CN101880909A - Full-automatic crucible manipulator - Google Patents
Full-automatic crucible manipulator Download PDFInfo
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- CN101880909A CN101880909A CN2010102100129A CN201010210012A CN101880909A CN 101880909 A CN101880909 A CN 101880909A CN 2010102100129 A CN2010102100129 A CN 2010102100129A CN 201010210012 A CN201010210012 A CN 201010210012A CN 101880909 A CN101880909 A CN 101880909A
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- crucible
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Abstract
The invention discloses a full-automatic crucible manipulator which is used for automatically hauling a graphite crucible, a quartz crucible in a single crystal furnace and silicon materials filled in the quartz crucible. The mechanism of the invention mainly comprises the following function components: a bottom reducer casing, a rotary shaft, a gear driving pair and a reducer motor which are arranged in the reducer casing; a rotary shaft base is arranged on the reducer casing, and an upright is arranged on a rotary shaft and is provided with a cantilever and a lift mechanism which enables the cantilever to move up and down; the front end of the cantilever is provided with a crucible tong component, a pneumatic unit, a locking unit and a horizontal adjusting component used for adjusting the horizontal position of the crucible tong. The invention enables the silicon material transportation and the crucible to realize full-automaticity, thereby saving time and labor and greatly improving the production efficiency.
Description
Technical field
The present invention relates to semiconductor production equipment, particularly a kind of full-automatic crucible manipulator that is used to carry plumbago crucible, quartz crucible and silicon material in the single crystal growing furnace.
Background technology
Most of in the market single crystal furnace equipment does not all also have to realize the functional component of carrying carrying plumbago crucible, quartz crucible and silicon material automatically, and factory all needs manually to consign silicon material and quartz crucible when beginning that draws crystal bar and end.But when a dead lift silicon material and quartz crucible,, also there are problems such as inefficiency, labor cost height because human factor is very easily damaged the quartz crucible of high price and polluted the silicon raw material.At this problem, our company once developed a kind of cantilever type crucible hoisting and transporting mechanism, make original pure manual operation become semi-automatic operation, saved certain labor force and time cost comparatively speaking, but the cantilever rotation still need be passed through workman's manual operation, is not convenient especially, relatively require great effort, accuracy is not high, and operation neither be very well, makes mistakes easily.
Summary of the invention
In order to overcome the defective that above-mentioned prior art exists, the invention provides a kind of crucible manipulator of full-automation, make the single crystal growing furnace production plant realize fully automated carrying crucible equipment, the production efficiency height, time saving and energy saving, accurately and reliably.
To achieve these goals, technical scheme of the present invention is as follows:
Full-automatic crucible manipulator comprises the handle component that lifts quartz crucible, lateral adjustments parts, elevating drive mechanism and the rotating mechanism that is connected with handle component.
Further, on the described crucible handle component locking unit and pneumatic unit are set, pneumatic unit comprises cylinder, and transmission shaft is set in the cylinder, and described cylinder also can be a motor etc.;
Lateral adjustments parts and earthenware handle component are installed on the socle girder, and described socle girder is connected with elevating drive mechanism.
The sidepiece of pneumatic unit also connects a socle girder, is connected with elevating drive mechanism by described socle girder.
Described locking unit comprises the locking mechanism that is connected with transmission shaft, and locking mechanism is made of sliding seat and connecting rod, and described connecting rod connects the transmission shaft in the said cylinder.
Described crucible handle component is that movable jaw and the shaft collar by three circumference uniform distributions constitutes, and is installed in movably on the slide plate; Described slide plate is installed on the miniature line slideway of lateral adjustments parts, can move thereon.
When not working, the pot pawl is in extended configuration, and in the time will grasping, movement cylinder drives the automatic indentation of pot pawl by connecting rod, grasps crucible;
Described lateral adjustments parts are used to regulate the horizontal position of crucible handgrip, are made up of miniature line slideway and small ball lead screw pair, motor etc., and these parts play the effect of adjustment to the heart; Described miniature line slideway is positioned at the top of above-mentioned socle girder, and the small ball lead screw pair is located on the miniature line slideway, and described small ball lead screw pair connects casing outer wall.
Described elevating drive mechanism comprises that the lifting mobile jib is column, T type lead screw pair, socle girder and servomotor, and servomotor is arranged on the top of column, and servomotor connects socle girder, and socle girder can slide up and down along described ball screw assembly.
Further, described column adopts the weldless steel tube of certain wall thickness, the external diameter processing grinding, and weight reduction, all circuits can pass through internally simultaneously, and ball-screw promotes reliable and stable.
Described socle girder connects above-mentioned column by web plate and screw assembly, and lateral adjustments parts, pneumatic unit, the locking unit that can drive socle girder and connection thereof by the elevating drive mechanism on the column move up and down with crucible handle component integral body.
Described rotating mechanism comprises reduction box, is arranged at reducing motor, gear driving pair, thrust block in the reduction box, the rotating shaft that shaft seat is inner with it, described rotating shaft upper end is connected with the column on its top by bearing, the rotating shaft lower end is passed shaft seat and is extended to and be connected with described gear driving pair in the reduction box, and gear driving pair is by the transmission rig of thrust block connection reducing motor.
Described reducing motor adopts the built-in reduction box inside that is installed on, and helps saving the space.
The invention has the beneficial effects as follows, novel structure, simple, processing can realize full-automatic silicon material transportation and crucible easily, has improved production efficiency greatly, has also saved human cost, economic benefit is obvious.
Description of drawings
Fig. 1 is a front view of the present invention;
Fig. 2 is a vertical view of the present invention;
Among the figure, 1, handle component, 2, the lateral adjustments parts, 3, elevating drive mechanism, 31, servomotor, 4, rotating mechanism, 11, locking unit, 12, pneumatic unit, 13, quartz crucible, 41, shaft seat, 42, rotating shaft, 43, reduction box, 44, gear driving pair, 45, reducing motor, 5, column, 6, socle girder;
Embodiment:
Be easy to understand understanding in order to make creation characteristic of the present invention, technique means and to reach purpose, further set forth the present invention below in conjunction with specific embodiment.
Embodiment:
Referring to Fig. 1, a kind of full-automatic crucible hoisting appliance comprises the handle component 1 that lifts quartz crucible, the lateral adjustments parts 2 that are connected with handle component 1, the elevating drive mechanism 3 that is connected with lateral adjustments parts 2 and rotating mechanism 4.
Handle component is for 1 time the quartz crucible 13 that the silicon material is housed, because quartz crucible 1 is frangible, so generally hold with plumbago crucible its outside.
Described pneumatic unit 12 tops are provided with lateral adjustments parts 2, the servomotor 21 that lateral adjustments parts 2 are connected by feed screw nut and miniature line slideway, shaft coupling, can regulate the position of handle component 1 by lateral adjustments parts 2, make it with below that quartz crucible 13 positions of silicon material are housed is corresponding, be convenient to grasp; Pneumatic unit 12 is installed on the crucible handle component 1, socle girder 6 is connected in the vertical rod of elevating drive mechanism 3 by bolt and web plate, the top of elevating drive mechanism 3 is provided with servomotor 31, servomotor 31 is connected with the T type feed screw nut of bottom by transmission rig, elevating drive mechanism 3 can carry out lifting action, and drive socle girder 6 and handle component 1, quartz crucible 13 move up and down together.
Shaft seat is provided with the reduction box 43 of broad for 41 times, is provided with gear driving pair 44 and reducing motor 45 in the reduction box 43, and gear driving pair 44 is by the pinion in master wheel and the rotating shaft 42, and reducing motor 45 connects gear driving pair 44 by transmission rig.
Working process of the present invention is mainly finished by following action:
(1) crucible that is grasped is realized oscilaltion: the elevating drive mechanism 3 that is installed on the column 5 is realized, servomotor 31 actions make T type feed screw nut transmission drive socle girder 6 by shaft coupling and move up and down, and lifting travel can be controlled at by the optoelectronic switch that is installed in column 5 two ends in the desired stroke range;
(2) can horizontally rotate motion in the time of with the crucible oscilaltion campaign grasped: horizontally rotating motion is by 45 work of the reducing motors in the reduction box 43, make the rotating shaft rotation by gear driving pair 44, drive column 5 rotations, thereby make to be installed in that all mechanisms and parts can both rotate in the horizontal direction on the column 5, realize the carrying of crucible and silicon material;
(3) realize the extracting of crucible and the function of release: the cylinder action by pneumatic unit 12 makes the telescopic transmission shaft of connected locking unit 11 move, the lower end of described transmission shaft is connected with crucible handle component 1, crucible handle component 1 is to be made of the movable jaw of three circumference uniform distributions and shaft collar, realizes the extracting and the release function of three catchings simultaneously by the stretching motion of cylinder;
(4) centering of realization crucible handle component: realize by the lateral adjustments parts 2 that are installed in socle girder 6 front ends.Servomotor 21 actions of lateral adjustments parts 2, the small ball lead screw pair action that shaft coupling is connected, the slide plate that is installed on the miniature line slideway is laterally moved, and crucible handle component 1 is installed in movably on the slide plate, plays the effect of adjustment to the heart.
The about 2630mm of the maximum height of above-mentioned machine, pivoted arm rotation center adjust width between centers 80mm apart from 1515mm, and the lifting limit travel is 600mm.
This mechanism can be used for the crucible loading and unloading of 18 cun, 20 cun, 22 cun, 24 cun specifications, if use the crucible of different model, as long as change three pot melons, other parts are all general, meet the design philosophy of modular universalization.
More than show and described ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the specification sheets just illustrates principle of the present invention; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (7)
1. full-automatic crucible manipulator, it is characterized in that, comprise the crucible handle component that is used to pick up quartz crucible, be arranged on locking unit and pneumatic unit on the crucible handle component, socle girder, be installed in the lateral adjustments parts of socle girder front end, and the hoisting appliance that socle girder is moved up and down, be arranged on the column that the elevating drive mechanism sidepiece play the guiding role, described column bottom is connected with shaft seat and reduction box, the gear driving pair that is provided with in the described shaft seat in rotating shaft and the reduction box passes through meshed transmission gear, and described gear driving pair connects reducing motor by transmission shaft.
2. full-automatic crucible manipulator according to claim 1 is characterized in that, described crucible handle component is that movable jaw and the shaft collar by three circumference uniform distributions constitutes, and is installed in movably on the slide plate.
3. full-automatic crucible manipulator according to claim 1 is characterized in that described pneumatic unit comprises cylinder, is provided with transmission shaft in the cylinder, connects locking unit mechanism by transmission shaft.
4. full-automatic crucible manipulator according to claim 1 is characterized in that, described lateral adjustments parts are by servomotor, ball wire bar pair, and miniature line slideway is regulated the horizontal position automatically.
5. full-automatic crucible manipulator according to claim 1, it is characterized in that, the top of described elevating drive mechanism is provided with servomotor, and servomotor connects T type feed screw nut pair by shaft coupling, makes the socle girder that is connected on the nut realize up-and-down movement.
6. full-automatic crucible manipulator according to claim 1 is characterized in that, the described column that play the guiding role is installed in the rotating shaft, and rotating shaft is installed in the shaft seat, and shaft seat is fixed on the reduction box upper end.
7. full-automatic crucible manipulator according to claim 1, it is characterized in that, be provided with gear driving pair in the described reduction box, and reducing motor, by reducing motor column is rotated, thereby make the socle girder rotation that is installed on the column, crucible is transported to another position from a position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102100129A CN101880909A (en) | 2010-06-25 | 2010-06-25 | Full-automatic crucible manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102100129A CN101880909A (en) | 2010-06-25 | 2010-06-25 | Full-automatic crucible manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101880909A true CN101880909A (en) | 2010-11-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102100129A Pending CN101880909A (en) | 2010-06-25 | 2010-06-25 | Full-automatic crucible manipulator |
Country Status (1)
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| CN (1) | CN101880909A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102424161A (en) * | 2011-08-18 | 2012-04-25 | 德清县建明坩埚厂 | Crucible packing vehicle |
| CN102424160A (en) * | 2011-08-18 | 2012-04-25 | 德清县建明坩埚厂 | Crucible packing car |
| CN102909722A (en) * | 2011-08-01 | 2013-02-06 | 扬州多维数控***有限公司 | Planar multi-joint robot arm |
| CN105459100A (en) * | 2016-01-29 | 2016-04-06 | 成都硅特自动化设备有限公司 | Rotary manipulator for vacuum infiltration |
| CN106078704A (en) * | 2016-07-14 | 2016-11-09 | 青岛德山机械有限公司 | A kind of concrete prefabricated transferring pallet handling rotation and lifting machinery hands |
| CN106625574A (en) * | 2016-10-25 | 2017-05-10 | 中山市毅马五金有限公司 | Mechanical hand for smelting furnace |
| CN107045038A (en) * | 2017-03-10 | 2017-08-15 | 同济大学 | A kind of single droplet burning system |
| CN107127748A (en) * | 2017-07-10 | 2017-09-05 | 山东农业大学 | A kind of arm-type palletizing mechanical arm of small rotary and application method |
| CN108517565A (en) * | 2018-04-28 | 2018-09-11 | 广东先导先进材料股份有限公司 | Crucible process system |
| CN109533943A (en) * | 2018-11-20 | 2019-03-29 | 东台市海邦电气有限公司 | Axial center linked formula lift grasp handling transporter |
| CN112520636A (en) * | 2020-11-30 | 2021-03-19 | 泰州鸿材科技有限公司 | Steel bottle intelligence handling device |
| CN113308746A (en) * | 2021-05-28 | 2021-08-27 | 曲靖阳光能源硅材料有限公司 | Automatic feeding vehicle for single crystal furnace |
| CN115403254A (en) * | 2022-08-17 | 2022-11-29 | 上海汉虹精密机械有限公司 | Automatic sand adding device and process for quartz crucible mold of melting machine |
| CN117385419A (en) * | 2023-12-13 | 2024-01-12 | 赣州晨光稀土新材料有限公司 | Automatic tapping device for rare earth crucible |
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| JPH07172975A (en) * | 1993-12-20 | 1995-07-11 | Mitsubishi Materials Corp | Raw material incorporation method for single crystal pulling up device and apparatus therefor |
| JPH07206580A (en) * | 1993-12-29 | 1995-08-08 | Toshiba Ceramics Co Ltd | Attaching method for assembled crucible and attaching means |
| CN2629928Y (en) * | 2003-07-24 | 2004-08-04 | 李威 | Aluminium alloy head auto-cooling manipulator |
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| JP2010138003A (en) * | 2008-12-09 | 2010-06-24 | Daifuku Co Ltd | Equipment for growing single crystal rod |
| CN201713598U (en) * | 2010-06-25 | 2011-01-19 | 上海汉虹精密机械有限公司 | Automatic crucible carrying mechanism |
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Patent Citations (6)
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| JPH07172975A (en) * | 1993-12-20 | 1995-07-11 | Mitsubishi Materials Corp | Raw material incorporation method for single crystal pulling up device and apparatus therefor |
| JPH07206580A (en) * | 1993-12-29 | 1995-08-08 | Toshiba Ceramics Co Ltd | Attaching method for assembled crucible and attaching means |
| CN2629928Y (en) * | 2003-07-24 | 2004-08-04 | 李威 | Aluminium alloy head auto-cooling manipulator |
| JP2010138003A (en) * | 2008-12-09 | 2010-06-24 | Daifuku Co Ltd | Equipment for growing single crystal rod |
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Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102909722A (en) * | 2011-08-01 | 2013-02-06 | 扬州多维数控***有限公司 | Planar multi-joint robot arm |
| CN102424160A (en) * | 2011-08-18 | 2012-04-25 | 德清县建明坩埚厂 | Crucible packing car |
| CN102424161A (en) * | 2011-08-18 | 2012-04-25 | 德清县建明坩埚厂 | Crucible packing vehicle |
| CN105459100A (en) * | 2016-01-29 | 2016-04-06 | 成都硅特自动化设备有限公司 | Rotary manipulator for vacuum infiltration |
| CN105459100B (en) * | 2016-01-29 | 2017-07-07 | 成都硅特自动化设备有限公司 | For the rotary machine hand of vacuum infiltration |
| CN106078704B (en) * | 2016-07-14 | 2019-03-05 | 青岛德山机械有限公司 | A kind of concrete prefabricated transferring pallet handling rotation and lifting machinery hand |
| CN106078704A (en) * | 2016-07-14 | 2016-11-09 | 青岛德山机械有限公司 | A kind of concrete prefabricated transferring pallet handling rotation and lifting machinery hands |
| CN106625574A (en) * | 2016-10-25 | 2017-05-10 | 中山市毅马五金有限公司 | Mechanical hand for smelting furnace |
| CN107045038A (en) * | 2017-03-10 | 2017-08-15 | 同济大学 | A kind of single droplet burning system |
| CN107127748A (en) * | 2017-07-10 | 2017-09-05 | 山东农业大学 | A kind of arm-type palletizing mechanical arm of small rotary and application method |
| CN107127748B (en) * | 2017-07-10 | 2023-08-29 | 山东农业大学 | Small rotating arm type stacking manipulator and use method thereof |
| CN108517565A (en) * | 2018-04-28 | 2018-09-11 | 广东先导先进材料股份有限公司 | Crucible process system |
| CN108517565B (en) * | 2018-04-28 | 2023-12-01 | 广东长信精密设备有限公司 | Crucible processing system |
| CN109533943A (en) * | 2018-11-20 | 2019-03-29 | 东台市海邦电气有限公司 | Axial center linked formula lift grasp handling transporter |
| CN112520636A (en) * | 2020-11-30 | 2021-03-19 | 泰州鸿材科技有限公司 | Steel bottle intelligence handling device |
| CN112520636B (en) * | 2020-11-30 | 2022-06-07 | 泰州鸿材科技有限公司 | Steel bottle intelligence handling device |
| CN113308746A (en) * | 2021-05-28 | 2021-08-27 | 曲靖阳光能源硅材料有限公司 | Automatic feeding vehicle for single crystal furnace |
| CN115403254A (en) * | 2022-08-17 | 2022-11-29 | 上海汉虹精密机械有限公司 | Automatic sand adding device and process for quartz crucible mold of melting machine |
| CN117385419A (en) * | 2023-12-13 | 2024-01-12 | 赣州晨光稀土新材料有限公司 | Automatic tapping device for rare earth crucible |
| CN117385419B (en) * | 2023-12-13 | 2024-03-08 | 赣州晨光稀土新材料有限公司 | Automatic tapping device for rare earth crucible |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI SHENHE THERMO-MAGENETIC ELECTRONIC CO., L |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20101124 Address after: 200444 No. 188, Lian Lian Road, Baoshan City Industrial Park, Shanghai, China Applicant after: Shanghai Thermo-magenetic Electronic Co., Ltd. Co-applicant after: Shanghai Shenhe Thermo-magenetic Electronic Co., Ltd. Address before: 200444 No. 188, Lian Lian Road, Baoshan City Industrial Park, Shanghai, China Applicant before: Shanghai Thermo-magenetic Electronic Co., Ltd. |
|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20101110 |