CN102097982A - Permanent-magnet synchronous magnetic suspension planar motor - Google Patents
Permanent-magnet synchronous magnetic suspension planar motor Download PDFInfo
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Abstract
The invention provides a permanent-magnet synchronous magnetic suspension planar motor, which comprises a rotor and a stator, wherein the stator employs a specific two-dimensional permanent magnet array; a first main permanent magnet and a second main permanent magnet in the two-dimensional permanent magnet array are staggered along an X direction and an Y direction to form a planar array; four second secondary permanent magnets are arranged at the periphery of the first main permanent magnet; four third secondary permanent magnets are arranged at the periphery of the second main permanent magnet; a first secondary permanent magnet is arranged between the second secondary permanent magnets and the third secondary permanent magnets; and the side surfaces of each permanent magnet and the side surfaces of adjacent permanent magnets thereof are jointed with each other; all the included angles between the magnetization directions of any two adjacent permanent magnets in the two-dimensional permanent magnet array are 45 DEG. By the specific two-dimensional permanent magnet array, the magnetic field intensity of the motor is high, the sinusoidal characteristic is good, and the deficiency of the existing permanent-magnet synchronous magnetic suspension planar motor that high precision, high response and high efficiency cannot be taken into account together is compensated. The permanent-magnet synchronous magnetic suspension planar motor provided by the invention is a planar motor with better performance.
Description
Technical field
The invention belongs to the precise motion apparatus field, be specifically related to a kind of permanent-magnet synchronous maglev planar motor that adopts specific two-dimentional permanent magnet array.
Background technology
Along with science and technology and industrial development, can realize that plane motion and pinpoint device just more and more are applied in the industrial equipment.Traditional plane motion device structurally overlaps or overlaps the linear drives unit more by two and vertically superposes, and realizes plane motion by interlock in control.Plane motion device for this form, the driving on the predetermined direction not only will be born in the linear drives unit that is positioned at bottom, but also the quality that needs to carry linear drives unit, upper strata, so caused telecontrol equipment (as the directions X and the Y direction of traditional X-ray Y workbench) movement inertia seriously unbalanced on a plurality of directions, thereby influenced the raising of performance index such as stroke, speed, acceleration and precision; And owing to connect with bearing by mechanical guide rail between the stator of motor and the mover, friction, wearing and tearing, vibration and noise are inevitable, influence kinematic accuracy and speed.Under this background, adopt electromagnetic force directly to drive mover and realize that directly the planar motor of multifreedom motion arises at the historic moment, than traditional multiple degrees of freedom workbench, it has broad application prospects in the two-dimensional positioning system of precision, the precise motion equipment that particularly needs vacuum environment and can not use air supporting to support is as the EUV lithographic equipment.
According to the plane motion mode of planar motor, it can be divided into the floating mode of mechanical support, air supporting and magnetic.Wherein the mechanical support mode adopts mechanical guide rail guiding, and coefficient of friction is bigger, and can only do X, the operation of Y two-freedom, can only realize general precision and ordinary movement speed; Air supporting is supported and is used air-bearing to realize plane floatation, but can not be used for vacuum condition; The floating mode of magnetic is simple in structure, and can use in particular surroundingss such as vacuum environments, thereby becomes the main direction of research.
The magnetic-floating plane motor produces interaction force by energising winding and the magnetic field that is arranged in permanent magnet array magnetic field, moving component is suspended, and drive motion components is done plane motion.Mainly contain three kinds of magnetic-floating plane motors at present, be respectively induction planes motor, Sawyer planar motor and permanent-magnet synchronous maglev planar motor, and the permanent-magnet synchronous maglev planar motor be because can realize big stroke motion, and has higher performance, thereby becomes developing direction.
The key of high-performance permanent-magnet synchronous maglev planar motor design is to design rational electromagnetic structure, makes it reach requirements such as high accuracy, high response and high efficiency.And high accuracy and high response require accurate magnetic field structure and controllability, promptly require magnetic field to have good sine; High efficiency then requires can produce high magnetic field intensity in the same volume.
Permanent magnet array is the source of the permanent magnetic field of permanent-magnet synchronous maglev planar motor, and the magnetic field of its generation planar is period profile, and has monolateral property, can produce very strong magnetic field in a plane of array.Therefore, designing rational permanent magnet array structure, make the Distribution of Magnetic Field of its generation have high intensity and good sine, is the key that improves permanent-magnet synchronous maglev planar motor performance.Therefore, the difference of permanent-magnet synchronous maglev planar motor mainly is the difference of permanent magnet array structure.Present permanent-magnet synchronous maglev planar motor both domestic and external nearly all adopts two-dimentional permanent magnet array, and main several structures as shown in Figure 1.(U.S.Patent 4626749, Dec.1986) the middle proposition in patent " Two dimensional positioning devices " by Asakawa for array format shown in Fig. 1 (a); Array format shown in Fig. 1 (b) is proposed in patent " Two-axis motor with high densitymagnetic platen " (U.S.Patent 5777402, and July 1998) by Chitayat; (U.S.Patent 5,631 618, May1997) the middle proposition in patent " Magnetic arrays " by Trumper for array format shown in Fig. 1 (c); Array format shown in Fig. 1 (d) by people such as Cho at article " Magnetic fieldanalysis of 2-D permanent magnet array for planar motor " (IEEE Transactionson Magnetics, 2001,37 (5): propose 3762-3766.); Array format shown in Fig. 1 (e) by people such as J.W.Jansen at article " Modeling of Magnetically Levitated PlanarActuators With Moving Magnets " (IEEE Transactions on Magnetics, vol.43, no.1, Jan.2007.) the middle proposition; Array format shown in Fig. 1 (f) by people such as Wei Min at article " Analysis and Optimization of a New 2-D Magnet Array for Planar Motor " (IEEE Transactions on Magnetics, vol.46, no.5, May 2010.) the middle proposition.In these structures, the magnetic packaging density of array format is very low shown in Fig. 1 (a), Fig. 1 (b) and Fig. 1 (c), so magnetic field intensity is very low; The magnetic field intensity of the array format of Fig. 1 (d) is planted than first three and is wanted high, this article " Magnetic field analysis of 2-D permanent magnet array forplanar motor " (IEEE Transactions on Magnetics at Cho, 2001,37 (5): obtained proof 3762-3766.); Array format shown in Fig. 1 (e) make array produce higher magnetic field intensity, but the sine of its magnetic flux distribution is relatively poor by after optimizing.Array format can produce sine magnetic field preferably shown in Fig. 1 (f), but its magnetic field intensity is lower than Fig. 1 (e).Therefore along with the requirement to the indexs such as speed, acceleration, load capacity, positioning accuracy and running stability of planar motor improves constantly, designing the permanent magnet array with the good Distribution of Magnetic Field of high strength more and sine, is the target that the researcher makes great efforts to seek.
Summary of the invention
The purpose of this invention is to provide a kind of permanent-magnet synchronous maglev planar motor that adopts specific two-dimentional permanent magnet array, solve the problem that the high accuracy of permanent-magnet synchronous maglev planar motor in the prior art, high response and high efficiency can not be taken into account.
A kind of permanent-magnet synchronous maglev planar motor provided by the invention, comprise mover and stator, described stator is made up of two-dimentional permanent magnet array, and described two-dimentional permanent magnet array is formed by having the first main permanent magnet, the second main permanent magnet, the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet that equal height and shape be straight quadrangular;
Wherein the bottom surface of the first main permanent magnet is square, and the direction of magnetization makes progress perpendicular to the bottom surface; The shape and size of the second main permanent magnet are all identical with the first main permanent magnet, and the direction of magnetization is downward perpendicular to the bottom surface; The bottom surface of the first secondary permanent magnet is rectangle, and the direction of magnetization is parallel with broadside; The bottom surface of the second secondary permanent magnet is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 of going to the bottom, upper base equate that with the bottom surface length of side of the first main permanent magnet going to the bottom equates with long limit, the bottom surface of the first secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45, bottom surface, point to upper base one side; The shape and size of the 3rd secondary permanent magnet are all identical with the second secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and become miter angle with the bottom surface, point to the side of going to the bottom;
In the described two-dimentional permanent magnet array, the first main permanent magnet and the second main permanent magnet are staggered to planar array along directions X and Y direction, and the width sum that is spaced apart the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet between the first main permanent magnet and the second main permanent magnet; Be furnished with four second secondary permanent magnets around the first main permanent magnet, and each side of the first main permanent magnet all with the side applying at the upper base place of one second secondary permanent magnet; Be furnished with four the 3rd secondary permanent magnets around the second main permanent magnet, and each side of the second main permanent magnet all with the side applying at the upper base place of one the 3rd secondary permanent magnet; The first secondary permanent magnet is arranged between the second secondary permanent magnet and the 3rd secondary permanent magnet, and the second secondary permanent magnet go to the bottom the place the side and the side at place, long limit of the first secondary permanent magnet fit, fit in the go to the bottom side at another place, long limit of the side at place and the first secondary permanent magnet of the 3rd secondary permanent magnet, the direction of magnetization of the first secondary permanent magnet is pointed to from its first nearest main permanent magnet.
Permanent-magnet synchronous maglev planar motor of the present invention is by adopting the specific two-dimentional permanent magnet array of arranged in form as mentioned above, make its magnetic field intensity be higher than the highest permanent magnet array of existing magnetic field intensity, and the distribution of its magnetic flux density has good sinuso sine protractor, efficient and the precision and the response characteristic of permanent-magnet synchronous maglev planar motor have been improved greatly, thereby remedied deficiency and the shortcoming that existing permanent-magnet synchronous maglev planar motor high accuracy, high response and high efficiency can not be taken into account, be the better planar motor of a kind of performance.
Description of drawings
Disclosed several two-dimentional permanent magnet arrays in Fig. 1 prior art;
The 3-D view of the planar motor of the specific two-dimentional permanent magnet array of Fig. 2 employing of the present invention;
The specific two-dimentional permanent magnet array schematic diagram that Fig. 3 planar motor of the present invention adopts;
The 3-D view of the first main permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 4 employing of the present invention;
The 3-D view of the second main permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 5 employing of the present invention;
The 3-D view of the first secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 6 employing of the present invention;
The 3-D view of the second secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 7 employing of the present invention;
The 3-D view of the 3rd secondary permanent magnet of the planar motor of the specific two-dimentional permanent magnet array of Fig. 8 employing of the present invention;
Fig. 9 specific two-dimentional permanent magnet array air gap flux density vertical component of the present invention is about the variation schematic diagram of xy coordinate;
Result schematic diagram after the fundametal compoment of array is subtracted each other shown in Figure 10 specific two-dimentional permanent magnet array air gap flux density vertical component of the present invention and Fig. 1 (e);
Each label implication among the figure, the 1-first main permanent magnet; The 2-second main permanent magnet; The 3-first secondary permanent magnet; The 4-second secondary permanent magnet; 5-the 3rd secondary permanent magnet; The 6-coil.
Embodiment
The present invention will be further described in detail below in conjunction with accompanying drawing.
Permanent-magnet synchronous maglev planar motor of the present invention comprises mover and stator, its 3-D view as shown in Figure 2, stator is made up of specific two-dimentional permanent magnet array, mover is made up of a plurality of orthogonal coil arrays, each coil array is formed by square coil 6 parallel arranged of a plurality of no iron cores, the orientation of coil array and the orientation of described specific two-dimentional permanent magnet array angle at 45.
Described specific two-dimentional permanent magnet array as shown in Figure 3, comprises first main permanent magnet 1, second main permanent magnet 2, first secondary permanent magnet 3, second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5.
First main permanent magnet 1, second main permanent magnet 2, first secondary permanent magnet 3, the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 are straight quadrangular, and have identical height.
The structure of the first main permanent magnet 1 and the direction of magnetization as shown in Figure 4, its bottom surface be the square, its direction of magnetization makes progress perpendicular to the bottom surface.
The structure of the second main permanent magnet 2 and the direction of magnetization as shown in Figure 5, its bottom surface be the square, the length of side equates that with the length of side of the first main permanent magnet 1 its direction of magnetization is downward perpendicular to the bottom surface.
The structure of the first secondary permanent magnet 3 and the direction of magnetization as shown in Figure 6, its bottom surface is rectangle, the limit of longer dimension is called long limit, another side is called broadside, the length of broadside is called the width of this permanent magnet, its direction of magnetization is parallel with broadside.
The structure of the second secondary permanent magnet 4 and the direction of magnetization are as shown in Figure 7, its bottom surface is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 of going to the bottom, the size of upper base equates with the bottom surface length of side of the first main permanent magnet 1, the size of going to the bottom equates with long limit, the bottom surface size of the first secondary permanent magnet 3, the height of isosceles trapezoid is called the width of this permanent magnet, its direction of magnetization and upper base with go to the bottom vertical and with bottom surface angle at 45, point to upper base one side.
The structure of the 3rd secondary permanent magnet 5 and the direction of magnetization as shown in Figure 8, its shape is identical with the second secondary permanent magnet 4, its direction of magnetization and upper base with go to the bottom vertical and with bottom surface angle at 45, point to the side of going to the bottom.
The spread pattern of permanent magnet array as shown in Figure 3, the coordinate among the figure is three-dimensional Descartes's rectangular coordinate system, all permanent magnets are arranged in the plane parallel with XOY plane.
The first main permanent magnet 1 and the second main permanent magnet 2 are staggered to planar array along directions X and Y direction, and the width sum that is spaced apart first secondary permanent magnet 3, the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 between the first main permanent magnet 1 and the second main permanent magnet 2.
Be furnished with four second identical secondary permanent magnets 4 around the first main permanent magnet 1, and each side of the first main permanent magnet 1 fits together with the side at the upper base place of one second secondary permanent magnet 4 all.
Be furnished with four the 3rd identical secondary permanent magnets 5 around the second main permanent magnet 2, and each side of the second main permanent magnet 1 fits together with the side at the upper base place of one the 3rd secondary permanent magnet 5 all.
The first secondary permanent magnet 3 is arranged between the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5, and the second secondary permanent magnet 4 go to the bottom the place the side and the side at place, long limit of the first secondary permanent magnet 3 fit together, the go to the bottom side at another place, long limit of the side at place and the first secondary permanent magnet 3 of the 3rd secondary permanent magnet 5 fits together, the parallel sensing with broadside of the direction of magnetization of the first secondary permanent magnet 3 is from its first nearest main permanent magnet 1, dorsad from its second nearest main permanent magnet 2.
For making stator form very strong monolateral magnetic field in a side towards mover, then should around all first main permanent magnets 1 of mover one side, arrange the second secondary permanent magnet 4 perpendicular to the permanent magnet array plane in the direction of magnetization, around the second main permanent magnet 2, arrange the 3rd secondary permanent magnet 5, and the direction of magnetization of all first secondary permanent magnets 3 is pointed to all from its first nearest main permanent magnet 1.At this moment, the angle between the direction of magnetization of any two adjacent permanent magnets is 45 degree in the permanent magnet array.
For verifying the magnetic field intensity of described specific two-dimentional permanent magnet array, a packet size of now determining permanent magnet array is as follows: the height of all permanent magnets is 7mm, distance between the center of the adjacent first main permanent magnet 1 and the second main permanent magnet 2 is 25mm, wherein, the bed-plate dimension of the first main permanent magnet 1 and the second main permanent magnet 2 is 9mm * 9mm; The bed-plate dimension of the first secondary permanent magnet 3 is 15mm * 10mm; The bed-plate dimension of the second secondary permanent magnet 4 and the 3rd secondary permanent magnet 5 is: the long 9mm of upper base, and the long 15mm that goes to the bottom, the angle of going to the bottom with waist is 45 degree, the height of isosceles trapezoid is 3mm.The direction of magnetization of each permanent magnet as shown in Figure 3 in the array.
According to above size, adopt air gap flux density that analytical model calculates described specific two-dimentional permanent magnet array along the component Bz of z reference axis variation relation about x, y coordinate.Stronger one side in magnetic field, apart from 4mm place, permanent magnet array surface, the magnetic flux distribution in magnetic field as shown in Figure 9.As shown in Figure 9, the magnetic flux density amplitude in magnetic field is about 0.48 tesla, and far above the amplitude of existing two-dimentional permanent magnet array shown in Figure 1, therefore, described specific two-dimentional permanent magnet array has improved the efficient of permanent-magnet synchronous maglev planar motor.
The intensity of the first-harmonic air gap flux density of array shown in Fig. 1 (e) is the highest in the present known two-dimentional permanent magnet array, and has good sine.Result after the first-harmonic air gap flux density that Figure 10 has provided array shown in air gap flux density shown in Figure 9 and Fig. 1 (e) subtracts each other.As shown in Figure 10, worst error between the two is no more than 0.035 tesla, total error is no more than 0.05%, the distribution that shows its magnetic flux density has good sinuso sine protractor, therefore, described specific two-dimentional permanent magnet array has improved the precision and the response characteristic of permanent-magnet synchronous maglev planar motor.
Therefore, having adopted the planar motor of the specific two-dimentional permanent magnet array of described type, remedied deficiency and shortcoming that existing permanent-magnet synchronous maglev planar motor high accuracy, high response and high efficiency can not be taken into account, is the better planar motor of a kind of performance.
The present invention not only is confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; can adopt other multiple embodiment to implement the present invention; therefore; every employing project organization of the present invention and thinking; do some simple designs that change or change, all fall into the scope of protection of the invention.
Claims (2)
1. permanent-magnet synchronous maglev planar motor, comprise mover and stator, it is characterized in that, described stator is made up of two-dimentional permanent magnet array, and described two-dimentional permanent magnet array is formed by having the first main permanent magnet, the second main permanent magnet, the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet that equal height and shape be straight quadrangular;
Wherein the bottom surface of the first main permanent magnet is square, and the direction of magnetization makes progress perpendicular to the bottom surface; The shape and size of the second main permanent magnet are all identical with the first main permanent magnet, and the direction of magnetization is downward perpendicular to the bottom surface; The bottom surface of the first secondary permanent magnet is rectangle, and the direction of magnetization is parallel with broadside; The bottom surface of the second secondary permanent magnet is isosceles trapezoid, the waist of isosceles trapezoid and the angle at 45 of going to the bottom, upper base equate that with the bottom surface length of side of the first main permanent magnet going to the bottom equates with long limit, the bottom surface of the first secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45, bottom surface, point to upper base one side; The shape and size of the 3rd secondary permanent magnet are all identical with the second secondary permanent magnet, the direction of magnetization and upper base with go to the bottom vertical and with angle at 45, bottom surface, point to the side of going to the bottom;
The first main permanent magnet and the second main permanent magnet are staggered to planar array along directions X and Y direction in the described two-dimentional permanent magnet array, and the width sum that is spaced apart the first secondary permanent magnet, the second secondary permanent magnet and the 3rd secondary permanent magnet between the first main permanent magnet and the second main permanent magnet; Be furnished with four second secondary permanent magnets around the first main permanent magnet, and each side of the first main permanent magnet all with the side applying at the upper base place of one second secondary permanent magnet; Be furnished with four the 3rd secondary permanent magnets around the second main permanent magnet, and each side of the second main permanent magnet all with the side applying at the upper base place of one the 3rd secondary permanent magnet; The first secondary permanent magnet is arranged between the second secondary permanent magnet and the 3rd secondary permanent magnet, and the second secondary permanent magnet go to the bottom the place the side and the side at place, long limit of the first secondary permanent magnet fit, fit in the go to the bottom side at another place, long limit of the side at place and the first secondary permanent magnet of the 3rd secondary permanent magnet, the direction of magnetization of the first secondary permanent magnet is pointed to from its first nearest main permanent magnet.
2. permanent-magnet synchronous maglev planar motor according to claim 1, it is characterized in that, described mover is made up of a plurality of orthogonal coil arrays, each coil array is formed by the square coil parallel arranged of a plurality of no iron cores, the orientation of coil array and the orientation of described two-dimentional permanent magnet array angle at 45.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103208867A (en) * | 2012-01-17 | 2013-07-17 | 上海微电子装备有限公司 | Magnet unit, magnet array, magnetic levitation planar motor and lithographic device using magnetic levitation planar motor |
| CN103633884A (en) * | 2013-12-02 | 2014-03-12 | 江苏大学 | Pressure sensor group-based magnetic suspension permanent magnetic planar motor suspension method |
| CN103795297A (en) * | 2012-11-02 | 2014-05-14 | 上海微电子装备有限公司 | Magnetic-levitation planar motor |
| CN103795296A (en) * | 2012-11-02 | 2014-05-14 | 上海微电子装备有限公司 | Magnetic-levitation planar motor |
| CN104104198A (en) * | 2013-04-15 | 2014-10-15 | 上海微电子装备有限公司 | Moving coil-type maglev motor and magnetic angle detection method thereof |
| CN104753307A (en) * | 2013-12-31 | 2015-07-01 | 上海微电子装备有限公司 | Magnetic-levitation planar motor |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101515119A (en) * | 2009-04-03 | 2009-08-26 | 清华大学 | Silicon chip bench double-bench switching system employing air floatation plane motor |
| CN101609265A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the silicon slice platform multi-platform exchange system of maglev planar motor |
| CN101610054A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the planar motor of three-dimensional permanent magnet array |
-
2011
- 2011-02-24 CN CN 201110045692 patent/CN102097982B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101515119A (en) * | 2009-04-03 | 2009-08-26 | 清华大学 | Silicon chip bench double-bench switching system employing air floatation plane motor |
| CN101609265A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the silicon slice platform multi-platform exchange system of maglev planar motor |
| CN101610054A (en) * | 2009-07-21 | 2009-12-23 | 清华大学 | Adopt the planar motor of three-dimensional permanent magnet array |
Non-Patent Citations (1)
| Title |
|---|
| 《IEEE TRANSACTIONS ON MAGNETICS》 20100531 Wei Min et al. Analysis and optimization of a new 2-d magnet array for planar motor 第1167-1171页 1-2 第46卷, 第5期 * |
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| CN103208867A (en) * | 2012-01-17 | 2013-07-17 | 上海微电子装备有限公司 | Magnet unit, magnet array, magnetic levitation planar motor and lithographic device using magnetic levitation planar motor |
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| WO2023226272A1 (en) * | 2022-05-23 | 2023-11-30 | 华中科技大学 | Magnetic suspension planar motor workbench with double-layer winding coarse-fine drive |
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