CN102096328B - 液晶面板的曝光工序及其掩膜 - Google Patents
液晶面板的曝光工序及其掩膜 Download PDFInfo
- Publication number
- CN102096328B CN102096328B CN2010105755813A CN201010575581A CN102096328B CN 102096328 B CN102096328 B CN 102096328B CN 2010105755813 A CN2010105755813 A CN 2010105755813A CN 201010575581 A CN201010575581 A CN 201010575581A CN 102096328 B CN102096328 B CN 102096328B
- Authority
- CN
- China
- Prior art keywords
- mask
- liquid crystal
- crystal panel
- alignment marks
- alignment mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 106
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000011521 glass Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 230000008569 process Effects 0.000 claims description 35
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 12
- 238000013461 design Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000012797 qualification Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (7)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105755813A CN102096328B (zh) | 2010-12-03 | 2010-12-03 | 液晶面板的曝光工序及其掩膜 |
PCT/CN2010/079685 WO2012071748A1 (zh) | 2010-12-03 | 2010-12-13 | 液晶面板的曝光工序及其掩膜 |
US13/216,729 US8592111B2 (en) | 2010-12-03 | 2011-08-24 | LCD panel photolithography process and mask |
US14/056,492 US8758964B2 (en) | 2010-12-03 | 2013-10-17 | LCD panel photolithography process and mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105755813A CN102096328B (zh) | 2010-12-03 | 2010-12-03 | 液晶面板的曝光工序及其掩膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102096328A CN102096328A (zh) | 2011-06-15 |
CN102096328B true CN102096328B (zh) | 2012-11-21 |
Family
ID=44129467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010105755813A Expired - Fee Related CN102096328B (zh) | 2010-12-03 | 2010-12-03 | 液晶面板的曝光工序及其掩膜 |
Country Status (3)
Country | Link |
---|---|
US (2) | US8592111B2 (zh) |
CN (1) | CN102096328B (zh) |
WO (1) | WO2012071748A1 (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102866576B (zh) * | 2012-08-27 | 2014-08-06 | 京东方科技集团股份有限公司 | 一种掩膜板组及应用掩膜板组确定对位精度范围的方法 |
CN103969943A (zh) * | 2013-01-25 | 2014-08-06 | 北京京东方光电科技有限公司 | 一种对基板进行标记的方法 |
CN104297989B (zh) * | 2014-10-22 | 2017-06-27 | 京东方科技集团股份有限公司 | 基板、掩膜板及液晶显示装置 |
CN104503144B (zh) * | 2014-12-23 | 2017-09-05 | 南京中电熊猫液晶显示科技有限公司 | 一种液晶显示基板 |
CN106647011A (zh) | 2017-03-14 | 2017-05-10 | 京东方科技集团股份有限公司 | 显示基板的制作方法、显示基板、显示面板和显示装置 |
CN107065283B (zh) * | 2017-04-17 | 2020-04-07 | 深圳市华星光电半导体显示技术有限公司 | 高ppi面板cf光罩共用的方法 |
CN106933025B (zh) * | 2017-05-10 | 2020-04-10 | 京东方科技集团股份有限公司 | 掩膜版及其组件、曝光机和检测测试窗口遮挡效果的方法 |
CN111128963B (zh) * | 2018-10-30 | 2022-04-26 | 成都京东方光电科技有限公司 | 一种显示基板母板及其制作方法 |
CN111081151A (zh) * | 2020-01-08 | 2020-04-28 | 深圳市华星光电半导体显示技术有限公司 | 显示面板 |
CN113433791B (zh) * | 2020-03-23 | 2023-03-31 | 长鑫存储技术有限公司 | 一种掩膜版 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1492285A (zh) * | 2002-10-24 | 2004-04-28 | 友达光电股份有限公司 | 具有对准量测标记的光罩及其侦测方法 |
CN1758121A (zh) * | 2004-10-08 | 2006-04-12 | 中华映管股份有限公司 | 改善液晶显示面板之组装偏移的方法与液晶面板制造工艺 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2896787B2 (ja) * | 1988-05-20 | 1999-05-31 | 三菱レイヨン株式会社 | ゼオライト触媒の活性維持法 |
JPH04294329A (ja) * | 1991-03-22 | 1992-10-19 | G T C:Kk | 液晶表示装置およびその製造方法 |
JP2001257157A (ja) * | 2000-03-14 | 2001-09-21 | Nikon Corp | アライメント装置、アライメント方法、露光装置、及び露光方法 |
JP4365594B2 (ja) * | 2003-01-27 | 2009-11-18 | シャープ株式会社 | パターン形成方法、薄膜トランジスタ基板の製造方法、液晶表示装置の製造方法、及び露光マスク |
JP2004272167A (ja) * | 2003-03-12 | 2004-09-30 | Dainippon Printing Co Ltd | パターン形成装置、パターン形成方法、基材 |
JP2004342833A (ja) * | 2003-05-15 | 2004-12-02 | Seiko Epson Corp | 半導体装置の製造方法、電気光学装置、集積回路及び電子機器。 |
CN1333437C (zh) * | 2004-04-01 | 2007-08-22 | 上海宏力半导体制造有限公司 | 具有双向对准图案的掩膜 |
JP2006292426A (ja) * | 2005-04-06 | 2006-10-26 | Sharp Corp | 座標測定方法及び寸法測定方法 |
JP4854998B2 (ja) * | 2005-07-05 | 2012-01-18 | 三菱電機株式会社 | 液晶表示装置の製造方法 |
JP2007256581A (ja) * | 2006-03-23 | 2007-10-04 | Hitachi High-Technologies Corp | カラーフィルタ基板の露光装置及び露光方法 |
JP5023653B2 (ja) * | 2006-10-19 | 2012-09-12 | 富士通セミコンダクター株式会社 | 露光用マスク、電子装置の製造方法、及び露光用マスクの検査方法 |
-
2010
- 2010-12-03 CN CN2010105755813A patent/CN102096328B/zh not_active Expired - Fee Related
- 2010-12-13 WO PCT/CN2010/079685 patent/WO2012071748A1/zh active Application Filing
-
2011
- 2011-08-24 US US13/216,729 patent/US8592111B2/en active Active
-
2013
- 2013-10-17 US US14/056,492 patent/US8758964B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1492285A (zh) * | 2002-10-24 | 2004-04-28 | 友达光电股份有限公司 | 具有对准量测标记的光罩及其侦测方法 |
CN1758121A (zh) * | 2004-10-08 | 2006-04-12 | 中华映管股份有限公司 | 改善液晶显示面板之组装偏移的方法与液晶面板制造工艺 |
Non-Patent Citations (3)
Title |
---|
JP特开2001-257157A 2001.09.21 |
JP特开2006-292426A 2006.10.26 |
JP特开平4-294329A 1992.10.19 |
Also Published As
Publication number | Publication date |
---|---|
US8758964B2 (en) | 2014-06-24 |
US20120141926A1 (en) | 2012-06-07 |
US20140045104A1 (en) | 2014-02-13 |
CN102096328A (zh) | 2011-06-15 |
US8592111B2 (en) | 2013-11-26 |
WO2012071748A1 (zh) | 2012-06-07 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Exposure procedure of liquid crystal panels and mask Effective date of registration: 20190426 Granted publication date: 20121121 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20121121 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121121 |