CN102013832A - Ultrasonic linear motor and electric excitation method thereof - Google Patents
Ultrasonic linear motor and electric excitation method thereof Download PDFInfo
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- CN102013832A CN102013832A CN 201010603957 CN201010603957A CN102013832A CN 102013832 A CN102013832 A CN 102013832A CN 201010603957 CN201010603957 CN 201010603957 CN 201010603957 A CN201010603957 A CN 201010603957A CN 102013832 A CN102013832 A CN 102013832A
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- 230000005540 biological transmission Effects 0.000 claims description 6
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Abstract
The invention provides an ultrasonic linear motor and an electric excitation method thereof, belonging to the technical field of an ultrasonic motor. The motor comprises a stator, a rotor and piezoelectric ceramics, wherein the stator is a rectangular perforated plate one side of which is provided with a beam driving foot while the other side of which is adhered with 5 piezoelectric ceramics for simultaneously exciting the first-order flexure vibration mode and the second-order flexure vibration mode of a stator plate. In the invention, the two mutually orthogonal flexure vibrations are simultaneously excited by utilizing sinusoidal signals with a phase difference of pi/2 so as to drive the driving foot on the stator plate to do elliptic motion with a phase difference of pi/2, and the rotor pressing on the stator driving foot is pushed by friction and force transfer to move; and the rotor can be driven to move reversely by the excitation of sinusoidal signals with a phase difference of minus pi/2. Under the working condition, the two ends of the stator plate are fixed by screws. The ultrasonic linear motor has the advantages of compact structure, small mass, high driving efficiency and larger thrust and is reliable in operation.
Description
Technical field
The present invention relates to a kind of ultrasound electric machine and electric excitation method thereof thereof, belong to the ultrasound electric machine technical field.
Background technology
Ultrasound electric machine is a kind of new type power output device that utilizes the inverse piezoelectric effect and the friction-driven principle of piezoelectric ceramic, it utilizes inverse piezoelectric effect to convert electrical energy into the micro breadth oscillation of ultrasound electric machine stator, and, promote mover output macroscopic motion by the stator of motor and the rubbing action between the mover.Wherein, the mover linear movement output of linear ultrasonic motor.
At present, linear ultrasonic motor directly linear movement output drives load, need not movement conversion, and response speed is fast, positioning accuracy is high thereby have.Plate linear ultrasonic motor volume is small and exquisite, and thrust-weight ratio is big, and required installing space is few in host system, satisfies modern Driving technique to the actuator requirement, has broad application prospects.
Summary of the invention
Technical problem to be solved by this invention is to develop the linear ultrasonic motor of a kind of simple in structure, big thrust loading, high accuracy, fast-response.
The present invention adopts following technical scheme for solving the problems of the technologies described above:
A kind of linear ultrasonic motor, comprise stator and mover, side surface at stator is provided with the driving foot, described mover is pressed on the driving foot of stator by precompression, described stator is rectangular plate shape and is provided with through hole, be pasted with 5 piezoelectric ceramic on the opposite side surface of stator, be used to excite 1 rank flexural vibrations and the 2 rank flexural vibrations of stator on two orthogonal space directions;
Wherein, 1 in the described piezoelectric ceramic laterally is pasted on position symmetrical enough with driving on the stator, is used to excite the 1 rank flexural vibrations of stator at transverse plane;
Other 4 piezoelectric ceramic vertically are pasted on the both sides of described through hole in twos abreast, are used to excite the 2 rank flexural vibrations of stator at perpendicular.
Further, linear ultrasonic motor of the present invention, described driving foot are positioned at the node place of 2 rank flexural vibrations of the crest of 1 rank flexural vibrations of transverse plane and perpendicular.
Further, linear ultrasonic motor of the present invention, the through hole on the described stator are positioned at the crest place of 2 rank flexural vibrations of crest, the perpendicular of 1 rank flexural vibrations of transverse plane.
Further, linear ultrasonic motor of the present invention, described driving foot is the crossbeam shape.
Further, linear ultrasonic motor of the present invention is useful on the screw of fixed stator respectively at four corner ends of stator, and horizontally set is fluted respectively below the screwhole position that is provided with on the stator on the side surface that drives foot.
Further, linear ultrasonic motor of the present invention, the quantity of described through hole is 2, vertically is arranged on respectively on the center line of stator; On the axis of pitch of described through hole, be positioned at the position at stator plate two ends, offer two semicircle orifices respectively accordingly.
A kind of electric excitation method thereof of linear ultrasonic motor may further comprise the steps:
A, with phase difference is that the sinusoidal signal of pi/2 encourages stator simultaneously under two mutually orthogonal 1 rank flexural vibrations and 2 rank flexural vibrations, make the driving foot of stator produce the elliptic motion that has the pi/2 phase difference in time mutually, promote the mover motion through the friction power transmission;
B, encourage stator with phase difference simultaneously under two mutually orthogonal 1 rank flexural vibrations and 2 rank flexural vibrations for the sinusoidal signal of bearing pi/2, make the driving foot of stator produce the elliptic motion that has negative pi/2 phase difference in time mutually, promote the mover direction motion opposite with steps A through the friction power transmission.
The present invention adopts above technical scheme to have following beneficial effect:
Perforated plate linear ultrasonic motor of the present invention utilizes the mode work of shaking of the face excurvation of two orthogonal directions of single oscillator, except that general characteristic with ultrasound electric machine, adopt strip to drive foot as stator, simple and compact for structure, operation mode excites easily, and on structural design, can guarantee frequency invariance requirement, reliable operation.Perforated plate is simple in structure, good manufacturability, and the difficulty that greatly reduces design and make helps industrialization.With frequently dephased sine voltage signal excitation, drive circuit is easy to realize by two-way.
Description of drawings:
Fig. 1 is a perforated plate linear ultrasonic motor stator structure schematic diagram.
Fig. 2 is a perforated plate linear ultrasonic motor stator operation mode schematic diagram.
Fig. 3 is a perforated plate linear ultrasonic motor piezoelectric ceramic polarised direction schematic diagram.
Fig. 4 is a perforated plate linear ultrasonic motor structural representation.
Fig. 5 is a perforated plate linear ultrasonic motor operation principle schematic diagram.
Number in the figure title: 1-drives foot; The 2-stator; 3,4,5,6,7-piezoelectric ceramic; The 8-mover; 9, the 10-stator drives sufficient end face particle motion trace; 11, the 12-mover direction of motion; The 13-precompression; 21, the vibration shape of the operation mode of 22-stator.
Embodiment:
Below in conjunction with accompanying drawing technical scheme of the present invention is described in further detail:
Shown in Fig. 1 (a), a side surface of stator 2 is provided with and drives foot 1, and stator 2 is to constitute by having the perforated plate that drives foot 1;
Shown in Fig. 1 (b), the back side of stator 2 is pasted with 5 piezoelectric ceramic accordingly, is used to excite the flexural vibrations of stator plate.Wherein, piezoelectric ceramic 6 laterally is pasted on the stator 2 position symmetrical with driving foot 1, is used to excite the 1 rank flexural vibrations of stator 2 at transverse plane;
Other 4 piezoelectric ceramic vertically are pasted on the both sides of described through hole in twos abreast, are used to excite the 2 rank flexural vibrations of stator 2 at perpendicular.
Below in conjunction with shown in Figure 2, further explain principles of structural design of the present invention:
Shown in Fig. 2 (a), stator 2 is a rectangular plate shape, and on the center line of stator plate, vertically offer two circular holes, on the axis of pitch of these two circular holes, be positioned at the position at stator plate two ends, offer two semicircle orifices respectively accordingly, its purpose of design is to reduce stator structure rigidity, makes piezoelectric ceramic inspire required operation mode easily and the mode amplitude is responded to increase.
Four corner ends of stator plate are respectively opened a screw, play fixed stator 2, and laterally open a groove respectively near the position of screw, and being used to weaken stator 2 local stiffness to reduce the influence of hold-down screw to stator mode, its stiff end just is positioned at the node place of the stator plate vibration shape 22.
Drive the node place that foot 1 is positioned at mode of oscillation 21 crest places and mode of oscillation 22, shown in Fig. 2 (b), wherein: on piezoelectric ceramic 6, apply the signal of telecommunication
, can excite the flexural vibration mode of the stator plate shown in mode 21; Its mode 21 makes and drives the foot edge perpendicular to square plate apparent motion, the displacement with Z direction;
Shown in Fig. 2 (c), on piezoelectric ceramic 3,4 and 5,6, apply the signal of telecommunication respectively
With
, can excite the flexural vibration mode of the stator shown in mode 22, and mode 22 makes and drives sufficient end face and move along Y direction, has the displacement of Y direction.
In like manner, on piezoelectric ceramic 3, apply the signal of telecommunication
, can excite 1 rank flexural vibration mode 21 of the stator shown in Fig. 2 (a); On piezoelectric ceramic 3,4 and 5,7, apply the signal of telecommunication respectively
With
, can excite the flexural vibration mode 22 of the stator shown in Fig. 2 (b).
Piezoelectric ceramic 3,4 and 5,7 is used to excite the 2 rank flexural vibration modes 22 of stator plate at the Y-Z section, because when plate is crooked, its crest or trough place strain maximum should be pasted on piezoelectric ceramic near bending vibration modes 22 crests or the trough as far as possible, to improve launching efficiency.
As shown in Figure 3, the present invention includes 5 piezoelectric ceramic, wherein piezoelectric ceramic 6 laterally is pasted on the stator 2 position symmetrical with driving foot 1, is used to excite the 1 rank flexural vibrations of stator 2 at transverse plane; Other 4 piezoelectric ceramic vertically are pasted on the both sides of described through hole in twos abreast, are used to excite the 2 rank flexural vibrations of stator 2 at perpendicular.Requirement for above-mentioned 5 piezoelectric ceramic polarised directions is: the polarised direction of piezoelectric ceramic 3,4 is opposite with the polarised direction of piezoelectric ceramic 5,6,7.
Piezoelectric ceramic 6 is used to excite the flexural vibration mode of stator plate at the x-z section; Piezoelectric ceramic 3,4,5,7 is used to excite the 2 rank flexural vibration modes of stator plate at the y-z section.Drive foot 1 because just back to piezoelectric ceramic 6, drive sufficient integral body and be case of bending and made by the flexural vibration mode that piezoelectric ceramic 6 is excited, it drives sufficient z to the amplitude maximum plate centre position, the side of being positioned at; Drive the node place that foot also is positioned at the 2 rank flexural vibration modes that excited by piezoelectric ceramic 3,4,5,7 simultaneously, because the rotation at flexural vibrations node place and driving foot have certain altitude, the particle that drives the foot surface will be along the y shaft vibration.
As shown in Figure 4, linear ultrasonic motor of the present invention comprises stator 2 and mover 8, and stator 2 is for rectangular plate shape and be provided with some through holes, is provided with at a side surface of stator 2 and drives foot 1, and mover 8 is pressed on the driving foot 1 of stator 2 by precompression 13.
Shown in Fig. 5 (a), when on piezoelectric ceramic 6, applying the signal of telecommunication respectively simultaneously
,On piezoelectric ceramic 3,4 and 5,6, apply the signal of telecommunication respectively
With
Promptly when this 3 signals of telecommunication (E1, E2, E3) when applying simultaneously, the stack of mode of oscillation 21, mode of oscillation 22 responses can make and drive foot 1 and mover 8 contact positions and produce the elliptic motion that has the pi/2 phase difference each other 9 on the x-z face shown in Fig. 5 (a); The motion that drives foot 1 end face promotes mover 8 along 11 motions of the direction shown in Fig. 5 (a) through the friction power transmission.
Shown in Fig. 5 (b), when this 3 signals of telecommunication (E1, E2, E3) when applying simultaneously, the stack of two mode of oscillations 21,22 can make and drive foot and mover 8 contact positions and produce the elliptic motion that has the pi/2 phase difference each other 10 on the x-z face shown in Fig. 5 (b); The motion that drives sufficient end face promotes mover 8 along 12 motions of the direction shown in Fig. 5 (b) through the friction power transmission.
This ultrasound electric machine compact conformation helps miniaturization; The quality of motor own is little, can realize big thrust-weight ratio; Excite the required operation mode of motor easily, can guarantee the frequency invariance requirement on the structural design, help industrialization; Working stability, reliable.
Claims (7)
1. a linear ultrasonic motor comprises stator (2) and mover (8), is provided with at a side surface of stator (2) and drives foot (1), and described mover (8) is pressed on the driving foot (1) of stator (2) by precompression; It is characterized in that:
Described stator (2) is for rectangular plate shape and be provided with through hole, is pasted with 5 piezoelectric ceramic on the opposite side surface of stator (2), is used to excite 1 rank flexural vibrations and the 2 rank flexural vibrations of stator (2) on two orthogonal space directions;
Wherein, 1 in the described piezoelectric ceramic laterally is pasted on last and driving foot (1) the symmetrical position of stator (2), is used to excite the 1 rank flexural vibrations of stator (2) at transverse plane;
Other 4 piezoelectric ceramic vertically are pasted on the both sides of described through hole in twos abreast, are used to excite the 2 rank flexural vibrations of stator (2) at perpendicular.
2. linear ultrasonic motor according to claim 1 is characterized in that: describedly drive the node place that foot (1) is positioned at 2 rank flexural vibrations of the crest of 1 rank flexural vibrations of transverse plane and perpendicular.
3. linear ultrasonic motor according to claim 1 is characterized in that: the through hole on the described stator (2) is positioned at the crest place of 2 rank flexural vibrations of crest, the perpendicular of 1 rank flexural vibrations of transverse plane.
4. linear ultrasonic motor according to claim 1 is characterized in that: described driving foot (1) is the crossbeam shape.
5. linear ultrasonic motor according to claim 1, it is characterized in that: the screw that is useful on fixed stator (2) at four corner ends of described stator (2) respectively, be provided with on the stator (2) on the side surface that drives foot, horizontally set is fluted respectively below the position of described screw.
6. linear ultrasonic motor according to claim 1 is characterized in that: the quantity of described through hole is 2, vertically is arranged on respectively on the center line of stator (2); On the axis of pitch of described through hole, be positioned at the position at stator plate two ends, offer two semicircle orifices respectively accordingly.
7. the electric excitation method thereof of a linear ultrasonic motor as claimed in claim 1 is characterized in that, comprises the steps:
A, with phase difference is that the sinusoidal signal of pi/2 encourages stator (2) simultaneously under two mutually orthogonal 1 rank flexural vibrations and 2 rank flexural vibrations, make the driving foot (1) of stator (2) produce the elliptic motion that has the pi/2 phase difference in time mutually, promote mover (8) motion through the friction power transmission;
B, encourage stator (2) with phase difference simultaneously under two mutually orthogonal 1 rank flexural vibrations and 2 rank flexural vibrations for the sinusoidal signal of bearing pi/2, make the driving foot (1) of stator (2) produce the elliptic motion that has negative pi/2 phase difference in time mutually, promote mover (8) the direction motion opposite with steps A through the friction power transmission.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010603957A CN102013832B (en) | 2010-12-24 | 2010-12-24 | Ultrasonic linear motor and electric excitation method thereof |
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| CN201010603957A CN102013832B (en) | 2010-12-24 | 2010-12-24 | Ultrasonic linear motor and electric excitation method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106849738A (en) * | 2015-12-04 | 2017-06-13 | 佳能株式会社 | Drive method, oscillation drive and the plant equipment of oscillation actuator |
| CN107834898A (en) * | 2017-12-01 | 2018-03-23 | 河南省皓泽电子有限公司 | A kind of roll structure ultrasonic miniature motor |
| CN110299867A (en) * | 2019-07-16 | 2019-10-01 | 太原科技大学 | A kind of four-footed driving rotary ultrasonic wave motor |
| CN111181435A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN111193434A (en) * | 2020-02-24 | 2020-05-22 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
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| US20030201695A1 (en) * | 2002-04-03 | 2003-10-30 | Olympus Optical Co., Ltd. | Ultrasonic linear motor |
| CN100403647C (en) * | 2005-01-10 | 2008-07-16 | 南京航空航天大学 | Small linear ultrasonic motor |
| CN100488020C (en) * | 2005-12-12 | 2009-05-13 | 南京航空航天大学 | Linear ultrasonic motor |
| CN100587991C (en) * | 2004-09-03 | 2010-02-03 | 物理设备（Pi）两合公司 | Linear ultrasound motor |
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2010
- 2010-12-24 CN CN201010603957A patent/CN102013832B/en not_active Expired - Fee Related
Patent Citations (4)
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|---|---|---|---|---|
| US20030201695A1 (en) * | 2002-04-03 | 2003-10-30 | Olympus Optical Co., Ltd. | Ultrasonic linear motor |
| CN100587991C (en) * | 2004-09-03 | 2010-02-03 | 物理设备（Pi）两合公司 | Linear ultrasound motor |
| CN100403647C (en) * | 2005-01-10 | 2008-07-16 | 南京航空航天大学 | Small linear ultrasonic motor |
| CN100488020C (en) * | 2005-12-12 | 2009-05-13 | 南京航空航天大学 | Linear ultrasonic motor |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106849738A (en) * | 2015-12-04 | 2017-06-13 | 佳能株式会社 | Drive method, oscillation drive and the plant equipment of oscillation actuator |
| CN106849738B (en) * | 2015-12-04 | 2019-08-06 | 佳能株式会社 | Drive method, oscillation drive and the mechanical equipment of oscillation actuator |
| US10516349B2 (en) | 2015-12-04 | 2019-12-24 | Canon Kabushiki Kaisha | Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus |
| CN107834898A (en) * | 2017-12-01 | 2018-03-23 | 河南省皓泽电子有限公司 | A kind of roll structure ultrasonic miniature motor |
| CN107834898B (en) * | 2017-12-01 | 2020-01-14 | 河南皓泽电子股份有限公司 | Ultrasonic micro motor with ball structure |
| CN110299867A (en) * | 2019-07-16 | 2019-10-01 | 太原科技大学 | A kind of four-footed driving rotary ultrasonic wave motor |
| CN111181435A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN111193434A (en) * | 2020-02-24 | 2020-05-22 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
| CN111181435B (en) * | 2020-02-24 | 2024-05-28 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN111193434B (en) * | 2020-02-24 | 2024-05-28 | 南京航空航天大学 | Rail carrying system based on sandwich type frame actuator and working method thereof |
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| CN102013832B (en) | 2012-09-26 |
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Application publication date: 20110413 Assignee: Gui Xin Magnetoelectric Hi-tech Co., Ltd. Assignor: Nanjing University of Aeronautics and Astronautics Contract record no.: 2013320000627 Denomination of invention: Ultrasonic linear motor and electric excitation method thereof Granted publication date: 20120926 License type: Exclusive License Record date: 20130703 |
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