CN102115029A - Large-scale welding method for carbon nano tube devices - Google Patents
Large-scale welding method for carbon nano tube devices Download PDFInfo
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- CN102115029A CN102115029A CN2009102478854A CN200910247885A CN102115029A CN 102115029 A CN102115029 A CN 102115029A CN 2009102478854 A CN2009102478854 A CN 2009102478854A CN 200910247885 A CN200910247885 A CN 200910247885A CN 102115029 A CN102115029 A CN 102115029A
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Abstract
The invention relates to a large-scale welding method for carbon nano tube devices. A carbon nano tube is deposited on a wafer including a graphical electrode by adopting a dielectrophoresis method, the wafer is placed on a carrying table of a radio-frequency induction heating system for heating for a short time, the wafer is cooled under the condition of vacuum or protective gas, a heating coil is set according to an electrode pattern. The welding method includes the following steps of: A. dispersing carbon nano tubes; B. connecting a positioning and orientating bridge of the nano tubes between an electrode pair; and C. connecting the carbon nano tubes with the electrode in a welding manner. The large-scale welding method has the advantages of adopting a radio-frequency induction heating method, being simple in process, fast in welding speed, good in repeatability and high in reliability, and being capable of realizing production on a large scale, and realizing large-scale effective welding of the wafer-level carbon nano tube devices.
Description
Technical field
The present invention relates to a kind of minute manufacturing method, the extensive welding method between particularly a kind of CNT and the metal electrode.
Background technology
CNT is because its good electricity, machinery and calorifics attribute have great application potential.In micro-nano device.At present most ofly mainly concentrate on the prototype of device at the research of carbon nano tube device, for example field-effect transistor and based on the sensor of CNT is devoted to replace some assembly in the current electronic circuit.In addition, CNT can be used as the interconnection line of circuit, plays the part of extremely important role in nanometer electronic device.Therefore the contact between CNT and the metal electrode and be welded into the major issue that the carbon nanotube device is made.Yet the manufacturing process of many early stage carbon nano tube devices just simply is deposited on surface of metal electrode with CNT, does not weld reliably, and this can cause between CNT and the electrode mechanical strength very poor and contact resistance is very high.These shortcomings have hindered the practical application of CNT in the micro-nano field of electronic devices.In order to realize the effective welding contact between CNT and the metal electrode, many researchers have attempted many methods, for example at CNT and Metal Contact zone CNT and metal electrode are welded by electron beam and ion beam irradiation, the contact resistance several magnitude that can descend according to the method, however this method is because its technology difficulty is difficult for the real large-scale application that realizes more greatly.In addition, the rapid thermal annealing method also is proved to be and can reduces contact resistance, and in the method, entire substrate comprises CNT, patterned electrodes and other apparatus assemblies, be placed on up in 600～800 ℃ the environment temperature, this high temperature will seriously limit the selection of other materials on the substrate and use.Recently, the ultra-sonic welded technology has realized welding between CNT and the metal electrode, this welding method is pressed in CNT on the metal electrode by ultrasonic probe, although this method can obtain lower contact resistance, welding process is easy to lesion electrode.So this method has a same shortcoming, promptly be to weld single position at every turn, and can not be applied to the manufacturing of extensive carbon nano tube device.Thereby in order to realize the extensive use of carbon nano tube device, the batch that needs a kind of extensive welding method of research to satisfy extensive carbon nano tube device is reliably made.
Summary of the invention
The objective of the invention is at the defective that exists in the prior art, the extensive welding method between a kind of CNT and the metal electrode is provided.Method by dielectrophoresis is deposited on CNT on the disk that comprises patterned electrodes; disk is put on the objective table of radio frequency induction heating system; carry out the heating of short time; disk is cooled off under the condition of vacuum or protective gas; heater coil is according to the electrode pattern setting, and welding method comprises following steps:
A. by solution CNT is disperseed
B. by the dielectrophoresis method carbon nanotubes positioned is oriented between the electrode, voltage is from 0.1V to 100V, and electric field frequency is from 10KHz to 100MHz;
C. by the mode of radio frequency induction heating surface of metal electrode is melted fast, makes CNT and metal electrode carry out effectively reliably welding, the power excursion be 50W to 1500W, frequency range is that 100KHz is to 50MHz.
Advantage of the present invention is the radio frequency induction heating means that adopt, technology is simple, speed of welding is fast, good reproducibility, the reliability height can be realized manufacturing in enormous quantities, do not introduce impurity, other structures of damage device with the microelectronic technique compatibility, can not realize the extensive effectively welding of wafer level carbon nano tube device.
Description of drawings
Fig. 1 radio frequency induction adds the structural representation of thermal weld CNT and electrode;
The disk that Fig. 2 A includes CNT and patterned electrodes is placed on the schematic diagram in the radio frequency induction heater coil;
The structural representation of patterned electrodes and CNT on Fig. 2 B substrate;
The schematic diagram of CNT bridging between two isolated electrodes before the heating of Fig. 3 A radio frequency induction;
Fig. 3 B radio frequency induction heating back CNT is absorbed in the schematic diagram of metal electrode;
Fig. 4 A dielectrophoresis deposition of carbon nanotubes sem photograph;
The CNT after the heating of Fig. 4 B radio frequency induction and the sem photograph of electrode pair;
The local sem photograph that welds with CNT of Fig. 4 C electrode;
Fig. 5 A welding rear electrode between I-V curve resolution chart;
Fig. 5 B20 is to resistance variations figure before and after the electrode welding.
Among the figure: 11 cooling systems, 12 radio-frequency power supplies,, 13 coils, 14 glass base, 15 disks, 16 metal electrodes, 17 CNTs.
The specific embodiment
Embodiment one
Welding equipment and material comprise: the radio frequency induction heating system, and disk 15 and electrode 16 are deposited on the CNT 17 on the electrode, and the radio frequency heating system is by radio-frequency power supply, water-cooling system, heater coil, glass base is formed, referring to Fig. 1.The radio frequency induction heating system comprises 4 parts: radio-frequency power supply 11 provides heating required power, and cooling system 12 is used for cooling coil 13, and disk 15 is supported in the magnetic field that coil 13 is used to change when glass base 14 is used to weld.Water-cooling system comprises the helix tube that covers the coil outer surface, realizes the cooling of coil by the current piping.In order to realize the best thermal effect that adds, the structure of coil 13 changes along with the variation of electrode type, shape, size and thickness.Heater coil 13 is according to the electrode pattern setting, and electrode 16 is made by photoetching and stripping technology, and the shape of electrode changes with the design of carbon nano tube device is different with thickness.Electrode 16 is a metal alloy compositions, is made by photoetching process and stripping technology.Described CNT is SWCN or multi-walled carbon nano-tubes or carbon nano-tube bundle.
Utilize the dielectrophoresis method that CNT is deposited between the electrode pair.The employed electric field frequency of electrophoresis is from 10KHz to 100MHz, and the electrophoresis applied voltage is from 0.1V to 100V, and the electrophoresis time scope is 1 second to 600 seconds.Pattern electrodes and CNT are shown in Fig. 2 B.
Welding method comprises following steps:
1) dispersion of CNT
CNT after the CVD growth is put into DMF (dimethylformamide, dimethyl formamide) solution, ultrasonic 8 hours, 80 watts of ultrasonic powers, centrifugal 1 hour, 16000 rev/mins of centrifugal revolutions.Take out the solution on upper strata 10%, centrifugal back, this solution concentration is diluted to 10 mcg/ml, effective dispersion of ultrasonic 2 hours realization CNTs.
2) positioning and directing of CNT
Electrode is made by standard photoetching, sputter, stripping technology.With silicon chip thermal oxide layer of silicon dioxide, plate 10nm chromium successively, 500nm nickel, 200nm titanium, 1.5 microns of electrode pair spacings.By the dielectrophoresis method carbon nanotubes positioned is oriented between the electrode pair, the employed electric field frequency of electrophoresis is 3MHz, and the electrophoresis applied voltage is 20 volts, and electrophoresis time is 30 seconds.Shown in Fig. 4 A.
3) welding of CNT
The substrate of positioning and directing CNT is placed in the middle of the load coil, surface of metal electrode is melted fast, make CNT and metal electrode carry out effectively reliably welding, as shown in Figure 1 by the mode of radio frequency induction heating.The power of radio frequency source is changed to 1000W, and frequency is 13.56MHz, and be 1 second heat time heating time.Welding effect is shown in Fig. 4 B and Fig. 4 C.
CNT after the welding is put into the electrical testing platform, and I-V curve test result is shown in Fig. 5 A.The result shows: this welding method effectively strengthens contacting between CNT and the electrode, reduces contact berrier, is Ohmic contact between welding back CNT and the metal.
Embodiment two
Embodiment two is identical with embodiment one, and it is poised for battle different is soldered electrode and classifies 200 pairs as.From 200 pairs of electrode pairs, choose 20 pairs of electrode pairs immediately and carry out electrical testing, before and after the welding between the electrode pair resistance variations to such as shown in Fig. 5 B.The result shows: after the welding, between the electrode pair resistance on average drop to the welding before 1.21%, the welding high conformity.This welding method is applicable to extensive CNT welding.
Claims (7)
1. extensive welding method that is used for carbon nano tube device; it is characterized in that CNT being deposited on the disk that comprises patterned electrodes by the method for dielectrophoresis; disk is put on the objective table of radio frequency induction heating system; carry out the heating of short time; disk is cooled off under the condition of vacuum or protective gas; heater coil is according to the electrode pattern setting, and welding method comprises following steps:
A. by solution CNT is disperseed
B. by the dielectrophoresis method carbon nanotubes positioned is oriented between the electrode, voltage is from 0.1V to 100V, and electric field frequency is from 10KHz to 100MHz;
C. by the mode of radio frequency induction heating surface of metal electrode is melted fast, makes CNT and metal electrode carry out effectively reliably welding, the power excursion be 50W to 1500W, frequency range is that 100KHz is to 50MHz.
2. the extensive welding method that is used for carbon nano tube device according to claim 1 is characterized in that described radio frequency heating system comprises: radio-frequency power supply, water-cooling system, heater coil, glass base.
3. the extensive welding method that is used for carbon nano tube device according to claim 1 is characterized in that described CNT is SWCN or multi-walled carbon nano-tubes or carbon nano-tube bundle.
4. the extensive welding method that is used for carbon nano tube device according to claim 2 is characterized in that described water-cooling system comprises the helix tube that covers the coil outer surface, realizes the cooling of coil by the current piping.
5. the extensive welding method that is used for carbon nano tube device according to claim 1 is characterized in that described electrode is a metal alloy compositions, is made by photoetching process and stripping technology.
6. the extensive welding method that is used for carbon nano tube device according to claim 1 is characterized in that voltage in the described dielectrophoresis method from 0.1V to 100V, and electric field frequency is from 10KHz to 100MHz, and the time parameter scope is 1 second to 600 seconds.
7. the extensive welding method that is used for carbon nano tube device according to claim 1, the power excursion that it is characterized in that described radio frequency source is that 50W is to 1500W, the frequency range of radio frequency source be 100KHz to 100MHz, radio frequency is no more than 10 minutes heat time heating time.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111092155A (en) * | 2019-10-28 | 2020-05-01 | 温州大学 | Metal nanoparticle-containing single-walled carbon nanotube intramolecular junction and preparation method and application thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1819970A (en) * | 2003-07-18 | 2006-08-16 | 赤松则男 | Carbon nanotube manufacturing apparatus and method |
| CN101428754A (en) * | 2008-12-11 | 2009-05-13 | 上海纳米技术及应用国家工程研究中心有限公司 | Connection treatment method for carbon nano-tube and metal electrode |
| US20090314642A1 (en) * | 2008-04-25 | 2009-12-24 | Zhiyin Gan | Carbon nanotubes bonding on metallic electrodes |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1819970A (en) * | 2003-07-18 | 2006-08-16 | 赤松则男 | Carbon nanotube manufacturing apparatus and method |
| US20090314642A1 (en) * | 2008-04-25 | 2009-12-24 | Zhiyin Gan | Carbon nanotubes bonding on metallic electrodes |
| CN101428754A (en) * | 2008-12-11 | 2009-05-13 | 上海纳米技术及应用国家工程研究中心有限公司 | Connection treatment method for carbon nano-tube and metal electrode |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111092155A (en) * | 2019-10-28 | 2020-05-01 | 温州大学 | Metal nanoparticle-containing single-walled carbon nanotube intramolecular junction and preparation method and application thereof |
| CN111092155B (en) * | 2019-10-28 | 2023-01-17 | 温州大学 | Metal nanoparticle-containing single-walled carbon nanotube intramolecular junction and preparation method and application thereof |
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Application publication date: 20110706 |