CN102158123A - Drive device and driving method thereof, and optical device - Google Patents

Drive device and driving method thereof, and optical device Download PDF

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CN102158123A
CN102158123A CN2010106250623A CN201010625062A CN102158123A CN 102158123 A CN102158123 A CN 102158123A CN 2010106250623 A CN2010106250623 A CN 2010106250623A CN 201010625062 A CN201010625062 A CN 201010625062A CN 102158123 A CN102158123 A CN 102158123A
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mentioned
drive signal
signal
drive
driving
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CN102158123B (en
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吉田秀夫
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Fujifilm Corp
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Fujifilm Corp
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Abstract

The invention provides a drive device and the driving method thereof, and an optical device. The drive device comprises a piezoelectric component, a driving shaft, a driven component in friction clamp connection with the driving shaft, and a control part applying driving signals on the piezoelectric component. When moving a part to be moved, the control part applies a common driving signal on the piezoelectric component. At the same time, a mute control driving signal is applied on the piezoelectric component (1). The mute control driving signal gradually changes the counterclockwise charging and timing driving signal of the common driving signal, when the part to be moved does not move towards the opposite direction of the normal driving direction of the common driving signal. The mute control driving signal is applied during a specified period before the common driving signal is applied and after the common driving signal is applied.

Description

Drive unit and drive controlling method and Optical devices
Technical field
The present invention relates to utilize inertia and frictional force to move drive unit and drive controlling method thereof that is driven parts and the Optical devices that utilize above-mentioned drive unit mobile optical element along the driving shaft in the expanding-contracting action.
Background technology
Known following drive unit: it comprises the piezoelectric element (electromechanical conversion element) that stretches by drive pulse signal (drive signal), and may command is driven the translational speed (for example, No. 3358418 communique of Japan Patent) of parts.This drive unit little by little increases the pulse duration (duty ratio) of drive pulse signal, thereby little by little increases actuating speed when driving beginning.When driving stops, little by little reducing pulse duration, thereby little by little reduce actuating speed.In addition, in No. 3358418 communique of Japan Patent, also record following control, when driving beginning, little by little increase the voltage of drive pulse signal, thereby little by little improve actuating speed, and when driving stops, little by little reducing voltage, thereby little by little reduce actuating speed.
But, in the drive unit of No. 3358418 communique record of Japan Patent,, little by little change the pulse duration of drive pulse signal or apply voltage in order to reduce the motion and sound of drive unit.Thus, the making of drive pulse signal is very complicated.In addition, because piezoelectric element discharges and recharges by drive pulse signal, therefore follow variations in temperature and when deviation occurring when changing or because of the individual difference electrostatic capacitance, the control that reduces motion and sound will become unstable in the electrostatic capacitance of piezoelectric element.
Summary of the invention
Main purpose of the present invention is to provide and can realizes drive unit and drive controlling method and the Optical devices that motion and sound reduces by simple control.
Even another object of the present invention is to provide electrostatic capacitance variation to occur or exist deviation still can stably carry out drive unit and the drive controlling method and the Optical devices of the reduction control of motion and sound.
To achieve these goals, in the present invention,, thereby the parts stepping that is driven that is embedded in driving shaft is moved, the 1st drive signal and the 2nd drive signal are supplied to the electromechanical conversion element for the driving shaft that makes the electromechanical conversion element stretches vertically.Above-mentioned the 1st drive signal is used to make and is driven parts and moves with the driving shaft stepping, is timed to regularly interval of reverse charging, different with the interval that is timed to next positive charge timing from this reverse charging from the positive charge of electromechanical conversion element in above-mentioned the 1st drive signal.Above-mentioned the 2nd drive signal is used to make be driven under the state that parts stop only to make driving shaft move, and during at least one before the applying of above-mentioned the 1st drive signal and in the specified time limit after applying, changes the reverse charging timing in the 1st drive signal gradually.
Owing in being driven the scope that parts do not move, little by little change reverse charging regularly, therefore for example can control the translational speed that is driven parts, it is become greatly or gradually gradually diminish.Thus, begin by the 1st drive signal to move be driven parts before, finish to move after, can weaken driving shaft and be driven frictional engagement between the parts, therefore, the parts that are driven in stopping are moved smoothly, the parts that are driven in moving are stopped smoothly.That is to say that the stepping that is driven parts is moved and become level and smooth, motion and sound reduces.
Like this, the pulse duration of controlling and driving signal and voltage by only controlling the regularly this simple control of reverse charging in the 1st drive signal, can not realized the reduction of motion and sound.In addition, because the not pulse duration and the voltage of controlling and driving signal, therefore same with the 1st drive signal, also can charge fully by the 2nd drive signal to the electromechanical conversion element, like this, even under the situation because of the electrostatic capacitance change of variations in temperature or individual difference electromechanical conversion element, still can stably carry out the reduction of motion and sound.
Preferred above-mentioned electromechanical conversion element is a piezoelectric element.In addition, preferably adopt to make as lower member to be driven parts and driving shaft friction apply, these parts comprise: the breach of V font is formed at the above-mentioned parts that are driven; The 1st sliding panel is fixed in the above-mentioned breach, forms the V font in the mode that contacts with 2 positions of above-mentioned driving shaft; The 2nd sliding panel is positioned at the opposition side of above-mentioned the 1st sliding panel, forms the V font in the mode that contacts with 2 positions of above-mentioned driving shaft; With the leaf spring that is the L font, be fixed in the above-mentioned parts that are driven, above-mentioned the 2nd sliding panel is pressed to above-mentioned driving shaft.
Preferably between above-mentioned beginning in earlier stage, apply under the situation of above-mentioned the 2nd drive signal, change the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal, make that along with the end between approaching above-mentioned beginning in earlier stage the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal diminishes with the above-mentioned reverse charging difference regularly in above-mentioned the 1st drive signal.By such formation, can be driven by the 1st drive signal before parts begin to move, weaken driving shaft and be driven frictional engagement between the parts.The parts that are driven during this can make and stop move smoothly, can make the action that is driven parts level and smooth in the switching timing of the 1st drive signal and the 2nd drive signal in addition.
In addition, preferred above-mentioned driving signal control circuit is applying between the above-mentioned end later stage under the situation of above-mentioned the 2nd drive signal, change the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal, make that along with the end between the approaching above-mentioned end later stage the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal becomes greatly with the poor of above-mentioned reverse charging timing in above-mentioned the 1st drive signal.By such formation, be driven by the 1st drive signal after device end moves, can weaken driving shaft and be driven frictional engagement between the parts.Thus, can make and be driven the level and smooth motion of parts and stop.
Export the above-mentioned the 1st and the 2nd drive signal from driving signal control circuit.This driving signal control circuit by constituting as lower member is respectively: CPU, and output is used to specify the above-mentioned the 1st and the set point of the waveform of the 2nd drive signal; Register memory is preserved above-mentioned set point; Logical circuit, based on the set point in the above-mentioned register memory, the output control signal; And drive circuit, amplify carry out voltage amplification or electric current from the above-mentioned control signal of above-mentioned logical circuit, export as the above-mentioned the 1st and the 2nd drive signal.
In addition, Optical devices of the present invention are built-in with drive unit, and optical element and this are driven the parts interlock.Above-mentioned optical element moves along optical axis direction or with the perpendicular direction of this optical axis direction.
According to the present invention, can realize the reduction of motion and sound by simple control, and can stably carry out the reduction of motion and sound.
Description of drawings
Fig. 1 is the skeleton diagram of the camera head that relates to of form of implementation of the present invention.
Fig. 2 is the skeleton diagram that the lens driver of actuator is shown with section.
Fig. 3 is the profile that is driven parts along the III-III among Fig. 2.
Fig. 4 is the block diagram of driver.
Fig. 5 is the oscillogram of the drive signal of expression piezoelectric element.
Fig. 6 is the setting example of expression register and the table of wave setting example.
Fig. 7 is the oscillogram of expression drive signal and element current.
Fig. 8 is the oscillogram of expression drive signal.
Fig. 9 is the flow chart of the step of expression lens driving.
Figure 10 is the table of the setting example of the register of expression when changing the pulse duration of drive signal.
Figure 11 is the block diagram of driver that changes the voltage of drive signal.
Figure 12 is that expression is from the drive signal of driver output shown in Figure 11 and the oscillogram of element current.
Figure 13 is the drive signal of indicating impulse width change and the oscillogram of element current.
Figure 14 is the temperature dependent curve chart of expression electrostatic capacitance.
Figure 15 is the oscillogram of the element current when representing along with the variations in temperature electrostatic capacitance change.
Figure 16 is the oscillogram of the element current when representing because of the individual difference electrostatic capacitance change.
Embodiment
In Fig. 1, camera head for example digital camera comprises: zoom lens assembly portion 16, imaging apparatus 82 and control part 81.Zoom lens assembly portion 16 comprises: fixed lens 105, prism 104, mobile lens (optical element) 90,102 and fixed lens 101, adopt to make the at right angles bending optical system of bending of optical axis O.In addition, control part 81 carries out the control of camera head integral body, for example comprises CPU (Central Processing Unit) 62, ISP (Image Signal Processing) 60, element driving circuit 61, EEPROM (Electrically Erasable PROM) 64 and driver 65.
On mobile lens 90,102, be connected with zoom respectively and use actuator 15 with actuator 10, automatic focus (AF).Drive by each actuator 10,15 mobile lens 90,102 is moved along optical axis O, realize zoom function and focus function automatically.The control that drives via 65 pairs of each actuators 10,15 of driver by CPU62.
Imaging apparatus 82 is arranged on the optical axis O, and the image transitions of photographic optical system imaging that will be by zoom lens assembly portion 16 is the signal of telecommunication.Imaging apparatus 82 for example is made of CCD (Charge Coupled Device image sensor), and is connected with ISP60.
Be incident to picture bending of the subject 106 of zoom lens assembly portion 16, arrive imaging apparatuss 82, become picture signal via mobile lens 90, mobile lens 102, fixed lens 101 via fixed lens 105, prism 104.This picture signal is carried out signal processing by ISP60 and CPU62.
Here, the lens position of mobile lens 90,102 is detected by the position detecting element 83,84 that is equipped with in the zoom lens assembly portion 16.These position detecting elements 83,84 are connected with element driving circuit 61, carry out drive controlling by element driving circuit 61.Each position detecting element 83,84 detected luminous intensity forms output signal via element driving circuit 61, carries out the A/D conversion by the A/D converter section 63 that CPU62 had.
CPU62 and driver 65 are according to the output signal after the A/D conversion and be stored in information among the EEPROM64 etc., carry out the drive controlling of each actuator 10,15 with feedback system.In addition, in EEPROM64, for example storing mensuration when adjusting and the zoom position that obtains, the output signal of AF position.
In this form of implementation, drive unit is made of the control circuit of actuator, control actuator.This control circuit is by formations such as CPU62, driver (being equivalent to driving signal control circuit) 65, position detecting element 83,84, element driving circuits 61.
Because the actuator 10,15 of mobile lens 90,102 is identical structure, so be that typical example describes with actuator 15.For the actuator among Fig. 2 15, in fixed mount 4, take in the vibrating body that piezoelectric element 1, driving shaft 2, hammer 6 one are connected, along with the telescopic propeller shaft 2 of piezoelectric element 1 moves back and forth (vibration vertically).By moving back and forth of this driving shaft 2, utilize inertia and friction to make to be driven parts 3 and move along driving shaft 2, be driven parts 3 and be embedded on the driving shaft 2 with appropriate frictional force.
Piezoelectric element 1 is can be by the electromechanical conversion element of drive signal to prescribed direction elongation and contraction.This piezoelectric element 1 is connected with driver 65, and input is from the drive signal of this driver 65.Specifically, piezoelectric element 1 comprises 2 input terminal 11a, 11b.By pulse signal is supplied to this input terminal 11a, 11b as drive signal, piezoelectric element 1 extends repeatedly and shrinks.In addition,, also can adopt parts beyond the piezoelectric element, for example material that forms by electroconductive polymer or marmem etc. as the electromechanical conversion element as long as can stretch according to drive signal.
For driving shaft 2, an end of driving shaft 2 is fixed in piezoelectric element 1 via for example bonding agent 21, makes its flexible direction axial and along piezoelectric element 1 consistent.This driving shaft 2 is parts of strip, for example columned parts.Driving shaft 2 is supported in axially displaceable mode by the separating part 4b that extends to the inside from fixed mount 4, separating part 4c.In addition, these separating parts 4b, separating part 4c have also limited the moving area of driver part 3.
The material of driving shaft 2 is fit to adopt light high rigid parts.In addition, the shape of driving shaft 2 is not limited to cylindric, also can be prism-shaped.
Form the through hole 4a that driving shaft 2 is connected respectively at separating part 4b, separating part 4c.Near the position of the mounting portion of the piezoelectric element 1 of separating part 4b supporting driving shaft 2, be the cardinal extremity position of driving shaft 2.The front end position of separating part 4c supporting driving shaft 2.
In addition, Fig. 2 represents the situation at 2 position supporting driving shafts 2 of its front and base end side by separating part 4b, 4c, but the situation at one of them position supporting driving shaft 2 of its front or base end side is also arranged.For example, form greatlyyer than the external diameter of driving shaft 2 by through hole 4a with separating part 4b, by separating part 4c only at front end position supporting driving shaft 2.In addition, also the through hole 4a of separating part 4c can be formed bigger than the external diameter of driving shaft 2, by separating part 4b only at cardinal extremity position supporting driving shaft 2.
In addition, separating part 4b, the 4c of expression supporting driving shaft 2 and fixed mount 4 form the situation of one among Fig. 2, but these separating parts 4b, 4c also can be the parts that are independent of fixed mount 4, and it is installed in the fixed mount 4.
Be driven parts 3 and be connected with driving shaft 2, can move along the long side direction of driving shaft 2 with the friction of appropriateness.For example, when installation is driven parts 3, make itself and driving shaft 2 crimping, thereby engage with this driving shaft 2, feasiblely press on the driving shaft 2 the certain frictional force of generation when it moves with certain pressing force with the coefficient of friction of regulation by leaf spring 7.Move driving shaft 2 in the mode that surpasses this frictional force, keep its position because of inertia is driven parts 3 thus, driving shaft 2 is driven parts 3 with respect to this and moves.
Support component 5 relative its flexible directions support from the side piezoelectric element 1 are installed, and are arranged between piezoelectric element 1 and the fixed mount 4.Under this situation, preferably support piezoelectric element 1 from the perpendicular direction of direction flexible with it by support component 5.Like this, piezoelectric element 1 is from keeping with the supported parts 5 of the perpendicular direction of flexible direction, and the rear end of the front end of driving shaft 2 and piezoelectric element 1 is freely.Therefore, form the structure that is difficult to the flexible transfer of vibration that causes of piezoelectric element 1 is given fixed mount 4 sides.So, can set the drive signal of piezoelectric element 1 explicitly with the resonance frequency of the combination of driving shaft 2 and piezoelectric element 1.
Support component 5 by have the above flexible elastomer of regulation for example silicone resin form.For support component 5, form the jack 5a that piezoelectric element 1 is passed in the central, under the state that piezoelectric element 1 is passed this jack 5a, it is installed on fixed mount 4.The affixed of support component 5 relative fixed framves 4 undertaken by the bonding of bonding agent 22.In addition, affixed between support component 5 and the piezoelectric element 1 also undertaken by the bonding of bonding agent.By constitute this support component 5 by elastomer, can support piezoelectric element 1 movably in its flexible direction.In addition, support component 5 can form ring-type or prism-shaped according to the shape of fixed mount 4.
For the affixed of 5 pairs of fixed mounts 4 of support component and affixed to piezoelectric element 1, also can between fixed mount 4 and piezoelectric element 1, be pressed into support component 5, undertaken affixed by pushing of support component 5.For example, increase the thickness of support component 5, be pressed between fixed mount 4 and the piezoelectric element 1.Thus, support component 5 is crimped on fixed mount 4 and piezoelectric element 1.Under this situation, piezoelectric element 1 is from pushing with the supported parts 5 in both sides of the perpendicular direction of flexible direction.
In addition, here the situation that is formed support component 5 by silicone resin is illustrated, but also can constitutes support component 5 by spring members.For example, can between fixed mount 4 and piezoelectric element 1, dispose spring members, support piezoelectric element 1 with respect to fixed mount 4 by this spring members.
Be driven on the parts 3, the mobile lens (condenser lens) 102 of a part that constitutes image pickup optical system be installed via lens mount 91.This mobile lens 102 be driven parts 3 and be provided with integratedly, parts 3 are mobile with being driven.
Hammer parts 6 are installed in the end of piezoelectric element 1.These hammer parts 6 are the parts that are used for the contractility of piezoelectric element 1 is passed to driving shaft 2 sides, and it is installed on end piezoelectric element 1 and the opposite side in end installation driving shaft 2.Hammer parts 6 adopt the parts of weight greater than driving shaft 2.The material of hammer parts 6 adopts the material of Young's modulus less than piezoelectric element 1 and driving shaft 2.In addition, the bonding agent as affixed hammer parts 6 and piezoelectric element 1 preferably adopts elastic adhesive.
In addition, hammer parts 6 are not fixed in fixed mount 4.That is to say, the hammer parts 6 with as following state setting: the free end that is installed on piezoelectric element 1, neither directly supported or fixing, in addition, also not supported or fixing in the mode of the motion that retrains its relative fixed frame 4 via bonding agent or resin material with respect to fixed mount 4.
In Fig. 3, push driving shaft 2 by leaf spring 7, keep the frictional force of appropriateness thus, be installed in driving shaft 2 thereby be driven parts 3.Be driven parts 3 at this, be formed for groove 3a the V word shape of driving shaft 2 location.The configuration cross section is the sliding panel 3b of V word shape in this groove 3a, via this sliding panel 3b driving shaft 2 is pressed on to be driven on the parts 3.
In addition, the sliding panel 3c that the cross section is V word shape is set between leaf spring 7 and driven device 3, leaf spring 7 is pushed via this sliding panel 3c and is driven parts 3.Thus, sliding panel 3b, 3c dispose in the relative mode of recess side each other, clamping driving shaft 2 and being provided with.In the groove 3a by driving shaft 2 being contained in V word shape, can stably be installed on driving shaft 14 with being driven parts 3.
Leaf spring 7 for example adopts the cross section to be the plate spring component of L word shape.One side of leaf spring 7 is limited to is driven parts 3, with its another side be disposed at groove 3a in the face of the position, can will be contained in driving shaft 2 among the groove 3a by this another side thus and be held on it and be driven between the parts 3.
Like this, be driven parts 3 and push with certain power by leaf spring 7 and be installed on driving shaft 2 sides, friction apply is in driving shaft 2 thus.That is to say, be driven parts 3 and install as follows: will be driven parts 3 and press on the driving shaft 2, and when it moves, produce certain frictional force with certain pressing force.
In addition, be sliding panel 3b, the 3c clamping driving shaft 2 of V word shape, be driven parts 3 and contact with driving shaft 2 lines at a plurality of positions by the cross section, thus can be stably and driving shaft 2 friction applies.In addition, engage with driving shaft 2 because the line contact condition by a plurality of positions will be driven parts 3, thus in fact at this moment fastening state to be sticked in driving shaft 2 with surface contact state identical with being driven parts 3, can realize stable friction apply.
Then, the driver 65 that is used to drive above-mentioned actuator 10 is described.As shown in Figure 4, driver 65 comprises: the register memory 65b that makes the setting content of the drive circuit 65c of piezoelectric element 1 action, the logical circuit 65a that makes drive circuit 65c action and preservation logical circuit 65a.
Make drive unit when action, CPU62 is used to specify expression the signal S of set point of the umber of pulse, waveform etc. of drive signal INBe sent to logical circuit 65a.After this logical circuit 65a is kept at set point in the register memory 65b, make control signal according to this set point.Drive circuit 65c amplifies carry out voltage amplification or electric current from the control signal of logical circuit 65a, as the drive signal output of piezoelectric element 1.Drive circuit 65c is made of 4 FETs (FET).Transistor constitutes: can export Hi output (high potential output), Lo output (electronegative potential output) and OFF as output signal export (by output or open circuit output).In addition, drive circuit shown in Figure 4 adopts differential amplifier, but also can adopt other circuit.
Fig. 5 represents from an example of the drive signal of 2 lead-out terminal outputs of drive circuit 65c.The longitudinal axis is represented current potential, horizontal vertical express time.Drive circuit 65c produces output signal (the 1st pulse signal) A according to the control signal from logical circuit 65a OUT, output signal (the 2nd pulse signal) B OUTThese 2 output signal A OUT, B OUTBe input to 2 terminals (with reference to Fig. 1, Fig. 4) of piezoelectric element 1 as drive signal.
Be driven parts 3 and just be made as near the direction (right among Fig. 2) of piezoelectric element 1 and change making, be driven the direction that parts 3 leave piezoelectric element 1 and be made as counter-rotating making.2 output signal A when Fig. 5 represents just to change OUT, B OUTSignal waveform.In addition, for convenience of explanation, with output signal A OUT, B OUTIn the segment pulse of formation Hi output be called pulse signal A OUT, pulse signal B OUTAnd, between 1 pulse area, in (cycle is T), produce 2 pulse signal A OUT, pulse signal B OUT
2 pulse signal A OUT, B OUTBe same frequency f (period T), by making phase place difference each other, the potential difference that forms signal each other along a direction change step by step, along the signal that changes sharp in the other direction; The potential difference that perhaps forms signal each other along a direction change sharp, along the signal that changes step by step in the other direction.In addition, output signal A OUTAnd B OUTPotential difference be input to piezoelectric element 1, pulse signal A wherein OUT, B OUTAs drive signal, make piezoelectric element 1 elongation or contraction.Continuous by making between a plurality of pulse area, the stepper drive driving shaft 2 continuously.
Pulse signal A OUT, B OUTBe set to: for example an output signal is Hi output, is reduced to after the Lo output, and another output signal becomes Hi output.In addition, in these output signals, process certain time interval t when an output signal becomes Lo output OFFAfter, another output signal becomes Hi output.That is to say pulse signal B OUTWith pulse signal A OUTCompare, time delay time interval t OFFAnd constitute: by controlling this time interval t OFF, may command is timed to regularly interval of reverse charging, and is timed to ratio between the next positive charge interval regularly from this reverse charging from the positive charge of piezoelectric element 1.
Pulse signal A during counter-rotating OUT, B OUTAs described later, can be by control time interval t OFFGenerate.In addition, by controlling this time interval, the quiet controlling and driving signal of output when being formed on the quiet control of the motion and sound that reduces piezoelectric element 1.Output signal A OUT, B OUTHi output, the application time of Lo output etc. set by register memory 65b.
Shown in Fig. 6 (a), in register memory 65b, controlling and driving signal (the pulse A for how OUT, B OUT) waveform, action, time, select position and selection of time position to set with Action Selection position (Bit), waveform.In addition, owing to can set arbitrarily the selection of time position, so setting content omits.In register memory 65b, in store making is driven the common output signal setting that parts 3 move.For example, set output signal A in the mode shown in the table OUTPulse duration t1, output signal B OUTRelative output signal A OUTTime interval t OFF, output signal B OUTPulse duration t2, each output signal A OUT, B OUTPeriod T.In addition, except the setting of common output signal, the setting of 4 patterns of the quiet waveform that the also in store output signal that is used to reduce motion and sound is related.In these quiet waveforms, only set output signal B OUTRelative output signal A OUTTime interval t OFF, and for output signal A OUTPulse duration t1, output signal B OUTPulse duration t2, each output signal A OUT, B OUTPeriod T identical with the setting of common output signal.
By adopting the setting example shown in Fig. 6 (a), shown in Fig. 6 (b), in common waveform, output signal A OUTPulse duration t1 be a, output signal B OUTRelative output signal A OUTTime interval t OFFBe b, output signal B OUTPulse duration t2 be c, each output signal A OUT, B OUTPeriod T be d.In addition, in quiet waveform 1~4, compare with common waveform and only to change time interval t OFFFor example, in quiet waveform 1, time interval t OFFFor b1 (>b); In quiet waveform 2, time interval t OFFFor b2 (>b1); In quiet waveform 3, time interval t OFFFor b3 (>b2); In quiet waveform 4, time interval t OFFFor b4 (>b3).
Next, with reference to Fig. 7 the common waveform set among Fig. 6 and the element current of quiet waveform 1~4 are described.Fig. 7 (a) is the element current of common waveform, and Fig. 7 (b)~(e) is the element current of quiet waveform 1~4.In quiet waveform 1~4 with time interval t OFFChange into b1~b4, thereby under the state of holding current waveform and peak value, only change reverse charging regularly.According to the order of quiet waveform 1~4, time interval t OFFBecome big gradually, thereby reverse charging regularly moves closer to the centre between the positive charge timing.Reverse charging regularly moves closer to the centre between the positive charge timing, and actuating speed (being driven the translational speed of parts 3) is slow more.Therefore, the actuating speed of waveform is the fastest usually, and is slack-off gradually according to the order actuating speed of quiet waveform 1,2,3,4.That is to say,, can control the translational speed that is driven parts 3 by utilizing with the drive signal after the quiet waveform combination.
On the other hand,, be driven parts 3 and stop during in reverse charging regularly at positive charge middle between regularly.At this moment, for pulse signal A OUT, B OUT, from the potential difference of signal each other when a direction changes to time of changing inversely, with to this changing inversely the time to identical to the time of a direction variation once more.That is to say that piezoelectric element 1 is timed to regularly interval of reverse charging, identical with the interval that is timed to next positive charge timing from this reverse charging from positive charge.By the potential difference of these pulse signals, piezoelectric element 1 alternately extends repeatedly and shrinks according to certain intervals.And, vibrate with equidistant continuous and adjustable by driving shaft 8b, stop thereby being driven parts 3 (vibration dead state) under the state that floats slightly.
When positive charge middle between regularly regularly crossed in reverse charging, it was mobile in the other direction to be driven parts 3.Therefore, consistent with the moving direction based on common waveform in order to make based on the moving direction of quiet waveform 1~4, the time interval b1~b4 of quiet waveform 1~4 need not change in the scope that moves in the other direction being driven parts 3.That is to say, shown in Fig. 7 (a), set the time interval b of common waveform like that, make and be timed to reverse charging interval regularly from the positive charge of piezoelectric element 1, under the little situation in the interval that is timed to next positive charge from this reverse charging, be timed to reverse charging interval regularly in positive charge from piezoelectric element 1, be less than or equal in this reverse charging is timed to the scope at next positive charge interval regularly and (comprise from the positive charge of piezoelectric element 1 and be timed to reverse charging interval regularly, with be timed to the next positive charge identical situation in interval regularly from this reverse charging) set the time interval b1~b4 of static waveform 1~4.For example, in the common waveform shown in Fig. 7 (a), be timed to regularly interval of reverse charging, be set to 20: 80 with the ratio at the interval that is timed to next positive charge from this reverse charging from the positive charge of piezoelectric element 1.In this case, for example in quiet waveform 1~4, will be timed to regularly interval of reverse charging from the positive charge of piezoelectric element 1, be set in 25: 75,30: 70,40: 60,50: 50 with the ratio that is timed to next positive charge interval regularly from this reverse charging.
Below to the situation that is driven parts 3 edge opposite direction actions is described.Set the time interval b of common waveform, make and be timed to reverse charging interval regularly from the positive charge of piezoelectric element 1, under the big situation in the interval that is timed to next positive charge from this reverse charging, be timed to reverse charging interval regularly in positive charge from piezoelectric element 1, more than or equal to (comprising from the positive charge of piezoelectric element 1 and be timed to reverse charging interval regularly in the scope that is timed to next positive charge interval regularly from this reverse charging, with be timed to the next positive charge identical situation in interval regularly from this reverse charging) set the time interval b1~b4 of static waveform 1~4.For example, in common waveform, be timed to regularly interval of reverse charging, be set to 80: 20 with the ratio at the interval that is timed to next positive charge from this reverse charging from the positive charge of piezoelectric element 1.In this case, for example in quiet waveform 1~4, will be timed to regularly interval of reverse charging from the positive charge of piezoelectric element 1, be set in 75: 25,70: 30,60: 40,50: 50 with the ratio that is timed to next positive charge interval regularly from this reverse charging.
When forming the drive signal of the quiet waveform 1~4 of combination, according to time interval t OFFDiminish gradually or become big mode and make up.In addition, under the situation that common waveform and quiet waveform are linked up, adopt to have near the reverse charging reverse charging regularly quiet waveform regularly of waveform usually.For example, if the common waveform shown in Fig. 7 (a) then adopts the quiet waveform shown in Fig. 7 (b).
Fig. 8 is an example that is used to reduce the drive signal of motion and sound.Fig. 8 (a) be during usually driving the specified time limit before the beginning example during being provided with quiet driving, Fig. 8 (b) be during driving usually the specified time limit after the end example during being provided with quiet driving.Shown in Fig. 8 (a), during the quiet driving before the common drive signal (the 1st drive signal) that adopts common waveform applies beginning, apply the drive signal (the 2nd drive signal) that the pulse signal of quiet control usefulness is arranged in the following order, this is quiet driving 4, the quiet driving 3 of adopting quiet waveform 3, the quiet driving 2 of adopting quiet waveform 2 of adopting quiet waveform 4, the quiet driving 1 of adopting quiet waveform 1 in proper order.That is to say, the variation pattern of the pulse signal of quiet control usefulness is: along with the end during the approaching quiet driving, the difference between the reverse charging regularly in the reverse charging timing in the pulse signal of quiet control usefulness and the pulse signal of common driving usefulness diminishes.Thus, can weaken driving shaft 2 and be driven frictional engagement between the parts 3, so, the parts 3 that are driven in stopping to be moved smoothly, and the switching timing at the pulse signal of pulse signal that usually drives usefulness and quiet control usefulness is smoothly carried out the action that is driven parts 3.
In addition, shown in Fig. 8 (b), the common drive signal that adopts common waveform apply quiet driving after the end during, apply the drive signal that the pulse signal of quiet control usefulness is arranged in the following order, this in proper order for the quiet driving 1 of adopting quiet waveform 1, the quiet driving 2 of adopting quiet waveform 2, with the order of the quiet driving 4 of the quiet driving 3 of quiet waveform 3, the quiet waveform 4 of employing.That is to say, the variation pattern of the pulse signal of quiet control usefulness is: along with the end during the approaching quiet driving, the difference between the reverse charging regularly in the reverse charging timing in the pulse signal of quiet control usefulness and the pulse signal of common driving usefulness becomes greatly.Thus, can weaken driving shaft 2 and be driven frictional engagement between the parts 3, so, the parts 3 that are driven in moving are stopped smoothly, and the switching timing at the pulse signal of pulse signal that usually drives usefulness and quiet control usefulness is smoothly carried out the action that is driven parts 3.
Below, with reference to Fig. 9 the control and treatment that the mobile lens 102 that makes automatic focusing usefulness moves is described.This control and treatment is carried out in the timing that the CPU62 from control part 81 exports the movement directive of mobile lens 102.
CPU62 at first sets the driving number of times (S10) of piezoelectric element 1.For example, the common driving number of times during CPU62 sets and moves the preceding quiet controlling and driving number of times of beginning, moves, the quiet controlling and driving number of times after the mobile end.For example quiet controlling and driving number of times is set at " 4 ".After setting the driving number of times, CPU62 sets the burst length (S12) of common drive signal.CPU62 is for example with pulse duration t1, t2, the time interval t of common waveform OFF, period T is set at a, c, b, d respectively.Then, for example with the burst length (time interval t of quiet waveform 1 OFF) be set at b1 (S14).Then, for example with the burst length (time interval t of quiet waveform 2 OFF) be set at b2 (S16).Afterwards, for example with the burst length (time interval t of quiet waveform 3 OFF) be set at b3 (S18).Then, for example with the burst length (time interval t of quiet waveform 4 OFF) be set at b4 (S20).
Then, the set point that will set in the processing of S10~S20 of CPU62 sends to driver 65.Logical circuit 65a upgrades the set point of register memory 65b.Then, CPU62 will drive commencing signal and send to driver 65 (S22).Driver 65 select and be applied in the quiet waveform 1~4 of the quiet control usefulness of setting in the processing of S14~S18, have a maximum time interval t OFFQuiet waveform (here being quiet waveform 4) (S24).Then, count driving number of times, the quiet controlling and driving number of times before the mobile beginning of setting in the processing with itself and S10 compares (S26).When reaching quiet controlling and driving number of times, count value under the situation, is not transferred to the processing of S24 once more.In the processing of S24, driver 65 select and apply in the quiet waveform 1~3 of still unselected quiet control usefulness, have a maximum time interval t OFFQuiet waveform (here being quiet waveform 3).Like this, the time interval t of the quiet waveform that is applied OFFDiminish gradually, before moving beginning, become the drive signal shown in Fig. 8 (a).
In the processing of S26, count value reaches under the situation of quiet controlling and driving number of times, and driver 65 applies the common drive signal of setting in the processing of S12 (S28).Then, count, itself and the common driving number of times of setting in the processing of S10 that moves are compared (S30) driving number of times.Before count value reaches common driving number of times, carry out the processing of S28 repeatedly.
In the processing of S26, count value reaches under the situation of common driving number of times, driver 65 select and be applied in the quiet waveform 1~4 of the quiet control usefulness of setting in the processing of S14~S18, have a minimum time interval t OFFQuiet waveform (here being quiet waveform 1) (S32).Then, count driving number of times, with its with the mobile end of in the processing of S10, setting after quiet controlling and driving number of times compare (S34).Do not reach in count value under the situation of quiet controlling and driving number of times, be transferred to the processing of S32 once more.In the processing of S32, driver 65 select and apply in the quiet waveform 2~4 of still unselected quiet control usefulness, have a minimum time interval t OFFQuiet waveform (here being quiet waveform 2).Like this, the time interval t of the quiet waveform that is applied OFFBecome big gradually, the drive signal shown in Fig. 8 (b) behind mobile end, occurs.In the processing of S34, count value reaches under the situation of quiet controlling and driving number of times, finishes the control and treatment of focusing automatically.
By carrying out above control and treatment, when driving beginning, actuator 15 is applied the drive signal shown in Fig. 8 (a), when driving end, apply the drive signal shown in Fig. 8 (b), thus, be driven parts 3 and move along driving shaft 2 steppings.
As mentioned above, in drive unit and camera head that this form of implementation relates to, to be driven parts 3 and to move in order to make, apply from the positive charge of piezoelectric element 1 be timed to regularly interval of reverse charging, with the different common drive signal in interval that is timed to next positive charge timing from this reverse charging, and before the applying of common drive signal and the specified time limit after applying, apply the quiet controlling and driving signal of the reverse charging timing that only changes gradually in the common drive signal.Because the reverse charging of this quiet controlling and driving signal is regularly controlled as follows, just in scope, do not gradually change being driven parts 3 by the rightabout motion of the direction of common drive, therefore can control the translational speed that is driven parts 3, it is increased gradually or diminish gradually.Thus, be driven by common drive signal parts 3 begin to move before, finish to move after, can weaken driving shaft 2 and be driven frictional engagement between the parts 3, therefore, can move smoothly and be driven parts 3 in stopping, or be driven parts 3 in stopping smoothly moving.
In addition, according to drive unit and the camera head that this form of implementation relates to, can simplify the required structure of quiet control.In order to generate quiet controlling and driving signal, except considering time interval t OFFControl beyond, for example also can consider to change the pulse duration or the voltage of drive signal.As shown in figure 13, can consider pulse duration t1, t2 and time interval t with drive pulse signal OFF(((b1>b2>b3>b4) perhaps as shown in Figure 12, changes into V1~V4 (V1>V2>V3>V4) gradually with the voltage V of drive pulse signal for c1>c2>c3>c4), b1~b4 for a1>a2>a3>a4), c1~c4 to change into a1~a4 gradually.
But, under the situation of the pulse duration that changes drive signal, must change pulse duration t1, t2 and the time interval t of quiet waveform 1~4 OFFThe register that Figure 10 adopts when being the control impuls width is set example.As shown in figure 10, set example with the register shown in Fig. 6 (a) and compare, need be used to control the pulse duration t1 of quiet waveform 1~4, the register of t2.Thus, set processing (S14~S20), increase so handle load, and might compress the capacity of register memory 65b because increased the register relevant with quiet waveform shown in Figure 9.In addition, carrying out needing potential circuit under the voltage-controlled situation.The example of the driver 65 that Figure 11 adopts when being control voltage.As shown in figure 11, when control voltage, owing to need have reduction voltage circuit 1~4, so circuit scale might be bigger than driver shown in Figure 4 65.With respect to this, the drive unit and the camera head that relate to according to this form of implementation, the pulse duration of controlling and driving signal and voltage by only controlling the regularly this simple control and simple structure of reverse charging in the common drive signal, can not realized the reduction of motion and sound.
In addition, as shown in Figure 12 and Figure 13, under the situation that the pulse duration that makes drive pulse signal narrows down or reduce under the voltage condition, the distortion of element current waveform.Therefore, when electrostatic capacitance change, the situation of the reduction action of motion and sound can't be stably carried out in existence.Figure 14 is the temperature dependent curve chart of expression electrostatic capacitance.Electrostatic capacitance C 1~C 5Show the temperature dependency of the electrostatic capacitance in the prescribed material.As shown in figure 14, follow temperature rising electrostatic capacitance that the trend of increase is arranged.Therefore, when high temperature and during low temperature, the situation during with normal temperature is compared, and changing will appear in the peak strength of element current.
Figure 15 is a curve chart of representing the element current of quiet relatively controlling and driving signal according to temperature.Figure 15 (A) is control time t at interval only OFFQuiet controlling and driving signal, be the quiet waveform of the quiet driving 4 shown in Fig. 7 (e).In addition, Figure 15 (B) is a quiet controlling and driving signal of only controlling voltage, is the quiet waveform of the quiet driving 4 shown in Figure 12 (e).In addition, Figure 15 (C) is control impuls width t1, t2, time interval t OFFQuiet controlling and driving signal, be the quiet waveform of the quiet driving 4 shown in Figure 13 (e).(a) element current when being normal temperature among Figure 15 (A)~(C), the element current when (b) being low temperature, the element current when (c) being high temperature.
When generating quiet controlling and driving signal by voltage control, shown in Figure 15 (B), the peak strength of the element current under the normal temperature is h2.Shown in this element current waveform,, therefore under the state that piezoelectric element 1 is not fully charged as yet, discharge because voltage V4 is less.Then, because electrostatic capacitance diminishes at low temperatures, so the peak strength of the element current under the low temperature is the h3 greater than h2.In addition, because at high temperature electrostatic capacitance is bigger, so the peak strength of the element current under the high temperature is the h4 less than h2.Like this, follow variations in temperature, peak strength presents bigger variation.
In addition, when generating quiet controlling and driving signal by the control impuls width and the time interval, shown in Figure 15 (C), the peak strength of the element current under the normal temperature is h5.Shown in this element current waveform,, therefore under the state that piezoelectric element 1 is not fully charged as yet, discharge because pulse duration a4 is less.Then, because electrostatic capacitance diminishes at low temperatures, so the peak strength of the element current under the low temperature is the h6 greater than h5.In addition, because at high temperature electrostatic capacitance becomes big, so the peak strength of the element current under the high temperature is the h7 less than h5.Like this, follow variations in temperature, peak strength presents bigger variation.
With respect to this, when generating quiet controlling and driving signal at interval, shown in the element current waveform under the normal temperature of Figure 15 (A), under the state that piezoelectric element 1 has been carried out abundant charging, discharge as can be known by control time only.Thus, even because but electrostatic capacitance changes still not change of peak strength h1 under low temperature, high temperature, therefore can be by only the control time is carried out stable quiet control action at interval.
In addition, also consider the situation that the electrostatic capacitance because of individual difference piezoelectric element 1 changes.Figure 16 is a curve chart of representing the element current of quiet relatively controlling and driving signal according to electrostatic capacitance.Figure 16 (A) is control time t at interval only OFFQuiet controlling and driving signal, be the quiet waveform of the quiet driving 4 shown in Fig. 7 (e).In addition, Figure 16 (B) is a quiet controlling and driving signal of only controlling voltage, is the quiet waveform of the quiet driving 4 shown in Figure 12 (e).In addition, Figure 16 (C) is control impuls width t1, t2, time interval t OFFQuiet controlling and driving signal, be the quiet waveform of the quiet driving 4 shown in Figure 13 (e).(a) among Figure 16 (A)~(C) is the element current with piezoelectric element 1 of typical electrostatic capacitance, (b) is the element current of the minimum piezoelectric element of electrostatic capacitance 1, (c) is the element current of the highest piezoelectric element of electrostatic capacitance 1.Only controlling under the voltage condition, identical with Figure 15 under the situation in the control impuls width and the time interval, because of the difference of electrostatic capacitance, the charging peak strength changes.On the other hand, by only the control time generates under the situation of quiet controlling and driving signal at interval, shown in the element current waveform of the piezoelectric element with typical electrostatic capacitance 1 of Figure 15 (A), in that having been carried out, piezoelectric element 1 discharges under the state of charging fully.Thus, even changing appears in electrostatic capacitance under low temperature, high temperature, peak strength h1 does not change yet.Like this, can be by only the control time is carried out stable quiet control action at interval.
In addition, above-mentioned form of implementation shows the drive unit that the present invention relates to and an example of Optical devices.Drive unit that the present invention relates to and Optical devices are not limited to the drive unit and the Optical devices of form of implementation, also can be in the scope that does not change record main points in the summary of the invention, drive unit and Optical devices that form of implementation is related to are out of shape, or are applicable to others.
For example, in above-mentioned form of implementation, be illustrated with the situation about moving of mobile lens 102 being applicable to automatic focusing, still, also moving applicable to zoom lens assembly portion 16 grades.In addition, also can be used for making object beyond the mobile lens 102 (such as, platform (stage), probe (probe) etc.) move.In addition, also can hand to tremble correction mechanism such, be used for driving the situation of revising lens with the perpendicular direction of optical axis.
Also have, in above-mentioned form of implementation, drive unit moves optical element, but the printhead of ink jet type is moved.
Have again, in above-mentioned form of implementation, be installed on the fixed mount 4, thus, make the end of piezoelectric element 1 become free end, but also the end of piezoelectric element 1 can be installed on the fixed mount 4 via the side of support component 5 with piezoelectric element 1.
In addition, in above-mentioned way of realization, to before the applying of common drive signal or the example that applies quiet controlling and driving signal in the specified time limit after applying be illustrated, but, for example also can be only in the situation that applies quiet controlling and driving signal specified time limit before the beginning of applying of common drive signal, can also be only in the situation that applies quiet controlling and driving signal specified time limit after the end of applying of common drive signal.
In addition, in above-mentioned form of implementation, driver part adopts piezoelectric element, but in addition also can adopt the driver part of motor, polymer actuator, marmem etc.

Claims (8)

1. a drive unit is characterized in that,
Comprise: the electromechanical conversion element, carry out stretching motion by drive signal;
Driving shaft is installed on above-mentioned electromechanical conversion element, along with the expanding-contracting action of above-mentioned electromechanical conversion element moves back and forth;
Be driven parts,, move by the reciprocating motion of above-mentioned driving shaft with above-mentioned driving shaft friction apply; With
Driving signal control circuit to above-mentioned electromechanical conversion element, applies above-mentioned drive signal,
Above-mentioned driving signal control circuit, make above-mentioned when being driven parts and moving, above-mentioned electromechanical conversion element is applied the 1st drive signal, the 1st drive signal be the positive charge from above-mentioned electromechanical conversion element be timed to regularly interval of reverse charging, with the different drive signal in interval that is timed to next positive charge timing from this reverse charging
Promptly finish at least one specified time limit between the later stage during between promptly beginning in earlier stage during before beginning to apply above-mentioned the 1st drive signal and after finishing to apply above-mentioned the 1st drive signal, above-mentioned electromechanical conversion element is applied the 2nd drive signal, and the 2nd drive signal is only to allow the above-mentioned reverse charging in above-mentioned the 1st drive signal regularly be driven the drive signal that parts can not change gradually above-mentioned in the scope by the rightabout motion of the direction of the 1st drive.
2. drive unit according to claim 1 is characterized in that,
Above-mentioned electromechanical conversion element is a piezoelectric element.
3. drive unit according to claim 2 is characterized in that,
Comprise: the breach of V font is formed at the above-mentioned parts that are driven;
The 1st sliding panel is fixed in the above-mentioned breach, forms the V font in the mode that contacts with 2 positions of above-mentioned driving shaft;
The 2nd sliding panel is positioned at the opposition side of above-mentioned the 1st sliding panel, forms the V font in the mode that contacts with 2 positions of above-mentioned driving shaft; With
The leaf spring that is the L font is fixed in the above-mentioned parts that are driven, and above-mentioned the 2nd sliding panel is pressed to above-mentioned driving shaft.
4. drive unit according to claim 1 is characterized in that,
Above-mentioned driving signal control circuit, between above-mentioned beginning in earlier stage, apply under the situation of above-mentioned the 2nd drive signal, change the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal, make that along with the end between approaching above-mentioned beginning in earlier stage the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal diminishes with the above-mentioned reverse charging difference regularly in above-mentioned the 1st drive signal.
5. drive unit according to claim 1 is characterized in that,
Above-mentioned driving signal control circuit, applying between the above-mentioned end later stage under the situation of above-mentioned the 2nd drive signal, change the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal, make that along with the end between the approaching above-mentioned end later stage the above-mentioned reverse charging timing in above-mentioned the 2nd drive signal becomes greatly with the poor of above-mentioned reverse charging timing in above-mentioned the 1st drive signal.
6. according to claim 5 or 6 described drive units, it is characterized in that,
Above-mentioned driving signal control circuit by constituting as lower member is respectively:
CPU, output is used to specify the above-mentioned the 1st and the set point of the waveform of the 2nd drive signal;
Register memory is preserved above-mentioned set point;
Logical circuit, based on the set point in the above-mentioned register memory, the output control signal; With
Drive circuit amplifies carry out voltage amplification or electric current from the above-mentioned control signal of above-mentioned logical circuit, exports as the above-mentioned the 1st and the 2nd drive signal.
7. Optical devices is characterized in that,
Possess the described drive unit of claim 1,
Make optical element and above-mentionedly be driven parts interlocks, thereby make above-mentioned optical element in the optical axis direction or the control of moving with the perpendicular direction of above-mentioned optical axis direction.
8. the drive controlling method of a drive unit, this drive unit makes the driving shaft of electromechanical conversion element flexible vertically, thereby the parts stepping that is driven that is embedded in driving shaft is moved, and the drive controlling method feature of above-mentioned drive unit is to carry out following steps, is respectively:
Apply the step of the 1st drive signal, make above-mentioned when being driven parts and moving, above-mentioned electromechanical conversion element is applied the 1st drive signal, the 1st drive signal be the positive charge from above-mentioned electromechanical conversion element be timed to regularly interval of reverse charging, with the different drive signal in interval that is timed to next positive charge timing from this reverse charging; With
Apply the step of the 2nd drive signal, promptly finish at least one specified time limit between the later stage during between promptly beginning in earlier stage during before beginning to apply above-mentioned the 1st drive signal and after finishing to apply above-mentioned the 1st drive signal, above-mentioned electromechanical conversion element is applied the 2nd drive signal, and the 2nd drive signal is only to allow the above-mentioned reverse charging in above-mentioned the 1st drive signal regularly be driven the drive signal that parts can not change gradually above-mentioned in the scope by the rightabout motion of the direction of the 1st drive.
CN201010625062.3A 2009-12-04 2010-12-03 Drive device and driving method thereof, and optical device Expired - Fee Related CN102158123B (en)

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