CN102253004A - Sub-angstrom-level super-smooth transparent surface test system based on differential scattering - Google Patents
Sub-angstrom-level super-smooth transparent surface test system based on differential scattering Download PDFInfo
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- CN102253004A CN102253004A CN2011101101985A CN201110110198A CN102253004A CN 102253004 A CN102253004 A CN 102253004A CN 2011101101985 A CN2011101101985 A CN 2011101101985A CN 201110110198 A CN201110110198 A CN 201110110198A CN 102253004 A CN102253004 A CN 102253004A
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Abstract
The invention discloses a sub-angstrom-level super-smooth transparent substrate surface test system based on differential scattering. The sub-angstrom-level super-smooth transparent substrate surface test system consists of a light source system, a rotary table system, a sample stage system, a photoelectric detection system and a data collection and display system. In the rotary table system as shown in a figure in the specification, each component is in fully rigid connection; precision rotary tables C1 and C2 are fixed on an optical platform A by standard fastening screws; and a polarization analyzer, a photoelectric detector and the like are fixedly connected onto the precision rotary table C2 by an extension plate of the measurement system. By using the polarization interference principle and regarding the first-order differential scattering perturbation theory as a guideline, suitable polarizing direction and polarization analyzing direction are selected to eliminate the volume scattering of the substrate and effectively and independently measure the microstructure of the sub-angstrom-level super-smooth transparent substrate surface. The sub-angstrom-level super-smooth transparent substrate surface test system based on differential scattering can be used for rapidly and accurately screening fused quartz or microcrystalline glass substrates used in the research and production of high-precision laser gyroscopes, and synchronously, the invention provides a universal method for testing the super-smooth transparent substrate surface.
Description
Technical field
The present invention is a kind of high precision measurement system that is applied to inferior dust level ultra-smooth transparent surface, belongs to the optical detection field.
Background technology
In the development and production process of laser gyro, the ultra-smooth substrate is extremely important, and it is the basis that makes the high-quality high reflective mirror.At present, in order to satisfy the needs of high-precision laser gyroscope development and production, accomplished less than 1 through the super fused quartz of throwing or the surperficial r.m.s. roughness (RMS) of glass-ceramic substrate, even reached 0.6 (atomic force microscope measurement data), this almost is the present test limits of all senior surface test instruments, to the test of ultra-smooth substrate surface with select and have great challenge.In view of the direct relation of laser gyro to harsh requirement and the mirror surface roughness and the scattering of mirror surface roughness, the normal light scattering method that adopts detects the ultra-smooth substrate surface in the process of laser gyro catoptron.
With respect to other surface test system, it is fast to utilize light scattering method that the measurement of super-smooth surface is had speed, characteristics such as test area is big, and expense is cheap, and is simple to operation.But, since scattered intensity itself a little less than, on the one hand be not easy accurately to be surveyed, also be subjected to extraneous interference on the other hand easily, cause introducing bigger measuring error.So, suppressing outside noise to greatest extent, the surfaceness of accurately measuring substrate efficiently always is the difficult point problem that people pay close attention to.
For the transparent substrate that uses in the high-precision laser gyroscope development and production process, when light incided on the substrate, its surface microscopic fluctuating can cause scattering of light, is called surface scattering; Simultaneously, the fluctuating of its inner refractive index also can produce scattering of light, is called the volume scattering of substrate.Owing to need the substrate surface of detection very smooth, surface scattering is very faint, if be attended by the volume scattering of substrate, will cause measurement data can not truly reflect the micromechanism information of substrate surface, even the situation that surface scattering is flooded by volume scattering fully may take place.So for inferior dust level ultra-smooth transparent substrate, how effectively to suppress the influence of volume scattering, independent surface scattering of effectively measuring substrate will be a problem demanding prompt solution.
Summary of the invention
The objective of the invention is: utilize the polarisation of light characteristic to eliminate the transparent substrate volume scattering, independent and efficient is measured the surface scattering of substrate, characterizes the micromechanism of inferior dust level super-smooth surface whereby.
For realizing that the technical solution that the object of the invention adopts is:
A kind of inferior dust level super-smooth surface test macro based on the differential scattering, by light-source system, turret systems, sample platform system, photodetector system, five parts of data acquisition and display system are formed.Utilize the polarization characteristic of scattered light on principle, to eliminate volume scattering fully, from system design, effectively suppress outside noise, guarantee the test macro long-time steady operation, thus the repeated test precision of the system of assurance: (1) full rigid attachment structure; (2) accurate rotational angle control; (3) high efficiency Electro-Optical Sensor Set; (4) accurately controlled and repeated high polarization direction is regulated; (5) data acquisition system (DAS) and data analysis display system efficiently.
Advantage of the present invention is: eliminate the influence of substrate body scattering to the surface scattering test fully on principle, can suppress volume scattering to greatest extent; Adopt the detection front end of double small hole diaphragm as the differential scattering, noises such as inhibition parasitic light are to the influence of detection accuracy; Increasing under the less prerequisite of system cost, improved accuracy of measurement system greatly; Adopt full rigid attachment mounting means, eliminated the test error that the change of instrument relative position brings; System uses independent control, and the mode of cooperative cooperating is simple in structure, cost is low, reliability is high.
Description of drawings
Fig. 1 is the systematic survey principle schematic.
Fig. 2 is a measuring system one-piece construction synoptic diagram.Among the figure: 1. light source; 2,8. aperture; 3. the polarizer; 4. substrate; 5,6. turntable; 7. light absorber; 9. analyzer; 10. Photodetection system; 11. data analysis and display system
Fig. 3 is the turret systems structural representation.Among the figure: the A. optical table; B1, B2. turntable fixed head; C1, the turntable that the C2. structural parameters are identical; D. sample support post; E. measuring system extension board
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
When optical detection was carried out on inferior dust level ultra-smooth transparent substrate surface, the differential scattering power of the surface scattering of substrate and volume scattering can be coupled, thereby the surface scattering data that cause testing can not reflect the microscopic appearance feature of substrate surface fully really.Correlative study shows, is positioned at the situation of plane of incidence for the scattering plane, and surface scattering and volume scattering polarisation of light direction can present certain included angle in the s-p plane, as shown in Figure 1, establish surface scattering light
Polarization direction and p axle clamp angle be
, volume scattering light
The polarization direction and the angle of p axle be
, both is poor.Want to eliminate the influence of volume scattering to surface scattering, select to have High Extinction Ratio polaroid the printing opacity direction with
Vertically, in theory, volume scattering is eliminated fully, and the differential scattering that receive this moment behind polaroid is
In the projection of polaroid printing opacity direction, the differential scattering power that measures is
, be the size of the differential scattering power of surface scattering.So this measuring system has very high feasibility and dirigibility on principle.The structural representation of measuring system as shown in Figure 2, the nonpolarized light that is sent by light source becomes linearly polarized light through behind the polarizer, incide on the substrate with certain angle, by the substrate scattering, the scattered light of this moment had both comprised the also occlusion body scattering of surface scattering of substrate, received by photodetector through after the selection of analyzer, the differential scattering power of the surface scattering of substrate shows the most at last again.The main formula of the effect of aperture is in order to eliminate extraneous parasitic light among Fig. 2; Turntable can be realized high-precision separate running, guarantees the incident angle of light and the variation that scattering angle can be accurate and relatively independent; The polarization direction of polaroid also must be able to independently accurately be controlled, and guarantees that it can select the polarization direction arbitrarily in the s-p plane of polarization.
In order to obtain inferior dust level ultra-smooth transparent substrate surface test system, need finish following work based on the differential scattering:
1. full rigid attachment structure
In inferior dust level ultra-smooth transparent substrate surface test system, all parts all adopt the rigid attachment structure, guarantee that the relative position of various piece keeps invariable, eliminate the influence of these variable factors to scattered light differential scattering power.Do and eliminate the measuring error that Machine Design brings to the limit.
2. separate and high-precision turret systems
As shown in Figure 3, two coaxial stacking of identical high precision turntable of C1, C2, and use step motor control respectively, C1 connects with substrate by sample support post D, can freely change the incident angle of incident light; C2 by with the rigid attachment of the extension board E of measuring system, the reciever that can independently change detector is to, the i.e. scattering angle direction of scattered light.
3. accurate polarization angle control system
Because the polarization direction of the polarizer and analyzer is the most important parts of decision total system precision, so its polarization angle must be fixed by high-precision angle controller (electrical turntable).Polarization angle by the control polarizer and analyzer is selected, and eliminates the volume scattering of substrate, measures the size of its surface scattering.
4. the polarizer of High Extinction Ratio and analyzer
On the principle, have only the polarization direction light consistent with the polarization direction of the polarizer and analyzer could see through the polarizer and analyzer, the measuring system precision of this moment is the highest, and performance is best.In the actual use, polaroid can not be accomplished complete extinction to the light perpendicular to its polarization direction, so select the very high polarizer and the analyzer of extinction ratio in system, can reduce the error of test macro.
5. parasitic light shielding system efficiently
Because the surface scattering of inferior dust level super-smooth surface is about
Magnitude, even if having only very faint parasitic light to enter photodetector, the surface scattering meeting of substrate is submerged in the noise, causes effectively measuring the size of surface scattering.The topmost effect of aperture among Fig. 2 is exactly to eliminate parasitic light, and on the other hand, whole measuring system need be placed on the darkroom or add in the environment of light cage.
6. the coaxial running of high stability
The present invention is based on the first approximation theory of differential scattering, on principle, its alignment must reach following aspect: (1) scattering plane must be positioned at the plane of incidence; (2) super-smooth surface must be vertical with the scattering plane; (3) propagation of scattered light must be in scattering surface.Based on above-mentioned requirements, the present invention must have very high alignment in operation process, must accomplish in Fig. 2: the relay plane of (1) whole optical path is parallel with optical table; (2) polarizer and analyzer must be positioned at the s-p plane; (3) two concentric turntables and sample support post must coaxial placements, and its rotational plane is parallel to optical table; (4) surface of transparent substrate must overlap placement with the axis of turntable; (5) turntable must rotate around its axis in rotation process.More than the alignment of 5 aspects must be stable in the process of measuring system operation, big departing from can not take place.
Claims (6)
1. inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering is characterized in that the micromechanism information of high precision, stable test super-smooth surface.Realize by following steps:
(1) full rigid attachment structure.
In inferior dust level ultra-smooth transparent substrate surface measurement system, all parts all adopt the rigid attachment structure, guarantee that the relative position of various piece keeps invariable, eliminate the influence of these variable factors to the scattering of scattered light differential.
(2) separate and high-precision turret systems.
Turret systems is accomplished respectively independent control, may be selected in that incident angle and scattering angle direction are measured the differential scattering power of ultra-smooth substrate surface arbitrarily.
(3) accurate polarization angle control system.
Polarization angle by the control polarizer and analyzer is selected, and eliminates the volume scattering of substrate, measures the size of its surface scattering.The selection of polarization angle must be accomplished high precision, change continuously, can measure its differential scattering power at any polarization angle.
(4) the coaxial running of high stability.
Measuring system will be accomplished in operational process: the relay plane of (1) whole optical path is parallel with optical table; (2) polarizer and analyzer must be positioned at the s-p plane; (3) two concentric turntables and sample support post must coaxial placements, and its rotational plane is parallel to optical table; (4) substrate surface must overlap with the axis of turntable; (5) turntable must rotate around its axis in rotation process.
2. the inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering as claimed in claim 1, it is characterized in that using single order differential scattering theory, on principle, eliminate the influence of transparent substrate volume scattering fully, independently test the substrate surface scattering effectively surface scattering.
3. the inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering as claimed in claim 1 is characterized in that turntable, analyzer, Photodetection system are full rigid attachment mode with respect to turret systems.
4. the inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering as claimed in claim 1 is characterized in that can carry out the differential scattering to the super-smooth surface substrate in different incident angles and scattering angle direction detects.
5. the inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering as claimed in claim 1 is characterized in that two identical turntables stack with axle horizontal, and turntable adopts the independence and freedom drive manner, can carry out multi-angle, large-range measuring.
6. the inferior dust level ultra-smooth transparent substrate surface measurement system based on the differential scattering as claimed in claim 1 is characterized in that specimen connects firmly by sample support post and turntable are coaxial, has avoided using the sample adjutage and the problem that causes the easy overturning of system.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108152294A (en) * | 2017-12-26 | 2018-06-12 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of ultra-smooth eyeglass flaw inspection devices and methods therefor |
| CN110489851A (en) * | 2019-08-14 | 2019-11-22 | 上海卫星工程研究所 | Optics payload external stray light suppressing method based on ray tracing theory |
| CN114136979A (en) * | 2021-11-26 | 2022-03-04 | 天津津航技术物理研究所 | Device and method for detecting micro-defects on surface of bulk scattering optical material |
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| US20030025905A1 (en) * | 2001-03-26 | 2003-02-06 | Meeks Steven W. | Method of detecting and classifying scratches, particles and pits on thin film disks or wafers |
| JP2008281399A (en) * | 2007-05-09 | 2008-11-20 | Konica Minolta Sensing Inc | Three-dimensional measuring device and portable measuring device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20030025905A1 (en) * | 2001-03-26 | 2003-02-06 | Meeks Steven W. | Method of detecting and classifying scratches, particles and pits on thin film disks or wafers |
| JP2008281399A (en) * | 2007-05-09 | 2008-11-20 | Konica Minolta Sensing Inc | Three-dimensional measuring device and portable measuring device |
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| 陈天明等: "超光滑表面的微分散射测量", 《光学及光电仪器》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108152294A (en) * | 2017-12-26 | 2018-06-12 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of ultra-smooth eyeglass flaw inspection devices and methods therefor |
| CN110489851A (en) * | 2019-08-14 | 2019-11-22 | 上海卫星工程研究所 | Optics payload external stray light suppressing method based on ray tracing theory |
| CN110489851B (en) * | 2019-08-14 | 2023-08-08 | 上海卫星工程研究所 | Optical effective load external stray light inhibition method based on ray tracing theory |
| CN114136979A (en) * | 2021-11-26 | 2022-03-04 | 天津津航技术物理研究所 | Device and method for detecting micro-defects on surface of bulk scattering optical material |
| CN114136979B (en) * | 2021-11-26 | 2023-12-19 | 天津津航技术物理研究所 | Device and method for detecting micro defects on surface of bulk scattering optical material |
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Application publication date: 20111123 |