CN102161179B - 晶片研磨装置 - Google Patents
晶片研磨装置 Download PDFInfo
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- CN102161179B CN102161179B CN201010614088.8A CN201010614088A CN102161179B CN 102161179 B CN102161179 B CN 102161179B CN 201010614088 A CN201010614088 A CN 201010614088A CN 102161179 B CN102161179 B CN 102161179B
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- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
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CN201010614088.8A CN102161179B (zh) | 2010-12-30 | 2010-12-30 | 晶片研磨装置 |
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CN201010614088.8A CN102161179B (zh) | 2010-12-30 | 2010-12-30 | 晶片研磨装置 |
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CN102161179A CN102161179A (zh) | 2011-08-24 |
CN102161179B true CN102161179B (zh) | 2014-03-26 |
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CN201010614088.8A Active CN102161179B (zh) | 2010-12-30 | 2010-12-30 | 晶片研磨装置 |
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102950523A (zh) * | 2011-08-30 | 2013-03-06 | 浚鑫科技股份有限公司 | 一种硅片打磨装置 |
CN102909650B (zh) * | 2012-11-01 | 2015-04-08 | 成都精密光学工程研究中心 | 板条激光介质的表面加工方法 |
CN106272010B (zh) * | 2015-05-25 | 2019-03-08 | 蓝思科技股份有限公司 | 一种蓝宝石镜面基片内凹平台面的研磨抛光方法 |
CN105014526B (zh) * | 2015-07-27 | 2018-01-05 | 尚德太阳能电力有限公司 | 丝网印刷刮条的自动打磨机及自动打磨方法 |
CN106826406B (zh) * | 2016-12-27 | 2019-06-14 | 重庆晶宇光电科技有限公司 | 晶片加工方法 |
CN106826491B (zh) * | 2016-12-27 | 2018-09-21 | 重庆晶宇光电科技有限公司 | 用于晶片研磨的加工设备 |
CN106826537B (zh) * | 2016-12-28 | 2019-03-15 | 重庆晶宇光电科技有限公司 | 具有吸尘功能的晶片研磨设备 |
CN108177040A (zh) * | 2017-11-24 | 2018-06-19 | 苏州中拓专利运营管理有限公司 | 一种补强片去毛刺工艺 |
CN108544364A (zh) * | 2018-05-24 | 2018-09-18 | 镇江金莱宝光电有限公司 | 一种蓝宝石的立体方位式研磨装置 |
CN110561264B (zh) * | 2019-10-10 | 2020-08-25 | 温州冲亚电子科技有限公司 | 一种半导体元器件用晶棒外径研磨设备 |
CN111390750B (zh) * | 2020-03-25 | 2021-09-03 | 福建北电新材料科技有限公司 | 晶片面型加工装置 |
CN112757152A (zh) * | 2020-12-31 | 2021-05-07 | 福建省将乐县长兴电子有限公司 | 一种晶片研磨装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU607655A2 (ru) * | 1975-12-08 | 1978-05-25 | Всесоюзный заочный машиностроительный институт | Устройство дл получени криволинейных траекторий |
US5762544A (en) * | 1995-10-27 | 1998-06-09 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
JPH1199470A (ja) * | 1997-07-17 | 1999-04-13 | Canon Inc | 研磨装置 |
JP2003326456A (ja) * | 2002-05-08 | 2003-11-18 | Disco Abrasive Syst Ltd | 研磨装置 |
JP2005254416A (ja) * | 2004-03-15 | 2005-09-22 | Okamoto Machine Tool Works Ltd | 角形ワ−クの研磨方法 |
CN1938122A (zh) * | 2004-03-25 | 2007-03-28 | 揖斐电株式会社 | 真空卡盘和吸附板 |
CN201989044U (zh) * | 2010-12-30 | 2011-09-28 | 青岛嘉星晶电科技股份有限公司 | 晶片研磨装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3649393B2 (ja) * | 2000-09-28 | 2005-05-18 | シャープ株式会社 | シリコンウエハの加工方法、シリコンウエハおよびシリコンブロック |
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2010
- 2010-12-30 CN CN201010614088.8A patent/CN102161179B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU607655A2 (ru) * | 1975-12-08 | 1978-05-25 | Всесоюзный заочный машиностроительный институт | Устройство дл получени криволинейных траекторий |
US5762544A (en) * | 1995-10-27 | 1998-06-09 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
JPH1199470A (ja) * | 1997-07-17 | 1999-04-13 | Canon Inc | 研磨装置 |
JP2003326456A (ja) * | 2002-05-08 | 2003-11-18 | Disco Abrasive Syst Ltd | 研磨装置 |
JP2005254416A (ja) * | 2004-03-15 | 2005-09-22 | Okamoto Machine Tool Works Ltd | 角形ワ−クの研磨方法 |
CN1938122A (zh) * | 2004-03-25 | 2007-03-28 | 揖斐电株式会社 | 真空卡盘和吸附板 |
CN201989044U (zh) * | 2010-12-30 | 2011-09-28 | 青岛嘉星晶电科技股份有限公司 | 晶片研磨装置 |
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CN102161179A (zh) | 2011-08-24 |
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Effective date of registration: 20170623 Address after: 266114 Hedong Road, hi tech Zone, Shandong, Qingdao Patentee after: QINGDAO XINJIAXING ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 266114, high tech Industrial Development Zone, Mount 1, Ao Road, Chengyang District, Qingdao, Shandong Patentee before: QINGDAO ISTARWAFER TECHNOLOGY Co.,Ltd. |
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Address after: 266114 Hedong Road North, Gaoxin District, Qingdao, Shandong Province Patentee after: Qingdao Xinjiaxing Electronic Technology Co.,Ltd. Address before: 266114 Hedong Road North, Gaoxin District, Qingdao, Shandong Province Patentee before: QINGDAO XINJIAXING ELECTRONIC TECHNOLOGY Co.,Ltd. Address after: 266114 Hedong Road North, Gaoxin District, Qingdao, Shandong Province Patentee after: Qingdao huaxinjingdian Technology Co.,Ltd. Address before: 266114 Hedong Road North, Gaoxin District, Qingdao, Shandong Province Patentee before: Qingdao Xinjiaxing Electronic Technology Co.,Ltd. |