 70306 of the second emission controlling unit of launch control unit 703 switches to positive voltage by negative voltage, corresponding electron emission unit 12 electron emission, anode 2 produces target spot 22, and produces the transmitting of X ray in target spot 22 position.In the moment 3, the output of the selector switch 70306 of the 3rd emission controlling unit of launch control unit 703 switches to positive voltage by negative voltage, corresponding electron emission unit 13 electron emission, anode 2 produces target spot 23, and the transmitting of X ray is produced in target spot 23 position, the like, then target spot 24 position produces the transmitting of X ray, then target spot 25 position produces the transmitting of X ray ..., and move in circles.Therefore, power supply and control system 7 utilize launch control unit 703 to make each electron emission unit 1 alternately carry out work and divergent bundle according to scheduled timing, and, alternately produce X ray at the diverse location of anode 2, thus become distributed X-ray source.
In addition, the gas discharged when anode 2 is subject to electron beam bombardment is taken away in real time by vacuum pump 801, maintains high vacuum, be conducive to long-time steady operation like this in vacuum box 3.Power supply and control system 7 make to drive all parts co-ordination according to setting program except controlling each power supply, external command can be received by communication interface and man-machine interface simultaneously, modify to the key parameter of system and set, refresh routine adjusts with automatically controlling.
In addition, by the distributed X-ray apparatus of external hot negative electrode of the present invention is applied to CT equipment, thus the stability of a system and good reliability can be obtained and the high CT equipment of checking efficiency.
(effect)
The present invention mainly provides a kind of external hot negative electrode distributed X-ray apparatus, produces the X ray according to predefined procedure periodically shift the focus position in a light source.Electron emission unit of the present invention adopts hot cathode, has relative to other design the advantage that emission current is large, the life-span is long; Multiple electron emission unit is independently fixed on vacuum box separately, and directly can use two small-sized poles or triode gun, technology maturation, and cost is low, applying flexible; Adopt the design of the large anode of long strip type, effectively alleviate the problem that anode is overheated, be conducive to the power improving light source; Electron emission unit can linear array, and entirety becomes the distributed X-ray apparatus of linear pattern, and electron emission unit also can annular array, and entirety becomes ring-like distributed X-ray apparatus, applying flexible; By the design of focusing electrode, and the design of outside focusing arrangement, electron beam realizes very little focus.Relatively other distributed X-ray source equipment, electric current of the present invention is large, and target spot is little, and target position is evenly distributed and reproducible, and power output is high, and structure is simple, and it is convenient to control, and cost is low.
In addition, the distributed X-ray source of external hot negative electrode of the present invention is applied to CT equipment, just can produces multiple visual angle without the need to mobile light source, therefore can omit link motion, be conducive to simplified structure, improve the stability of a system, reliability, improve checking efficiency.
As mentioned above, the present application is illustrated, but is not limited to this, be construed as and in the scope of present inventive concept, various combination and various change can be carried out to above-mentioned execution mode.

Claims (15)

1. an X-ray apparatus, is characterized in that, possesses:
Vacuum box, surrounding seals and inside is high vacuum;
Multiple electron emission unit, the sidewall of described vacuum box is arranged in the mode of two-dimensional arrangements, and the entirety of each electron emission unit is in outside described vacuum box; And
Anode, is arranged on the centre position of described vacuum box inside,
From described electron emission unit electron beam bombardment described in anode, thus produce the transmitting of X ray at the target position of described anode.
2. X-ray apparatus as claimed in claim 1, is characterized in that,
Also possess: power supply and control system, have be connected with described anode high voltage source, with each launch control unit be connected of described multiple electron emission unit, the control system for controlling each power supply,
Described electron emission unit has: heat filament; The negative electrode be connected with described heat filament; From the double-end heater lead of described heat filament; Insulated support, surrounds described heat filament and described negative electrode; Focusing electrode, is configured in the top of described insulated support in the mode of the top being positioned at described negative electrode; Connection fixture, is configured in the top of described focusing electrode, is tightly connected with the box wall of described vacuum box,
Described heater lead is connected with described launch control unit through described insulated support,
Described anode comprises: positive plate, is made up and parallel with the upper surface of described electron emission unit of metal material; Multiple target, to be arranged on described positive plate and to arrange in mode corresponding with the position of described electron emission unit respectively,
The bottom surface of described target is connected with described positive plate and end face and described positive plate form predetermined angle.
3. X-ray apparatus as claimed in claim 2, is characterized in that,
Also have: high voltage source jockey, the cable of described anode with described high voltage source is connected, be arranged on the sidewall of one end of the close described anode of described vacuum box; Launch control unit jockey, for connecting described heat filament and described launch control unit; Vacuum power, is included in described power supply and control system; Vacuum plant, is arranged on the sidewall of described vacuum box, utilizes described vacuum power to carry out work, maintains the high vacuum in described vacuum box.
4. X-ray apparatus as claimed in claim 2, is characterized in that,
Described electron emission unit also has: grid, to be arranged between described negative electrode and described focusing electrode and to be close to negative electrode; Grid lead, is connected with described grid, through described insulated support, is connected with described launch control unit.
5. X-ray apparatus as claimed in claim 2, is characterized in that,
Described electron emission unit also has: focus on section, be arranged between described focusing electrode and described connection fixture; Focusing arrangement, configures in the mode of surrounding described focusing section.
6. X-ray apparatus as claimed in claim 5, is characterized in that,
Also have: focusing power supply, be included in described power supply and control system; Focusing arrangement jockey, for connecting described focusing arrangement and described focusing power supply.
7. X-ray apparatus as claimed in claim 2, is characterized in that,
Described electron emission unit is arranged on the relative sidewall of two of described vacuum box in the mode of two-dimensional arrangements.
8. X-ray apparatus as claimed in claim 2, is characterized in that,
Described vacuum box is made up of glass or pottery.
9. X-ray apparatus as claimed in claim 2, is characterized in that,
Described vacuum box is made up of metal material.
10. X-ray apparatus as claimed in claim 1, is characterized in that,
Also possess: power supply and control system, have be connected with described anode high voltage source, with each launch control unit be connected of described multiple electron emission unit, the control system for controlling each power supply,
Described electron emission unit comprises: dull and stereotyped grid, is made up of insulation framework plate, screen, aperture plate, grid lead; Cathode array, is made up of multiple cathode construction close-packed arrays, each cathode construction by filament, the negative electrode be connected with described filament, form from the double-end heater lead of described filament, the insulated support that surrounds described filament and described negative electrode,
Described screen is arranged at described insulation framework plate, and described aperture plate is arranged at the position of the perforate formed on described screen, and described grid lead is drawn from described screen,
Described dull and stereotyped grid is positioned at the top of described cathode array, and in vertical direction, the center of described aperture plate overlaps between two with the center of described negative electrode,
Described heater lead is connected with described launch control unit respectively with described grid lead,
Described anode comprises: positive plate, is made up and parallel with the upper surface of described electron emission unit of metal material; Multiple target, to be arranged on described positive plate and to arrange in mode corresponding with the position of described electron emission unit respectively,
The bottom surface of described target is connected with described positive plate and end face and described positive plate form predetermined angle.
11. X-ray apparatus as described in any one of claim 1 ~ 10, is characterized in that,
It is another direction of straight line is segmented linear that the array of described multiple electron emission unit arrangement is straight line or direction in the two directions.
12. X-ray apparatus as described in any one of claim 1 ~ 10, is characterized in that,
The array of described multiple electron emission unit arrangement is straight line in one direction and is camber line or segmentation camber line in the other directions.
13. X-ray apparatus as described in any one of claim 1 ~ 10, is characterized in that,
The arrangement pitch of described multiple electron emission unit is uniform.
14. X-ray apparatus as described in any one of claim 1 ~ 10, is characterized in that,
The arrangement pitch of described multiple electron emission unit is heterogeneous.
15. 1 kinds of CT equipment, is characterized in that,
The x-ray source used is the X-ray apparatus described in any one of claim 1 ~ 14.
CN201310600016.1A 2013-09-18 2013-09-18 X-ray device and CT device provided with same Pending CN104470171A (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
CN201310600016.1A CN104470171A (en) 2013-09-18 2013-09-18 X-ray device and CT device provided with same
KR1020167008295A KR101855931B1 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
RU2016114671A RU2655916C2 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
JP2016543304A JP6526014B2 (en) 2013-09-18 2014-09-17 X-ray apparatus and CT device having the X-ray apparatus
PCT/CN2014/086743 WO2015039603A1 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
US14/490,526 US9653251B2 (en) 2013-09-18 2014-09-18 X-ray apparatus and a CT device having the same
ES14185376T ES2749725T3 (en) 2013-09-18 2014-09-18 An X-ray machine and a CT device that has the same
EP14185376.2A EP2858087B1 (en) 2013-09-18 2014-09-18 A X-Ray apparatus and a CT device having the same
PL14185376T PL2858087T3 (en) 2013-09-18 2014-09-18 A X-Ray apparatus and a CT device having the same
HK15104555.2A HK1204199A1 (en) 2013-09-18 2015-05-14 X-ray apparatus and ct device having the same x x ct

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