CN101610054A - Adopt the planar motor of three-dimensional permanent magnet array - Google Patents
Adopt the planar motor of three-dimensional permanent magnet array Download PDFInfo
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- CN101610054A CN101610054A CNA2009100888939A CN200910088893A CN101610054A CN 101610054 A CN101610054 A CN 101610054A CN A2009100888939 A CNA2009100888939 A CN A2009100888939A CN 200910088893 A CN200910088893 A CN 200910088893A CN 101610054 A CN101610054 A CN 101610054A
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- 238000003491 array Methods 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 abstract description 4
- 230000005291 magnetic effect Effects 0.000 description 18
- 238000007667 floating Methods 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- Engineering & Computer Science (AREA)
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- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
Adopt the planar motor of three-dimensional permanent magnet array, this planar motor comprises mover and stator.Described mover adopts three-dimensional permanent magnet array, this three-dimensional permanent magnet array is respectively the S type of the S utmost point and the N utmost point and the big permanent magnet of the positive truncated rectangular pyramids of N type and little permanent magnet by upper bottom surface and forms, described S type and the big permanent magnet of N type all edge two bottom center's line directions up and down separately magnetize, little permanent magnet is that the straight triangular prism of isosceles triangle is clipped a rectangular pyramid in last bottom surface place symmetry and obtained by the bottom surface, magnetizing direction is parallel to the base direction of bottom surface isosceles triangle, the big permanent magnet bottom surface of S type and N type and is staggered to planar array along directions X and Y direction down; Little permanent magnet is arranged between adjacent two big permanent magnets, and little permanent magnet magnetizing direction is pointed to the S utmost point of the adjacent big permanent magnet of S type by the N utmost point of the big permanent magnet of N type.This mover can produce higher field strength mass ratio at air gap, thereby improves the thrust and the acceleration of planar motor.
Description
Technical field
The present invention relates to a kind of planar motor, particularly a kind of planar motor that adopts three-dimensional permanent magnet array is mainly used in manufacturing equipment and robot field.
Background technology
In many industrial equipments, we need drive workpiece or workbench is done plane motion and in the plane it accurately located for example microscopical objective table, equipment such as the silicon chip platform in the mask aligner.Traditional two-dimensional positioning system overlaps or overlaps the linear drives unit more by two and vertically is formed by stacking, every cover linear drives unit is made up of a turning motor, a cover linear motion conversion mechanism and a cover line slideway, perhaps is made up of linear electric motors and a cover line slideway.The driving that end holds the part platform is not only born in the linear drives unit that is positioned at bottom, but also the quality of carrying top layer linear drives unit, so caused two-dimensional positioning system (as the directions X and the Y direction of traditional X-ray Y workbench) movement inertia seriously unbalanced on a plurality of directions, thereby influenced the raising of performance index such as movement travel, response speed, kinematic accuracy.Under this background, adopt electromagnetic force directly to drive single mover and realize that directly the planar motor of multifreedom motion then arises at the historic moment, it has avoided the thinking that traditional multiple degrees of freedom workbench lamination drives, and has broad application prospects in the two-dimensional positioning system of precision, is subjected to paying close attention to widely
According to the way of restraint of the non-freedom of motion of planar motor and the technical field that relates to, planar motor can be divided into air-floatation planar motor and magnetic-floating plane motor, they adopt the floating mode of air supporting and magnetic to realize the constraint of (as beat, vertical hectare and horizontal hectare) of non-freedom of motion respectively.Than the air supporting mode, that the floating mode of magnetic has is simple in structure, base-plates surface need not Precision Machining, can realize the active constraint of non-freedom of motion, advantage such as easily use in vacuum environment.
The Lorentz force that present magnetic-floating plane motor is generally produced in the permanent magnet array air-gap field by hot-wire coil provides actuating force and the supporting that suspends.Along with the requirement to planar motor acceleration and load performance index improves constantly, we need improve constantly permanent magnet array air-gap field intensity.Particularly, have no cable and disturb, adapt to the outstanding advantages such as operational environment of vacuum, but the gravity of the gravity of permanent magnet array load itself needs electromagnetic force to support for the moving-iron type magnetic-floating plane motor that adopts permanent magnet array as mover.This just requires us to improve constantly the field intensity of permanent magnet array working gas gap and the ratio of sole mass, and improves constantly the magnetic flux density of air gap under the prerequisite of mass conservation.
Present permanent magnet array all adopts 2D plane permanent magnetic array, main several structures as shown in Figure 1, at first (U.S.Patent 4626749, Dec.1986.) the middle proposition in patent " Two dimensional positioning devices " by Asakawa for array format shown in Fig. 1 (a); Array format shown in Fig. 1 (b) is proposed in patent " Two-axis motor withhigh density magnetic platen " (U.S.Patent 5777402, and July 1998) by Chitayat; People such as Trumper have proposed a kind of array format of Halbach structure shown in Fig. 1 (c) in patent " Magnetic arrays " (U.S.Patent 5,631 618, May 1997); People such as Cho are at article " Magnetic field analysis of 2-Dpermanent magnet array for planar motor " (IEEETransactions on Magnetics, 2001,37 (5): proposed array format shown in Fig. 1 (d) 3762 ~ 3766.), and above several structures are compared, think that the magnetic packaging density of array format shown in the figure a only reaches half of linear permanent-magnet motor magnetic packaging density; The magnetic packaging density of array format also is lower than the magnetic packaging density of linear permanent-magnet motor shown in Fig. 1 (b) and Fig. 1 (c), four kinds of analytic solutions that array format surface air gap flux density distributes have been provided, and the surperficial air gap flux density that has calculated these several structures distributes, three kinds of array formats of proof and other are compared, and array format has higher surperficial air gap flux density shown in the figure d.Another, halbach permanent magnet array common in the document is shown in Fig. 1 (e).Above-mentioned these several permanent magnet arrays all are 2D plane permanent magnetic arrays, and the spatial distribution of array inner permanent magnetic body does not change with the variation of Z.Therefore we can construct 3D plane permanent magnetic array, further improve the field intensity of permanent magnet array working gas gap and the ratio of sole mass.
Summary of the invention
The purpose of this invention is to provide a kind of planar motor that adopts three-dimensional permanent magnet array.
Technical scheme of the present invention is as follows:
A kind of planar motor that adopts three-dimensional permanent magnet array, include mover 5 and stator 6, described planar motor comprises and adopts permanent magnet array as the moving-coil structure of stator or the permanent magnet array moving-iron type structure as mover, it is characterized in that: described permanent magnet array adopts three-dimensional permanent magnet array, this three-dimensional permanent magnet array is the big permanent magnet 1 of the positive truncated rectangular pyramids of S type of the S utmost point by upper bottom surface, upper bottom surface is that the big permanent magnet 2 of the positive truncated rectangular pyramids of N type and the little permanent magnet 3 of the N utmost point formed, described S type and the big permanent magnet of the positive truncated rectangular pyramids of N type all edge two bottom center's line directions up and down separately magnetize, described little permanent magnet 3 is that the straight triangular prism of isosceles triangle is clipped a rectangular pyramid in last bottom surface place symmetry and obtained by the bottom surface, make 3 two sides of little permanent magnet become the isosceles trapezoid with a side congruence of the big permanent magnet of the positive truncated rectangular pyramids of N type, magnetizing direction is parallel to the base direction of bottom surface isosceles triangle, big permanent magnet 2 bottom surfaces of big permanent magnet 1 of the positive truncated rectangular pyramids of S type and the positive truncated rectangular pyramids of N type and are staggered to planar array along directions X and Y direction down; Little permanent magnet 3 is arranged between adjacent two S types and the big permanent magnet of N type, make 3 two sides of little permanent magnet overlap with a side of N type and the big permanent magnet of the positive truncated rectangular pyramids of S type respectively, and little permanent magnet 3 magnetizing directions are pointed to the S utmost point of the adjacent big permanent magnet 1 of the positive truncated rectangular pyramids of S type by the N utmost point of the big permanent magnet 2 of the positive truncated rectangular pyramids of N type.
Technical characterictic of the present invention also is: for the moving-iron type structure that adopts permanent magnet array as mover, described stator 6 is made up of a plurality of mutually perpendicular coil arrays, and each coil array is formed by a plurality of rectangle iron-less core coil 4 linear array; For the moving-coil structure of using permanent magnet array as stator, described mover is made up of a plurality of coil arrays, and vertical mutually between the adjacent windings array, each coil array is formed by a plurality of rectangle iron-less core coil 4 linear array.
Technical characterictic of the present invention also is: the orientation of described coil array and the orientation of described permanent magnet array are at 45.
The planar motor of employing three-dimensional permanent magnet array of the present invention has the following advantages and the high-lighting effect: adopted three-dimensional permanent magnet array, the field intensity of permanent magnet array working gas gap and the ratio of sole mass have further been improved, thereby under the constant situation of drive current, improved the thrust and the suspending power of planar motor, improved the acceleration and the carrying load ability of planar motor greatly.
Description of drawings
Disclosed several permanent magnet arrays in Fig. 1 prior art.
Fig. 2 is the 3-D view of the planar motor of employing three-dimensional permanent magnet array of the present invention.
Fig. 3 is the big permanent magnet 3-D view of positive truncated rectangular pyramids of the planar motor of employing three-dimensional permanent magnet array of the present invention.
Fig. 4 is the little permanent magnet 3-D view of the planar motor of employing three-dimensional permanent magnet array of the present invention.
Fig. 5 is two the big permanent magnets of positive truncated rectangular pyramids of planar motor of employing three-dimensional permanent magnet array of the present invention and the assembling 3-D view of a little permanent magnet.
Fig. 6 permanent magnet array gap density of the present invention vertical component is about the variation relation schematic diagram of XY coordinate.
Among the figure: the big permanent magnet of the positive truncated rectangular pyramids of 1-S type; The big permanent magnet of the positive truncated rectangular pyramids of 2-N type; The little permanent magnet of 3-; The 4-coil; The 5-mover; The 6-stator;
Embodiment
Below in conjunction with accompanying drawing concrete structure of the present invention, mechanism and the course of work are further described.
Fig. 2 is the 3-D view of the planar motor of employing three-dimensional permanent magnet array of the present invention, the planar motor of employing three-dimensional permanent magnet array of the present invention as seen from the figure comprises mover 5 and stator 4, mover adopts three-dimensional permanent magnet array, described permanent magnet array adopts three-dimensional permanent magnet array, this three-dimensional permanent magnet array is the big permanent magnet 1 of the positive truncated rectangular pyramids of S type of the S utmost point by upper bottom surface, upper bottom surface is that the big permanent magnet 2 of the positive truncated rectangular pyramids of N type and the little permanent magnet 3 of the N utmost point formed, described S type and the big permanent magnet of the positive truncated rectangular pyramids of N type all edge two bottom center's line directions up and down separately magnetize, described little permanent magnet 3 is that the straight triangular prism of isosceles triangle is clipped a rectangular pyramid in last bottom surface place symmetry and obtained by the bottom surface, make 3 two sides of little permanent magnet become the isosceles trapezoid with a side congruence of the big permanent magnet of the positive truncated rectangular pyramids of N type, magnetizing direction is parallel to the base direction of bottom surface isosceles triangle, big permanent magnet 2 bottom surfaces of big permanent magnet 1 of the positive truncated rectangular pyramids of S type and the positive truncated rectangular pyramids of N type and are staggered to planar array along directions X and Y direction down; Little permanent magnet 3 is arranged between adjacent two S types and the big permanent magnet of N type, make 3 two sides of little permanent magnet overlap with a side of N type and the big permanent magnet of the positive truncated rectangular pyramids of S type respectively, and little permanent magnet 3 magnetizing directions are pointed to the S utmost point of the adjacent big permanent magnet 1 of the positive truncated rectangular pyramids of S type by the N utmost point of the big permanent magnet 2 of the positive truncated rectangular pyramids of N type.
Fig. 5 has provided the schematic three dimensional views at big permanent magnet of the positive truncated rectangular pyramids of S type and the little permanent magnet of the big permanent magnet intermediate arrangement of the positive truncated rectangular pyramids of N type.The upper bottom surface of " S " among the figure and the big permanent magnet of " N " positive truncated rectangular pyramids of expression is respectively the S utmost point and the N utmost point.Arrow is represented the magnetizing direction of little permanent magnet.Two sides of little permanent magnet overlap with the side of two big permanent magnets of positive truncated rectangular pyramids respectively.
As shown in Figure 2, the floating mode of planar motor employing magnetic realizes the constraint to non-freedom of motion; Described stator 6 is made up of a plurality of mutually perpendicular coil arrays, and each coil array is formed by a plurality of rectangle iron-less core coil 4 linear array; The orientation of coil array and the orientation of described permanent magnet array are at 45.
In the air gap of three-dimensional permanent magnet array between mover and stator or produce air-gap field on the contact-making surface.Fig. 6 is the variation relation schematic diagram of the gap density vertical component Bz of the plane permanent magnetic array shown in Figure 2 that obtains by the finite element simulation analysis about the XY coordinate.τ is that pole span is the distance at two the big permanent magnet upper bottom surface of adjacent positive truncated rectangular pyramids centers among Fig. 2, also is the distance between the gap density two adjacent peak values of Fig. 2 midplane permanent magnet array.Pass through simulation analysis, we find three-dimensional permanent magnet array, under situation identical in quality, the magnetic flux density of working gas gap is higher than existing several permanent magnet array, thereby under the constant situation of drive current, improved the thrust and the suspending power of planar motor, improved the acceleration and the carrying load ability of planar motor greatly.
Claims (3)
1. planar motor that adopts three-dimensional permanent magnet array, include mover (5) and stator (6), described planar motor comprises and adopts permanent magnet array as the moving-coil structure of stator or the permanent magnet array moving-iron type structure as mover, it is characterized in that: described permanent magnet array adopts three-dimensional permanent magnet array, this three-dimensional permanent magnet array is the big permanent magnet of the positive truncated rectangular pyramids of S type (1) of the S utmost point by upper bottom surface, upper bottom surface is that the big permanent magnet of the positive truncated rectangular pyramids of N type (2) and the little permanent magnet (3) of the N utmost point formed, described S type and the big permanent magnet of the positive truncated rectangular pyramids of N type all edge two bottom center's line directions up and down separately magnetize, described little permanent magnet (3) is that the straight triangular prism of isosceles triangle is clipped a rectangular pyramid in last bottom surface place symmetry and obtained by the bottom surface, make (3) two sides of little permanent magnet become the isosceles trapezoid with a side congruence of the big permanent magnet of the positive truncated rectangular pyramids of N type, magnetizing direction is parallel to the base direction of bottom surface isosceles triangle, big permanent magnet of the positive truncated rectangular pyramids of S type (1) and the big permanent magnet of the positive truncated rectangular pyramids of N type (2) bottom surface and are staggered to planar array along directions X and Y direction down; Little permanent magnet (3) is arranged between adjacent two S types and the big permanent magnet of N type, make (3) two sides of little permanent magnet overlap with a side of N type and the big permanent magnet of the positive truncated rectangular pyramids of S type respectively, and little permanent magnet (3) magnetizing direction is pointed to the S utmost point of the adjacent big permanent magnet of the positive truncated rectangular pyramids of S type (1) by the N utmost point of the big permanent magnet of the positive truncated rectangular pyramids of N type (2).
2. according to the planar motor of the described employing three-dimensional permanent magnet array of claim 1, it is characterized in that: for the moving-iron type structure that adopts permanent magnet array as mover, described stator (6) is made up of a plurality of mutually perpendicular coil arrays, and each coil array is formed by a plurality of rectangle iron-less core coils (4) linear array; For the moving-coil structure of using permanent magnet array as stator, described mover is made up of a plurality of coil arrays, and vertical mutually between the adjacent windings array, each coil array is formed by a plurality of rectangle iron-less core coils (4) linear array.
3. according to the planar motor of the described employing three-dimensional permanent magnet array of claim 2, it is characterized in that: the orientation of described coil array and the orientation of described permanent magnet array are at 45.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100888939A CN101610054B (en) | 2009-07-21 | 2009-07-21 | Planar motor adopting three-dimensional permanent magnet array |
| PCT/CN2010/075304 WO2011009397A1 (en) | 2009-07-21 | 2010-07-20 | Planar motor adopting three-dimensional permanent magnet array |
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| CN2009100888939A CN101610054B (en) | 2009-07-21 | 2009-07-21 | Planar motor adopting three-dimensional permanent magnet array |
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| CN101610054A true CN101610054A (en) | 2009-12-23 |
| CN101610054B CN101610054B (en) | 2011-02-16 |
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| WO2011009397A1 (en) * | 2009-07-21 | 2011-01-27 | 清华大学 | Planar motor adopting three-dimensional permanent magnet array |
| CN102097982A (en) * | 2011-02-24 | 2011-06-15 | 华中科技大学 | Permanent-magnet synchronous magnetic suspension planar motor |
| WO2011088776A1 (en) * | 2010-01-19 | 2011-07-28 | 清华大学 | Two-dimensional locating method of motion platform based on magnetic steel array |
| CN103208867A (en) * | 2012-01-17 | 2013-07-17 | 上海微电子装备有限公司 | Magnet unit, magnet array, magnetic levitation planar motor and lithographic device using magnetic levitation planar motor |
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| US6285097B1 (en) * | 1999-05-11 | 2001-09-04 | Nikon Corporation | Planar electric motor and positioning device having transverse magnets |
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2009
- 2009-07-21 CN CN2009100888939A patent/CN101610054B/en active Active
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2010
- 2010-07-20 WO PCT/CN2010/075304 patent/WO2011009397A1/en active Application Filing
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