CN101930169A

CN101930169A - Separator of stamping die

Info

Publication number: CN101930169A
Application number: CN2009101788675A
Authority: CN
Inventors: 郑昌镐; 李真香; 金德洙; 朴春成
Original assignee: Display Manufacturing Services Co Ltd
Current assignee: DMS Co Ltd
Priority date: 2009-06-26
Filing date: 2009-09-29
Publication date: 2010-12-29
Anticipated expiration: 2029-09-29
Also published as: KR20110000204A; KR101054916B1; CN101930169B; TW201100238A

Abstract

The invention discloses a separator of a stamping die, capable of simply separating a substrate from the stamping die. The separator comprises a support stage used for placing the substrate bonded with the stamping die, a plurality of first fixed parts for separating, which is arranged at the upper side of the support stage to lift the marginal portion of the whole surface of the stamping die so as to separate the marginal portion from the substrate, a plurality of second fixed parts for separating, which is used for lifting the mid portion of the whole surface of the stamping die so as to separate the mid portion from the substrate, and an inclining device used for inclining the plurality of first fixed parts for separating so as to lift the marginal portion of the stamping die.

Description

Separator of stamping die

Technical field

The present invention relates to a kind of impression (imprint) technology that is used for flat panel displaying element with substrate, the particularly a kind of separator of stamping die that can use impressing mould simply from the impression that substrate separates and base plate bonding.

Background technology

Form in the method for various functional patterns the general operating type that adopts impression (imprint), and the main imprinting apparatus that uses at flat panel displaying element on substrate with plane impressing mould (stamp).

In the structure of this described imprinting apparatus that makes a brief explanation, described device comprises chamber unit; Brace table, the inboard that it is arranged at described chamber unit is used for placing the substrate that is coated with soup (for example, etching resistance agent (etching resist)); Impressing mould, it is arranged at described brace table upside; And fixture, it is used for fixing described impressing mould, enable be placed on described brace table on base plate bonding or separate.

Promptly, above-mentioned imprinting apparatus is utilizing fixture fixedly under the state of the upper surface of impressing mould, make impressing mould and base plate bonding by conventional method (for example: landing), and then utilize described fixture to be pulled upwardly impressing mould with base plate bonding, and this mould is broken away from from substrate.Above-mentioned imprinting apparatus carries out imprint process in this way.

And, before substrate separation impressing mould, the soup between the adhesive surface is hardened by the method for routine.

Therefore, when carrying out aforesaid bonding, sclerosis and separation circuit in regular turn, can on the soup layer of substrate, form various functional patterns simply by the impression mode.

With regard to this impression operating type, with substrate and impressing mould is bonding and the sclerosis state under, the operation that stably separates impressing mould from substrate is extremely important.That is, between the adhesive surface of substrate and impressing mould,, when therefore separating impressing mould, can produce very large resistance owing to there is the bonding force of soup.

The method of at first separation edge part (separating for the first time), and then separation center section (separating for the second time) etc. recently, in order to improve the problems referred to above, have been proposed after the whole surperficial separated into two parts with impressing mould.

But, with regard to this separate mode, when utilizing a plurality of fixtures to lift the edge of impressing mould, because stair-stepping bending phenomenon takes place the boundary of the part (marginal portion of impressing mould) of fixing with a plurality of fixtures in the whole area of described impressing mould and revocable part (center section of impressing mould) easily.

Therefore, when carrying out the mask work of impressing mould, distortion of the shape distortion of impressing mould and damage easily, thus the permanance of impressing mould will soon reduce, and cause the problem that shortens the life-span.

And then, because the big more bonding force that acts between the adhesive surface of the size of impressing mould and substrate is just big more, therefore when the impression operation of carrying out large-area substrates, be difficult to suitably handle the problems referred to above.

And, with regard to regard to the mode of carrying out bonding and separation in the imprinting apparatus simultaneously,, therefore be difficult to improve the work efficiency of imprint process because mask work need consume the too much time.

Summary of the invention

The present invention does in view of the above-mentioned problems in the prior art.

The object of the present invention is to provide a kind of especially can be when the tacky state of separating base plate and impressing mould, reduce the damaged condition of impressing mould, and the separator of stamping die that can separate simply.

To achieve these goals, separator of stamping die of the present invention comprises:

Brace table, it is used to place the substrate bonding with impressing mould;

Fixture is used in a plurality of first separation, and the upside that it is arranged at described brace table is used for the marginal portion on the whole surface of described impressing mould is lifted, thereby described marginal portion can be separated from substrate;

Fixture is used in a plurality of second separation, and it is used to lift the center section on the whole surface of described impressing mould, thereby described center section can be separated from substrate;

Tilting gearing, it is used to tilt described a plurality of first separation fixture, thereby can separate the marginal portion of lifting described impressing mould with the tilting action of fixture by described a plurality of first.

Aforesaid the present invention uses fixture owing to a plurality of first separation with the whole surface that can separately separate impressing mould separate with a plurality of second with fixture, can carry out the mask work of impressing mould simply.For example, the present invention can be in the whole surface of impressing mould, at first lifts the marginal portion and with after its separation (separating for the first time), lifts the center section of impressing mould again and it is separated (separating for the second time).

Particularly, the present invention has with a plurality of first and separates with fixture corresponding tilting gearing, therefore for example when separating the edge of impressing mould, for being reached, separation resistance due to the bonding force that acts on adhesive surface between substrate and the impressing mould minimizes, described a plurality of first separation fixture suitably tilts, and draw the marginal portion of described impressing mould, thereby make described marginal portion from strippable substrate to the side.The present invention carries out mask work by this mode exactly.

And, when the whole surperficial separated into two parts of impressing mould is separated, a plurality of first separation fixtures can suitably tilt, thereby can not make boundary with stepped bending, thereby can prevent the lost of life that when carrying out mask work impressing mould torsional deformation or damage cause.

Description of drawings

Fig. 1 is the one-piece construction synoptic diagram of the separator of stamping die that relates to of one embodiment of the invention;

Fig. 2 and Fig. 3 are used to illustrate that a plurality of first of separator of stamping die that one embodiment of the invention relates to separates the accompanying drawing that separates the preferred arrangement mode of usefulness fixture with fixture with a plurality of second;

Fig. 4 is the detailed structure of fluid ejectors of the separator of stamping die that is used to illustrate that one embodiment of the invention relates to and the accompanying drawing of effect;

Fig. 5 and Fig. 6 are the accompanying drawings of the effect of the separator of stamping die medium dip device that is used to illustrate that one embodiment of the invention relates to;

Fig. 7 and Fig. 8 are used to illustrate that the separator of stamping die that is related to by one embodiment of the invention carries out the accompanying drawing of impressing mould detached job;

Fig. 9 and Figure 10 are other structures of the separator of stamping die medium dip device that is used to illustrate that one embodiment of the invention relate to and the accompanying drawing of effect.

Embodiment

Below, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that the those skilled in the art can implement.

Embodiments of the invention can have various embodiment, and the embodiment that protection scope of the present invention is not limited to describe below.

Fig. 1 is the one-piece construction synoptic diagram of the separator of stamping die that relates to of one embodiment of the invention, wherein Reference numeral 2 expression brace tables.

Described brace table 2 has can load the structure of using the bonding substrate G of impressing mould S with conventional impression.

That is, the upside of described brace table 2 has loading surface L, and as shown in Figure 1, described brace table 2 can be in the upper horizontal setting of support F, so that described loading surface L up.

And though not shown, described support F is upward best to be provided with housing (perhaps lid) with the state around described brace table 2.So, can prevent that substrate G or impressing mould S from being polluted by foreign.

For substrate G is fixed or remove its stationary state with the state that loads, described brace table S for example can use tabular vacuum cup (vacuum chuck or electrostatic chuck).

Therefore, when on described substrate G, carrying out the mask work of impressing mould S, can utilize described brace table 2 fixing base G simply, thereby make it motionless.

The related separator of stamping die of the above embodiment of the present invention comprises that a plurality of first separation separate with a plurality of second with fixture 6 with fixture 4.

Described a plurality of first separates to separate with fixture 6 with fixture 4 and a plurality of second and lifts impressing mould S from the substrate G that is placed on the described brace table 2, thereby makes impressing mould S from separating with the bonding state of described substrate G.

Referring again to Fig. 1, described a plurality of first separation separate with fixture 6 with fixture 4 and a plurality of second can use adsorber, and for example, the bottom possesses pin (pin) the type adsorber of vacuum suction unit H.

Though not shown, described absorbing unit H produces vacuum adsorption force by conventional method, and fixes described impressing mould S by this vacuum adsorption force.

Above-mentioned a plurality of first separates to separate with fixture 6 with fixture 4 and a plurality of second and is arranged on the described support F, thereby carries out mask work after the whole surface of described impressing mould S is divided into a plurality of parts.

Fig. 2 is to be used to illustrate that above-mentioned a plurality of first separates the accompanying drawing that separates the preferred arrangement mode of using fixture 6 with fixture 4 with a plurality of second with Fig. 3.

That is, with reference to Fig. 2, described a plurality of first separate with fixtures 4 can with corresponding settings in left and right side marginal portion in the whole surface of described impressing mould S, described a plurality of second separation usefulness fixtures 6 can corresponding setting with the center section of impressing mould S.

In addition, with reference to Fig. 3, described a plurality of first separate with fixtures 4 can with four corresponding settings in position at described impressing mould S edge.

Have a plurality of first of as above configuration structure and separate to separate with fixture 6 and be configured to its absorbing unit H down, fix the upper surface of described impressing mould S with this with fixture 4 and a plurality of second.

And above-mentioned a plurality of first separation separate with a plurality of second with fixture 4 uses fixture 6 to receive power from fixture driver element M, thereby can move by above-below direction.

Referring again to Fig. 1, described fixture driver element M for example can use a plurality of screw jack J of routine (screw jack) as power source, and described screw jack has lifting screw rod J1.

Promptly, described a plurality of screw jack J is arranged at the top of described support F, and described a plurality of liftings are separated to separate with fixture 6 with fixture 4 and second with screw rod J1 and a plurality of first be connected, separate with fixture 4 and separates usefulness fixture 6 with second thereby make described a plurality of lifting can above-below direction move described first with screw rod J1.

For example, described a plurality of first separation are connected with the end of described a plurality of liftings with screw rod J1 respectively with fixture 4, thereby can drive independently.

And described a plurality of second top of separating with fixture 6 is individually fixed on the extra fixed head J2, and moves fixed head J2 by described lifting with screw rod J1, thereby drives a plurality of fixtures to simultaneously with upper and lower.

Though it is not shown, described screw jack J receives the power of gear motor (geared motor) by conventional method (worm gear (worm gear), bevel gear), and make described lifting carry out linearity (linear) motion with screw rod J1, this structure is not only applicable to the conveying of large-scale weight object, but also have self-locking (self locking) function, therefore can ensure the processing safety of further raising.

And though not shown, the present invention can also utilize cylinder and come push-and-pull described a plurality of first to separate with fixture 4 or a plurality of second separation fixture 6 by conventional method, thereby its above-below direction is moved except described screw jack J.

Above-mentioned a plurality of first separates to separate with a plurality of second with fixture 6 with fixture 4 and is carrying out when described substrate G separation is bonded in the operation of the impressing mould S on the substrate G, the whole surface of described impressing mould S can be divided, and separate impressing mould S by twice separating action (separate for the first time, separate for the second time).

The related separator of stamping die of the above embodiment of the present invention can also comprise fluid ejectors 8.

Described fluid ejectors 8 can be between the adhesive surface of described substrate G and impressing mould S injection of separation fluid W.

Referring again to Fig. 1, described fluid ejectors 8 can be made of with nozzle N a plurality of separation of injection of separation with fluid W.

And described a plurality of separation can be installed on the described support F with nozzle N, and separated by a distance with described brace table 2, thereby can spray fluid between the adhesive surface of described substrate G and impressing mould S.

Described separation can be used nitrogen or clean dry air (CDA:Clean DriedAir) with fluid W.

Be the easy enforcement of person of ordinary skill in the field with nozzle N injection of separation between the adhesive surface of substrate G and impressing mould S with the structure of fluid W so, so no longer describe in detail at this with a plurality of separation.

With regard to the structure of above-mentioned fluid ejectors 8, separate with fixture 4 by described a plurality of first and to separate with a plurality of second when carrying out the mask work of impressing mould S with fixture 6, can be by separating the bonding force of eliminating the soup G1 (for example, etching resistance agent) between the adhesive surface that acts on substrate G and impressing mould S with the expulsion pressure of fluid W effectively.

Fig. 4 is the accompanying drawing that is used to illustrate the effect of described fluid ejectors 8.

With reference to Fig. 4, the present invention can separate under the state of the marginal portion of separating or having separated impressing mould S with fixture 4 from substrate G by described a plurality of first, injection of separation fluid W between the adhesive surface of substrate G and impressing mould S, thereby the bonding force of elimination soup.

Therefore, as long as possess aforesaid fluid ejectors 8, from substrate G separation impressing mould S the time, just can reduce the separation resistance that produces because of the bonding force that acts on the soup between the adhesive surface, thereby can carry out the mask work of described impressing mould S more simply.

And, though it is not shown, but the present invention can also carry out mask work in the following manner, for example, utilizing described a plurality of first to separate under the state of the marginal portion of lifting described impressing mould S with fixture 4, if to the eject slot separation fluid W that has separated, then can promote the center section of impressing mould S by hydrodynamic pressure, separate (separating for the second time) and work thereby more stably be adsorbed under described second state that separates with fixture 6 at the center section of impressing mould S.

In addition, the separator of stamping die that relates to of one embodiment of the invention comprises tilting gearing 10.

Described tilting gearing 10 can make described a plurality of first to separate with fixture 4.

Fig. 5 is the accompanying drawing that is used to illustrate the detailed structure of described tilting gearing 10.

That is, described tilting gearing 10 for example can be made of supply unit U1, and described supply unit U1 has the supply unit piece B1 that can carry out linear movement according to air pressure.

Described supply unit U1 can be arranged at described first to be separated with between fixture 4 and the described screw jack J, wherein main body is fixed in the end of the lifting of described screw jack J with screw rod J1, and supply unit piece B1 can be connected and fixed on described a plurality of first top of separating with fixture 4.

And when being benchmark with Fig. 5, described supply unit U1 can move first upper end of separating with fixture 4 by left and right directions by described supply unit piece B1.

With regard to this structure, when with fixture 4 marginal portion in the whole surface of described impressing mould S being separated, can use fixture 4 inclinations by separating to described first by described a plurality of first separation, just can be more prone to separate this marginal portion.

Fig. 6 is the accompanying drawing that is used to illustrate the effect of described tilting gearing 10.

That is,, utilizing described a plurality of first to separate with fixture 4 fixedly under the state of the marginal portion in the whole surface of impressing mould S, to the left the supply unit piece B1 of mobile described supply unit U1 with reference to Fig. 6.

So, when described first separation is moved along with described supply unit piece B1 to the left with the top of fixture 4, can realize the inclination of described absorbing unit H.Therefore, in the time of can be by the marginal portion in the whole surface that spurs described impressing mould S to the side mode of its strip off be separated (separating for the first time) work.

So, with upwards lift impressing mould S simply after it is compared from the existing separate mode that substrate G separates, the mode of separating by inclination can make because of the separation resistance that bonding force produced that acts on adhesive surface reaches and minimize.

Especially, if under a plurality of first state that separates with fixture 4 inclinations, carry out mask work, then after the whole surface of described impressing mould S is divided into edge and middle two parts, when twice separating action separates, can prevent that its boundary from causing the phenomenon of impressing mould S torsional deformation or damage with stepped bending.

Therefore, the separator of stamping die that the above embodiment of the present invention relates to, be positioned under the state on the described brace table 2 with the bonding substrate G of impressing mould S, can utilize described a plurality of first separation to separate with after the whole surperficial separated into two parts of fixture 6 with described impressing mould S, it is separated simply from substrate G with fixture 4 and a plurality of second.

Fig. 7 is to be used to illustrate that the separator of stamping die that utilizes the above embodiment of the present invention separates the accompanying drawing of impressing mould with Fig. 8.

That is, as shown in Figure 7, under utilizing described a plurality of first state that separates with the marginal portion in the whole surface of fixture 4 fixing described impressing mould S, described a plurality of first separation fixture 4 tilts.

So, separate with the tilting action of fixture 4 by described a plurality of first and to lift marginal portion the whole surface of described impressing mould S, thereby separate this marginal portion (separation for the first time) from substrate G.

Then, as shown in Figure 8, utilizing under the state of described a plurality of second separation with the center section on the whole surface of fixture 6 fixing described impressing mould S, described a plurality of second separation fixture 6 moves up.

So, the center section on the whole surface of described impressing mould S will separate when moving with fixture 6 and separate (separation for the second time) from substrate G along with described a plurality of second.Through aforesaid twice separating action, the whole surface of impressing mould S can be divided into two parts after, separate from substrate G again.

So, the mode of marginal portion of at first separating the whole surface of described impressing mould S, for example with disposable the lifting in whole surface with impressing mould S after the mode of separating when comparing, even there is the bonding force of soup G1 between the adhesive surface of substrate G and impressing mould S, also can more easily separate impressing mould S.

And, separate with the tilting action of fixtures 4 mode to the marginal portion of side pulling impressing mould S the time by described a plurality of first its separation, the separation resistance of impressing mould S is reached to minimize, and when separating when the center section of impressing mould S and marginal portion branch are come, can prevent since their boundary with stepped bending, thereby make the phenomenon of described impressing mould S torsional deformation or damage.

Fig. 9 is used to illustrate other structure of tilting gearing 10.Present embodiment is compared with the foregoing description, and its difference is, described a plurality of first separates when being rotated motion with the driving of fixture 4 by rotary unit U2 the formation heeling condition.

That is, with reference to Fig. 9, described rotary unit U2 can use the rotating cylinder (perhaps stepper motor) with turning axle B2, and its main body is fixed in the end of described lifting with screw rod J1, and turning axle B2 can be connected and fixed on described first top of separating with fixture 4.

And, be provided with hinge unit H1 at described first upside that separates with absorbing unit H in the fixture 4 with conventional method (for example, joint pin combination).

With regard to this structure, when can and transmit revolving force by described rotary unit U2 generation, described a plurality of first separation fixture 4 tilts.

Figure 10 is the accompanying drawing of effect that is used to illustrate other structures of described tilting gearing 10.

That is, as shown in figure 10,, rotate described first by described rotary unit U2 towards direction shown in the drawings and separate with fixture 4 utilizing described first to separate under the state of the marginal portion of supporting described impressing mould S with fixture 4.

So, described first separates when using fixture 4 rotations, and described absorbing unit H can pass through hinge unit H1, and to tilt to the state of the marginal portion of side pulling and the described impressing mould S of strip off from substrate G.

Therefore, tilt a plurality of first to separate and the marginal portion of described impressing mould S to be separated simply with above-mentioned rotation mode with fixture 4.

And described tilting gearing 10 is except said structure, and described a plurality of first separation fixture 4 can also tilt by the mode of various transmission of power.Naturally, these structures also belong to protection scope of the present invention.

Claims

1. a separator of stamping die is characterized in that, comprising:

Brace table, it is used to place the substrate bonding with impressing mould;

Fixture is used in a plurality of first separation, and the upside that it is arranged at described brace table is used for the marginal portion on the whole surface of described impressing mould is lifted, and described marginal portion is separated from substrate;

Fixture is used in a plurality of second separation, and it is used to lift the center section on the whole surface of described impressing mould, and described center section is separated from substrate;

Tilting gearing, it is used to tilt described a plurality of first separation fixture, and separates the marginal portion of lifting described impressing mould with the tilting action of fixture by described a plurality of first.

2. separator of stamping die according to claim 1 is characterized in that:

Described brace table is made of tabular vacuum cup, and it has and the corresponding loading surface of described substrate area.

3. separator of stamping die according to claim 1 is characterized in that:

Described a plurality of first separates to separate with fixture with fixture and a plurality of second and is made of a plurality of vacuum absorbers, and described a plurality of vacuum absorbers have the absorbing unit of fixing described impressing mould one surface by absorption affinity.

4. separator of stamping die according to claim 1 is characterized in that:

Described a plurality of first separation is configured to its fixedly two edges or four edges on impressing mould one surface with fixture.

5. separator of stamping die according to claim 1 is characterized in that:

Described tilting gearing is made of the supply unit with supply unit piece, and by described supply unit piece transferring power the time, makes described a plurality of first to separate with fixture, and wherein said supply unit piece can linear movement.

6. separator of stamping die according to claim 1 is characterized in that:

Described tilting gearing is made of the rotary unit with turning axle, and by described turning axle transferring power the time, makes described a plurality of first to separate with fixture, and wherein said turning axle can rotatablely move.

7. separator of stamping die according to claim 1 is characterized in that:

Described tilting gearing spurs the marginal portion of described impressing mould from substrate to the side according to described a plurality of first tilting action that separates with fixture, thereby makes described marginal portion break away from substrate.

8. separator of stamping die according to claim 1 is characterized in that:

Described separator of stamping die also comprises fluid ejectors, and described fluid ejectors is made of with nozzle a plurality of separation of injection of separation between the adhesive surface of described substrate and impressing mould with fluid.

9. separator of stamping die according to claim 8 is characterized in that:

Described separation fluid is nitrogen or clean dry air.