CN102272900A - Slit type supersonic nozzle and surface treatment device having the same - Google Patents
Slit type supersonic nozzle and surface treatment device having the same Download PDFInfo
- Publication number
- CN102272900A CN102272900A CN2010800042771A CN201080004277A CN102272900A CN 102272900 A CN102272900 A CN 102272900A CN 2010800042771 A CN2010800042771 A CN 2010800042771A CN 201080004277 A CN201080004277 A CN 201080004277A CN 102272900 A CN102272900 A CN 102272900A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- slit
- process object
- object thing
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 title abstract description 5
- 239000007921 spray Substances 0.000 claims abstract description 52
- 230000035939 shock Effects 0.000 claims abstract description 31
- 238000009826 distribution Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 130
- 239000007789 gas Substances 0.000 claims description 105
- 238000009827 uniform distribution Methods 0.000 claims description 63
- 238000012545 processing Methods 0.000 claims description 20
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 239000007779 soft material Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000005507 spraying Methods 0.000 abstract description 3
- 239000000356 contaminant Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 15
- 239000003344 environmental pollutant Substances 0.000 description 9
- 231100000719 pollutant Toxicity 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 229910001651 emery Inorganic materials 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000012634 fragment Substances 0.000 description 4
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 241000209149 Zea Species 0.000 description 2
- 235000005824 Zea mays ssp. parviglumis Nutrition 0.000 description 2
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- 235000005822 corn Nutrition 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003643 water by type Substances 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Nozzles (AREA)
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention relates to a slit type supersonic nozzle and a surface treatment device having the same. In particular, the slit type supersonic nozzle of the present invention sprays high speed gas to remove contaminants from the surface of a an object to be treated (10), the nozzle comprising: a nozzle body (111) extendedly formed along the width direction of the object to be treated (10); an equal pressure-distribution line (112) which is formed inside the nozzle body (111) and has a flow path formed continuously in the width direction of the object to be treated (10) such that high-pressure gas supplied to the nozzle body (111) is equally distributed in the longitudinal direction of the nozzle body (111); ; and a slit (113) which is formed at one end of the nozzle body (111) and the equal pressure-distribution line (112) in an open state in the lateral direction of the object to be treated (10), and generates a supersonic gas jet for producing a shock wave out of high-pressure gas supplied via the equal pressure-distribution line (112) and then spraying towards the object to be treated (10). The present invention nozzle and the surface treatment device having the same can effectively remove micro-contaminants firmly attached to the surface of an object to be treated, without necessarily damaging the surface of the object to be treated.
Description
Technical field
The present invention relates to the slit superonic flow nozzzle and possess the surface processing device of this nozzle, specifically, relate to when can not cause damage, utilize supersonic gas welding gun (supersonic gas jet) to remove securely and possess the surface processing device of this nozzle attached to the slit superonic flow nozzzle of the lip-deep small pollutant of process object thing to the surface of the process object thing as semiconductor crystal wafer, liquid crystal display cells.
Background technology
Semiconductor crystal wafer (semiconductor wafer), liquid crystal display cells (LCD, Liquid Crystal Display), solar cell etc. also might be because of being equivalent to atomic small pollutant in its surface attachment, deserve the operating efficiency that parts can not use or reduce significantly these parts and make, therefore need accurate process of surface treatment, removed atomic surface treatment method and disclosed multiple surface in the past from this process object thing.
In general, under the situation of liquid crystal display cells, in order to save producing cost, as shown in Figure 1, after making large-sized glass substrate (below be called " former glass sheet 1 "), it is cut apart cut-out according to specified size make a plurality of panels 10, in the manufacturing of liquid crystal display cells during the initial stage, former glass sheet 1 was made into for the 1st generation (370 * 470mm) sizes, but along with the trend that maximizes gradually, be made into for the 7th generation (1870～1950mm * 2200～2250mm) in recent years, in the 8th generation, (after the size of 2200mm * 2500mm), can be cut and be made into (2～10 inches of various sizes, 10～32 inches, 30～42 inches, 50 inches with first-class) panel 10.
When the former glass sheet of cutting, shown in Fig. 2 (a), utilizing mechanical friction based on diamond or hard grinding wheel 20 to come surface to former glass sheet 1 to form V font (or U font) groove after giving directivity, shown in Fig. 2 (b), give the mechanicalness impact and make the fragment that generates in the cutting process minimized, but be difficult to remove fully the minute sized fragment that produces in the cutting part, this becomes the intrinsic problem in the manufacturing process of the highly purified flat panel display of requirement (Flat Panel Display) device.
In the process of glass-cutting substrate, under the lip-deep situation of the fragment that in cutting part, produces attached to panel, because panel and interfragmental surface tension (surface tension), Van der Waals for (van derwaals forces), electrostatic force (static electricity forces) and by panel and the interfragmental tight caused vacuum pressure etc. that contacts, it is firm especially and to make the removal of fragment (particulate) difficulty that becomes be actual conditions to adhere to its degree of adhesion.
Even utilize nozzle or air knife 30 etc. as illustrated in fig. 3 to panel surface inject high pressure fluid or gas, perhaps utilize the surface of brush device 40 cleaning panels 10 as illustrated in fig. 4, particulate also adheres to firm intensity, and its intensity has reached the degree of the state on the panel 10 that can maintain.Therefore shown in Fig. 5 (a), will have #1000～#3000 equigranular (#, lin.
2The emery wheel 50 of the cerium number of interior polishing particles) (Cerium) raw material etc. begins to be suitable for the surface of counter plate 10 to grind from the emery wheel with less granularity, needs through this numerous and diverse process.
Yet, utilize under the situation of emery wheel 50 lapped faces, there are the following problems, that is: pressurize in the expression that is attached with counter plate 10 under the atomic state shown in Fig. 5 (b), thereby generation scratch, perhaps shown in Fig. 5 (c) owing to particulate makes emery wheel 50 damaged, perhaps be absorbed in a lot of particulates in the pars affecta owing to emery wheel 50 and make the situation of requirement that do not reach of grinding, if and use emery wheel 50 for a long time at the panel of the identical size shown in Fig. 5 (d), the part of then having only emery wheel to contact with panel is worn, and therefore has the problem of the panel that can't handle different sizes.
Summary of the invention
The present invention proposes for solving the above problems, the surface processing device that its purpose is to provide a kind of slit superonic flow nozzzle and possesses this nozzle, it can not cause damage to the surface of process object thing, can also remove simultaneously securely the lip-deep small pollutant attached to the process object thing effectively.
The technical essential of the present invention that is used to reach as above-mentioned purpose is that a kind of injection can break away from the nozzle 110 of the high-speed gas of foreign matter from the surface of process object thing 10.This nozzle comprises: nozzle body 111, pressure uniform distribution road 112 and slit 113, and this nozzle body 111 extends to form along the Width of above-mentioned process object thing 10; This pressure uniform distribution road 112 possesses along the stream of the Width continuity of above-mentioned process object thing 10 and is formed on said nozzle body 111 inside, so that the gases at high pressure of supplying with to above-mentioned nozzle body 111 can be distributed equably along the length direction of said nozzle body 111; Formation is opened on this slit 113 Width continuity ground along above-mentioned process object thing 10 on an end on said nozzle body 111 and pressure uniform distribution road 112, and obtain the supply of gases at high pressure by above-mentioned pressure uniform distribution road 112, can produce the supersonic speed gas jetting of shock wave and spray thereby generate to above-mentioned process object thing 10 sides.
At this, preferably, said nozzle body 111 comprises: the length direction separation along said nozzle body 111 is provided with a plurality of gas inlet port 111a.The path that this gas inlet port 111a provides gases at high pressure can enter into said nozzle body 111 inside along certain orientation, described direction is with different to the direction of above-mentioned slit 113 supply gas from above-mentioned pressure uniform distribution road 112.
In addition, preferably, above-mentioned pressure uniform distribution road 112 comprises: gas enters 112a of uniform distribution portion and the gas transfer uniform distribution 112b of portion.This gas enters the 112a of uniform distribution portion and comprises the first side wall 112a-1 and the second sidewall 112a-2, this the first side wall 112a-1 provide opposed faces, described opposed faces obtains can changing flow direction to above-mentioned slit 113 sides after the gases at high pressure supply, this second sidewall 112a-2 forms with above-mentioned the first side wall 112a-1 and separates certain separation distance, so that along the length direction of said nozzle body 111 dispense pressure and transmit gases at high pressure to above-mentioned slit 113 sides equably; This gas transfer uniform distribution 112b of portion forms and enters the 112a of uniform distribution portion with above-mentioned gas and slit 113 is connected, also can be so that the gas that enters uniform distribution for the first time among the 112a of uniform distribution portion at above-mentioned gas is carried out the uniform distribution second time to above-mentioned slit 113 side transmission, and dwindle towards forming continuously more from entering the 112a of uniform distribution portion connecting portion, so that can realize the pressure consolidated of gas and mobile smoothly with above-mentioned slit 113 its cross sections of connecting portion side with above-mentioned gas.
And, preferably, above-mentioned slit 113 comprises: tilt to dwindle the 113a of portion, curved surface connecting portion 113b and inclination expansion section 113c, this inclination is dwindled the 113a of portion and is formed along with the spray end side near above-mentioned slit 113, the width of slit dwindles with 15～52 ° gradient, this curved surface connecting portion 113b is formed at the end that the 113a of portion is dwindled in above-mentioned inclination continuously, and form the length of 0.02～5.00mm continuously along the injection direction of above-mentioned slit 113, thereby form the slit width that is equivalent to 0.01～1.25mm, this inclination expansion section 113c is formed at the end of above-mentioned curved surface connecting portion 113b continuously, and along with spray end side near above-mentioned slit 113, its cross section enlarges with 0.1～48 ° gradient, and forms the length of 0.02～6.25mm continuously along the injection direction of above-mentioned slit 113.
In addition, preferably, the spray end of above-mentioned slit 113 is configured to, and 5 wavelength that have the shock wave that the spray end with above-mentioned slit 113 generates from the surface of above-mentioned process object thing 10 arrive distance with interior suitable separation distance.
And, preferably, said nozzle 110 comprises: quadrate part 110b and sealing ring 110c behind nozzle front part 110a, the nozzle, this nozzle front part 110a has the front part that is equivalent to said nozzle body 111 and has a bodily form structure, and opens the front part that forms above-mentioned pressure uniform distribution road 112 and slit 113 overleaf on respect to the throughput direction of above-mentioned process object thing 10; Quadrate part 110b has the back quadrate part that is equivalent to said nozzle body 111 and has a bodily form structure behind this nozzle, and opens the back quadrate part that forms above-mentioned pressure uniform distribution road 112 and slit 113 in front on respect to the throughput direction of above-mentioned process object thing 10; Sealing ring 110c by back that can hermetic be close to said nozzle front part 110a and nozzle after the soft material of front of quadrate part 110b constitute, and around above-mentioned pressure uniform distribution road 112 and slit 113, be provided with continuously between the quadrate part 110b behind said nozzle front part 110a and the nozzle.
In addition, preferably, this nozzle 110 also comprises: the first spray nozzle part 110A and the second spray nozzle part 110B, this first spray nozzle part 110A dips down to the upper surface of above-mentioned process object thing 10 and tiltedly sprays supersonic speed gas jetting, and this second spray nozzle part 110B sprays supersonic speed gas jetting to the lower surface of above-mentioned process object thing 10 with being inclined upwardly.
And, preferably, this nozzle is configured to compare with a sidepiece of the Width of above-mentioned process object thing 10 on the throughput direction that the other side is positioned at above-mentioned process object thing 10 more on the front or more by rear side, and sprays supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing 10.
In addition, another technical essential is, a kind of surface processing device that process object thing 10 surfaces are handled, it is characterized in that, comprise: possess the supersonic speed processor 100 of slit superonic flow nozzzle 110, this nozzle 110 is by generating equably on the whole width of the open 113 pairs of above-mentioned process object things 10 of slit that form continuously along the Width of above-mentioned process object thing 10 and spraying the supersonic speed gas jetting that can produce shock wave.
At this, preferably, above-mentioned slit superonic flow nozzzle 110 is configured to, one sidepiece of the Width of above-mentioned process object thing 10 compare on the throughput direction that the other side is positioned at above-mentioned process object thing 10 more on the front, and spray supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing 10, and described slit superonic flow nozzzle 110 also comprises exhaust outlet 150, this exhaust outlet possesses the stream that the foreign matter that disperses can be discharged and removed to the outside in the air, and be set at the rear side of above-mentioned slit superonic flow nozzzle 110, and be configured to and to be positioned at a lateral side of above-mentioned slit superonic flow nozzzle 110 more on the front contiguous.
And, preferably, above-mentioned slit superonic flow nozzzle 110 is configured to spray supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing 10, and comprise and cut off curtain 160, this partition curtain 160 provides the next door, described next door cuts off the air flows between forward and backward side's side spatial portion of above-mentioned slit superonic flow nozzzle 110, adheres again on the handling part of above-mentioned process object thing 10 at the foreign matter of the rear side of above-mentioned slit superonic flow nozzzle 110 preventing.
In addition, preferably, also comprise high voltage supply device 120, this high voltage supply device 120 possesses air booster 121, and its air voltage rise with 3～10bar is pressed onto 100～200bar and supplies to above-mentioned slit superonic flow nozzzle 110.
And, preferably, also comprise: clean device 250 and air knife processor 270, above-mentioned process object thing 10 injection waters of 250 pairs of above-mentioned supersonic speed processors 100 of process of this clean device are also brushed 251 with roller and are cleaned, and are attached to above-mentioned process object thing 10 lip-deep foreign matters thereby remove; This above-mentioned clean device 250 of 271 pairs of processes of air knife processor 270 usefulness air knives and residue in above-mentioned process object thing 10 lip-deep water and carry out drying.
The present invention has following effect as constituted above: open the slit that forms continuously by the Width along the process object thing, on the whole width of process object thing, generate, spray the supersonic speed gas jetting that can produce shock wave equably, thereby can not cause damage ground that the lip-deep small pollutant attached to the process object thing is broken away from the process object thing.
Can promptly remove the small pollutant of large-area entire process object by spraying 1～2 supersonic speed gas jetting along the direction transport process object vertical, one side on one side with the width of slit, thereby can reduce the consumption of desired a plurality of injector arrangements, operation number of times etc. cause when utilizing existing circular cone (corn) shape nozzle expense, time, manpower significantly, the disqualification rate that generation because of the portion of being untreated is brought minimizes, and can guarantee the reliability of handling.
Description of drawings
Fig. 1 is the plane skeleton diagram of the example of the former glass sheet of expression cutting;
Fig. 2 be used to illustrate for expression former glass sheet cutting process want portion's side skeleton diagram;
Fig. 3 uses the side skeleton diagram of the example that air knife handles process object thing surface for expression;
Fig. 4 uses the side skeleton diagram of the example that brush device handles process object thing surface for expression;
Fig. 5 uses the side skeleton diagram of the example that emery wheel handles process object thing surface for expression;
Fig. 6 is the curve chart of expression according to the pressure ratio of the geometry of superonic flow nozzzle and position;
Fig. 7 owes schlieren (Schlieren) photo that expansion ratio is 1.2,1.5,1.7 free jet;
The curve chart that Fig. 8 reduces according to the pressure from the different shock wave of the separation distance of nozzle for expression;
Fig. 9 utilizes the side skeleton diagram of the example that slit superonic flow nozzzle according to the present invention handles process object thing surface for expression;
Figure 10 is the major part front perspective view of expression according to first embodiment of slit superonic flow nozzzle of the present invention;
Figure 11 is the major part birds-eye perspective of Figure 10;
Figure 12 is the major part side perspective view of Figure 10
Figure 13 is the A part enlarged drawing of Figure 12;
Figure 14 is used to illustrate major part birds-eye perspective according to the supersonic speed processor of the example of the setting of slit superonic flow nozzzle of the present invention and user mode for expression;
Figure 15 is the major part front perspective view of Figure 14;
Figure 16 is the overlook skeleton diagram of expression according to first embodiment of surface processing device of the present invention;
Figure 17 is the side skeleton diagram of Figure 16;
Figure 18 is used to illustrate the supply of gas, liquid for expression and discharges the side skeleton diagram of Figure 16 of an example of the pipeline configuration of usefulness;
Figure 19 is the oily pneumatics loop diagram of Figure 16;
Description of reference numerals:
10: process object thing 100: the supersonic speed processor
110: superonic flow nozzzle 110A: first spray nozzle part
110B: the second spray nozzle part 110a: nozzle front part
110b: quadrate part 110c behind the nozzle: sealing ring
111: nozzle body 111a: the gas inlet port
112: pressure uniform distribution road 112a: gas enters uniform distribution portion
112a-1: the first side wall 112a-2: second sidewall
112b: gas transfer uniform distribution portion 113: slit
113a: tilt to dwindle the 113b of portion: the curve connecting portion
113c: inclination expansion section 120: high voltage supply device
121: air booster 130: the substrate guide part
131: directive wheel 140: substrate is assisted connecting portion
150: exhaust outlet 160: cut off curtain
250: clean device 251: the roller brush
270: air knife processor 271: air knife
Embodiment
With reference to the following drawings, to being described in detail of as above constituting according to slit superonic flow nozzzle of the present invention and the surface processing device that possesses this nozzle.
Fig. 6 is the curve chart of expression according to the different pressure ratio in the geometry of superonic flow nozzzle and position, Fig. 7 is 1.2 for owing expansion ratio (Under-expended Ratio), 1.5,1.7 schlieren (Schlieren) photo of free jet, Fig. 8 for expression according to the curve chart that reduces from the pressure of the different shock wave of the separation distance of nozzle, Fig. 9 utilizes the side skeleton diagram of the example that slit superonic flow nozzzle according to the present invention handles process object thing surface for expression.
Figure 10 is the major part front perspective view of expression according to first embodiment of slit superonic flow nozzzle of the present invention, Figure 11,12 is respectively major part birds-eye perspective, the major part side perspective view of Figure 10, Figure 13 is the A part enlarged drawing of Figure 12, Figure 14 is used to illustrate that for expression Figure 15 is the major part front perspective view of Figure 14 according to the major part birds-eye perspective of the supersonic speed processor of the example of the setting of slit superonic flow nozzzle of the present invention and user mode.
Figure 16 is the overlook skeleton diagram of expression according to first embodiment of surface processing device of the present invention, Figure 17 is the side skeleton diagram of Figure 16, Figure 18 is used to illustrate the supply of gas, liquid for expression and discharges the side skeleton diagram of Figure 16 of example of the pipeline configuration of usefulness that Figure 19 is the oily pneumatics loop diagram of Figure 16.
Thereby a kind of fluctuation of in fluid, propagating and propagate than the faster pressure that makes of velocity of sound, density, the ripple that temperature etc. change sharp is called shock wave (shock wave), slit superonic flow nozzzle according to the present invention is the spray nozzle device that comprises following formation, that is: utilize this shock wave can be to as semiconductor chip (semiconductor wafer), liquid crystal display cells (LCD, Liquid Crystal Display), damage is caused on such process object thing 10 surfaces of solar cell, simultaneously can be from the surface removal of process object thing 10 securely attached to the small pollutant on above-mentioned process object thing 10 surfaces.
Shown in Fig. 6 (a), if gases at high pressure are passed through from slit (slot), this slit has that to reduce the back gradually from inlet (entrance) side the closer to outlet (exit) side path be the shape that the starting point path enlarges once more with neck (throat) Pt, then in the pressure P of outlet side pressure P e with the outlet outside
2Under the different situations, can generate the overexpansion jet (over-expanded supersonic jet) (A, the B of Fig. 6 (b), the situation of C) that is equivalent to generate shock wave or the supersonic jet of the jet (under-expanded supersonic jet) (situation of the D of Fig. 6 (b)) of owing to expand is flowed.
According to slit superonic flow nozzzle of the present invention, in order to generate the shock wave that to remove reliably attached to the small pollutant on above-mentioned process object thing 10 surfaces as physical force, have the structure that the supersonic jet of form shown in A, the B that can cause as (b) of Fig. 6, C, the D is flowed, and can be according to the outlet side pressure P e that recently selects suitable nozzles of the sectional area of the sectional area of above-mentioned outlet and neck.
The distribution that the supersonic jet that forms in the outlet outside of nozzle is flowed can be divided into following three zones, thereby that is: intensity of wave makes turbulent mixing process be presented as the mobile zone of non-sticky of thin layer by force; Thereby turbulent mixing layer and the turbulization that flow to interact on every side dissipate and make the transitional region that intensity of wave reduces; Thereby intensity of wave is eliminated fully and is made pressure distribution become VISCOUS FLOW zone certain and that turbulent mixing layer disappears.
(a) of Fig. 7 owes schlieren (Schlieren) photo that expansion ratio is 1.2 free jet, till from jet expansion to the second shock wave unit, be equivalent to non-sticky that the shape of ripple obviously the demonstrates zone of flowing, till the five shock wave unit, the 3rd shock wave unit to the, thereby being equivalent to turbulent mixing layer and the turbulization that flow to interact on every side dissipates and makes the transitional region that ripple fogs gradually, (b) of Fig. 7, (c) be to owe expansion ratio to be respectively 1.5,1.7 the schlieren photograph of free jet, situation about thus can the confirmation unit size increasing than the shock wave shown in Fig. 7 (a).
Can confirm by Fig. 8, in place with the separation distance that surpasses the 5th shock wave unit area (5 wavelength), impulsive force is reduced to can't remove the atomic degree of firm attachment on above-mentioned process object thing 10 surfaces reliably, therefore according to slit superonic flow nozzzle of the present invention, preferably, as shown in Figure 9, spray end is arranged to have 5 wavelength (λ) reach with shock wave with interior suitable separation distance from above-mentioned process object thing 10 surfaces.
And, can confirm by Fig. 8, separate from the spray end of superonic flow nozzzle more, the pressure of shock wave can't reduce successively continuously, but repeatedly pressure sharply rise or descend, and has different barometric gradients according to the position difference, therefore be arranged to have from above-mentioned process object thing 10 surfaces 5 wavelength (λ) reach with shock wave with interior suitable separation distance in, preferably, be arranged to have the position shown in the dark red colo(u)r streak with Fig. 8, promptly light the separation distance suitable apart from x from the ground that sharply rises than the circumferential pressure that closes on.
Slit superonic flow nozzzle 110 according to the present invention comprises nozzle body 111, pressure uniform distribution road 112, slit 113, said nozzle body 111 forms along above-mentioned process object thing 10 Widths has development length, above-mentioned pressure uniform distribution road 112 is communicated with formation in said nozzle body 111 inside continuously on the length direction of said nozzle body 111, above-mentioned slit 113 be for can produce the impact wave structure, and has the structure that forms continuously on an end on said nozzle body 111 and pressure uniform distribution road 112.
Figure 10 is to first embodiment according to slit superonic flow nozzzle of the present invention shown in Figure 12, above-mentioned slit superonic flow nozzzle 110 have by a plurality of bolt members with nozzle front part 110a and nozzle after the quadrate part 110b structure that mutually combines and assemble, this nozzle front part 110a is equivalent to the front part of said nozzle body 111 and has a bodily form structure, and on respect to the throughput direction of above-mentioned process object thing 10, open the front part that forms above-mentioned pressure uniform distribution road 112 and slit 113 overleaf, quadrate part 110b is equivalent to the back quadrate part of said nozzle body 111 and has a bodily form structure behind this nozzle, and opens the back quadrate part that forms above-mentioned pressure uniform distribution road 112 and slit 113 in front on respect to the throughput direction of above-mentioned process object thing 10.
The quadrate part 110b shape that forms as one respectively behind said nozzle front part 110a and the nozzle, and behind said nozzle front part 110a and nozzle the connecting portion of quadrate part 110b, can cut off except that above-mentioned slit 113 pressure-air fully to the root of flows outside, therefore can said nozzle body 111 internal stabilities keep and generate the high pressure that is used to generate supersonic speed gas jetting (supersonic gas jet).
In order on the whole length of above-mentioned slit 113, to generate the shock wave of uniform strength, need on above-mentioned pressure uniform distribution road 112, fully form the uniform distribution of the gases at high pressure of supplying with to above-mentioned slit 113 sides, if but gas inlet port 111a is formed injection direction with above-mentioned slit 113, promptly from the different direction of direction of the above-mentioned slit 113 side supply gas of above-mentioned pressure uniform distribution road 112 side direction, described gas inlet port 111a provides the gases at high pressure access path to above-mentioned nozzle body 111 inboards, then can be in size and shape maintains former state with above-mentioned pressure uniform distribution road 112, direction conversion by gas etc. more effectively forms the pressure uniform distribution.
Above-mentioned gas inlet port 111a has the gases at high pressure supplying tubing can be by bolt in conjunction with waiting hermetic assembled portion structure of assembling, and along the length direction of said nozzle body 111 be separated be provided with a plurality of, thereby compare with the situation that forms or minority at the central portion of said nozzle body 111 or length direction one sidepiece, can gases at high pressure that supply with to above-mentioned nozzle body 111 are more even and stably distribute along the length direction of said nozzle 111.
Above-mentioned pressure uniform distribution road 112 comprises that gas enters 112a of uniform distribution portion and the gas transfer uniform distribution 112b of portion, this gas enters the 112a of uniform distribution portion will enter into the length direction for the first time equably distribution of the gases at high pressure of said nozzle body 111 inside along said nozzle body 111, and supply to above-mentioned slit 113 sides, and it has uniform cross-sectional area, this gas transfer uniform distribution 112b of portion distributes the gases at high pressure that above-mentioned gas enters the 112a of uniform distribution portion so that can supply to above-mentioned slit 113 sides swimmingly for the second time equably, and it has and dwindles variable cross section.
Above-mentioned gas enters the 112a of uniform distribution portion and has the structure that possesses the first side wall 112a-1 and the second sidewall 112a-2, this the first side wall 112a-1 provide opposed faces, described opposed faces can change flow direction to above-mentioned slit side 113 sides afterwards by the supply that above-mentioned gas inlet port 111a obtains gases at high pressure, wherein above-mentioned gas inlet port 111a is formed with and stream to the gas flow direction different directions of above-mentioned slit 113 sides, this second sidewall 112a-2 forms the separation distance that separates regulation with above-mentioned the first side wall 112a-1, so that along the length direction of said nozzle body 111 dispense pressure and transmit gases at high pressure to above-mentioned slit 113 sides equably.
Above-mentioned gas transmits the end of the uniform distribution 112b of portion and the other end enters the 112a of uniform distribution portion with above-mentioned gas respectively and slit 113 is communicated with formation, and form from the connecting portion that enters the 112a of uniform distribution portion with above-mentioned gas and dwindle more continuously towards its cross section of connecting portion side more, so that make the pressure that enters the gases at high pressure that the 112a of uniform distribution portion enters by above-mentioned gas strengthen more and flow swimmingly, transmit to above-mentioned slit 113 sides with above-mentioned slit 113.
Above-mentioned slit 113 is opened along the Width continuity ground of above-mentioned process object thing 10 in an end on said nozzle body 111 and pressure uniform distribution road 112 and is formed, and have following structure, the supply that obtains gases at high pressure by above-mentioned pressure uniform distribution road 112 produces the supersonic speed gas jetting that can give the shock wave of impulsive force to the surface of above-mentioned process object thing 10 effectively afterwards.
The applicant carries out The deformation repeatedly by shape, angle, curvature to the spray end of above-mentioned slit 113, confirmed as illustrated in fig. 13 the spray end of above-mentioned slit 113 to be distinguished to form to tilt to dwindle the 113a of portion, curved surface connecting portion 113b, inclination expansion section 113c, if and were suitable for gradient shown in Figure 13 or curvature, length respectively, then could stably generate the shock wave of removing effectively attached to the lip-deep atomic degree of plate process object thing 10.
But, according to the configuration of the suitable environment of spray nozzle device, relevant device, operating condition etc., preferably be suitable for structure and the shape that is more suitable for, therefore according to slit superonic flow nozzzle of the present invention, as long as can generate supersonic speed gas jetting with uniform pressure and speed, then be not limited to be suitable for the specific structure and the shape that comprise above-mentioned public technology etc. along the length direction of above-mentioned slit 113.
Above-mentioned inclination is dwindled the 113a of portion and is formed spray end side the closer to above-mentioned slit 113, the width of slit dwindles with 15～52 ° gradient, above-mentioned curved surface connecting portion 113b forms along the injection direction of above-mentioned slit 113 and is connected 0.02～5.00mm length with the end that the 113a of portion is dwindled in above-mentioned inclination, and form the slit width that is equivalent to 0.01～1.25mm in the end, above-mentioned inclination expansion section 113c forms the closer to the spray end lateral section of above-mentioned slit 113 that the gradient with 0.1～48 ° enlarges, and forms 0.02～6.25mm continuously along the injection direction of above-mentioned slit 113.
In the above-mentioned slit 113 at the minute sized width of microstage unit, form gas flow at a high speed simultaneously along the continuous a plurality of places of the length direction of said nozzle body 111, by being equivalent to 0.01～1.25mm, therefore according to surface roughness (degree of roughness), because gas flow and with friction, collision and the consequent direction transformation etc. on surface, have influence on the energy loss degree greatly.
Fig. 4,5 is used to illustrate supersonic speed processor 100 according to the example of the setting of slit superonic flow nozzzle 110 of the present invention and user mode for expression, and it has following structure, that is: a sidepiece of the Width of above-mentioned process object thing 10 be positioned at respect to the other side above-mentioned process object thing 10 throughput direction on the front or rear side, have inclined angle alpha at the rear side opposite with the throughput direction of above-mentioned process object thing 10.
If above-mentioned slit superonic flow nozzzle 110 is arranged to respect to the rectangular direction of the throughput direction of above-mentioned process object thing 10, and to the direction gas jet of the Surface Vertical of above-mentioned process object thing 10, concentrate the effect impulsive force on the narrow width suitable then above-mentioned process object thing 10 with vertical with respect to its throughput direction wire shaped, not only owing to above-mentioned process object thing 10 is transmitted unnecessary plus-pressure, also make the foreign matter removed from above-mentioned process object thing 10 disperse and might adhere to once more to the front side of above-mentioned slit superonic flow nozzzle 110 towards the impulsive force of giving with the direction of the Surface Vertical of above-mentioned process object thing 10.
As mentioned above, be provided with, can prevent to disperse to the front side of above-mentioned slit superonic flow nozzzle 110 from the foreign matter that above-mentioned process object thing 10 is removed by following.That is: a sidepiece of the Width of above-mentioned process object thing 10 is positioned at the side on the front of the throughput direction of above-mentioned process object thing 10 with respect to the other side, and tilt towards the rear side opposite with the throughput direction of above-mentioned process object thing 10, thereby through a sidepiece of the above-mentioned slit 113 of the associating expansion width till the other side, impulsive force is effect dispersedly successively.
Rear side at above-mentioned slit superonic flow nozzzle 110 is removed the foreign matter of handling and dispersing aloft from above-mentioned process object thing 10, preferably, thereby be forced to be drawn into the supersonic speed processor 100 outside removings promptly that above-mentioned slit superonic flow nozzzle 110 is set, before the central portion of above-mentioned supersonic speed processor 100 reaches, back quadrate part setting is also used above-mentioned slit superonic flow nozzzle 110 and its auxiliary device, the a plurality of equipment that comprise substrate guide part 130 (following explanation), thereby preferably, for utilization that does not hinder these equipment and the space of applying flexibly qualification effectively, on the left side of above-mentioned supersonic speed processor 100 or right side, be provided for providing and force to discharge, remove the exhaust outlet 150 of the stream of the foreign matter that disperses in the air.
Under the situation of above-mentioned slit superonic flow nozzzle 110 being arranged to have as described above as the flat shape of above-mentioned gradient and side view, preferably, above-mentioned exhaust outlet 150 is arranged at the rear side of above-mentioned slit superonic flow nozzzle 110, and is arranged to and is positioned at the lateral side vicinity of the above-mentioned slit superonic flow nozzzle 110 in the place ahead.
If above-mentioned exhaust outlet 150 is provided with as described above, then above-mentioned exhaust outlet 150 is arranged in the place that above-mentioned supersonic speed processor 100 rear sides inner and above-mentioned slit superonic flow nozzzle 110 have the space of relative expansion, thereby not only can discharge and remove air and foreign matter on the place with big expansion space definitely, thereby and have relatively and can make by the air-breathing processing of above-mentioned exhaust outlet 150 and can carry out effectively through the space that relatively enlarges swimmingly successively in the rear side spatial portion entire portion of above-mentioned slit superonic flow nozzzle 110 than air on the place of narrow space and foreign matter.
In addition, if the partition curtain 160 that the next door is provided is set, described next door cuts off the air flows between forward and backward side's side spatial portion of above-mentioned slit superonic flow nozzzle 110, then can prevent to break away from and the skyborne foreign matter that disperses adheres again on the handling part of above-mentioned process object thing 10 from above-mentioned process object thing 10 at the rear side of above-mentioned slit superonic flow nozzzle 110.
Utilize a plurality of directive wheels 131 and substrate guide part 130 plate shaped above-mentioned process object thing 10 stably can be carried, wherein, the lower end of 131 pairs of above-mentioned process object things 10 of this directive wheel is connected supporting with the upper end, and the throughput direction along above-mentioned process object thing 10 in this substrate guide part 130 disposes continuously to a plurality of cramp bars of above-mentioned directive wheel 131 supporting in the mode of positive position rotation.
Even utilize the above-mentioned process object thing of 130 pairs of aforesaid substrate guide parts 10 to connect supporting in many places, to still acting on the above-mentioned process object thing 10 microvibration is arranged, therefore if be not connected the position of above-mentioned directive wheel 131 on the front part of above-mentioned slit superonic flow nozzzle 110 and back quadrate part appends application substrate and assists connecting portion 140 in contiguous position, but the rolling member that the auxiliary link portions 140 of described yoke has connection processing object 10 and can lead can prevent definitely that then the action effect of the impulsive force that the microvibration because of above-mentioned process object thing 10 causes from reducing.
Surface processing device according to the present invention relates to following surface processing device, even apparatus has as constituted above according to slit superonic flow nozzzle 110 of the present invention and supersonic speed processor 100, and has the formation that to handle the surface of above-mentioned process object thing 10, as Fig. 6, shown in 7, have the structure that the above-mentioned supersonic speed processor 100 that possesses above-mentioned slit superonic flow nozzzle 110 is set on the transport path of above-mentioned process object thing 10, this slit superonic flow nozzzle 110 is opened the slit 113 that forms continuously by the Width along above-mentioned process object thing 10, on the whole width of above-mentioned process object thing 10, generate equably and spray the supersonic speed gas jetting that can produce shock wave.
Among first embodiment according to surface processing device of the present invention, above-mentioned supersonic speed processor 100 possesses a pair of above-mentioned slit superonic flow nozzzle 110 that is equivalent to the spray nozzle part 110A and the second spray nozzle part 110B, thereby the upper and lower surface of above-mentioned process object thing 10 is handled simultaneously.This first spray nozzle part 110A dips down to the upper surface of above-mentioned process object thing 10 and tiltedly sprays supersonic speed gas jetting, and this second spray nozzle part 110B sprays supersonic speed gas jetting to the lower surface of above-mentioned process object thing 10 with being inclined upwardly.
In addition, has the structure that clean device 250 and air knife processor 270 are set in addition.Wherein, above-mentioned process object thing 10 injection waters of 250 pairs of above-mentioned supersonic speed processors 100 of process of this clean device are also brushed 251 with roller and are cleaned, be attached to above-mentioned process object thing 10 lip-deep foreign matters thereby remove, this above-mentioned clean device 250 of 271 pairs of processes of air knife processor 270 usefulness air knives and residue in above-mentioned process object thing 10 lip-deep water and carry out drying.
According to said structure, above-mentioned process object thing 10 passes through supersonic speed processor 100, clean device 250, air knife processor 270 successively, thereby pass through high-intensity pressure disengaging, cleaning and dry run successively, described pressure disengaging is to utilize the dry process of supersonic speed shock wave to bring, and described cleaning and dry run are carried out residuing in above-mentioned process object thing 10 lip-deep foreign matters lightly.
Supply with gases at high pressure, treatment fluid and water to above-mentioned supersonic speed processor 100, clean device 250, air knife processor 270, when after processing, discharging, by boost as Fig. 8, fluid pressure line shown in Figure 9, heat, supply, injection, collection, draining, circulation, waste water treatment and uses energy effectively.
When supplying with the pressure-air that generates equably on can whole width and spray the degree of the supersonic speed gas jetting that can produce shock wave with above-mentioned slit superonic flow nozzzle 110 by above-mentioned slit 113 and press to above-mentioned process object thing 10, use common compressor can realize the air pressure of 3～10bar, if produce the high voltage supply device 120 of air booster 121 that condition can boost to the performance of 100～200bar but utilize to be suitable for to have according to shock wave, then compress with suitable compressor, the situation of boosting is compared, more effectively uses energy.
According to slit superonic flow nozzzle of the present invention and have the surface processing device of this nozzle, open the above-mentioned slit 113 that forms continuously by Width along above-mentioned process object thing 10, generate equably on the whole width to above-mentioned process object thing 10 and spray the supersonic speed gas jetting that can produce shock wave, thereby above-mentioned process object thing 10 is not being produced under the situation of damage, removing securely attached to above-mentioned process object thing 10 lip-deep small pollutants safely and effectively.
By carrying above-mentioned process object thing 10 to spray 1～2 time supersonic speed gas jetting on one side along the direction vertical on one side with the width of above-mentioned slit 113, and can promptly remove the small pollutant of large-area whole above-mentioned process object thing 10, can reduce the consumption of desired a plurality of injector arrangements, operation number of times etc. cause when utilizing existing circular cone (corn) shape nozzle expense, time, manpower thus significantly, the disqualification rate that generation because of the portion of being untreated is brought minimizes, and can guarantee the reliability of handling.
More than, the preferred embodiments of the present invention have been described, but the present invention is not limited thereto, will be understood that the embodiment that the simple combination of the foregoing description and existing known technology is suitable for, and those skilled in the art can change the technology of utilizing according to claims of the present invention and embodiment and all belong to technical scope of the present invention.
Claims (13)
1. a slit superonic flow nozzzle (110) is to spray the nozzle that can break away from the high-speed gas of foreign matter from the surface of process object thing (10), it is characterized in that, comprising:
Nozzle body (111), its Width along above-mentioned process object thing (10) extends to form;
Pressure uniform distribution road (112), it possesses along the stream of the Width continuity of above-mentioned process object thing (10) and is formed on said nozzle body (111) inside, so that the gases at high pressure of supplying with to above-mentioned nozzle body (111) can be distributed equably along the length direction of said nozzle body (111); And
Slit (113), formation is opened on its Width continuity ground along above-mentioned process object thing (10) on an end on said nozzle body (111) and pressure uniform distribution road (112), and obtain the supply of gases at high pressure by above-mentioned pressure uniform distribution road (112), can produce the supersonic speed gas jetting of shock wave and spray thereby generate to above-mentioned process object thing (10) side.
2. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, said nozzle body (111) comprising:
Separate along the length direction of said nozzle body (111) a plurality of gas inlet ports (111a) be set, this gas inlet port (111a) can along with provide gases at high pressure to make it enter into the inner path of said nozzle body (111) from above-mentioned pressure uniform distribution road (112) to the direction different directions of above-mentioned slit (113) supply gas.
3. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, above-mentioned pressure uniform distribution road (112) comprising:
Gas enters uniform distribution portion (112a) and gas transfer uniform distribution portion (112b),
This gas enters uniform distribution portion (112a) and possesses the first side wall (112a-1) and second sidewall (112a-2), this the first side wall (112a-1) can be to the opposed faces of above-mentioned slit (113) side change flow direction after the supply that obtains gases at high pressure is provided, the separation distance that this second sidewall (112a-2) and above-mentioned the first side wall (112a-1) separate regulation forms, so that along the length direction of said nozzle body (111) dispense pressure and transmit gases at high pressure to above-mentioned slit (113) side equably;
This gas transfer uniform distribution portion (112b) enters uniform distribution portion (112a) with above-mentioned gas and slit (113) is communicated with formation, also can be so that the gas that enters the distribution first time in the uniform distribution portion (112a) at above-mentioned gas is carried out distributing the second time to above-mentioned slit (113) side transmission, and dwindle formation continuously towards its cross section of connecting portion side more from the connecting portion that enters uniform distribution portion (112a) with above-mentioned gas, so that can realize the pressure consolidated of gas and flow smoothly with above-mentioned slit (113).
4. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, above-mentioned slit (113) comprising:
Tilt to dwindle portion (113a), curved surface connecting portion (113b) and inclination expansion section (113c),
This inclination is dwindled portion (113a) and is formed along with the spray end side near above-mentioned slit (113), and the width of slit dwindles with 15～52 ° gradient,
This curved surface connecting portion (113b) is connected to form with the end that portion (113a) is dwindled in above-mentioned inclination, and along the continuous length that forms 0.02～5.00mm of the injection direction of above-mentioned slit (113), forms the slit width that is equivalent to 0.01～1.25mm,
This inclination expansion section (113c) is connected to form with the end of above-mentioned curved surface connecting portion (113b), and along with spray end side near above-mentioned slit (113), its cross section enlarges with 0.1～48 ° gradient, and forms the length of 0.02～6.25mm continuously along the injection direction of above-mentioned slit (113).
5. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, the spray end of above-mentioned slit (113) is configured to:
5 wavelength reach that have the shock wave that the spray end with above-mentioned slit (113) generates from the surface of above-mentioned process object thing (10) are with interior suitable separation distance.
6. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, this nozzle (110) comprising:
Quadrate part (110b) and sealing ring (110c) behind nozzle front part (110a), the nozzle,
This nozzle front part (110a) is equivalent to the front part of said nozzle body (111) and has a bodily form structure, and opens the front part that forms above-mentioned pressure uniform distribution road (112) and slit (113) overleaf on respect to the throughput direction of above-mentioned process object thing (10);
Quadrate part behind this nozzle (110b) is equivalent to the back quadrate part of said nozzle body (111) and has a bodily form structure, and opens the back quadrate part that forms above-mentioned pressure uniform distribution road (112) and slit (113) in front on respect to the throughput direction of above-mentioned process object thing (10);
Sealing ring (110c) by back that can hermetic be close to said nozzle front part (110a) and nozzle after the soft material of front of quadrate part (110b) constitute, and behind said nozzle front part (110a) and the nozzle between the quadrate part (110b) and along the setting continuously on every side of above-mentioned pressure uniform distribution road (112) and slit (113).
7. slit superonic flow nozzzle according to claim 1 (110) is characterized in that, this nozzle (110) comprising:
First spray nozzle part (110A) and second spray nozzle part (110B),
This first spray nozzle part (110A) dips down to the upper surface of above-mentioned process object thing (10) and tiltedly sprays supersonic speed gas jetting,
This second spray nozzle part (110B) sprays supersonic speed gas jetting to the lower surface of above-mentioned process object thing (10) with being inclined upwardly.
8. according to claim 1 or 7 described slit superonic flow nozzzles (110), it is characterized in that,
This nozzle be configured to compare with a sidepiece of the Width of above-mentioned process object thing (10) on the throughput direction that the other side is positioned at above-mentioned process object thing (10) more on the front, and spray supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing (10).
9. a surface processing device is handled the surface of process object thing (10), it is characterized in that, comprises the supersonic speed processor (100) that possesses slit superonic flow nozzzle (110), and this slit superonic flow nozzzle (110) comprising:
Nozzle body (111), its Width along above-mentioned process object thing (10) extends to form;
Pressure uniform distribution road (112), it possesses along the stream of the Width continuity of above-mentioned process object thing (10) and is formed on said nozzle body (111) inside, so that the gases at high pressure of supplying with to above-mentioned nozzle body (111) can be distributed equably along the length direction of said nozzle body (111); And
Slit (113), formation is opened on its Width continuity ground along above-mentioned process object thing (10) on an end on said nozzle body (111) and pressure uniform distribution road (112), and obtain the supply of gases at high pressure by above-mentioned pressure distribution road (112), can produce the supersonic speed gas jetting of shock wave and spray thereby generate to above-mentioned process object thing (10) side.
10. surface processing device according to claim 9 is characterized in that,
Above-mentioned slit superonic flow nozzzle (110) be configured to compare with a sidepiece of the Width of above-mentioned process object thing (10) on the throughput direction that the other side is positioned at above-mentioned process object thing (10) more on the front, and spray supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing (10)
And comprise exhaust outlet (150), this exhaust outlet possesses the stream that the foreign matter that disperses can be discharged and removed to the outside in the air, and be set at the rear side of above-mentioned slit superonic flow nozzzle (110), and be configured to and to be positioned at the lateral side of above-mentioned slit superonic flow nozzzle (110) in the place ahead contiguous.
11. surface processing device according to claim 9 is characterized in that,
Above-mentioned slit superonic flow nozzzle (110) is configured to spray supersonic speed gas jetting obliquely to the rear side opposite with the throughput direction of above-mentioned process object thing (10),
And comprise and cut off curtain (160), this partition curtain (160) provides the next door of the air flows between the forward and backward side's side spatial portion that cuts off above-mentioned slit superonic flow nozzzle (110), adheres again on the handling part of above-mentioned process object thing (10) at the foreign matter of the rear side of above-mentioned slit superonic flow nozzzle (110) preventing.
12. surface processing device according to claim 9 is characterized in that, also comprises:
High voltage supply device (120), this high voltage supply device (120) possess that air voltage rise with 3～10bar is pressed onto 100～200bar and the air booster (121) that supplies to above-mentioned slit superonic flow nozzzle (110).
13. surface processing device according to claim 9 is characterized in that, also comprises:
Clean device (250) and air knife processor (270),
This clean device (250) is attached to the lip-deep foreign matter of above-mentioned process object thing (10) to cleaning through above-mentioned process object thing (10) injection water of above-mentioned supersonic speed processor (100) and with roller brush (251) thereby remove;
This air knife processor (270) carries out drying with air knife (271) to residuing in the lip-deep water of above-mentioned process object thing (10) through above-mentioned clean device (250).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2009-0024958 | 2009-03-24 | ||
| KR1020090024958A KR100928691B1 (en) | 2009-03-24 | 2009-03-24 | Slit type supersonic nozzle and surface-cleaning apparatus having the same |
| PCT/KR2010/001658 WO2010110546A2 (en) | 2009-03-24 | 2010-03-18 | Slit type supersonic nozzle and surface treatment device having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102272900A true CN102272900A (en) | 2011-12-07 |
Family
ID=41605478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010800042771A Pending CN102272900A (en) | 2009-03-24 | 2010-03-18 | Slit type supersonic nozzle and surface treatment device having the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012516233A (en) |
| KR (1) | KR100928691B1 (en) |
| CN (1) | CN102272900A (en) |
| WO (1) | WO2010110546A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113997205A (en) * | 2021-11-26 | 2022-02-01 | 山东大学 | High-voltage pulse abrasive jet flow generation device and method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101768655B1 (en) * | 2011-06-20 | 2017-08-17 | 주식회사 엘지화학 | Drying apparatus for cleaning system of float glass |
| KR101824628B1 (en) * | 2015-10-16 | 2018-02-01 | 라온닉스 주식회사 | Surface cleaning apparatus |
| CN110130250B (en) * | 2019-05-21 | 2021-01-15 | 郭旋 | Pneumatic low-damage road pile mud removing device |
| KR102459609B1 (en) * | 2020-12-04 | 2022-10-27 | 인하대학교 산학협력단 | Structure of connecting pipe for pipe of the high pressure hydrogen |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05253550A (en) * | 1992-03-09 | 1993-10-05 | Sanpo Denki Kk | Article cleaning apparatus |
| JPH08198431A (en) * | 1995-01-25 | 1996-08-06 | Tsukasa Kogyo Kk | Automatic interior washing system for various kind of powder processing apparatus |
| JPH11297653A (en) * | 1998-02-13 | 1999-10-29 | Sumitomo Heavy Ind Ltd | Surface cleaning method and apparatus |
| KR20060107841A (en) * | 2003-12-15 | 2006-10-16 | 코레플로우 사이언티픽 솔루션스 리미티드 | Apparatus and method for cleaning surfaces |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10211473A (en) * | 1997-01-29 | 1998-08-11 | Shibaura Eng Works Co Ltd | Air knife, supporting apparatus for air knife, and treatment apparatus using the same |
| KR100328640B1 (en) * | 1999-06-21 | 2002-03-20 | 오자와 미토시 | Surface Cleaning Method and Device Therefor |
| JP3856210B2 (en) * | 2002-01-21 | 2006-12-13 | 株式会社いけうち | nozzle |
| JP4120991B2 (en) * | 2005-09-05 | 2008-07-16 | 福岡県 | Cleaning nozzle and cleaning method using the same |
-
2009
- 2009-03-24 KR KR1020090024958A patent/KR100928691B1/en active IP Right Grant
-
2010
- 2010-03-18 WO PCT/KR2010/001658 patent/WO2010110546A2/en active Application Filing
- 2010-03-18 CN CN2010800042771A patent/CN102272900A/en active Pending
- 2010-03-18 JP JP2011547825A patent/JP2012516233A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05253550A (en) * | 1992-03-09 | 1993-10-05 | Sanpo Denki Kk | Article cleaning apparatus |
| JPH08198431A (en) * | 1995-01-25 | 1996-08-06 | Tsukasa Kogyo Kk | Automatic interior washing system for various kind of powder processing apparatus |
| JPH11297653A (en) * | 1998-02-13 | 1999-10-29 | Sumitomo Heavy Ind Ltd | Surface cleaning method and apparatus |
| KR20060107841A (en) * | 2003-12-15 | 2006-10-16 | 코레플로우 사이언티픽 솔루션스 리미티드 | Apparatus and method for cleaning surfaces |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113997205A (en) * | 2021-11-26 | 2022-02-01 | 山东大学 | High-voltage pulse abrasive jet flow generation device and method |
| CN113997205B (en) * | 2021-11-26 | 2022-11-18 | 山东大学 | High-voltage pulse abrasive jet flow generation device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010110546A2 (en) | 2010-09-30 |
| JP2012516233A (en) | 2012-07-19 |
| KR100928691B1 (en) | 2009-11-27 |
| WO2010110546A3 (en) | 2010-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0640411B1 (en) | Dust removing system | |
| CN102272900A (en) | Slit type supersonic nozzle and surface treatment device having the same | |
| US8523632B2 (en) | Blasting method and apparatus having abrasive recovery system, processing method of thin-film solar cell panel, and thin-film solar cell panel processed by the method | |
| CN1325177C (en) | A cleaning device and cleaning method | |
| KR101653222B1 (en) | Blasting method and apparatus having abrasive recovery system, processing method of thin-film solar cell panel, and thin-film solar cell panel processed by the method | |
| CN101642896B (en) | Blasting method and apparatus, thin-film solar cell panel and processing method thereof | |
| AU756947B2 (en) | Method and apparatus for manufacturing semiconductor device | |
| KR101720349B1 (en) | Fluid Applicator and Glass Cleaning Process | |
| CN212310299U (en) | Dry-type ultrasonic cleaning device | |
| KR100756640B1 (en) | Solid particles injecting nozzle and solid particles injecting high capacity nozzle | |
| JP4448458B2 (en) | Substrate cleaning method and substrate cleaning apparatus | |
| CN111940414A (en) | Dry ultrasonic cleaning device and cleaning method | |
| KR20190012584A (en) | Air knife and dust cleaning apparatus having the same | |
| TW200528202A (en) | Sheet material washing equipment | |
| JP4870608B2 (en) | Deposition equipment | |
| CN115540521B (en) | Substrate drying device | |
| TW202327810A (en) | Dedusting device, sander and method for dedusting a workpiece | |
| JP2004146455A (en) | Cleaning device and cleaning method | |
| KR102026867B1 (en) | Debris removal device | |
| CN216323883U (en) | Integrated dry-type ultrasonic cleaning device | |
| JP2001104897A (en) | Device and method for ultrasonic washing | |
| JPH11253897A (en) | Dust removing device | |
| JP2008253893A (en) | Substrate processing apparatus | |
| CN212310298U (en) | Ultrasonic cleaning system | |
| EP2735381B1 (en) | Method of using a dust-removing apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20111207 |