CN101963587B - X-ray inspection apparatus - Google Patents
X-ray inspection apparatus Download PDFInfo
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- CN101963587B CN101963587B CN2009101630214A CN200910163021A CN101963587B CN 101963587 B CN101963587 B CN 101963587B CN 2009101630214 A CN2009101630214 A CN 2009101630214A CN 200910163021 A CN200910163021 A CN 200910163021A CN 101963587 B CN101963587 B CN 101963587B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/08—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3306—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts object rotates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3307—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts source and detector fixed; object moves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
- G01N2223/6113—Specific applications or type of materials patterned objects; electronic devices printed circuit board [PCB]
Abstract
The invention provides an X-ray inspection apparatus. A loading board, an X-ray tube and a detector are arranged in a shell and an article to be measured is arranged on the loading board and the X-ray tube radiates the X-ray and the article to be measured is inspected by imaging by the detector, wherein the loading board is a rotary board or a round rotation board rotatably arranged in a part of the through hole and leaning to the through hole, a connection rod is arranged at the lower part of the rotary board and a rotary motor is arranged at the lower end of the connection rod and fixed on the loading board by a fixation rack, the rotary board rotates by rotating the rotary motor to horizontally move along the x-axis and the y-axle and vertically move along the z-axis and the detector moves along the guide rail by a bracket and the detection part obtains various incidence angles, thus various angle detection is performed while ensuring the solid image information and the precision is increased and the efficiency is very effective.
Description
Technical field
The present invention relates to X ray checking device, relate in particular to following X ray checking device: this X ray checking device in the enclosure section is provided with objective table, X-ray tube and detector, and determinand is positioned on the above-mentioned objective table, from above-mentioned X-ray tube X-ray irradiation, make a video recording to check determinand by above-mentioned detector, wherein, above-mentioned objective table is rotatable universal stage, perhaps possess amesiality and hole that run through, in this part that runs through, rotatably be provided with circular universal stage, bottom at above-mentioned universal stage is provided with connecting rod, in the lower end of above-mentioned connecting rod, be provided with turning motor, be fixed on the above-mentioned objective table by fixed mount, make above-mentioned universal stage rotation by rotating above-mentioned turning motor, can carry out the x axle, the y axle horizontal moves vertical with the z axle mobile, above-mentioned detector can move along guide rail by carriage, in the production process of electrical and electronic product, at printed circuit board (PCB) (printed circuit board, PCB) after upper installation component carries out weld job, in order to improve the reliability of product, not only make determinand along x, y, the z axle moves, and make its rotation, can carry out the inspection of multiple angles thus.
Background technology
Generally, be built-in with the PCB of multiple kind in the electric and electronic product.In the production process of the said goods, after carrying out weld job, installation component on the PCB in order to improve the reliability of product, carries out the operation that state is checked.In the past, as such inspection method, visual examination or appearance inspection device are arranged, come photographic image by lighting device and video camera, judge according to this form after behind the input image signal of video signal being processed good/bad, but only depend on visual examination that limitation is arranged, therefore developed the x-ray testing fixture that utilizes X ray.
Existing x-ray testing fixture has utilized the material transmittance of X ray, has namely utilized based on the image of the Transmission X transmitted intensity with the characteristic that is inversely proportional to the thickness that is transmitted material and density to form, can easily grasp bonding state good/bad.
Generally, x-ray testing fixture in the enclosure section is provided with objective table, X-ray tube and detector, and determinand is positioned on the above-mentioned objective table, from above-mentioned X-ray tube X-ray irradiation, by above-mentioned detector shooting, checks thus determinand.
Existing x-ray testing fixture, place determinand at objective table, from the X-ray tube X-ray irradiation, measured determinand after fixed detector being fixed in the range of exposures of X ray, so there is the incident angle that is difficult to obtain solid and variform about inspection area, thereby especially there is the weld part of the inside of the PCB with sandwich construction in the problem that causes precision to reduce, owing to being formed on the problem that the weld part on surface hinders accurate detection.
In order to address the above problem, developed and movably formed detector, be arranged to not only have the incident angle of straight line, also had the x-ray testing fixture of the incident angle of inclination, but in this case also because the image of obtaining multiple angles has limitation, the problem that exists precision to reduce.
Summary of the invention
The present invention proposes in order to solve aforesaid existing problem, its purpose is the X ray checking device that provides following: this X ray checking device in the enclosure section is provided with objective table, X-ray tube and detector, and determinand is positioned on the above-mentioned objective table, from above-mentioned X-ray tube X-ray irradiation, make a video recording to check determinand by above-mentioned detector, wherein, above-mentioned objective table is rotatable universal stage, perhaps possess amesiality and hole that run through, in this part that runs through, rotatably be provided with circular universal stage, bottom at above-mentioned universal stage is provided with connecting rod, in the lower end of above-mentioned connecting rod, be provided with turning motor, be fixed on the above-mentioned objective table by fixed mount, make above-mentioned universal stage rotation by rotating above-mentioned turning motor, can carry out the x axle, the y axle horizontal moves vertical with the z axle mobile, above-mentioned detector can move along guide rail by carriage, in the production process of electrical and electronic product, after installation component on the PCB carries out weld job in order to improve the reliability of product, not only make determinand along x, y, the z axle moves, and make its rotation, the inspection of multiple angles can be carried out thus, precision and efficient can be improved.
To achieve these goals, X ray checking device of the present invention, section is provided with objective table in the enclosure, X-ray tube and detector, and determinand is positioned on the above-mentioned objective table, from above-mentioned X-ray tube X-ray irradiation, make a video recording by above-mentioned detector, check thus determinand, wherein, above-mentioned objective table is rotatable universal stage, perhaps possess amesiality and hole that run through, in this part that runs through, rotatably be provided with circular universal stage, above-mentioned universal stage is provided with connecting rod in the bottom, lower end at above-mentioned connecting rod is provided with turning motor, is fixed on the above-mentioned objective table by fixed mount, makes above-mentioned universal stage 110 rotations by rotating above-mentioned turning motor.
And, above-mentioned universal stage can be all or optionally is provided with y axle horizontal moving-member, x axle horizontal moving-member and z axle horizontal moving-member, wherein, this y axle horizontal moving-member is supported by fixed mount, and can move along the y axle horizontal, this x axle horizontal moving-member is supported by fixed mount, and can move along the x axle horizontal, this z axle horizontal moving-member is supported by fixed mount, and can vertically move, above-mentioned detector can move along guide rail by carriage, and this guide rail is circular arc type, linear pattern, perhaps be provided with some in the linear form in the end of circular arc type.
And above-mentioned X-ray tube can be vertically mobile along with being fixed on moving-member mobile on the guide rail.
And above-mentioned detector can be vertically mobile along with being fixed on moving-member mobile on the guide rail.
And the central authorities of above-mentioned connecting rod are provided with through hole, and above-mentioned turning motor is made of the mesopore motor that central authorities are provided with mesopore, and above-mentioned detector is by can make a video recording determinand on the above-mentioned universal stage of this through hole.
And, for fixing determinand in a side of above-mentioned objective table, be provided with vice grip, also be provided with mouth part, this mouth part is provided with motor, rotatable this vice grip.
And, in order to finely tune the position of the determinand that is positioned at above-mentioned objective table top, in a side of above-mentioned objective table, be provided with the horizontal movement unit that is made of y axle mobile unit and x axle mobile unit at an end of bar, the other end is provided with the guide rod of the pushing part that is moved by cylinder.
And, when preventing that above-mentioned objective table from vertically moving and the collision of above-mentioned X-ray tube, being provided with induction installation, this induction installation is fixed to aspect-oriented on the end side height of the above-mentioned X-ray tube of above-mentioned shell side.
And, when preventing that above-mentioned objective table from vertically moving and the collision of above-mentioned detector or guide rail, being provided with induction installation, this induction installation is fixed to towards following in above-mentioned shell side.
And above-mentioned these induction installations are monitor or optical sensor.
And above-mentioned X-ray tube is provided with timer, by this timer, above-mentioned X-ray tube is operated at certain intervals, so that warming-up (warm-up) time minimization.
And, centered by above-mentioned objective table, on top X-ray tube is set, in the bottom detector is set, when moving above-mentioned objective table to vertically upward direction, above-mentioned determinand is moved to above-mentioned X-ray tube with nearest as far as possible distance.
In the present invention, the objective table of having set determinand is rotatable, can move along x axle, y axle horizontal, can be vertically mobile along the z axle, above-mentioned detector moves along guide rail by carriage, can obtain multiple incident angle about inspection area, therefore, the present invention has when guaranteeing three-dimensional image information can carry out the inspection of multiple angles, can improve the very effective effect of precision and efficient.
Description of drawings
Fig. 1 is the stereographic map of X ray checking device of the present invention;
Fig. 2 is the front view of X ray checking device of the present invention;
Fig. 3 is the side view of X ray checking device of the present invention;
Fig. 4 is in order to represent the duty of X ray checking device of the present invention, the stereographic map after the extraction major part;
Fig. 5 is the stereographic map of the state looked up from the bottom of above-mentioned Fig. 4;
Fig. 6 a is the front view that moves horizontally above-mentioned Fig. 4 of duty for expression; Fig. 6 b is another front view that moves horizontally above-mentioned Fig. 4 of duty for expression;
Fig. 7 is the oblique view of structure of the universal stage of icon X ray checking device of the present invention;
Fig. 8 is the sectional drawing along the E-E line of above-mentioned Fig. 7;
Fig. 9 is the stereographic map of the anchor clamps of X ray checking device of the present invention;
Figure 10 is the front view of the embodiment of the detector 300 of X ray checking device of the present invention when being positioned at top;
Figure 11 is the duty of the universal stage of the detector 300 of Figure 10 when being positioned at top and the stereographic map of structure;
Figure 12 is the sectional drawing along the F-F line of above-mentioned Figure 11;
Figure 13 is the figure of the embodiment of guide rail 310 of the present invention, and Figure 13 a is the figure of diagram circular arc type guide rail, and Figure 13 b is the figure of icon linear pattern guide rail, and Figure 13 c is the figure of icon circular arc type and linear hybrid junctions configuration guide rail;
Figure 14 is icon X-ray tube 200, detector 300 can be along with the moving-member 291 that is fixed on guide rail 290,390 rear movements, 391 vertical mobile embodiment.
Wherein, description of reference numerals is as follows:
1 shell, 10 determinands
100 objective tables, 110 universal stages
120 mouth parts, 121 vice grips
122 motor, 130 guide rods
131y axle mobile unit 132x axle mobile unit
133 bars, 134 cylinders
135 pushing part 200X ray tubes
290 guide rails, 291 moving-members
300 detectors, 310 guide rails
311 carriages, 390 guide rails
391 moving-member 410y axle horizontal moving-members
411 fixed mounts, 412 workholders
420x axle horizontal moving-member 421 fixed mounts
422 workholder 430z axle horizontal moving-members
431 fixed mounts, 432 workholders
510 connecting rods, 511 through holes
520 turning motors, 530 fixed mounts
540 supports, 600 induction installations
700 induction installations
Embodiment
Describe technical pattern of the present invention in detail referring to accompanying drawing.
Fig. 1 is the stereographic map of X ray checking device of the present invention; Fig. 2 is the front view of X ray checking device of the present invention; Fig. 3 is the side view of X ray checking device of the present invention; Fig. 4 is in order to represent the duty of X ray checking device of the present invention, illustrated stereographic map after the extraction major part; Fig. 5 is the stereographic map of the state looked up from the bottom of above-mentioned Fig. 4; Fig. 6 is the front view that moves horizontally above-mentioned Fig. 4 of duty for expression; Fig. 7 is the stereographic map of structure of the universal stage of icon X ray checking device of the present invention; Fig. 8 is the sectional drawing along the E-E line of above-mentioned Fig. 7; Fig. 9 is the oblique view of the anchor clamps of X ray checking device of the present invention; Figure 10 is the front view of the embodiment of the detector 300 of X ray checking device of the present invention when being positioned at top; Figure 11 is the duty of the universal stage of detector 300 when being positioned at top of the above-mentioned Figure 10 of diagram and the stereographic map of structure; Figure 12 is the sectional drawing along the F-F line of above-mentioned Figure 11; Figure 13 is the figure of the embodiment of diagram guide rail 310 of the present invention, and Figure 13 a is the figure of diagram circular arc type guide rail; Figure 13 b is the figure of icon linear pattern guide rail; Figure 13 c is the figure of icon circular arc type and linear hybrid junctions configuration guide rail.
X ray checking device of the present invention, be provided with objective table 100 in shell 1 inside, X-ray tube 200 and detector 300, and determinand 10 is positioned on the above-mentioned objective table 100, from above-mentioned X-ray tube 200 X-ray irradiations, make a video recording by above-mentioned detector 300, check thus determinand 10, wherein, above-mentioned objective table 100 is rotatable universal stages 110, perhaps possess amesiality and hole that run through, in this part that runs through, rotatably be provided with circular universal stage 110, above-mentioned universal stage 110 is provided with connecting rod 510 in the bottom, be provided with turning motor 520 in the lower end of above-mentioned connecting rod 510, be fixed on the above-mentioned objective table 100 by fixed mount 530, make above-mentioned universal stage 110 rotations by rotating above-mentioned turning motor 520.
And, above-mentioned universal stage 110 can be all or optionally is provided with y axle horizontal moving-member 410, x axle horizontal moving-member 420 and z axle horizontal moving-member 430, wherein, this y axle horizontal moving-member 410 is supported by fixed mount 411, and can move along the y axle horizontal, this x axle horizontal moving-member 420 is supported by fixed mount 421, and can move along the x axle horizontal, this z axle horizontal moving-member 430 is supported by fixed mount 431, and can be vertically mobile along the z axle, above-mentioned detector 300 can move along guide rail 310 by carriage 311, and this guide rail 310 is circular arc types, linear pattern, perhaps be provided with some in the linear form in the end of circular arc type.
X ray checking device of the present invention, be provided with objective table 100, X-ray tube 200 and detector 300 in shell 1 inside, and make determinand 10 be positioned on the above-mentioned objective table 100 X-ray irradiation from above-mentioned X-ray tube 200, make a video recording by above-mentioned detector 300, check thus determinand 10.
Above-mentioned objective table 100 is rotatable universal stages 110 or possesses amesiality and hole that run through, in this part that runs through, rotatably be provided with circular universal stage 110, above-mentioned universal stage 110 is provided with connecting rod 510 in the bottom, be provided with turning motor 520 in the lower end of above-mentioned connecting rod 510, be fixed on the above-mentioned objective table 100 by fixed mount 530, make above-mentioned universal stage 110 rotations by rotating above-mentioned turning motor 520.
Above-mentioned objective table 100 can be the various forms such as polygon, circle, considers that the words of space availability ratio it would be desirable square.
Above-mentioned objective table 100 only is provided with universal stage 110, perhaps is constituted as the various forms such as polygon, circle, and a side of deflection objective table 100 forms above-mentioned universal stage 110.As above-mentioned, it is in order when needing the multiple camera angle of determinand 10 determinand to be set on the universal stage 110 that one side of deflection objective table 100 forms above-mentioned universal stage 110, when perhaps needing to rotate determinand is set on the part that does not have universal stage 110 and detects by detecting device 300, whole advantage of objective table 100 parts that can utilize universal stage 110 and not have universal stage 110 is arranged.
Such as Fig. 2 and shown in Figure 4, one end of above-mentioned fixed mount 530 is fixed on a side of above-mentioned objective table 100, the connecting rod 510 that is provided with turning motor 520 at the other end of above-mentioned fixed mount 530 is connected with the central axial region of above-mentioned universal stage 110, by rotating above-mentioned turning motor 520, make above-mentioned universal stage 110 rotations.
Shown in Fig. 4, Fig. 5, Fig. 6 a, Fig. 6 b, can move along the y axle horizontal by the y axle horizontal moving-member 410 that is supported by above-mentioned fixed mount 411, can move along the x axle horizontal by the x axle horizontal moving-member 420 that is supported by above-mentioned fixed mount 421, can move along the z axle horizontal by the z axle horizontal moving-member 430 that is supported by above-mentioned fixed mount 431.
Mode and y axle horizontal moving-member 410 combinations of above-mentioned fixed mount 411 can move along the y axle horizontal at the workholder 412 that is fixed in the sidepiece on the objective table 100, mode and 420 combinations of x axle horizontal moving-member that above-mentioned fixed mount 421 can move along the x axle horizontal with workholder 422, wherein, above-mentioned workholder 422 is equipped with at an upper portion thereof above-mentioned fixed mount 411 and is fixed to and can moves along the x axle horizontal, mode and 430 combinations of z axle horizontal moving-member that above-mentioned fixed mount 431 can move along the z axle horizontal with workholder 432, above-mentioned workholder 432 is arranged on two sides of above-mentioned fixed mount 421, can move along the z axle horizontal.As above-mentioned, can move horizontally with vertical mobile, and can make determinand be positioned at the desired correct position of operator.
Can be all or optionally be provided with above-mentioned y axle horizontal moving-member 410, x axle horizontal moving-member 420, z axle horizontal moving-member 430.Namely, only be provided with y axle horizontal moving-member 410 and x axle horizontal moving-member 420, perhaps only be provided with x axle horizontal moving-member 420 and z axle horizontal moving-member 430, perhaps be provided with y axle horizontal moving-member 410, x axle horizontal moving-member 420, z axle horizontal moving-member 430 whole.For example, when not needing multiplying power to adjust, can be provided with the parts except z axle horizontal moving-member 430.
Above-mentioned carriage 311 and above-mentioned detector 300 combinations are so that above-mentioned detecting device 300 moves along above-mentioned guide rail 310.
Above-mentioned guide rail 310 is circular arc type, linear pattern or is provided with some in the linear form in the end of circular arc type.
In the past, above-mentioned guide rail 310 is difficult to make objective table 100 itself to rotate, therefore use once in a while the guide rail of semicircular arc-shaped, but be provided with universal stage 110 in the X ray checking device of the present invention, so circular arc type guide rail 310 of the present invention can have arbitrarily angled, only also multiple shooting angle can be obtained fully by 1/4 circular arc type, therefore the space can be reduced significantly.
In addition, because objective table 100 rotations, so even linear guide rail 310 also can access multiple shooting angle, and can measure the correct ratio of determinand 10.Shown in Figure 13 a, if detector 300 moves along circular arc type guide rail 310a, then become L1: L2=L1 ': L2 ', but not L1: L2=11: 12, can not draw the correct ratio of the detected object of determinand 10, thereby when the correct ratio of needs, have difficulties, so can use circular arc type or linear pattern according to purpose, perhaps the end of circular arc type is provided with linear mixed type.
Therefore, shown in Figure 13 b, above-mentioned guide rail 310 is set as linear pattern, when making detector 300 along traveling priority, L1: L2=L1 ': L2 ' also can measure with the ratio of determinand 10 in detector 300 in the same manner.
And, shown in Figure 13 c, above-mentioned guide rail 310 is set as circular arc type and linear pattern mixing formation, make its advantage with circular arc type and linear advantage.
And above-mentioned X-ray tube 200 can be along with being fixed on the guide rail 290 and mobile moving-member 291 vertically moves.
Above-mentioned X-ray tube 200 is moved, make its near or away from determinand 10 or objective table 100, can make a video recording more exactly.
And above-mentioned detector 300 can be along with being fixed on the guide rail 390 and mobile moving-member 391 vertically moves.
Above-mentioned detector 300 is moved, make its near or away from determinand 10 or objective table 100, change that multiplying power is regulated and the intensity (brightness) of image, can make a video recording more exactly thus.
And above-mentioned connecting rod 510 is provided with through hole 511 in central authorities, and above-mentioned turning motor 520 is made of the mesopore motor that central authorities are provided with through hole, and therefore above-mentioned detector 300 can be made a video recording by the determinand 10 of 511 pairs of above-mentioned universal stages 110 of above-mentioned through hole.
Above-mentioned connecting rod 510 is provided with through hole 511 in central authorities, and the mesopore motor that is provided with mesopore by central authorities consists of turning motor 520, and is located at the lower end outer peripheral face of above-mentioned connecting rod 510, makes above-mentioned connecting rod 510 rotations.
Because turning motor 520 its central authorities of being made of the mesopore motor are formed with mesopore, therefore are constituted as in the mesopore of turning motor 520 and are mingled with above-mentioned connecting rod 510.
At this moment, use the mesopore motor to be owing to being provided with gear on the lower end periphery of connecting rod 510, be provided with motor at sidepiece and make travelling belt or engaged gears, rotate thus connecting rod 510, but this moment, motor was inclined to the side, in the situation of the rotation center bending shaft of connecting rod 510, be difficult to carry out correct inspection work, thereby will directly rotate connecting rod 510 with the turning motor 520 direct linking rods 510 that are provided with mesopore when the interlock of travelling belt or gear departs from some.
And, for fixing determinand 10 in a side of above-mentioned objective table 100, be provided with vice grip 121, also be provided with mouth part 120, this mouth part 120 is provided with motor 122, rotatable this vice grip 121.
Above-mentioned mouth part 120 is fixed on determinand 10 on the vice grip 121, rotate the fixedly vice grip 121 of determinand 10 by motor 122, thus after determinand 10 is placed on the top of above-mentioned universal stage 110, rotate with angle other angle in addition that rotation universal stage 110 obtains, can check determinand 10 in multiple angles.
And, in order to finely tune the position of the determinand 10 that is positioned at above-mentioned objective table 100 tops, in a side of above-mentioned objective table 100, end at bar 133 is provided with the horizontal movement unit that is made of y axle mobile unit 131 and x axle mobile unit 132, and the other end is provided with the guide rod 130 of the pushing part 135 that is moved by cylinder 134.
Above-mentioned guide rod 130 is provided with y axle mobile unit 131 and x axle mobile unit 132, can move horizontally, and is provided with the pushing part 135 by cylinder 134 can vertically move or diagonal line moves in the end of bar 133.
Such as Fig. 6 a, 6b and shown in Figure 9, can be set as cylinder 134 and move in the vertical direction, form bar 133 along diagonal line, cylinder 134 is also along diagonal line work, and above-mentioned pushing part 135 is moved along diagonal line.
Above-mentioned guide rod 130 always need to need to be opened the door of shell 1 outside when fine setting is set in the determinand 10 on top of above-mentioned objective table 100, the operator directly moves determinand 10 with hand, therefore there are the difficult of fine setting own, the problem points that Inspection is numerous and diverse.
And, vertical when mobile and the collision of above-mentioned X-ray tube 200 in order to prevent above-mentioned objective table 100, be provided with induction installation 600, this induction installation 600 is fixed to aspect-oriented on the end side height of the above-mentioned X-ray tube 200 of above-mentioned shell 1 side.
Above-mentioned induction installation 600 is by being located at outside watch-dog (not shown), vertical when mobile at above-mentioned objective table 100, in the situation about narrowing down with the interval of above-mentioned detector 300 or guide rail 310, the operator confirms by above-mentioned monitor, guarantee safe distance, prevent collision.
And, vertical when mobile and the collision of above-mentioned detector 300 or guide rail 310 in order to prevent above-mentioned objective table 100, be provided with induction installation 700, this induction installation 700 is fixed to towards following in above-mentioned shell 1 side.
Above-mentioned induction installation 700, by being located at outside watch-dog (not shown), in the situation vertical when mobile at above-mentioned objective table 100, that narrow down in the interval of above-mentioned detector 300 or guide rail 310, the operator confirms by above-mentioned monitor, guarantee safe distance, prevent collision.
And, above-mentioned induction installation 600, the 700th, monitor or optical sensor.
As shown in Figure 3, above-mentioned induction installation 600,700 is used for the operator and monitors to prevent collision by being located at outside watch-dog, but can be monitor or optical sensor (laser sensor, infrared ray sensor) this moment, and above-mentioned optical sensor is too narrow to certain distance and stops mobile (level, vertical, rotary moving etc.) when above at the interval.
And above-mentioned X-ray tube 200 is provided with timer (not shown), by this timer, above-mentioned X-ray tube is operated at certain intervals, so that warm-up period minimizes.
Above-mentioned X-ray tube, warming-up needs the time when starting, but should the time have a few length, and therefore have following shortcoming: when continuous Inspection was arranged, the activity duration was elongated.For example, if when not using more than 8 hours, X-ray tube stops, then in order to restart, starting after the time through warming-up again.Therefore, append timer, with the certain hour interval, for example 7 hours 59 minutes interval starts X-ray tube 200, and the time of warming-up shortens the activity duration in the time of then can reducing the operator and begin operation.
And, centered by above-mentioned objective table 100, X-ray tube 200 is set on top, detector 300 is set in the bottom, when moving above-mentioned objective table 100 to vertically upward direction, above-mentioned determinand 10 is moved to above-mentioned X-ray tube 300 with distance that can be nearest as far as possible.
As shown in Figure 1 to Figure 3, centered by above-mentioned objective table 100, be provided with X-ray tube 200 on top, the bottom is provided with detector 300.When being constituted as mentioned above, be set in all the time the determinand 10 as close as possible above-mentioned X-ray tubes 200 on objective table 100 tops.
But, as shown in figure 10, can be centered by above-mentioned objective table 100, be provided with X-ray tube 200 in the bottom, top is provided with detector 300, although not shown, but can centered by above-mentioned objective table 100, at two sidepieces X-ray tube 200 and detector 300 be set respectively.
If the bottom is provided with X-ray tube, then based on the thickness of objective table 100 and fixed mount etc., approaching can be limited.
As shown in figure 10, centered by above-mentioned objective table 100, be provided with X-ray tube 200 in the bottom, when top is provided with detector 300, fixed mount 530 is located at top, and connecting rod 510, turning motor 520 are located at top, therefore in order to ensure the space of setting determinand 10, form space part in inside, to be fixed on the above-mentioned rotation status 110 and the mode of rotating by above-mentioned turning motor 510 arranges carriage 540.Such as Figure 11 and shown in Figure 12, above-mentioned support connects a plurality of supports, and by support, detector 300 can be made a video recording.
Claims (11)
1. X ray checking device, its in the enclosure section be provided with objective table, X-ray tube and detector, and determinand is positioned on this objective table, from this X-ray tube X-ray irradiation, make a video recording by this detector, check thus determinand, wherein, described objective table possesses amesiality and hole that run through, rotatably is provided with circular universal stage in this part that runs through, bottom at this universal stage is provided with connecting rod, lower end at described connecting rod is provided with turning motor, and this turning motor is fixed on the described objective table by fixed mount, makes described universal stage rotation by rotating described turning motor, it is characterized in that
The central authorities of described connecting rod are provided with through hole, and described turning motor is made of the mesopore motor that central authorities are provided with mesopore, and described detector is by can make a video recording determinand on the described universal stage of this through hole.
2. X ray checking device according to claim 1 is characterized in that, described X-ray tube can be vertically mobile along with being fixed on moving-member mobile on the guide rail.
3. X ray checking device according to claim 1 and 2 is characterized in that, described detector can be vertically mobile along with being fixed on moving-member mobile on the guide rail.
4. X ray checking device according to claim 1 is characterized in that, for fixing determinand in a side of described objective table, is provided with vice grip, also is provided with mouth part, and this mouth part is provided with motor, rotatable this vice grip.
5. X ray checking device according to claim 1, it is characterized in that, in order to finely tune the position of the determinand that is positioned at described objective table top, in a side of described objective table, end at bar is provided with the horizontal movement unit that is made of y axle mobile unit and x axle mobile unit, and the other end is for being provided with the guide rod of the pushing part that is moved by cylinder at an end of described objective table.
6. X ray checking device according to claim 1, it is characterized in that, when preventing that described objective table from vertically moving and the collision of described X-ray tube, be provided with induction installation, this induction installation is fixed to aspect-oriented on the end side height of the described X-ray tube of described shell side.
7. X ray checking device according to claim 1 is characterized in that, when preventing that described objective table from vertically moving and the collision of described detector or guide rail, is provided with induction installation, and this induction installation is fixed to towards following in described shell side.
8. X ray checking device according to claim 6 is characterized in that, described induction installation is monitor or optical sensor.
9. X ray checking device according to claim 7 is characterized in that, described induction installation is monitor or optical sensor.
10. X ray checking device according to claim 1 is characterized in that, described X-ray tube is provided with timer, by this timer, described X-ray tube is operated at certain intervals, so that warm-up period minimizes.
11. X ray checking device according to claim 1, it is characterized in that, centered by described objective table, X-ray tube is set on top, detector is set in the bottom, when moving described objective table to vertically upward direction, described determinand is moved to described X-ray tube with nearest as far as possible distance.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020090066702A KR100943002B1 (en) | 2009-07-22 | 2009-07-22 | X-ray inspection apparatus for pcb |
| KR10-2009-0066702 | 2009-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101963587A CN101963587A (en) | 2011-02-02 |
| CN101963587B true CN101963587B (en) | 2013-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101630214A Expired - Fee Related CN101963587B (en) | 2009-07-22 | 2009-08-19 | X-ray inspection apparatus |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5221604B2 (en) |
| KR (1) | KR100943002B1 (en) |
| CN (1) | CN101963587B (en) |
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| KR101224883B1 (en) | 2010-12-07 | 2013-02-06 | (주)자비스 | X-ray inspection equipment |
| KR101242633B1 (en) * | 2011-07-19 | 2013-03-20 | 주식회사 쎄믹스 | Vertical and Horizontal movement apparatus with approved strength |
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| CN111762488A (en) * | 2020-06-23 | 2020-10-13 | 瑞茂光学（深圳）有限公司 | Full-automatic X-RAY material-dispensing system |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100943002B1 (en) | 2010-02-18 |
| JP5221604B2 (en) | 2013-06-26 |
| JP2011027740A (en) | 2011-02-10 |
| CN101963587A (en) | 2011-02-02 |
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