CN105626806A - Z-shaft transmission structure - Google Patents
Z-shaft transmission structure Download PDFInfo
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- CN105626806A CN105626806A CN201410605075.2A CN201410605075A CN105626806A CN 105626806 A CN105626806 A CN 105626806A CN 201410605075 A CN201410605075 A CN 201410605075A CN 105626806 A CN105626806 A CN 105626806A
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Abstract
The invention relates to a Z-shaft transmission structure. According to the Z-shaft transmission structure, stand columns are replaced with a triangular supporting sliding sleeve (6) and a triangular LF type linear ball spline shaft/linear ball lining assembly (3), and the triangular supporting sliding sleeve (6) and the triangular LF type linear ball spline shaft/linear ball lining assembly (3) serve as a main body supporting structure. Due to the facts that the transmission accuracy of the LF type linear ball spline shaft/linear ball lining assembly (3) is quite high, and the LF type linear ball spline shaft/linear ball lining assembly (3) is uniformly installed and distributed within a 120-degree circumference, so that the weight of a T-shaft mechanism and an R-shaft mechanism is uniformly borne by the triangular supporting sliding sleeve (6), extra turning torque caused by nonuniform stressing is avoided, the stressing state is greatly improved, and the Z-shaft transmission structure is more reasonable.
Description
Technical field
The present invention relates in semi-conductor silicon chip transferring robot manufacture field, a kind of with column Z-axis transmission structure compared with, have higher transmission accuracy, driven load at circumference uniform distribution, lightweight, volume is little, saves space-efficient triangle supporting Z-axis transmission structure.
Background technology
In the Z-axis transmission structure of wafer-handling robot, domestic it is used mostly column Z-axis transmission structure, namely uses spherical guide as the motion benchmark of Z-axis transmission, spherical guide is arranged on the datum level of column. But this drive mechanism also exists following shortcoming: one is that structural stress state is bad. Owing to the total weight of T axle Yu R axle all passes to spherical guide by T axle support slipper with the form of cantilever beam, spherical guide is outside the gravity normally born, also additionally bear very big turning torque, spherical guide is made to produce bigger microdeformation, light then motion-affecting motility, heavy then shorten service life of spherical guide. Two be due between installed surface and the lateral register face of spherical guide, the installing between locating surface up and down, all there is the shaped position tolerance of complexity between spherical guide installed surface and the reference for installation of ball-screw of column, therefore column processing technique is complicated, yield rate is relatively low, and processing cost is high. Three is that all at tens kilograms, face is arranged on the direction, side in cabinet, inevitably causes crank owing to the weight of column is general, easily makes main frame produce to topple. Four is owing between installed surface up and down and the upper lower installation board of main frame of column, contact area is very big so that it is not easily adjusts when assembling, wastes time and energy.
Summary of the invention
It is an object of the invention to provide a kind of rational in infrastructure, have higher transmission accuracy, driven load at circumference uniform distribution, lightweight, volume is little, joint space-efficient triangle supporting Z-axis transmission structure.
The goal of the invention of the present invention is achieved in that a kind of Z-axis transmission structure, including lower mounting seat l, Z axis combination of drive means 2, LF type straight-line ball splined shaft/straight-line ball bushing combination 3, flexible coupling 4, ball-screw 5, gusseted sliding sleeve 6, ball screw assembly 7, T axis mechanism combination 8, upper installation lid 9 etc. Described high accuracy, equal load the feature of Z-axis transmission structure be: use gusseted sliding sleeve 6 and three set LF type straight-line ball splined shaft/straight-line ball bushing combination 3 to substitute column. Owing to LF type straight-line ball splined shaft/straight-line ball bushing combination 3 has significantly high transmission accuracy, and it is uniform in 120 �� installing in circumference, therefore gusseted sliding sleeve 6 is made only to bear the weight of T axle and R axis mechanism equably, without producing extra turning torque because of unbalance stress, improve stress greatly, make Z-axis transmission structure more reasonable.
3 LF type straight-line ball splined shafts 3 are arranged in the installing hole of lower mounting seat l, and are screwed in the screw of spline axle head with trip bolt fasten through the counter sink of lower mounting seat l.
3 LF type straight-line ball bushing combination 3 are loaded in the installing hole of gusseted sliding sleeve 6, and tighten with trip bolt and put in place. Again ball screw assembly 7 is loaded in the mating holes of gusseted sliding sleeve 6, tighten fastening with trip bolt. Finally ball-screw 5 is screwed in ball screw assembly 7 stand-by.
Z axis combination of drive means 2 is arranged on the relevant position of lower mounting seat l, and couples fastening by the counterbore of lower mounting seat l with Z axis combination of drive means 2 with trip bolt. Then at the outfan of Z axis combination of drive means 2, flexible coupling 4 is installed.
Will be equipped with the gusseted sliding bush combination 6 of 3 LF type straight-line ball bushing combination 3 and ball screw assembly 7, ball-screw 5 and be contained on 3 LF type straight-line ball splined shafts 3, and the lower end of ball-screw 5 is loaded in the hole of flexible coupling 4, tighten fastening with holding screw.
After 3 LF type straight-line ball splined shaft 3 upper end positioning cylinders are aligned with the upper hole, location installing lid 9, with trip bolt by the upper counterbore installed on lid 9, fastening in being screwed on LF type straight-line ball splined shaft 3 screw of axle head. Then T axis mechanism combination 8 is installed. As needed to adjust, unclamp trip bolt, be encased inside certain thickness pad to corresponding spline axle head, then after trip bolt is tightened.
If now the motor shaft of Z axis combination of drive means 2 rotates, moment drives ball-screw 5 to rotate by shaft coupling 4, drives ball screw assembly 7 to make upper and lower rectilinear motion. Ball screw 5 drives straight-line ball lining for linear motion along LF type straight-line ball splined shaft 3 by gusseted sliding sleeve 6.
Accompanying drawing explanation
Figure l is the axonometric chart of the Z-axis transmission structure of a kind of high accuracy of the present invention, equal load.
In figure: 1, lower mounting seat, 2, Z axis combination of drive means, 3, LF type straight-line ball splined shaft/straight-line ball bushing combination, 4, flexible coupling, 5, ball-screw, 6, gusseted sliding sleeve, 7, ball screw assembly, 8, the combination of T axis mechanism, 9, upper installation lid etc.
Detailed description of the invention
Shown in figure l, a kind of high accuracy, equal load Z-axis transmission structure include lower mounting seat l, Z axis combination of drive means 2, LF type straight-line ball splined shaft/straight-line ball bushing combination, 3, flexible coupling 4, ball-screw 5, gusseted sliding sleeve 6, ball screw assembly 7, T axis mechanism combination 8, upper lid 9 etc. is installed.
A kind of high accuracy, equal load the feature of Z-axis transmission structure be: use gusseted sliding sleeve 6 and three set LF type straight-line ball splined shaft/straight-line ball bushing combination 3 to substitute column. Owing to LF type straight-line ball splined shaft/straight-line ball bushing combination 3 has significantly high transmission accuracy, and it is uniform in 120 �� installing in circumference, therefore gusseted sliding sleeve 6 is made only to bear the weight of T axle and R axis mechanism equably, without producing extra turning torque because of unbalance stress, improve stress greatly, make Z-axis transmission structure more reasonable.
3 LF type straight-line ball splined shafts 3 are arranged in the installing hole of lower mounting seat l, and are screwed in the screw of spline axle head with trip bolt fasten through the counter sink of lower mounting seat l; 3 LF type straight-line ball bushing combination 3 are loaded in the installing hole of gusseted sliding sleeve 6, and tighten with trip bolt and put in place. Again ball screw assembly 7 is loaded in the mating holes of gusseted sliding sleeve 6, fasten with trip bolt. Finally ball-screw 5 is screwed in ball screw assembly 7 stand-by; Z axis combination of drive means 2 is arranged on the relevant position of lower mounting seat l, and is fastened by the counterbore of lower mounting seat l and Z axis combination of drive means 2 with trip bolt. Then at the outfan of Z axis driving device 2, flexible coupling 4 is installed. Will be equipped with gusseted sliding sleeve 6 combination of 3 LF type straight-line ball bushing combination 3 and ball screw 7, ball-screw 5 to be contained on 3 LF type straight-line ball splined shafts 3, and the lower end of ball-screw 5 is loaded in the hole of flexible coupling 4, fasten with holding screw. After 3 LF type straight-line ball splined shaft 3 upper end positioning cylinders are aligned with the upper hole, location installing lid 9, with trip bolt by the upper counterbore installed on lid 9, fastening in being screwed on LF type straight-line ball splined shaft 3 screw of axle head. Then T axis mechanism combination 8 is installed. As needed to adjust, unclamp trip bolt, be encased inside certain thickness pad to corresponding spline axle head, then after trip bolt is tightened.
If now the motor shaft of Z axis combination of drive means 2 rotates, moment drives ball-screw 5 to rotate by shaft coupling 4, drives ball screw group 7 to make upper and lower rectilinear motion. Ball screw 7 drives straight-line ball lining 3 for linear motion along LF type straight-line ball splined shaft 3 by gusseted sliding sleeve 6.
Claims (1)
1. a Z-axis transmission structure, covers (9) including lower mounting seat (1), Z axis combination of drive means (2), LF type straight-line ball splined shaft/straight-line ball bushing combination (3), flexible coupling (4), ball-screw (5), gusseted sliding sleeve (6), ball screw assembly (7), T axis mechanism combination (8), upper installation; It is characterized in that: described rotational structure uses gusseted sliding sleeve (6) and three set LF type straight-line ball splined shaft/straight-line ball bushing combination (3) as main body supporting structure; Described LF type straight-line ball splined shaft/straight-line ball bushing combination (3) is circumferentially uniform in 120 �� in installation; Described 3 LF type straight-line ball splined shaft (3) are arranged in the installing hole of lower mounting seat (1), and are screwed in the screw of spline axle head with trip bolt fasten through the counter sink of lower mounting seat (1); Described 3 LF type straight-line ball bushing combination (3) load in the installing hole of gusseted sliding sleeve (6), and tighten with trip bolt and put in place; Described ball screw assembly (7) loads in the mating holes of gusseted sliding sleeve (6), fastens with trip bolt; Described ball-screw (5) screws in ball screw assembly (7); Described Z axis combination of drive means (2) is arranged on the relevant position of lower mounting seat (1), and with trip bolt by the counterbore of lower mounting seat (1) and Z axis combination of drive means (2) fastening; The outfan of described Z axis driving device (2), installs flexible coupling (4); Gusseted sliding sleeve (6) combination of described 3 LF type straight-line ball bushing combination (3) and ball screw (7), ball-screw (5) is contained on 3 LF type straight-line ball splined shaft (3), and the lower end of ball-screw (5) is loaded in the hole of flexible coupling (4), fasten with holding screw; After described 3 LF type straight-line ball splined shaft (3) upper end positioning cylinders align with the upper hole, location installing lid (9), with trip bolt by the upper counterbore installed on lid (9), it is screwed into fastening in the screw of the upper axle head of LF type straight-line ball splined shaft (3); Have last
Z-axis transmission structure according to claim l, it is characterized in that: LF type straight-line ball splined shaft (3) the location and installation hole of lower mounting seat (1), upper installation lid (9) LF type straight-line ball splined shaft (3) location and installation hole, and 3 mating holes of gusseted sliding sleeve (6), it is arranged on same positioning fixture and carries out same work step polish.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410605075.2A CN105626806A (en) | 2014-11-03 | 2014-11-03 | Z-shaft transmission structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410605075.2A CN105626806A (en) | 2014-11-03 | 2014-11-03 | Z-shaft transmission structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105626806A true CN105626806A (en) | 2016-06-01 |
Family
ID=56042015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410605075.2A Pending CN105626806A (en) | 2014-11-03 | 2014-11-03 | Z-shaft transmission structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105626806A (en) |
-
2014
- 2014-11-03 CN CN201410605075.2A patent/CN105626806A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160601 |
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| WD01 | Invention patent application deemed withdrawn after publication |