CN102158123B - Drive device and driving method thereof, and optical device - Google Patents
Drive device and driving method thereof, and optical device Download PDFInfo
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- CN102158123B CN102158123B CN201010625062.3A CN201010625062A CN102158123B CN 102158123 B CN102158123 B CN 102158123B CN 201010625062 A CN201010625062 A CN 201010625062A CN 102158123 B CN102158123 B CN 102158123B
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- 238000000034 method Methods 0.000 title claims abstract description 24
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- 239000000463 material Substances 0.000 description 6
- 239000007767 bonding agent Substances 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
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- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
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Abstract
The invention provides a drive device and the driving method thereof, and an optical device. The drive device comprises a piezoelectric component, a driving shaft, a driven component in friction clamp connection with the driving shaft, and a control part applying driving signals on the piezoelectric component. When moving a part to be moved, the control part applies a common driving signal on the piezoelectric component. At the same time, a mute control driving signal is applied on the piezoelectric component (1). The mute control driving signal gradually changes the counterclockwise charging and timing driving signal of the common driving signal, when the part to be moved does not move towards the opposite direction of the normal driving direction of the common driving signal. The mute control driving signal is applied during a specified period before the common driving signal is applied and after the common driving signal is applied.
Description
Technical field
The present invention relates to and utilize inertia and frictional force move the drive unit of driven member and drived control method thereof along the driving shaft in expanding-contracting action and utilize the Optical devices of above-mentioned drive unit mobile optical element.
Background technology
Known following drive unit: it comprises and carries out by drive pulse signal (drive singal) piezoelectric element (electromechanical conversion element) that stretches, the translational speed (such as, Japan Patent No. 3358418 publication) of driven member can be controlled.This drive unit, when driving beginning, little by little increases the pulse duration (duty ratio) of drive pulse signal, thus little by little increases actuating speed.When driving stopping, little by little reducing pulse duration, thus little by little reducing actuating speed.In addition, in Japan Patent No. 3358418 publication, also record following control, little by little increase the voltage of drive pulse signal when driving and starting, thus little by little improve actuating speed, and little by little reduce voltage when driving and stopping, thus little by little reduce actuating speed.
But, in the drive unit that Japan Patent No. 3358418 publication is recorded, in order to reduce the motion and sound of drive unit, little by little changing the pulse duration of drive pulse signal or applying voltage.Thus, the making of drive pulse signal is very complicated.In addition, because piezoelectric element carries out discharge and recharge by drive pulse signal, therefore when the electrostatic capacitance of piezoelectric element changes with variations in temperature or because of individual difference electrostatic capacitance there is deviation time, reduce the control of motion and sound and will become instability.
Summary of the invention
Main purpose of the present invention is to provide the drive unit and drived control method thereof and Optical devices that reduce by simple control realization motion and sound.
Even if another object of the present invention is to provide electrostatic capacitance to occur change or there is the drive unit and drived control method thereof and Optical devices that reduction that deviation still carries out motion and sound controls Absorbable organic halogens.
To achieve these goals, in the present invention, in order to make the driving shaft of electromechanical conversion element stretch vertically, thus the driven member stepping being embedded in driving shaft is moved, the 1st drive singal and the 2nd drive singal are supplied to electromechanical conversion element.Above-mentioned 1st drive singal is used for driven member stepping together with driving shaft is moved, and is timed to the interval, different with being timed to next positive charge interval regularly from this reverse charging of reverse charging timing in above-mentioned 1st drive singal from the positive charge of electromechanical conversion element.Above-mentioned 2nd drive singal for driven member is stopped state under only make driving shaft move, during at least one in the specified time limit before the applying of above-mentioned 1st drive singal and after applying, change the reverse charging timing in the 1st drive singal gradually.
Owing to little by little changing reverse charging timing in the scope that driven member is not moved, therefore such as can control the translational speed of driven member, make it become gradually and diminish greatly or gradually.Thus, before mobile driven member by the 1st drive singal, after end movement, the frictional engagement between driving shaft and driven member can be weakened, therefore, the driven member in stopping can being made to move smoothly, or the driven member in movement is stopped smoothly.That is, the stepping of driven member is moved and is become level and smooth, and motion and sound reduces.
Like this, not controlling pulse duration and the voltage of drive singal, by only controlling this simple control of reverse charging timing in the 1st drive singal, the reduction of motion and sound can be realized.In addition, owing to not controlling pulse duration and the voltage of drive singal, therefore same with the 1st drive singal, also can be charged fully to electromechanical conversion element by the 2nd drive singal, like this, even if when electrostatic capacitance change because of variations in temperature or individual difference electromechanical conversion element, still carry out the reduction of motion and sound Absorbable organic halogens.
Preferred above-mentioned electromechanical conversion element is piezoelectric element.In addition, preferably adopt as lower component makes driven member and driving shaft friction apply, these parts comprise: the breach of V-shaped, are formed at above-mentioned driven member; 1st sliding panel, is fixed in above-mentioned breach, forms V-shaped in the mode of 2 location contacts with above-mentioned driving shaft; 2nd sliding panel, is positioned at the opposition side of above-mentioned 1st sliding panel, forms V-shaped in the mode of 2 location contacts with above-mentioned driving shaft; Leaf spring with in L-shaped, is fixed on above-mentioned driven member, above-mentioned 2nd sliding panel is pressed to above-mentioned driving shaft.
When preferably applying above-mentioned 2nd drive singal when between above-mentioned beginning in earlier stage, change the above-mentioned reverse charging timing in above-mentioned 2nd drive singal, make along with close to the end between above-mentioned beginning early stage, the above-mentioned reverse charging timing in above-mentioned 2nd drive singal diminishes with the difference of the above-mentioned reverse charging timing in above-mentioned 1st drive singal.By such formation, before being started by the 1st drive singal driven member to move, the frictional engagement between driving shaft and driven member can be weakened.This can make the driven member in stopping move smoothly, can, in the switching timing of the 1st drive singal and the 2nd drive singal, make the action of driven member level and smooth in addition.
In addition, preferred above-mentioned driving signal control circuit applies above-mentioned 2nd drive singal when between the above-mentioned end later stage, change the above-mentioned reverse charging timing in above-mentioned 2nd drive singal, make along with close to the end between the above-mentioned end later stage, the difference of the above-mentioned reverse charging timing in above-mentioned 2nd drive singal and the above-mentioned reverse charging timing in above-mentioned 1st drive singal becomes large.By such formation, after being terminated by the 1st drive singal driven member to move, the frictional engagement between driving shaft and driven member can be weakened.Thus, the motion that driven member can be made level and smooth and stopping.
The the above-mentioned 1st and the 2nd drive singal is exported from driving signal control circuit.This driving signal control circuit is made up of such as lower component, respectively: CPU, exports the set point being used to specify the waveform of the above-mentioned 1st and the 2nd drive singal; Register memory, preserves above-mentioned set point; Logical circuit, based on the set point in above-mentioned register memory, exports control signal; And drive circuit, voltage amplification or Current amplifier are carried out to the above-mentioned control signal from above-mentioned logical circuit, exports as the above-mentioned 1st and the 2nd drive singal.
In addition, Optical devices of the present invention are built-in with drive unit, and optical element and this driven member link.Above-mentioned optical element along optical axis direction or with this optical axis direction perpendicular direction move.
According to the present invention, by simply controlling the reduction that can realize motion and sound, and Absorbable organic halogens ground carries out the reduction of motion and sound.
Accompanying drawing explanation
Fig. 1 is the skeleton diagram of the camera head that form of implementation of the present invention relates to.
Fig. 2 is the skeleton diagram of the lens driver that actuator is shown with section.
Fig. 3 is the profile of the driven member along the III-III in Fig. 2.
Fig. 4 is the block diagram of driver.
Fig. 5 is the oscillogram of the drive singal representing piezoelectric element.
Fig. 6 represents the setting example of register and the table of wave setting example.
Fig. 7 is the oscillogram representing drive singal and element current.
Fig. 8 is the oscillogram representing drive singal.
Fig. 9 is the flow chart representing the step that lens drive.
The table of the setting example of register when Figure 10 is the pulse duration representing change drive singal.
Figure 11 is the block diagram of the driver of the voltage changing drive singal.
Figure 12 is the oscillogram representing drive singal and the element current exported from the driver shown in Figure 11.
Figure 13 is the drive singal of indicating impulse width change and the oscillogram of element current.
Figure 14 is the temperature dependent curve chart representing electrostatic capacitance.
Figure 15 represents the oscillogram along with element current during variations in temperature electrostatic capacitance change.
Figure 16 represents the oscillogram because of element current during individual difference electrostatic capacitance change.
Embodiment
In FIG, camera head such as digital camera comprises: zoom lens assemblies portion 16, imaging apparatus 82 and control part 81.Zoom lens assemblies portion 16 comprises: fixed lens 105, prism 104, mobile lens (optical element) 90,102 and fixed lens 101, adopts the bending optical system that optical axis O is at right angles bent.In addition, control part 81 carries out the control of camera head entirety, such as, comprise CPU (Central Processing Unit) 62, ISP (Image Signal Processing) 60, element driving circuit 61, EEPROM (Electrically Erasable PROM) 64 and driver 65.
Mobile lens 90,102 is connected to zoom actuator 10, auto-focusing (AF) actuator 15.Carrying out driving by each actuator 10,15 makes mobile lens 90,102 move along optical axis O, realizes zoom function and automatic focusing function.The control via driver 65, each actuator 10,15 driven by CPU62.
Imaging apparatus 82 is arranged on optical axis O, and the image of the photographic optical system imaging by zoom lens assemblies portion 16 is converted to the signal of telecommunication.Imaging apparatus 82 is such as made up of CCD (Charge Coupled Device image sensor), and is connected with ISP60.
The picture being incident to the subject 106 in zoom lens assemblies portion 16, via fixed lens 105, prism 104 and bending, arrives imaging apparatus 82 via mobile lens 90, mobile lens 102, fixed lens 101, becomes picture signal.This picture signal carries out signal transacting by ISP60 and CPU62.
Here, the lens position of mobile lens 90,102 is detected by the position detecting element 83,84 be equipped with in zoom lens assemblies portion 16.These position detecting elements 83,84 are connected with element driving circuit 61, carry out drived control by element driving circuit 61.The luminous intensity that each position detecting element 83,84 detects forms output signal via element driving circuit 61, and the A/D converter section 63 had by CPU62 carries out A/D conversion.
CPU62 and driver 65, according to the output signal after A/D conversion and the information etc. that is stored in EEPROM64, carry out the drived control of each actuator 10,15 in a feedback manner.In addition, such as store in EEPROM64 for adjustment time mensuration and obtain zoom position, AF position output signal.
In this form of implementation, drive unit is made up of the control circuit of actuator, control actuator.This control circuit by CPU62, driver (being equivalent to driving signal control circuit) 65, position detecting element 83,84, element driving circuit 61 etc. forms.
Because the actuator 10,15 of mobile lens 90,102 is identical structure, therefore with actuator 15 for typical example is described.For the actuator 15 in Fig. 2, in fixed mount 4, be accommodated with vibrating body piezoelectric element 1, driving shaft 2, hammer 6 one connected, along with the telescopic propeller shaft 2 of piezoelectric element 1 moves back and forth (vibration vertically).By moving back and forth of this driving shaft 2, utilize inertia and friction that driven member 3 is moved along driving shaft 2, driven member 3 is embedded on driving shaft 2 with appropriate frictional force.
Piezoelectric element 1 is the electromechanical conversion element extending by drive singal to prescribed direction and shrink.This piezoelectric element 1 is connected with driver 65, inputs the drive singal from this driver 65.Specifically, piezoelectric element 1 comprises 2 input terminals 11a, 11b.By pulse signal is supplied to this input terminal 11a, 11b as drive singal, piezoelectric element 1 carries out extending and shrinking repeatedly.In addition, as long as can stretch according to drive singal, the parts beyond piezoelectric element also can be adopted as electromechanical conversion element, the material such as formed by electroconductive polymer or marmem etc.
For driving shaft 2, piezoelectric element 1 is fixed on via such as bonding agent 21 in one end of driving shaft 2, makes it axially consistent with the telescopic direction along piezoelectric element 1.This driving shaft 2 is parts of strip, such as columned parts.Driving shaft 2 is supported in axially displaceable mode by the separating part 4b extended to the inside from fixed mount 4, separating part 4c.In addition, these separating parts 4b, separating part 4c also limit the moving area of driver part 3.
The material of driving shaft 2 is applicable to the parts adopting light high rigidity.In addition, the shape of driving shaft 2 is not limited to cylindric, also can be prism-shaped.
The through hole 4a making driving shaft 2 through is formed respectively at separating part 4b, separating part 4c.The cardinal extremity position at the neighbouring position of the mounting portion of the piezoelectric element 1 of separating part 4b supporting driving shaft 2, i.e. driving shaft 2.The position, front end of separating part 4c supporting driving shaft 2.
In addition, Fig. 2 represents by separating part 4b, 4c situation at 2 position supporting driving shafts 2 of its front and base end side, but also has the situation of one of them the position supporting driving shaft 2 at its front or base end side.Such as, by the through hole 4a of separating part 4b being formed larger than the external diameter of driving shaft 2, by separating part 4c only at position, front end supporting driving shaft 2.In addition, also the through hole 4a of separating part 4c can be formed larger than the external diameter of driving shaft 2, by separating part 4b only at cardinal extremity position supporting driving shaft 2.
In addition, represent separating part 4b, 4c and the fixed mount 4 shape all-in-one-piece situation of supporting driving shaft 2 in Fig. 2, but these separating parts 4b, 4c also can be the parts independent of fixed mount 4, are installed in fixed mount 4.
Driven member 3 is connected with driving shaft 2 with the friction of appropriateness, can move along the long side direction of driving shaft 2.Such as, when installing driven member 3, make it crimp with driving shaft 2 by leaf spring 7, thus engage with this driving shaft 2 with the coefficient of friction of regulation, make to press on driving shaft 2 with certain pressing force, produce certain frictional force when it moves.Move driving shaft 2 in the mode exceeding this frictional force, thus because inertia driven member 3 maintains its position, driving shaft 2 moves relative to this driven member 3.
Support component 5 its telescopic direction relative supports from side and installs piezoelectric element 1, is arranged between piezoelectric element 1 and fixed mount 4.In this situation, preferably support piezoelectric element 1 by support component 5 from the direction perpendicular with its telescopic direction.Like this, piezoelectric element 1 keeps from the direction supported member 5 perpendicular with telescopic direction, and the front end of driving shaft 2 and the rear end of piezoelectric element 1 are freely.Therefore, formation is difficult to the flexible vibration passing caused of piezoelectric element 1 to the structure of fixed mount 4 side.So, the drive singal of piezoelectric element 1 can be set explicitly with the resonance frequency of the combination of driving shaft 2 and piezoelectric element 1.
Support component 5 is formed by having above flexible elastomer such as the silicone resin of regulation.For support component 5, centre forms the jack 5a that piezoelectric element 1 is passed wherein, under the state that piezoelectric element 1 is passed this jack 5a, be installed on fixed mount 4.Support component 5 relatively the affixed of fixed mount 4 is undertaken by the bonding of bonding agent 22.In addition, affixed between support component 5 and piezoelectric element 1 is also undertaken by the bonding of bonding agent.By being made up of this support component 5 elastomer, piezoelectric element 1 can be supported movably in its telescopic direction.In addition, support component 5 can form ring-type or prism-shaped according to the shape of fixed mount 4.
For the affixed of support component 5 pairs of fixed mounts 4 and affixed to piezoelectric element 1, also can be pressed into support component 5 between fixed mount 4 and piezoelectric element 1, be undertaken affixed by the pressing of support component 5.Such as, increase the thickness of support component 5, between press-in fixed mount 4 and piezoelectric element 1.Thus, support component 5 is crimped on fixed mount 4 and piezoelectric element 1.In this situation, piezoelectric element 1 presses from the both sides supported member 5 in the direction perpendicular with telescopic direction.
In addition, here the situation being formed support component 5 by silicone resin is illustrated, but also can forms support component 5 by spring members.Such as, spring members can be configured between fixed mount 4 and piezoelectric element 1, support piezoelectric element 1 by this spring members relative to fixed mount 4.
In driven member 3, the mobile lens (condenser lens) 102 of the part forming image pickup optical system is installed via lens mount 91.This mobile lens 102 is arranged integratedly with driven member 3, moves together with driven member 3.
Hammer parts 6 are installed in the end of piezoelectric element 1.These hammer parts 6 are the parts for the contractility of piezoelectric element 1 being passed to driving shaft 2 side, its be installed on piezoelectric element 1 with the end of end opposite side of installing driving shaft 2.Hammer parts 6 adopt weight to be greater than the parts of driving shaft 2.The material of hammer parts 6 adopts Young's modulus to be less than the material of piezoelectric element 1 and driving shaft 2.In addition, the bonding agent as affixed hammer parts 6 and piezoelectric element 1 preferably adopts elastic adhesive.
In addition, hammer parts 6 into shape and be not fixed on fixed mount 4.That is, hammer parts 6 are arranged with such as following state: the free end being installed on piezoelectric element 1, neither directly supported relative to fixed mount 4 or fixed, in addition, also do not supported in the mode of the motion retraining its relative fixed mount 4 via bonding agent or resin material or fix.
In figure 3, press driving shaft 2 by leaf spring 7, keep the frictional force of appropriateness thus, thus driven member 3 is installed in driving shaft 2.In this driven member 3, form the groove 3a be used for the V shape that driving shaft 2 is located.In this groove 3a, configure the sliding panel 3b that cross section is V shape, via this sliding panel 3b, driving shaft 2 is pressed in driven member 3.
In addition, arrange the sliding panel 3c that cross section is V shape between leaf spring 7 and driven device 3, leaf spring 7 presses driven member 3 via this sliding panel 3c.Thus, sliding panel 3b, 3c configure in the mode that recess side is each other relative, grasp drive shaft 2 and arranging.By being contained in the groove 3a of V shape by driving shaft 2, stably driven member 3 can be installed on driving shaft 14.
Leaf spring 7 such as adopts cross section to be the plate spring component of L-shaped.By leaf spring 7 while be locked to driven member 3, its another side is configured at groove 3a in the face of position, by this another side, the driving shaft 2 be contained in groove 3a can be held between itself and driven member 3 thus.
Like this, driven member 3 is installed on driving shaft 2 side, thus frictional engagement in driving shaft 2 by leaf spring 7 with the pressing of certain power.That is, driven member 3 is installed as follows: press on driving shaft 2 by driven member 3 with certain pressing force, produce certain frictional force when it moves.
In addition, be sliding panel 3b, 3c grasp drive shaft 2 of V shape by cross section, driven member 3 at multiple position and driving shaft 2 linear contact lay, thus Absorbable organic halogens ground with driving shaft 2 friction apply.In addition, because driven member 3 engages with driving shaft 2 by the linear contact lay state by multiple position, therefore in fact now fastening state and driven member 3 to be sticked in driving shaft 2 with surface contact state identical, stable friction apply can be realized.
Then, to for driving the driver 65 of above-mentioned actuator 10 to be described.As shown in Figure 4, driver 65 comprises: make the drive circuit 65c of piezoelectric element 1 action, make the register memory 65b of the setting content of the logical circuit 65a of drive circuit 65c action and preservation logical circuit 65a.
When making drive unit action, CPU62 is used to specify the signal S of the set point of the umber of pulse, waveform etc. of drive singal by representing
iNbe sent to logical circuit 65a.After set point is kept in register memory 65b by this logical circuit 65a, make control signal according to this set point.Drive circuit 65c carries out voltage amplification or Current amplifier to the control signal from logical circuit 65a, and the drive singal as piezoelectric element 1 exports.Drive circuit 65c is made up of 4 FETs (FET).Transistor is configured to: the Hi that can export as output signal exports (high potential output), Lo output (electronegative potential output) and OFF output (cut-off exports or open circuit output).In addition, the drive circuit shown in Fig. 4 adopts differential amplifier, but also can adopt other circuit.
Fig. 5 represents an example of the drive singal exported from 2 lead-out terminals of drive circuit 65c.The longitudinal axis represents current potential, and transverse and longitudinal represents the time.Drive circuit 65c, according to the control signal from logical circuit 65a, produces output signal (the 1st pulse signal) A
oUT, output signal (the 2nd pulse signal) B
oUT.These 2 output signal A
oUT, B
oUT2 terminals (with reference to Fig. 1, Fig. 4) of piezoelectric element 1 are input to as drive singal.
The direction making driven member 3 close to piezoelectric element 1 (right direction in Fig. 2) is set to rotating forward, the direction making driven member 3 leave piezoelectric element 1 is set to reversion.Fig. 5 represents 2 output signal A during rotating forward
oUT, B
oUTsignal waveform.In addition, for convenience of explanation, A will be outputed signal
oUT, B
oUTin formation Hi export segment pulse be called pulse signal A
oUT, pulse signal B
oUT.Further, between 1 pulse area in (cycle is T), 2 pulse signal A are produced
oUT, pulse signal B
oUT.
2 pulse signal A
oUT, B
oUTfor same frequency f (cycle T), by making phase place each other different, the signal that the potential difference forming signal each other changes step by step along a direction, changes sharp in reverse direction; Or the signal that the potential difference forming signal each other changes sharp along a direction, changes step by step in reverse direction.In addition, A is outputed signal
oUTand B
oUTpotential difference be input to piezoelectric element 1, pulse signal A wherein
oUT, B
oUTas drive singal, piezoelectric element 1 is made to extend or shrink.By making between multiple pulse area continuously, can stepper drive driving shaft 2 continuously.
Pulse signal A
oUT, B
oUTbe set to: such as an output signal exports for Hi, after being reduced to Lo output, another output signal becomes Hi and exports.In addition, in these output signals, become when Lo exports through certain time interval t an output signal
oFFafter, another output signal becomes Hi and exports.That is, pulse signal B
oUTwith pulse signal A
oUTcompare, time delay time interval t
oFF.And be configured to: by controlling this time interval t
oFF, can control from the positive charge of piezoelectric element 1 be timed to reverse charging timing interval, and from this reverse charging be timed to next positive charge timing interval between ratio.
Pulse signal A during reversion
oUT, B
oUTas described later, control time interval t can be passed through
oFFgenerate.In addition, by controlling this time interval, the quiet control drive singal exported when being formed in the quiet control of the motion and sound reducing piezoelectric element 1.Output signal A
oUT, B
oUThi export, Lo export application time etc. set by register memory 65b.
As shown in Fig. 6 (a), in register memory 65b, for how controlling drive singal (pulse A
oUT, B
oUT) waveform, action, the time, with Action Selection position (Bit), waveform selection position and selection of time position setting.In addition, owing to can set arbitrarily selection of time position, therefore setting content omits.In register memory 65b, the in store common output signal setting making driven member 3 movement.Such as, output signal A is set in the mode shown in showing
oUTpulse duration t1, output signal B
oUTrelative output signal A
oUTtime interval t
oFF, output signal B
oUTpulse duration t2, respectively output signal A
oUT, B
oUTcycle T.In addition, except the setting of common output signal, the setting of 4 patterns of the quiet waveform also involved by the in store output signal for reducing motion and sound.In these quiet waveforms, only setting output signal B
oUTrelative output signal A
oUTtime interval t
oFF, and for output signal A
oUTpulse duration t1, output signal B
oUTpulse duration t2, respectively output signal A
oUT, B
oUTcycle T identical with the setting of common output signal.
By adopting the setting example shown in Fig. 6 (a), as shown in Fig. 6 (b), in usual waveform, output signal A
oUTpulse duration t1 be a, output signal B
oUTrelative output signal A
oUTtime interval t
oFFfor b, output signal B
oUTpulse duration t2 be c, respectively output signal A
oUT, B
oUTcycle T be d.In addition, in quiet waveform 1 ~ 4, only time interval t is changed compared with usual waveform
oFF.Such as, in quiet waveform 1, time interval t
oFFfor b1 (> b); In quiet waveform 2, time interval t
oFFfor b2 (> b1); In quiet waveform 3, time interval t
oFFfor b3 (> b2); In quiet waveform 4, time interval t
oFFfor b4 (> b3).
Next, be described with reference to the element current of Fig. 7 to the usual waveform set in Fig. 6 and quiet waveform 1 ~ 4.Fig. 7 (a) is the element current of usual waveform, and Fig. 7 (b) ~ (e) is the element current of quiet waveform 1 ~ 4.By time interval t in quiet waveform 1 ~ 4
oFFchange into b1 ~ b4, thus under the state keeping current waveform and peak value, only change reverse charging timing.According to the order of quiet waveform 1 ~ 4, time interval t
oFFbecome large gradually, thus reverse charging timing move closer to the centre between positive charge timing.Reverse charging timing moves closer to the centre between positive charge timing, and actuating speed (translational speed of driven member 3) is slower.Therefore, the actuating speed of usual waveform is the fastest, gradually slack-off according to the order actuating speed of quiet waveform 1,2,3,4.That is, by utilizing the drive singal after quiet waveform combination, the translational speed of driven member 3 can be controlled.
On the other hand, reverse charging timing positive charge timing between middle time, driven member 3 stops.Now, for pulse signal A
oUT, B
oUT, during from the potential difference of signal each other to a direction change to changing inversely time, with to identical to the time again changed to a direction during this changing inversely.That is, piezoelectric element 1 is timed to the interval, identical with being timed to next positive charge interval regularly from this reverse charging of reverse charging timing from positive charge.By the potential difference of these pulse signals, piezoelectric element 1 alternately carries out extending and shrinking according to certain intervals repeatedly.Further, vibrated with equidistant continuous and adjustable by driving shaft 8b, thus driven member 3 (vibration dead state) under the state of floating slightly stops.
When to cross between positive charge timing middle in reverse charging timing, driven member 3 is to movement in the other direction.Therefore, in order to make the moving direction based on quiet waveform 1 ~ 4 consistent with the moving direction based on usual waveform, the time interval b1 ~ b4 of quiet waveform 1 ~ 4 needs not change in the scope of movement in the other direction in driven member 3.That is, the time interval b of usual waveform is set as shown in Fig. 7 (a), make the interval being timed to reverse charging timing from the positive charge of piezoelectric element 1, less than the interval being timed to next positive charge from this reverse charging, the interval of reverse charging timing is being timed to from the positive charge of piezoelectric element 1, be less than or equal to from this reverse charging be timed to next positive charge timing interval scope in (comprise from the positive charge of piezoelectric element 1 be timed to reverse charging timing interval, and the identical situation in interval of next positive charge timing is timed to from this reverse charging) set the time interval b1 ~ b4 of electrostatic waveform 1 ~ 4.Such as, in the usual waveform shown in Fig. 7 (a), from the positive charge of piezoelectric element 1 be timed to reverse charging timing interval, and the ratio at the interval that is timed to next positive charge from this reverse charging be set to 20: 80.In this case, such as in quiet waveform 1 ~ 4, the positive charge from piezoelectric element 1 is timed to the interval of reverse charging timing, and is set in 25: 75,30: 70,40: 60,50: 50 from the ratio at interval that this reverse charging is timed to the timing of next positive charge.
Below to making the situation of driven member 3 action in reverse direction be described.Set the time interval b of usual waveform, make the interval being timed to reverse charging timing from the positive charge of piezoelectric element 1, larger than the interval being timed to next positive charge from this reverse charging, the interval of reverse charging timing is being timed to from the positive charge of piezoelectric element 1, be more than or equal to from this reverse charging be timed to next positive charge timing interval scope in (comprise from the positive charge of piezoelectric element 1 be timed to reverse charging timing interval, and the identical situation in interval of next positive charge timing is timed to from this reverse charging) set the time interval b1 ~ b4 of electrostatic waveform 1 ~ 4.Such as, in usual waveform, from the positive charge of piezoelectric element 1 be timed to reverse charging timing interval, and the ratio at the interval that is timed to next positive charge from this reverse charging be set to 80: 20.In this case, such as in quiet waveform 1 ~ 4, the positive charge from piezoelectric element 1 is timed to the interval of reverse charging timing, and is set in 75: 25,70: 30,60: 40,50: 50 from the ratio at interval that this reverse charging is timed to the timing of next positive charge.
When forming the drive singal of the quiet waveform 1 ~ 4 of combination, according to time interval t
oFFdiminish gradually or become large mode and combine.In addition, when usual waveform and quiet waveform being linked up, adopt the quiet waveform of the reverse charging timing of the reverse charging timing had near usual waveform.Such as, if the usual waveform shown in Fig. 7 (a), then the quiet waveform shown in Fig. 7 (b) is adopted.
Fig. 8 is an example of the drive singal for reducing motion and sound.Fig. 8 (a) is the example being provided with during quiet driving the specified time limit before starting during usually driving, and Fig. 8 (b) is the example being provided with during quiet driving the specified time limit after terminating during usually driving.As shown in Fig. 8 (a), during quiet driving before applying adopting the usual drive singal (the 1st drive singal) of usual waveform to start, the drive singal (the 2nd drive singal) that the pulse signal applying quiet control arranges in the following order, this order is the quiet driving 1 adopting the quiet driving 4 of quiet waveform 4, adopt the quiet driving 3 of quiet waveform 3, adopt the quiet driving 2 of quiet waveform 2, adopt quiet waveform 1.That is, the variation pattern of the pulse signal of quiet control is: along with close to the end during quiet driving, and the difference between the reverse charging regularly in the reverse charging timing in the pulse signal of quiet control and the pulse signal that usually drives diminishes.Thus, the frictional engagement between driving shaft 2 and driven member 3 can be weakened, so, the driven member 3 in stopping can being made to move smoothly, and the switching timing of the pulse signal in the pulse signal usually driven and quiet control, makes the action of driven member 3 smoothly carry out.
In addition, as shown in Fig. 8 (b), during quiet driving after the applying of the usual drive singal adopting usual waveform terminates, the drive singal that the pulse signal applying quiet control arranges in the following order, this order is adopt the quiet driving 1 of quiet waveform 1, adopt the quiet driving 2 of quiet waveform 2, by the quiet driving 3 of quiet waveform 3, the order adopting the quiet driving 4 of quiet waveform 4.That is, the variation pattern of the pulse signal of quiet control is: along with close to the end during quiet driving, and differing between the reverse charging timing in the reverse charging timing in the pulse signal of quiet control and the pulse signal that usually drives becomes large.Thus, the frictional engagement between driving shaft 2 and driven member 3 can be weakened, so, the driven member 3 in moving can be made to stop smoothly, and the switching timing of the pulse signal in the pulse signal usually driven and quiet control, makes the action of driven member 3 smoothly carry out.
Below, be described with reference to the control treatment of Fig. 9 to mobile lens 102 movement making auto-focusing.This control treatment is carried out in the timing of the movement directive of the CPU62 output mobile lens 102 from control part 81.
First CPU62 sets the driving number of times (S10) of piezoelectric element 1.Such as, CPU62 setting is mobile start before quietly control to drive number of times, mobile in usual driving number of times, quiet controls driving number of times after mobile end.Such as number of times is driven to be set as " 4 " quiet control.After setting drives number of times, CPU62 sets the burst length (S12) of common drive singal.CPU62 is such as by the pulse duration t1 of usual waveform, t2, time interval t
oFF, cycle T is set as a, c, b, d respectively.Then, such as, by the burst length (time interval t of quiet waveform 1
oFF) be set as b1 (S14).Then, such as, by the burst length (time interval t of quiet waveform 2
oFF) be set as b2 (S16).Afterwards, such as, by the burst length (time interval t of quiet waveform 3
oFF) be set as b3 (S18).Then, such as, by the burst length (time interval t of quiet waveform 4
oFF) be set as b4 (S20).
Then, the set point set in the process of S10 ~ S20 is sent to driver 65 by CPU62.The set point of logical circuit 65a to register memory 65b upgrades.Then, driving commencing signal is sent to driver 65 (S22) by CPU62.Driver 65 select and be applied in the process of S14 ~ S18 in the quiet waveform 1 ~ 4 of the quiet control set, there is maximum time interval t
oFFquiet waveform (being here quiet waveform 4) (S24).Then, count driving number of times, the quiet control before the movement set in the process of itself and S10 being started drives number of times to compare (S26).When count value does not reach quiet control driving number of times in situation, be again transferred to the process of S24.In the process of S24, driver 65 select and apply in the quiet waveform 1 ~ 3 of still unselected quiet control, there is maximum time interval t
oFFquiet waveform (being here quiet waveform 3).Like this, the time interval t of the quiet waveform applied
oFFdiminish gradually, before mobile beginning, become the drive singal shown in Fig. 8 (a).
In the process of S26, when count value reaches quiet control driving number of times, driver 65 applies the common drive singal (S28) set in the process of S12.Then, driving number of times is counted, itself and the usual driving number of times of movement set in the process of S10 are compared (S30).Before count value reaches usually driving number of times, repeatedly carry out the process of S28.
In the process of S26, when count value reaches and usually drives number of times, driver 65 select and be applied in the process of S14 ~ S18 in the quiet waveform 1 ~ 4 of the quiet control set, there is minimum time interval t
oFFquiet waveform (being here quiet waveform 1) (S32).Then, driving number of times is counted, by its with the mobile end that sets in the process of S10 after quiet control drive number of times to compare (S34).When count value does not reach quiet control driving number of times, be again transferred to the process of S32.In the process of S32, driver 65 select and apply in the quiet waveform 2 ~ 4 of still unselected quiet control, there is minimum time interval t
oFFquiet waveform (being here quiet waveform 2).Like this, the time interval t of the quiet waveform applied
oFFbecome large gradually, after mobile end, occur the drive singal shown in Fig. 8 (b).In the process of S34, when count value reaches quiet control driving number of times, terminate the control treatment of auto-focusing.
By carrying out above control treatment, when driving and starting, the drive singal shown in Fig. 8 (a) is applied to actuator 15, at the end of driving, apply the drive singal shown in Fig. 8 (b), thus, driven member 3 moves along driving shaft 2 stepping.
As mentioned above, in the drive unit related in this form of implementation and camera head, move to make driven member 3, apply to be timed to the interval of reverse charging timing, the usual drive singal different with being timed to next positive charge interval regularly from this reverse charging from the positive charge of piezoelectric element 1, and the specified time limit before the applying of usual drive singal and after applying, apply the quiet control drive singal of the reverse charging timing only changed gradually in usual drive singal.Because the reverse charging timing of this quiet control drive singal controls as follows, namely do not gradually change in the scope of the rightabout in the direction driven by usual drive singal motion in driven member 3, therefore, it is possible to control the translational speed of driven member 3, it is made to increase gradually or diminish gradually.Thus, before started movement by usual drive singal driven member 3, after end movement, the frictional engagement between driving shaft 2 and driven member 3 can be weakened, therefore, the driven member 3 in stopping can be moved smoothly, or stop the driven member 3 in movement smoothly.
In addition, the drive unit related to according to this form of implementation and camera head, can simplify the structure needed for quiet control.In order to generate quiet control drive singal, except considering time interval t
oFFcontrol beyond, such as also can consider to change the pulse duration of drive singal or voltage.As shown in figure 13, can consider the pulse duration t1 of drive pulse signal, t2 and time interval t
oFFchange into a1 ~ a4 (a1 > a2 > a3 > a4) gradually, c1 ~ c4 (c1 > c2 > c3 > c4), b1 ~ b4 (b1 > b2 > b3 > b4), or as shown in Figure 12, the voltage V of drive pulse signal is changed into gradually V1 ~ V4 (V1 > V2 > V3 > V4).
But, when changing the pulse duration of drive singal, pulse duration t1, t2 and the time interval t of quiet waveform 1 ~ 4 must be changed
oFF.The Register Set example that Figure 10 adopts when being control impuls width.As shown in Figure 10, compared with the Register Set example shown in Fig. 6 (a), need for controlling the quiet pulse duration t1 of waveform 1 ~ 4, the register of t2.Thus, because add the Register Set process (S14 ~ S20) relevant to the quiet waveform shown in Fig. 9, so processing load increases, and likely compress the capacity of register memory 65b.In addition, carrying out, in voltage-controlled situation, needing potential circuit.The example of the driver 65 adopted when Figure 11 is control voltage.As shown in figure 11, when control voltage, because needs have reduction voltage circuit 1 ~ 4, therefore circuit scale is likely large than the driver 65 shown in Fig. 4.Relative to this, the drive unit related to according to this form of implementation and camera head, not controlling pulse duration and the voltage of drive singal, by only controlling reverse charging regularly this simple control and the simple structure in usual drive singal, the reduction of motion and sound can be realized.
In addition, as shown in Figure 12 and Figure 13, when making the pulse duration of drive pulse signal narrow or when reducing voltage, element current waveform distortions.Therefore, when electrostatic capacitance change, there is the situation stably cannot carrying out the reduction action of motion and sound.Figure 14 is the temperature dependent curve chart representing electrostatic capacitance.Electrostatic capacitance C
1~ C
5show the temperature dependency of the electrostatic capacitance in prescribed material.As shown in figure 14, raise with temperature the trend that electrostatic capacitance has increase.Therefore, when high temperature and low temperature time, compared with situation during normal temperature, appearance changes by the peak strength of element current.
Figure 15 is the curve chart of the element current representing relatively quiet control drive singal according to temperature.Figure 15 (A) is only control time interval t
oFFquiet control drive singal, be the quiet waveform of the quiet driving 4 shown in Fig. 7 (e).In addition, Figure 15 (B) is the quiet control drive singal of only control voltage, is the quiet waveform of the quiet driving 4 shown in Figure 12 (e).In addition, Figure 15 (C) is control impuls width t1, t2, time interval t
oFFquiet control drive singal, be the quiet waveform of the quiet driving 4 shown in Figure 13 (e).Element current when (a) in Figure 15 (A) ~ (C) is normal temperature, element current when (b) is low temperature, element current when (c) is high temperature.
When generating quiet control drive singal by voltage control, as shown in Figure 15 (B), the peak strength of the element current under normal temperature is h2.As shown in this element current waveform, because voltage V4 is less, therefore discharge under the state of not yet piezoelectric element 1 being carried out to fully charging.Then, because electrostatic capacitance diminishes at low temperatures, the peak strength of the element current therefore under low temperature is the h3 being greater than h2.In addition, because at high temperature electrostatic capacitance is comparatively large, the peak strength of the element current therefore under high temperature is the h4 being less than h2.Like this, with variations in temperature, peak strength presents larger change.
In addition, when generating quiet control drive singal by control impuls width and the time interval, as shown in Figure 15 (C), the peak strength of the element current under normal temperature is h5.As shown in this element current waveform, because pulse duration a4 is less, therefore discharge under the state of not yet piezoelectric element 1 being carried out to fully charging.Then, because electrostatic capacitance diminishes at low temperatures, the peak strength of the element current therefore under low temperature is the h6 being greater than h5.In addition, because at high temperature electrostatic capacitance becomes large, the peak strength of the element current therefore under high temperature is the h7 being less than h5.Like this, with variations in temperature, peak strength presents larger change.
In contrast, by when only control time interval generates quiet control drive singal, as shown in the element current waveform under the normal temperature of Figure 15 (A), discharge under the known state having carried out abundant charging to piezoelectric element 1.Thus, even if because the electrostatic capacitance peak strength h1 that changes still does not change under low temperature, high temperature, therefore, it is possible to carry out stable quiet control action by only control time interval.
In addition, the situation because the electrostatic capacitance of individual difference piezoelectric element 1 changes also is considered.Figure 16 is the curve chart of the element current representing relatively quiet control drive singal according to electrostatic capacitance.Figure 16 (A) is only control time interval t
oFFquiet control drive singal, be the quiet waveform of the quiet driving 4 shown in Fig. 7 (e).In addition, Figure 16 (B) is the quiet control drive singal of only control voltage, is the quiet waveform of the quiet driving 4 shown in Figure 12 (e).In addition, Figure 16 (C) is control impuls width t1, t2, time interval t
oFFquiet control drive singal, be the quiet waveform of the quiet driving 4 shown in Figure 13 (e).(a) in Figure 16 (A) ~ (C) is the element current of the piezoelectric element 1 with typical electrostatic capacitance, b () is the element current of the piezoelectric element 1 that electrostatic capacitance is minimum, (c) is the element current of the piezoelectric element 1 that electrostatic capacitance is the highest.When only control voltage, when control impuls width and the time interval, identical with Figure 15, because of the difference of electrostatic capacitance, charging peaks intensity changes.On the other hand, by when only control time interval generates quiet control drive singal, as shown in the element current waveform of the piezoelectric element 1 with typical electrostatic capacitance of Figure 15 (A), discharge under the state of charging fully has been carried out to piezoelectric element 1.Thus, even if change appears in electrostatic capacitance under low temperature, high temperature, peak strength h1 does not also change.Like this, can only control time interval be passed through, carry out stable quiet control action.
In addition, above-mentioned form of implementation shows an example of drive unit and the Optical devices that the present invention relates to.The drive unit that the present invention relates to and Optical devices are not limited to drive unit and the Optical devices of form of implementation, also can record in the scope of main points not changing in summary of the invention, the drive unit relate to form of implementation and Optical devices are out of shape, or are applicable to other side.
Such as, in above-mentioned form of implementation, the situation of the movement being applicable to auto-focusing mobile lens 102 is illustrated, but, be also applicable to the movement of zoom lens assemblies portion 16 grade.In addition, also can be used for making the object beyond mobile lens 102 (such as, platform (stage), probe (probe) etc.) mobile.In addition, also can hand shaking correction mechanism such, for driving in the direction perpendicular with optical axis the situation revising lens.
Further, in above-mentioned form of implementation, drive unit makes optical element move, but the printhead of ink jet type also can be made to move.
Further, in above-mentioned form of implementation, via support component 5, the side of piezoelectric element 1 is installed on fixed mount 4, thus, makes the end of piezoelectric element 1 become free end, but also the end of piezoelectric element 1 can be installed on fixed mount 4.
In addition, in above-mentioned way of realization, the example applying quiet control drive singal in specified time limit before the applying of usual drive singal or after applying is illustrated, but, also can be such as the situation applying quiet control drive singal specified time limit only before the applying of usual drive singal starts, can also be the situation applying quiet control drive singal specified time limit only after the applying of usual drive singal terminates.
In addition, in above-mentioned form of implementation, driver part adopts piezoelectric element, but in addition also can adopt the driver part of motor, polymer actuator, marmem etc.
Claims (8)
1. a drive unit, is characterized in that,
Comprise: electromechanical conversion element, carry out stretching motion by drive singal;
Driving shaft, is installed on above-mentioned electromechanical conversion element, along with the expanding-contracting action of above-mentioned electromechanical conversion element moves back and forth;
Driven member, with above-mentioned driving shaft friction apply, is moved by the reciprocating motion of above-mentioned driving shaft; With
Driving signal control circuit, to above-mentioned electromechanical conversion element, applies above-mentioned drive singal,
Above-mentioned driving signal control circuit, when making above-mentioned driven member move, 1st drive singal is applied to above-mentioned electromechanical conversion element, 1st drive singal is timed to the interval of reverse charging timing, the drive singal different with being timed to next positive charge interval regularly from this reverse charging from the positive charge of above-mentioned electromechanical conversion element
Namely start between early stage during before starting to apply above-mentioned 1st drive singal and namely terminate at least one specified time limit between the later stage during terminating to apply after above-mentioned 1st drive singal, apply the 2nd drive singal to above-mentioned electromechanical conversion element, the 2nd drive singal is the drive singal only allowing the above-mentioned reverse charging timing in above-mentioned 1st drive singal change gradually in the scope that above-mentioned driven member can not be moved to the rightabout in the direction driven by the 1st drive singal.
2. drive unit according to claim 1, is characterized in that,
Above-mentioned electromechanical conversion element is piezoelectric element.
3. drive unit according to claim 2, is characterized in that,
Comprise: the breach of V-shaped, be formed at above-mentioned driven member;
1st sliding panel, is fixed in above-mentioned breach, forms V-shaped in the mode of 2 location contacts with above-mentioned driving shaft;
2nd sliding panel, is positioned at the opposition side of above-mentioned 1st sliding panel, forms V-shaped in the mode of 2 location contacts with above-mentioned driving shaft; With
Leaf spring in L-shaped, is fixed on above-mentioned driven member, and above-mentioned 2nd sliding panel is pressed to above-mentioned driving shaft.
4. drive unit according to claim 1, is characterized in that,
Above-mentioned driving signal control circuit, when applying above-mentioned 2nd drive singal when between above-mentioned beginning in earlier stage, change the reverse charging timing in above-mentioned 2nd drive singal, make along with close to the end between above-mentioned beginning early stage, the above-mentioned reverse charging timing in above-mentioned 2nd drive singal diminishes with the difference of the above-mentioned reverse charging timing in above-mentioned 1st drive singal.
5. drive unit according to claim 1, is characterized in that,
Above-mentioned driving signal control circuit, when applying above-mentioned 2nd drive singal when between the above-mentioned end later stage, change the reverse charging timing in above-mentioned 2nd drive singal, make along with close to the end between the above-mentioned end later stage, the difference of the above-mentioned reverse charging timing in above-mentioned 2nd drive singal and the above-mentioned reverse charging timing in above-mentioned 1st drive singal becomes large.
6. drive unit according to claim 5, is characterized in that,
Above-mentioned driving signal control circuit is made up of such as lower component, respectively:
CPU, exports the set point being used to specify the waveform of the above-mentioned 1st and the 2nd drive singal;
Register memory, preserves above-mentioned set point;
Logical circuit, based on the set point in above-mentioned register memory, exports control signal; With
Drive circuit, carries out voltage amplification or Current amplifier to the above-mentioned control signal from above-mentioned logical circuit, exports as the above-mentioned 1st and the 2nd drive singal.
7. Optical devices, is characterized in that,
Possess drive unit according to claim 1,
Optical element and above-mentioned driven member are linked, thus carries out making above-mentioned optical element in the control of optical axis direction or the direction movement perpendicular with above-mentioned optical axis direction.
8. the drived control method of a drive unit, this drive unit makes the driving shaft of electromechanical conversion element stretch vertically, thus the driven member stepping being embedded in driving shaft is moved, the drived control method characteristic of above-mentioned drive unit is to carry out following steps, respectively:
Apply the step of the 1st drive singal, when making above-mentioned driven member move, apply the 1st drive singal to above-mentioned electromechanical conversion element, the 1st drive singal is timed to the interval of reverse charging timing, the drive singal different with being timed to next positive charge interval regularly from this reverse charging from the positive charge of above-mentioned electromechanical conversion element; With
Apply the step of the 2nd drive singal, namely start between early stage during before starting to apply above-mentioned 1st drive singal and namely terminate at least one specified time limit between the later stage during terminating to apply after above-mentioned 1st drive singal, apply the 2nd drive singal to above-mentioned electromechanical conversion element, the 2nd drive singal is the drive singal only allowing the above-mentioned reverse charging timing in above-mentioned 1st drive singal change gradually in the scope that above-mentioned driven member can not be moved to the rightabout in the direction driven by the 1st drive singal.
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| JP2009276609A JP5358415B2 (en) | 2009-12-04 | 2009-12-04 | Driving device and optical device |
| JP2009-276609 | 2009-12-04 |
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| WO2014034699A1 (en) * | 2012-08-31 | 2014-03-06 | 富士フイルム株式会社 | Lens system, lens barrel, and drive unit |
| JP6303382B2 (en) * | 2013-10-15 | 2018-04-04 | ソニー株式会社 | Drive control device, imaging device, and drive control method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002218773A (en) * | 2001-01-22 | 2002-08-02 | Minolta Co Ltd | Driver |
| CN101401290A (en) * | 2006-03-08 | 2009-04-01 | 柯尼卡美能达精密光学株式会社 | Drive device |
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| JP3358418B2 (en) * | 1996-01-04 | 2002-12-16 | ミノルタ株式会社 | Driving mechanism using electro-mechanical conversion element |
| JP2004056951A (en) * | 2002-07-23 | 2004-02-19 | Minolta Co Ltd | Drive circuit, drive method and imaging device of piezoelectric actuator |
| JP2005173161A (en) * | 2003-12-10 | 2005-06-30 | Canon Inc | Optical apparatus |
| JP2005237145A (en) * | 2004-02-20 | 2005-09-02 | Konica Minolta Holdings Inc | Drive circuit for piezoelectric element |
| JP2005354854A (en) * | 2004-06-14 | 2005-12-22 | Konica Minolta Photo Imaging Inc | Pwm signal duty control method, pwm signal generating circuit, and imaging device using it |
| JP2008245467A (en) * | 2007-03-28 | 2008-10-09 | Fujinon Corp | Drive device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2002218773A (en) * | 2001-01-22 | 2002-08-02 | Minolta Co Ltd | Driver |
| CN101401290A (en) * | 2006-03-08 | 2009-04-01 | 柯尼卡美能达精密光学株式会社 | Drive device |
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