CN102221361A - Capacitive micro machinery gyroscope - Google Patents
Capacitive micro machinery gyroscope Download PDFInfo
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- CN102221361A CN102221361A CN 201110133079 CN201110133079A CN102221361A CN 102221361 A CN102221361 A CN 102221361A CN 201110133079 CN201110133079 CN 201110133079 CN 201110133079 A CN201110133079 A CN 201110133079A CN 102221361 A CN102221361 A CN 102221361A
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Abstract
The invention discloses a capacitive micro machinery gyroscope, belonging to the technical field of a micro electrical mechanical system. A gyroscope mass block 15 is connected with the center of a lever 12; two pivot points are symmetrically distributed between the center and two end points of the lever 12, and the distance h0 from the pivot points to the center of the lever is less than the distance h1 from the pivot point to the end points of the lever; simultaneously two end points of the lever 12 are respectively and sequentially connected with a sensitive transmission beam 8 in Y direction and two sensitive bent beams 9 in X direction; the other end of each sensitive bent beam 9 of two is respectively connected with two end points of a non-deformed beam 16; a moving comb tooth and a static comb tooth fixed on the non-deformed beam 16 form a sensitive detection comb tooth pair 10 to complete the capacitance detection at the sensitive direction. According to the invention, the displacement detection and the lever amplification technology in the traditional micro machinery gyroscope are combined, the displacement amplification effect of the mass block at the Y direction by the lever is h1/h0, thus the variation of the detection capacitance is increased, and the flexibility of the micro machinery gyroscope is improved.
Description
One, affiliated field
The present invention relates to a kind of capacitive micro mechinery gyroscope, belong to micro-electromechanical system field.
Two, background technology
Micromechanical gyro has wide practical use in military fields such as inertial navigation, attitude references with characteristics such as its volume are little, low in energy consumption, cost is low.Micromechanical gyro can be divided into condenser type gyro, resonant mode gyro, pressure resistance type gyro, piezoelectric type gyro, optical gyroscope etc. by detection mode.The tradition micromechanical gyro all is based on the input angular velocity amount is obtained in the detection of coriolis force.
The capacitance detecting mode has simple in structure, the precision advantages of higher is widely used in various micro mechanical sensors, and a lot of micromechanical gyros all are that the caused capacitance change of displacement by all vertical sensitive direction of measurement and driving direction and angular velocity input direction obtains coriolis force.But general micromechanical gyro is very little at the capacitance change of sensitive direction, and the size that this has reduced detection signal has limited the raising of micromechanical gyro sensitivity.
Application number has proposed " a kind of resonant-type micro-mechanical optic fiber gyroscope " for the patent of " 200610012216.5 ", and it comprises the interdigital driver of pectination, plate mass, lever enlarger and double-ended tuning fork resonator.When on the interdigital driver of pectination, adding driving voltage, plate mass is done the vibratory movement along X-direction, and externally around the following coriolis force that produces along the Y direction of the turning effort of Z axle, by being delivered on two double-ended tuning fork resonators of symmetrical distribution after the lever amplification, make its harmonic moving be subjected to periodic modulation, the differential output of two double-ended tuning fork resonators of measurement can realize the measurement to the input angle frequency.This patent is to amplify by the coriolis force of lever with sensitive direction, thereby amplifies the resonance frequency variable quantity of resonator.But the coriolis force that micromechanical gyro produces is minimum, and is also minimum by the resonance frequency variable quantity of its resonator that causes, is difficult to the sensitivity that reaches higher in actual applications.The capacitive micro mechinery gyroscope that the present invention proposes adopts lever that the sensitive direction displacement variable that coriolis force causes is amplified, thereby increases the changes in capacitance amount that detects, and improves sensitivity.
Three, summary of the invention
The present invention proposes a kind of capacitive micro mechinery gyroscope, the lever amplifying technique of being carried in displacement detecting in traditional micromechanical gyro and the background technology is combined, utilize leverage that the displacement variable of sensitive direction is amplified, thereby increase the changes in capacitance amount that detects, the sensitivity that improves micromechanical gyro.
As shown in Figure 1, the technical solution adopted in the present invention is: a kind of capacitive micro mechinery gyroscope comprises mass 15; Definition mass 15 centers are initial point, be X to, the direction parallel with another side with the parallel on one side direction of mass are Y to, capacitive micro mechinery gyroscope on directions X, about the Y-axis symmetry, on Y direction about the X-axis symmetry;
Described mass 15 is connected with driving Vierendeel girder 5 to the folded beam II 13 of side by being connected in its Y, drives Vierendeel girder 5 and is connected on the anchor point by folded beam I 7; Be fixed on the part that drives on the Vierendeel girder 5 and drive moving broach and constitute driving comb to 4 with the quiet broach of driving that is fixed on the drive electrode 3, make drive Vierendeel girder 5 drive masses 15 produce X to to-and-fro movement; Be fixed on and drive on the Vierendeel girder 5 other and drive moving broach and be fixed on the driving that drives detecting electrode 1 and detect quiet broach and constitute and drive detection comb and detect to finish to drive 2;
At X on side, mass 15 by folded beam I 7 be parallel to the center of mass X and be connected to the lever 12 of side; Between the center of lever 12 and two end points, symmetry is furnished with two fulcrums, fulcrum from the distance at lever center less than the distance of fulcrum from the lever end points, two Y to balance pivot beam 14 respectively described two fulcrums are connected with anchor point; Simultaneously, two end points of lever 12 connect successively respectively Y to responsive transfer beams 8 and X to responsive bent beam 9, the other end of two responsive bent beams 9 then is connected with two end points of no variable shaped beam 16 respectively, and the width of responsive bent beam 9 is less than the width of no variable shaped beam 16; The moving broach of sensitivity that is fixed on the no variable shaped beam 16 constitutes responsive detection comb to 10 with the quiet broach that is fixed on the responsive detecting electrode 11, to finish the capacitance detecting of sensitive direction.Wherein, balance pivot is h0 apart from centre distance, and lever is h1 apart from the distance of end points.
A kind of capacitive micro mechinery gyroscope principle of work that the present invention proposes: when on drive electrode 3, adding the periodic voltage signal, driving comb to 4 electrostatic forcing under, mass 15 is along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction, on Y direction, can produce coriolis force, make mass 15 produce displacement d0 along Y direction, this displacement produces acting force by the center of 13 pairs of levers 12 of folded beam II, under the effect of lever 12, the displacement d1 that the two ends generation of lever 12 is bigger (d1＞d0), this displacement is delivered on the no variable shaped beam 16 by responsive transfer beams 8 and 9 effects of responsive bent beam, make no variable shaped beam produce displacement d1 in the Y direction, thereby obtain bigger capacitance change at responsive detection comb on to 10, obtain the information of input angular velocity ω.Wherein, in the ideal case, lever is h1/h0, i.e. d1/d0=h1/h0 to mass at the displacement amplification of Y direction.
Therefore, the capacitive micro mechinery gyroscope that the present invention proposes can amplify mass in the displacement of Y direction, increase the responsive capacitance change that detects, thus the sensitivity that increases capacitive micro mechinery gyroscope.
Four, description of drawings
The structural representation of the capacitive micro mechinery gyroscope that Fig. 1 the present invention proposes
Among the figure: 1-drives detecting electrode, and it is right that 2-drives detection comb, the 3-drive electrode, the 4-driving comb is right, and 5-drives Vierendeel girder, 6-anchor point, 7-folded beam I, the responsive transfer beams of 8-, the responsive bent beam of 9-, the responsive detection comb of 10-is right, the responsive detecting electrode of 11-, 12-lever, 13-folded beam II, 14-balance pivot beam, the 15-mass, 16-does not have variable shaped beam.
Five, embodiment
The specific embodiment of the present invention: as shown in Figure 1, the technical solution adopted in the present invention is: a kind of capacitive micro mechinery gyroscope comprises mass 15; Definition mass 15 centers are initial point, be X to, the direction parallel with another side with the parallel on one side direction of mass are Y to, capacitive micro mechinery gyroscope on directions X, about the Y-axis symmetry, on Y direction about the X-axis symmetry;
Described mass 15 is connected with driving Vierendeel girder 5 to the folded beam II 13 of side by being connected in its Y, drives Vierendeel girder 5 and is connected on the anchor point by folded beam I 7; Be fixed on the part that drives on the Vierendeel girder 5 and drive moving broach and constitute driving comb to 4 with the quiet broach of driving that is fixed on the drive electrode 3, make drive Vierendeel girder 5 drive masses 15 produce X to to-and-fro movement; Be fixed on and drive on the Vierendeel girder 5 other and drive moving broach and be fixed on the driving that drives detecting electrode 1 and detect quiet broach and constitute and drive detection comb and detect to finish to drive 2.
At X on side, mass 15 by folded beam I 7 be parallel to the center of mass X and be connected to the lever 12 of side; Between the center of lever 12 and two end points, symmetry is furnished with two fulcrums, fulcrum from the distance at lever center less than the distance of fulcrum from the lever end points, two Y to balance pivot beam 14 respectively described two fulcrums are connected with anchor point; Simultaneously, two end points of lever 12 connect successively respectively Y to responsive transfer beams 8 and X to responsive bent beam 9, the other end of two responsive bent beams 9 then is connected with two end points of no variable shaped beam 16 respectively, and the width of responsive bent beam 9 is less than the width of no variable shaped beam 16; The moving broach of sensitivity that is fixed on the no variable shaped beam 16 constitutes responsive detection comb to 10 with the quiet broach that is fixed on responsive detecting electrode 11, to finish the capacitance detecting of sensitive direction.
In this embodiment, the width of lever 12 is 10 microns, and balance pivot is 50 microns from the distance h 0 at lever center, and fulcrum is 450 microns from the distance h 1 of lever end points, the width of balance pivot beam 14 is 2 microns, length is 20 microns, and the length of responsive transfer beams 8 is 50 microns, and width is 10 microns, the length and width of responsive bent beam 9 are 20 microns, width is 2 microns, and the width of no variable shaped beam 16 is 30 microns, and length is 960 microns; The single beam length of forming folded beam I 7 is 100 microns, and width is 2 microns; All thickness of structure are 30 microns.
Capacitive micro mechinery gyroscope principle of work among this embodiment: when on drive electrode 3, adding the periodic voltage signal, driving comb to 4 electrostatic forcing under, mass 15 is along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction, on Y direction, can produce coriolis force, make mass 15 produce displacement d0 along Y direction, this displacement produces acting force by the center of 13 pairs of levers 12 of folded beam II, under the effect of lever 12, the displacement d1 that the two ends generation of lever 12 is bigger (d1＞d0), this displacement is delivered on the no variable shaped beam 16 by responsive transfer beams 8 and 9 effects of responsive bent beam, make no variable shaped beam 16 produce displacement d1 in the Y direction, thereby obtain bigger capacitance change at responsive detection comb on to 10, obtain the information of input angular velocity ω.Lever should be h1/h0 to the enlargement factor d1/d0 of displacement in theory, and promptly enlargement factor is 9.For example, when the displacement d0 that produces along Y direction when mass 15 was 1 micron, the theoretical displacement d1 of no variable shaped beam 16 was 9 microns.Because have slippages in the structure, the actual displacement of no variable shaped beam 16 is 4 microns.Leverage has amplified 4 times to the actual displacement of mass, thereby has amplified 4 times to detecting the changes in capacitance amount.
Claims (1)
1. a capacitive micro mechinery gyroscope comprises mass (15); Definition mass (15) center is an initial point, be X to, the direction parallel with another side with the parallel on one side direction of mass (15) is Y to, capacitive micro mechinery gyroscope on directions X, about the Y-axis symmetry, on Y direction about the X-axis symmetry; It is characterized in that: described mass (15) is connected with driving Vierendeel girder (5) to the folded beam II (13) of side by being connected in its Y, drives Vierendeel girder (5) and is connected on the anchor point by folded beam I (7); Be fixed on the part that drives on the Vierendeel girder (5) and drive moving broach and constitute driving comb to (4) with the quiet broach of driving that is fixed on the drive electrode (3), make drive Vierendeel girder (5) drive mass (15) produce X to to-and-fro movement; Be fixed on and drive on the Vierendeel girder (5) other and drive moving broach and be fixed on the driving that drives detecting electrode (1) and detect quiet broach and constitute and drive detection comb (2) are detected to finish to drive; On side, mass (15) is connected with the center that is parallel to the lever (12) of mass X to side by folded beam I (7) at X; Between the center of lever (12) and two end points, symmetry is furnished with two fulcrums, fulcrum from the distance at lever center less than the distance of fulcrum from the lever end points, two Y to balance pivot beam (14) respectively described two fulcrums are connected with anchor point; Simultaneously, two end points of lever (12) connect successively respectively Y to responsive transfer beams (8) and X to responsive bent beam (9), the other end of two responsive bent beams (9) then is connected with two end points of no variable shaped beam (16) respectively, and the width of responsive bent beam (9) is less than the width of no variable shaped beam (16); The moving broach of sensitivity that is fixed on the no variable shaped beam (16) constitutes responsive detection comb to (10) with the quiet broach that is fixed on the responsive detecting electrode (11), to finish the capacitance detecting of sensitive direction.
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| CN 201110133079 CN102221361B (en) | 2011-05-20 | 2011-05-20 | Capacitive micro machinery gyroscope |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528577A (en) * | 2013-10-12 | 2014-01-22 | 深迪半导体(上海)有限公司 | Z-axis MEMS capacitive gyroscope |
| WO2016082571A1 (en) * | 2014-11-27 | 2016-06-02 | 歌尔声学股份有限公司 | Tri-axial micro-electro-mechanical gyroscope |
| CN105698781A (en) * | 2014-11-26 | 2016-06-22 | 司红康 | Radially-supported bulk acoustic wave silicon micro-gyroscope |
| CN105737810A (en) * | 2014-12-10 | 2016-07-06 | 司红康 | High-sensitivity disc-shaped bulk acoustic wave silicon micro-gyroscope |
| CN110307832A (en) * | 2019-06-28 | 2019-10-08 | 北京理工大学 | One kind being based on leverage displacement equations sonic type micro mechanical scopperil instrument |
| CN110307833A (en) * | 2019-06-27 | 2019-10-08 | 深迪半导体(上海)有限公司 | A kind of high-precision Z-axis gyroscope |
| CN110926445A (en) * | 2019-12-06 | 2020-03-27 | 深迪半导体(上海)有限公司 | Three-axis MEMS gyroscope |
| CN112113553A (en) * | 2020-09-15 | 2020-12-22 | 浙江大学 | Gyro full-matching tuning electrode |
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| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN101746708A (en) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | Complete coupling capacitance type micromachined gyroscope |
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2011
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| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN101746708A (en) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | Complete coupling capacitance type micromachined gyroscope |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528577A (en) * | 2013-10-12 | 2014-01-22 | 深迪半导体(上海)有限公司 | Z-axis MEMS capacitive gyroscope |
| CN105698781B (en) * | 2014-11-26 | 2019-01-04 | 安徽康力节能电器科技有限公司 | Radial support bulk acoustic wave silicon micro-gyroscope |
| CN105698781A (en) * | 2014-11-26 | 2016-06-22 | 司红康 | Radially-supported bulk acoustic wave silicon micro-gyroscope |
| WO2016082571A1 (en) * | 2014-11-27 | 2016-06-02 | 歌尔声学股份有限公司 | Tri-axial micro-electro-mechanical gyroscope |
| US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
| CN105737810A (en) * | 2014-12-10 | 2016-07-06 | 司红康 | High-sensitivity disc-shaped bulk acoustic wave silicon micro-gyroscope |
| CN105737810B (en) * | 2014-12-10 | 2018-09-14 | 安徽康力节能电器科技有限公司 | Highly sensitive plate-like bulk acoustic wave silicon micro-gyroscope |
| CN110307833A (en) * | 2019-06-27 | 2019-10-08 | 深迪半导体(上海)有限公司 | A kind of high-precision Z-axis gyroscope |
| CN110307832A (en) * | 2019-06-28 | 2019-10-08 | 北京理工大学 | One kind being based on leverage displacement equations sonic type micro mechanical scopperil instrument |
| CN110926445A (en) * | 2019-12-06 | 2020-03-27 | 深迪半导体(上海)有限公司 | Three-axis MEMS gyroscope |
| CN110926445B (en) * | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| US11639852B2 (en) | 2019-12-06 | 2023-05-02 | Senodia Technologies (Shaoxing) Co., Ltd. | Three-axis microelectromechanical system (MEMS) gyroscope |
| CN112113553A (en) * | 2020-09-15 | 2020-12-22 | 浙江大学 | Gyro full-matching tuning electrode |
| CN112113553B (en) * | 2020-09-15 | 2022-06-21 | 浙江大学 | Gyro full-matching tuning electrode |
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