CN102129963B - 双臂式机械手臂及其搬运板件的方法 - Google Patents
双臂式机械手臂及其搬运板件的方法 Download PDFInfo
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- CN102129963B CN102129963B CN 201010559558 CN201010559558A CN102129963B CN 102129963 B CN102129963 B CN 102129963B CN 201010559558 CN201010559558 CN 201010559558 CN 201010559558 A CN201010559558 A CN 201010559558A CN 102129963 B CN102129963 B CN 102129963B
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- Prior art keywords
- mechanical arm
- plate
- arm
- double
- process equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201010559558 CN102129963B (zh) | 2010-11-25 | 2010-11-25 | 双臂式机械手臂及其搬运板件的方法 |
US13/000,585 US20120136472A1 (en) | 2010-11-25 | 2010-12-06 | Dual-arm type robotic arm and its method of transporting panels |
PCT/CN2010/079448 WO2012068745A1 (zh) | 2010-11-25 | 2010-12-06 | 双臂式机械手臂及其搬运板件的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201010559558 CN102129963B (zh) | 2010-11-25 | 2010-11-25 | 双臂式机械手臂及其搬运板件的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102129963A CN102129963A (zh) | 2011-07-20 |
CN102129963B true CN102129963B (zh) | 2013-03-13 |
Family
ID=44267999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201010559558 Expired - Fee Related CN102129963B (zh) | 2010-11-25 | 2010-11-25 | 双臂式机械手臂及其搬运板件的方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102129963B (zh) |
WO (1) | WO2012068745A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101410246B1 (ko) * | 2013-03-18 | 2014-06-20 | 주식회사 로보스타 | 패널 반송용 트리플 암 로봇 |
JP6435669B2 (ja) * | 2014-07-04 | 2018-12-12 | 三星ダイヤモンド工業株式会社 | 基板加工装置 |
CN105151776B (zh) * | 2015-09-23 | 2017-10-31 | 京东方科技集团股份有限公司 | 一种机械手 |
CN106882596B (zh) | 2017-03-23 | 2019-07-16 | 京东方科技集团股份有限公司 | 基板上下料***、基板上料方法及基板下料方法 |
CN109454640A (zh) * | 2018-11-14 | 2019-03-12 | 惠科股份有限公司 | 一种缩短交换片时长的方法 |
CN115172240B (zh) * | 2022-09-07 | 2022-12-02 | 江苏邑文微电子科技有限公司 | 一种晶圆运输***及晶圆运输方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1383199A (zh) * | 2001-04-25 | 2002-12-04 | 株式会社爱科技 | 机械手的驱动装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002158272A (ja) * | 2000-11-17 | 2002-05-31 | Tatsumo Kk | ダブルアーム基板搬送装置 |
JP2005150575A (ja) * | 2003-11-19 | 2005-06-09 | Nachi Fujikoshi Corp | ダブルアーム型ロボット |
JP4648161B2 (ja) * | 2005-11-14 | 2011-03-09 | 平田機工株式会社 | ダブルアーム列式基板搬送用ロボット |
JP2007186321A (ja) * | 2006-01-16 | 2007-07-26 | Murata Mach Ltd | 板材の搬送システム |
WO2008023560A1 (fr) * | 2006-08-21 | 2008-02-28 | Kabushiki Kaisha Yaskawa Denki | Robot à bras doubles |
CN101549493B (zh) * | 2008-06-19 | 2010-07-28 | 大连理工大学 | 一种双臂玻璃基板搬运机器人 |
JP5102717B2 (ja) * | 2008-08-13 | 2012-12-19 | 大日本スクリーン製造株式会社 | 基板搬送装置およびこれを備えた基板処理装置 |
-
2010
- 2010-11-25 CN CN 201010559558 patent/CN102129963B/zh not_active Expired - Fee Related
- 2010-12-06 WO PCT/CN2010/079448 patent/WO2012068745A1/zh active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1383199A (zh) * | 2001-04-25 | 2002-12-04 | 株式会社爱科技 | 机械手的驱动装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2012068745A1 (zh) | 2012-05-31 |
CN102129963A (zh) | 2011-07-20 |
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GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Dual-arm mechanical arm and method for moving plates by using same Effective date of registration: 20190426 Granted publication date: 20130313 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20130313 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 |