CN101877323A - 设置模片粘贴膜的切割带和生产半导体器件的方法 - Google Patents
设置模片粘贴膜的切割带和生产半导体器件的方法 Download PDFInfo
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- CN101877323A CN101877323A CN2010101608745A CN201010160874A CN101877323A CN 101877323 A CN101877323 A CN 101877323A CN 2010101608745 A CN2010101608745 A CN 2010101608745A CN 201010160874 A CN201010160874 A CN 201010160874A CN 101877323 A CN101877323 A CN 101877323A
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- Prior art keywords
- die attach
- attach film
- cutting belt
- supporting strap
- film
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Cited By (4)
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000129227A (ja) * | 1998-10-29 | 2000-05-09 | Lintec Corp | 半導体ウエハ保護用粘着シートおよびその使用方法 |
US20050074921A1 (en) * | 2003-10-02 | 2005-04-07 | Sony Corporation | Method of producing semiconductor package, apparatus for producing semiconductor package, and adhesive film |
CN101186127A (zh) * | 2006-11-10 | 2008-05-28 | 日东电工株式会社 | 自卷层压片和自卷压敏粘合片 |
JP2008155619A (ja) * | 2006-11-10 | 2008-07-10 | Nitto Denko Corp | 自発巻回性積層シート及び自発巻回性粘着シート |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3784202B2 (ja) * | 1998-08-26 | 2006-06-07 | リンテック株式会社 | 両面粘着シートおよびその使用方法 |
JP3865184B2 (ja) * | 1999-04-22 | 2007-01-10 | 富士通株式会社 | 半導体装置の製造方法 |
JP2002158276A (ja) * | 2000-11-20 | 2002-05-31 | Hitachi Chem Co Ltd | ウエハ貼着用粘着シートおよび半導体装置 |
JP2007311421A (ja) * | 2006-05-16 | 2007-11-29 | Sekisui Chem Co Ltd | 半導体チップの製造方法 |
-
2009
- 2009-05-01 JP JP2009112002A patent/JP2010263041A/ja active Pending
-
2010
- 2010-04-29 US US12/769,959 patent/US20100279491A1/en not_active Abandoned
- 2010-04-29 CN CN2010101608745A patent/CN101877323A/zh active Pending
- 2010-04-30 TW TW099113923A patent/TW201103967A/zh unknown
- 2010-04-30 KR KR1020100040633A patent/KR20100119725A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000129227A (ja) * | 1998-10-29 | 2000-05-09 | Lintec Corp | 半導体ウエハ保護用粘着シートおよびその使用方法 |
US20050074921A1 (en) * | 2003-10-02 | 2005-04-07 | Sony Corporation | Method of producing semiconductor package, apparatus for producing semiconductor package, and adhesive film |
CN101186127A (zh) * | 2006-11-10 | 2008-05-28 | 日东电工株式会社 | 自卷层压片和自卷压敏粘合片 |
JP2008155619A (ja) * | 2006-11-10 | 2008-07-10 | Nitto Denko Corp | 自発巻回性積層シート及び自発巻回性粘着シート |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102637651A (zh) * | 2011-02-15 | 2012-08-15 | 日东电工株式会社 | 保护层形成用薄膜 |
CN102637651B (zh) * | 2011-02-15 | 2015-04-15 | 日东电工株式会社 | 保护层形成用薄膜 |
CN105609455A (zh) * | 2014-11-19 | 2016-05-25 | 美科米尚技术有限公司 | 用于转移微型元件的装置 |
CN105609455B (zh) * | 2014-11-19 | 2019-05-17 | 美科米尚技术有限公司 | 用于转移微型元件的装置 |
CN109417049A (zh) * | 2016-06-28 | 2019-03-01 | 株式会社迪思科 | 处理背面上具有突出物的晶片的方法 |
CN109417049B (zh) * | 2016-06-28 | 2023-09-05 | 株式会社迪思科 | 处理背面上具有突出物的晶片的方法 |
CN110226215A (zh) * | 2017-03-31 | 2019-09-10 | 古河电气工业株式会社 | 带剥离衬垫的掩模一体型表面保护带 |
CN110226215B (zh) * | 2017-03-31 | 2023-09-19 | 古河电气工业株式会社 | 带剥离衬垫的掩模一体型表面保护带 |
Also Published As
Publication number | Publication date |
---|---|
US20100279491A1 (en) | 2010-11-04 |
JP2010263041A (ja) | 2010-11-18 |
TW201103967A (en) | 2011-02-01 |
KR20100119725A (ko) | 2010-11-10 |
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