CN101959814A - Glass substrate suction table, and method for processing of glass substrate - Google Patents

Glass substrate suction table, and method for processing of glass substrate Download PDF

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Publication number
CN101959814A
CN101959814A CN2009801067078A CN200980106707A CN101959814A CN 101959814 A CN101959814 A CN 101959814A CN 2009801067078 A CN2009801067078 A CN 2009801067078A CN 200980106707 A CN200980106707 A CN 200980106707A CN 101959814 A CN101959814 A CN 101959814A
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China
Prior art keywords
glass substrate
sheet material
absorptive table
edging
glass
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Granted
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CN2009801067078A
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Chinese (zh)
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CN101959814B (en
Inventor
鸟井秀晴
宫本干大
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AGC Inc
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Asahi Glass Co Ltd
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Publication of CN101959814A publication Critical patent/CN101959814A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/068Table-like supports for panels, sheets or the like
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Disclosed is a sheet material (18) which is intended to be adhered to a glass substrate suction table for a glass substrate-processing machine. The sheet material (18) has a hardness of 90 to 95 degrees in accordance with JIS K6253 or JIS K7215, a thickness of 0.7 mm or less, and a coefficient of kinetic friction of 0.3 or less. Preferably, the sheet material (18) has a multi-layered structure composed of at least a urethane sheet material (32) and an olefin sheet material (or a nitflon sheet material) (34), and has a total thickness of 0.7 mm or less.

Description

Glass substrate absorptive table and glass base processing method
Technical field
The present invention relates to glass substrate absorptive table and glass base processing method, relate to glass substrate absorptive table and the glass base processing method that to desire the glass substrate absorption maintenance of edging processing via sheet material.
Background technology
For FPD such as liquid-crystal display, plasma display (Flat Panel Display: flat-panel monitor) use glass substrate, sheet glass cutting is fractureed be processed as predetermined rectangular shape size by the cutting operation that fractures, by edging operation its edge part is carried out edging processing, manufacture the glass substrate of product design size thus.Then, this glass substrate is through the matting that is arranged on the edging operation back segment and check operation and be shifted into the surface finish operation, makes the glass substrate of product thickness at this.
In the manufacturing process of such glass substrate, sheet glass high precision cutting is broken into predetermined size or carry out edging accurately and add man-hour being cut glass substrate after fractureing, after glass substrate being positioned on the glass substrate absorptive table, with glass substrate securely vacuum suck to keep being important.Particularly in the edging processing, therefore end surface shape processing request high precision and high-quality improves adsorptive power and glass substrate absorption is remained on the glass substrate absorptive table.
Yet, if foreign material such as the foreign matter of equipment, glass cullet are clipped between glass substrate absorptive table and the glass substrate, then, produce the problem of the quality decline that makes glass substrate because this adsorptive power height can make the glass substrate that is adsorbed on the glass substrate absorptive table produce cut because of these foreign material on the contrary.In addition, when finding on the glass substrate of this cut after the polishing process of operation back segment finishes, exist many glass substrates of before finding, producing to become the problem of substandard products.Therefore, generally speaking, on the glass substrate absorptive table, paste sheet material and implement.
In patent documentation 1, the glass substrate absorptive table of edging device is disclosed.Mounting in the glass substrate on this glass substrate absorptive table by position block after being positioned on the glass substrate absorptive table, kept by glass substrate absorptive table absorption, utilize the edging grinding stone to carry out edging processing afterwards.
Paste the general sheet material on the glass substrate absorptive table, as shown in Figure 3, use on glass fibre sheet 1, to be coated with Teflon (TEFLON; Registered trademark) sheet material 3 that obtains.By means of the character of this Teflon (registered trademark) 2, glass substrate G improves with respect to the sliding of sheet material 3, on the sheet material 3, promptly the location of the glass substrate G on the glass substrate absorptive table can be carried out smoothly.In addition, the label 4 of Fig. 3 is to be used for sheet material 3 is pasted the tackiness agent of glass substrate adsorption plane side of glass substrate absorptive table or the tackiness agent of subsidiary interleaving paper.In addition, be formed with a plurality of adsorption holes that are used for vacuum suck glass substrate G on the sheet material 3, and be formed with a plurality of be used for glass substrate on the glass substrate absorptive table, float support and position blow the hole.
Patent documentation 1: TOHKEMY 2003-11043 communique
Summary of the invention
But, although sheet material shown in Figure 3 utilizes Teflon (registered trademark) 2 and has good sliding, but can not suppress fully that foreign material such as glass or metal-powder are clipped between sheet material 3 and the glass substrate G and produce the cut of glass substrate, therefore, tackle by careful operations such as cleaning.
The present invention makes in view of such problem, its purpose is to provide a kind of glass substrate absorptive table and glass base processing method, desired sliding and glass substrate be with respect to the confining force of absorptive table during its location that can keep glass substrate, and glass substrate produces cut when suppressing absorption and keeping glass substrate.
The present invention provides a kind of glass substrate absorptive table to achieve these goals, be arranged on the glass substrate processing machine, it is characterized in that, the sheet material that possesses glass substrate adsorption plane one side that pastes described glass substrate absorptive table, the hardness according to the standard of JIS K6253 (2006) or JISK7215 (1986) of this sheet material is 90~95 degree, and thickness is below the 0.7mm, and kinetic friction coefficient is below 0.3.
The present invention provides a kind of glass base processing method to achieve these goals, it is characterized in that, glass substrate absorption is remained on the sheet material, and this glass substrate processed, described sheet attaching is to the glass substrate absorptive table, the hardness according to the standard of JIS K6253 (2006) or JIS K7215 (1986) of described sheet material is 90~95 degree, and thickness is below the 0.7mm, and kinetic friction coefficient is below 0.3.
In addition, among the present invention, described sheet material is preferably multilayered structure.
Among the present invention, preferred described sheet material comprises urethane resin sheet material and olefin resin sheet material or NITOFLON sheet material at least, and described olefin resin sheet material or NITOFLON sheet material are the sheet material that contacts with described glass substrate.
In addition, according to glass base processing method of the present invention, preferred described sheet material comprises urethane resin sheet material and olefin resin sheet material or NITOFLON sheet material at least, and described olefin resin sheet material or NITOFLON sheet material are the sheet material that contacts with described glass substrate.
In addition, in the glass base processing method of the present invention, the processing machine of preferred described glass substrate utilizes the edging grinding stone that the edge part of the glass substrate that is adsorbed maintenance is carried out edging.
On the glass substrate absorptive table of the cutting breaking device of the last process configurations of edging device, can use glass substrate absorptive table of the present invention, in addition, if absorption keeps the structure of glass substrate, no matter be the glass substrate absorptive table that is configured in which operation then, can use glass substrate absorptive table of the present invention, in the edge polisher that the edging of the working accuracy of having relatively high expectations is processed, be fit to.
According to glass substrate absorptive table of the present invention and glass base processing method, be defined as 90~95 degree by hardness with sheet material, thickness piece is decided to be below the 0.7mm, and kinetic friction coefficient is defined as below 0.3, can keep glass substrate desired sliding of when location and glass substrate confining force, and glass substrate produces cut when suppressing absorption and keeping glass substrate with respect to absorptive table.
Description of drawings
(A) of Fig. 1 is the vertical view of the glass substrate absorptive table of embodiment, (B) being at the localized explanatory view of the enterprising oozy glass plate of the glass substrate absorptive table of (A), (C) is the explanatory view that the glass substrate that absorption on the glass substrate absorptive table of (A) keeps is carried out edging processing.
Fig. 2 is the sectional view of structure of the sheet material of expression embodiments of the present invention.
Fig. 3 is the sectional view of the existing sheet material of expression.
Label declaration
10 glass substrate absorptive tables
12
18 sheet materials
20 locating pads
22 adsorption holes
24 blow the hole
30 edging grinding stones
32 urethane resin sheet materials
34 olefin resin sheet materials (perhaps NITOFLON sheet material)
36 tackiness agent
38 tackiness agent or interleaving paper
Embodiment
Below, the preferred implementation to glass substrate absorptive table of the present invention and glass base processing method describes with reference to the accompanying drawings.
Fig. 1 (A)~(C) is the explanatory view of formation of the glass substrate absorptive table 10 of the glass substrate processing machine that relates to of expression embodiment, (A)~(C) left figure represents the vertical view of glass substrate absorptive table 10 respectively, and right figure represents the sectional side view of glass substrate absorptive table 10 respectively.This glass substrate absorptive table 10 is arranged on the platform on the edge polisher of glass substrate, among Fig. 1, is divided into three platforms 12,14,16 that constitute with long rectangular shape, and integral body constitutes the planar rectangular shape corresponding with the shape of glass substrate G.In addition, the number of cutting apart of glass substrate absorptive table 10 is not limited to three platforms, also can be two more than the platform.In addition, can not cut apart yet and only constitute by a platform.
These 12,14,16 are provided with across predetermined interval, and the glass substrate adsorption plane side of platform 12,14,16 is pasted with sheet material 18 of the present invention respectively.In addition, be provided with around the glass substrate absorptive table 10 and be used on glass substrate absorptive table 10 the localized align member of glass substrate, for example registration roller 20,20 ... be provided with two respectively corresponding to each limit.
Each sheet material 18,18,18 for sticking on the platform 12,14,16 is formed with adsorption hole 22,22 at preposition ... with blow hole 24,24 ...These adsorption holes 22,22 ... then can form at an arbitrary position the position of fixing glass substrate reliably man-hour so long as add at glass substrate, also can on glass substrate absorptive table 10, be provided for improving adsorption area adsorption tank and with adsorption hole 22,22 ... connect.In addition, for blowing hole 24,24 ..., as long as being floated on glass substrate absorptive table 10, moves smoothly by glass substrate, then can form in any way at an arbitrary position.
Below, describe utilizing glass substrate absorptive table 10 to carry out the localized order of glass substrate.
At first, from each 12,14,18 a plurality of hole 24,24 of blowing that form at glass substrate absorptive table 10 ... the air of winding-up predetermined pressure.Then, shown in Fig. 1 (B), take out and be cut the glass substrate G that fractures and be processed as rectangular shape from cutting breaker (not shown), and with its mounting on glass substrate absorptive table 10.Thus, glass substrate G is supported on the glass substrate absorptive table 10 by come-up.In addition, it not is the state that the integral body of glass substrate G fully float with respect to glass substrate absorptive table 10 that this come-up supports, and is meant a part to float and other parts contact with the sheet material 18 of glass substrate absorptive table 10, the state that is free to slide.
Then, under the state that come-up supports, shown in Fig. 1 (B), make registration roller 20,20 ... advance towards each limit of glass substrate G move and with each limit butt, glass substrate G is slided on sheet material 18 and glass substrate G is positioned the position (edging position) of formal provision.
After finish the location, stop to blow hole 24,24 from glass substrate absorptive table 10 ... injection air.And, afterwards immediately from adsorption hole 22,22 ... suction air remains on glass substrate G absorption on the glass substrate absorptive table 10 via sheet material 18,18,18, perhaps after locating pad 20,20 ... G retreats from glass substrate.Thus, the glass substrate G behind the location is adsorbed reliably and remains on the glass substrate absorptive table 10.
Then, shown in Fig. 1 (C), the edging processing that edging grinding stone 30,30 is moved along the relative both sides of glass substrate G implement relative both sides.After the edging process finishing on these both sides, utilize glass substrate absorptive table 10 that glass substrate G is revolved and turn 90 degrees, implement to remain the edging processing on both sides by the action of edging grinding stone 30,30.In addition, edge polisher also can be provided with the edging unit at two positions and utilize the edging unit in downstream to remain the edging processing on both sides.At this moment, glass substrate G is being adsorbed under the state that remains on the glass substrate absorptive table 10, is transported to the edging unit in downstream by glass substrate absorptive table 10.In addition, edging processing so long as the edging grinding stone with got final product by the relative action of the glass substrate of edging, which side action can.
Below, the structure that pastes the sheet material 18 on the glass substrate absorptive table 10 is described.
During the location that utilizes the glass substrate G that locating pad 20 carries out of implementing before edging processing and the absorption of glass substrate absorptive table 10 keep, though the sliding that sheet material 18 requires to be used to glass substrate G is carried out smoothly in the location on the glass substrate absorptive table 10, be used between sheet material 18 and glass substrate G, existing glass or the such foreign material of metal powder also can on glass substrate G, not produce the flexibility of the cut that causes because of these foreign material and satisfy glass substrate add the man-hour glass substrate can be with respect to the inflexible hardness of glass substrate absorptive table maintenance relative position.
At this, sheet material 18 for embodiment,, be with the hardness according to the standard of JIS K6253 (2006) or JIS K7215 (1986) be that 90~95 degree and thickness are that 0.7mm is following, kinetic friction coefficient is that sheet material 18 below 0.3 pastes on the glass substrate absorptive table 10.That is, hardness is lower than 90 when spending, and sheet material 18 is too soft, so the working accuracy variation.For example, be under the situation of the edge polisher shown in Fig. 1 (C) at the glass substrate processing machine, sheet material 18 softnesses, therefore sheet material 18 is out of shape because of the tonnage of edging grinding stone 30, because this distortion, glass substrate G moves with respect to the glass substrate absorptive table 10 after locating, so the edging deterioration in accuracy.In the edge polisher, based on the approach (Zhui Write amount of 30 couples of glass substrate G of edging grinding stone) control edging amount, so sheet material 18 is when deforming as mentioned above, approach becomes and adds this deflection, perhaps becomes the uneven machining shape along the limit.Therefore, can not carry out high precision processing.On the other hand, when the hardness of sheet material 18 is spent above 95,, therefore can not eliminate the existing issue that on glass substrate G, produces cut that causes because of described foreign material because sheet material 18 becomes really up to the mark.
In addition, about thickness, when thickness surpasses 0.7mm, absorption glass substrate G and glass substrate G is carried out edging add man-hour, because this tonnage, make glass substrate G move, therefore processed glass substrate G accurately with respect to glass substrate absorptive table 10.
Therefore, by being set at hardness, thickness with 90~95 degree is sheet material 18 below the 0.7mm, can satisfy and add man-hour glass substrate G at glass substrate and can keep the rigidity of relative positions with respect to glass substrate absorptive table 10, can realize high-precision edging processing, and can eliminate simultaneously because of clipping the cut problem that described foreign material cause.In addition, the hardness of sheet material 18 utilizes the measurement of hardness machine (GS-719G) of De Le Co., Ltd. (TECLOCK) manufacturing to measure.
And then, consider that with respect to the sliding aspect of sheet material 18 needing kinetic friction coefficient is below 0.3 from guaranteeing glass substrate G.Kinetic friction coefficient surpasses at 0.3 o'clock, and sliding has problems, and glass substrate G is difficult on glass substrate absorptive table 10 location smoothly, produces the bad and situation such as edging not of edging processing.
Therefore, glass substrate absorptive table 10 according to the edge polisher of embodiment, the hardness of sheet material 18 is defined as 90~95 degree, kinetic friction coefficient is defined as below 0.3, thickness piece is decided to be below the 0.7mm, therefore desired sliding and glass substrate be with respect to the confining force of absorptive table in the time of can keeping glass substrate G location, and glass substrate G produces cut when suppressing absorption and keeping glass substrate G.In addition, use in the glass substrate edging method for processing of this glass substrate absorptive table 10, can carry out edging processing to glass substrate G accurately.
At this, the measuring method of the kinetic friction coefficient of sheet material 18 is described.
As determinator, the superficiality of using new eastern scientific company to make is measured machine (trade(brand)name: HEIDON, model: 14DR), implement the mensuration of kinetic friction coefficient under following test conditions.
Test conditions
Test load: 1000g
Sliding velocity: 100mm/ minute
Sliding distance: 30mm
Slip number of times: n3
Temperature: room temperature
Test conditions: do, wet (dripping pure water 2cc)
Subject material: olefin resin sheet material, NITOFLON sheet material, velour (ス ウ エ one De) sheet material
Test-results
Olefin resin sheet material: 0.202 (dry method is average), 0.159 (wet method is average)
NITOFLON sheet material: 0.080 (dry method is average), 0.058 (wet method is average)
Velour sheet material: 0.498 (dry method is average), 0.486 (wet method is average)
The kinetic friction coefficient of above-mentioned olefin resin sheet material, NITOFLON sheet material is below 0.3, is being pasted with on the glass substrate absorptive table 10 of these materials, and glass substrate G slides smoothly, and glass substrate G always is positioned in the position of formal provision.
Relative therewith, the kinetic friction coefficient of velour sheet material surpasses 0.3, is being pasted with the location condition of poor that produces glass substrate G on the glass substrate absorptive table 10 of this material.
On the other hand, sheet material 18 is preferably the bilayer structure that comprises urethane resin sheet material 32 and olefin resin sheet material (or NITOFLON sheet material) 34 as shown in Figure 2, and total thickness is below the 0.7mm.Olefin resin sheet material (or NITOFLON sheet material) the 34th, the sheet material that contacts with glass substrate G.In addition, the urethane resin sheet material also comprises the foaming polyurethane resin sheet material.Among Fig. 2, label 36 is gluing urethane resin sheet materials 32 and the tackiness agent of olefin resin sheet material (or NITOFLON sheet material) 34, and label 38 is to be used for sheet material 18 is pasted the tackiness agent of glass substrate adsorption plane side of glass substrate absorptive table 10 or the interleaving paper of band tackiness agent.
According to preferred embodiment, can guarantee 90~95 hardness of spending by urethane resin sheet material 32, can guarantee that by olefin resin sheet material (or NITOFLON sheet material) 34 kinetic friction coefficient of glass substrate contact surface is below 0.3.About total thickness, when the hardness of these materials surpasses 0.7mm, at absorption glass substrate G and glass substrate G is carried out edging add man-hour,, therefore can not carry out edging processing to glass substrate G accurately because this tonnage makes glass substrate G move with respect to glass substrate absorptive table 10.Therefore, the total thickness of sheet material 18 is set at below the 0.7mm.
In addition, the lower value of total thickness also can be set at 0.2mm according to the manufacturing limit of two sheet materials 32,34, but is used for realizing fully that the lower value of purpose of the present invention is preferably set to 0.5mm.In addition, as long as can access Flatness and durability degree, then can be a kind of single layer structure of material, also can be the multilayered structure of two or more materials, can make sheet material by olefine kind resin etc. is applied on the urethane resin sheet material.In addition, multilayered structure also comprises such coating.And then, in embodiment, to being applicable to that the glass substrate absorptive table 10 in the edging device is illustrated, still be not limited thereto, also the glass substrate absorptive table 10 of embodiment can be applied to cut the glass substrate absorptive table of breaking device, the glass substrate absorptive table of boring device.In addition, so long as absorption keeps the structure of glass substrate G, no matter then be the glass substrate absorptive table 10 that the glass substrate absorptive table that disposes can the application implementation mode in operation arbitrarily.
In the present embodiment, to utilizing tackiness agent that the olefin resin sheet material (thickness is 0.13mm under the situation of NITOFLON sheet material) of thickness 0.2mm and the gluing two sheets that forms of urethane resin sheet material of thickness 0.3mm are illustrated, also can use by tackiness agent Teflon (registered trademark) sheet material of 0.13mm and the gluing two sheets that obtains of urethane resin sheet material of 0.2mm~0.3mm etc.In addition, the material of sheet material, sheet thickness are not limited to above-mentioned situation.
With reference to specific embodiment the present invention is had been described in detail, still, it will be apparent to one skilled in the art that under the situation that does not break away from the spirit and scope of the present invention and can carry out various changes or modification.The Japanese patent application (Japanese Patent Application 2008-049618) that the application proposed based on February 29th, 2008, the content of this application is incorporated herein as a reference.

Claims (7)

1. a glass substrate absorptive table is arranged on the glass substrate processing machine, it is characterized in that,
The sheet material that possesses glass substrate adsorption plane one side that pastes described glass substrate absorptive table,
The hardness according at least a standard of JIS K6253 (2006) and JIS K7215 (1986) of this sheet material is 90~95 degree, and thickness is below the 0.7mm, and kinetic friction coefficient is below 0.3.
2. glass substrate absorptive table as claimed in claim 1, wherein, described sheet material is a multilayered structure.
3. glass substrate absorptive table as claimed in claim 2, wherein, described sheet material comprises urethane resin sheet material and olefin resin sheet material or NITOFLON sheet material at least, and described olefin resin sheet material or NITOFLON sheet material are the sheet material that contacts with described glass substrate.
4. a glass base processing method is characterized in that,
Glass substrate absorption is remained on the sheet material, and this glass substrate is processed,
Described sheet attaching is to the glass substrate absorptive table, and the hardness according at least a standard of JIS K6253 (2006) and JIS K7215 (1986) of described sheet material is 90~95 degree, and thickness is below the 0.7mm, and kinetic friction coefficient is below 0.3.
5. glass base processing method as claimed in claim 4, wherein, described sheet material comprises urethane resin sheet material and olefin resin sheet material or NITOFLON sheet material at least, and described olefin resin sheet material or NITOFLON sheet material are the sheet material that contacts with described glass substrate.
6. glass base processing method as claimed in claim 4, wherein, the processing machine of described glass substrate utilizes the edging grinding stone that the edge part of the glass substrate that is adsorbed maintenance is carried out edging.
7. glass base processing method as claimed in claim 5, wherein, the processing machine of described glass substrate utilizes the edging grinding stone that the edge part of the glass substrate that is adsorbed maintenance is carried out edging.
CN200980106707.8A 2008-02-29 2009-02-25 Glass substrate suction table, and method for processing of glass substrate Active CN101959814B (en)

Applications Claiming Priority (3)

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JP2008049618A JP5246583B2 (en) 2008-02-29 2008-02-29 Glass substrate adsorption table and glass substrate processing method
JP2008-049618 2008-02-29
PCT/JP2009/053460 WO2009107685A1 (en) 2008-02-29 2009-02-25 Glass substrate suction table, and method for processing of glass substrate

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CN101959814B CN101959814B (en) 2014-05-14

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TWI462209B (en) 2014-11-21
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TW200945478A (en) 2009-11-01
JP2009203141A (en) 2009-09-10

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