CN1018687B - Discharge tube of metal vapour - Google Patents
Discharge tube of metal vapourInfo
- Publication number
- CN1018687B CN1018687B CN 90102917 CN90102917A CN1018687B CN 1018687 B CN1018687 B CN 1018687B CN 90102917 CN90102917 CN 90102917 CN 90102917 A CN90102917 A CN 90102917A CN 1018687 B CN1018687 B CN 1018687B
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- tube
- discharge
- anode
- negative electrode
- window
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Abstract
The present invention relates to a discharge tube of a metal vapor laser with gas laser. The present invention is composed of a yin electrode end, a yang electrode end and an intermedium tube body, wherein plasma tubes for discharge, a high-temperature insulating layer, a hard-melting insulation tube and a cylinder in a coaxial back flow structure are arranged coaxially in the intermedium tube from the central axis to the outside. The cylinder in a coaxial back flow structure is installed outside a vacuum sealing chamber. One end of the cylinder in a coaxial back flow structure is connected with the yang electrode and the other end of the cylinder is isolated from the yin electrode. All connecting parts of the vacuum sealing chamber are connected by sealing rings. The plasma tubes for discharge can be connected by the technology of short tube connection. The discharge tube can be used for laser oscillators and laser amplifiers, and have the advantages of convenient disassembly, uniform, stable and reliable discharge, low cost, etc.
Description
The invention belongs to the gas laser field.Patent related to the present invention by retrieval has:
1. United States Patent (USP) 4,694, and 463
2. European patent 0 319 898
3. United States Patent (USP) 4,761, and 792
Above-mentioned three patents are all about discharge tube of metal vapour.Wherein United States Patent (USP) 4,694, and 463 discharge tube structure as shown in Figure 1.Discharge plasma pipe wherein, anode, negative electrode and elevated temperature heat insulating barrier all place a vacuum seal indoor, and this closed chamber is by the negative electrode window, negative electrode, cathode block, metal bellows A, high strength refractory ceramic tube, metal bellows B, the anode seat, anode and anode window are formed.Mainly by welding, the transition sealing sealing has only window glass to be tightly connected with rubber ring and window between its each several part, and this structure is unsuitable for changes the parts that damage, and can only disposablely use.
The laser discharge tubular construction of European patent 0319898 is shown in Fig. 2.Wherein the metallic cylinder of coaxial return-flow structure is a link of vacuum sealing chamber.In such vacuum sealing chamber, two ends of discharge plasma pipe and negative electrode must be worked into rate of pressurization to mill between inserting partly accordingly.Directly spend poorly because difficulty is melted earthenware, it is processed mill with the molybdenum tube is very difficult.In addition, the electrode damage that causes also can be destroyed air-tightness because sputter or local fixed point are discharged in discharge process, make neon inevitably can enter thermal insulation layer from discharge plasma pipe two ends, therefore discharge takes place between the metallic cylinder edge of negative electrode and coaxial return-flow structure easily, has destroyed the regular picture passage of negative electrode by discharge plasma arrival anode.
In addition, when device uses as amplifier, European patent 0319898 by increase negative electrode head window to the negative electrode end face apart from d1, reduce anode head window to the anode end face apart from d2, stain and prevent that with the constant window that reduces of seasonal laser discharge tube total length amplified spontaneous emission from increasing.Experimental results show that, by d1, d2 changes and causes that the growth of discharge tube total length can't make amplified spontaneous emission obviously increase, in addition, by experiment as can be seen, it is the principal element that causes that laser discharge tube transmitance descends that anode head window stains, and therefore reduces d2 and can only increase the weight of anode head window contamination degree, and transmitance is further descended.
United States Patent (USP) 4,761,792 is different with other two patents, and discharge tube is to melt ceramic material with difficulty to fire and form, as shown in Figure 3.Intermediate portion part is the discharge plasma pipe.Cause the plasma tracheal rupture for reducing the discharge heating, in discharge waits the daughter pipe, be lined with one deck refractory metal film.As seen from Figure 3, the two end distance negative electrodes and the anode of this metallic thin film tube are very near, and discharge takes place to anode by metallic film from negative electrode easily, therefore are difficult to set up between two electrodes by the gas regular picture in the discharge plasma pipe.In addition, owing to outside this metal vapor lamp, do not have the metallic cylinder of coaxial return-flow structure, so the length of discharge plasma pipe can not be greater than 500 millimeters.
Discharge plasma pipe in above-mentioned three patents all requires to select the difficulty of straight degree＜0.006 to melt earthenware to make.The discharge plasma pipe is longer, melt earthenware difficult selection of can healing less than the difficulty of 0.006 straight degree, therefore in general, longer difficulty melt earthenware directly spend poorer, therefore the length of plasmatron is restricted, and melt from a large amount of difficulties and to select qualified pipe the earthenware, this has just improved the cost of discharge tube.
The objective of the invention is to design a kind of overcome above-mentioned shortcoming and practical discharge tube of metal vapour.Wherein the effective short tube engagement technique linking of discharge plasma forms, and is not selected the restriction of tubing finite length, can make the discharge plasma pipe of random length with short pipe material.
Discharge tube of metal vapour of the present invention is divided into the negative electrode head, and middle body and anode head three are partly.The negative electrode head comprises the negative electrode window, air inlet, negative electrode head flanges and negative electrode.Intervalve body part comprises the discharge plasma pipe, the elevated temperature heat insulating barrier, and difficulty is melted insulated tube, fixes in the negative electrode of this insulated tube flange, the cylinder of coaxial return-flow structure and High-Voltage Insulation bracing frame in the flange and anode.The anode head comprises anode window, exhaust outlet, anode head flanges and anode.The High-Voltage Insulation bracing frame is fixed on two disks of two ends by High-Voltage Insulation support bar (using four usually) to be formed.
The negative electrode head, flange in the negative electrode, difficulty is melted insulated tube, is tightly connected into a vacuum sealing chamber each other with sealing ring between flange and the anode head in the anode.The discharge plasma pipe, thermal insulation layer, negative electrode and anode all place this vacuum seal indoor.Cylinder one end of coaxial return-flow structure links to each other with anode with the anode head flanges by flange in the anode.The other end of the cylinder of coaxial return-flow structure is connected on the disk of High-Voltage Insulation bracing frame, by high pressure bracing frame and cathode isolation.It is outdoor that the cylinder of this coaxial return-flow structure is positioned at vacuum seal, and with the coaxial storing of discharge plasma pipe, the material of cylinder is usually selected to conduct electricity very well and the metal of fine intensity is arranged, as copper, stainless steel etc.
The negative electrode head all has water-cooling structure in middle flange and the anode head, for preventing the overheated damage that causes.
Distance from the negative electrode window to the negative electrode end face is d1, and the distance from the anode window to the anode end face is d2.Desirable d1 equaled d2 when discharge tube used as laser oscillator.As use seasonal d2 〉=2d1 as laser amplifier, then the window transmitance can have clear improvement, although this moment, the discharge tube total length increased thereupon, its amplified spontaneous emission there is no significant change.
Discharge plasma pipe of the present invention can by two sections or multistage difficulty melt earthenware on demand length be connected piecemeal and form.Marching method is to be slightly less than refractory metal light wall pipe that difficulty melts the earthenware internal diameter as connection tube with one section external diameter, the connection tube two ends is respectively stretched into to face a difficult choice melt in the earthenware, and two sections earthenwares are connected internally.
Under common metal steam laser discharging condition, if the total length that control connection tube length is two sections difficulties melts the earthenware addition 0.08 to 0.12.This is for fear of generating electrodes to the connection tube edge or the additional partial discharge between each connection tube edge.Because this additional discharge can influence the uniformity and the stability of whole discharge tube, in addition, this additional partial discharge can cause that also the connection tube edge is melted by burning.
For guaranteeing to have rigidity and straight degree preferably through the discharge plasma pipe that linking forms, the thickness that is connected tube wall also will be selected suitably.Usually thickness is slightly less than or equals 0.3 millimeter.The connection tube edge should smoothly not have burr in addition.Above-mentioned marching method is called the short tube engagement technique.
Under identical discharging condition, be connected the discharge plasma pipe that art is made with short tube, can not change the discharge performance of discharge tube because of linking.The metal vapors operation material also is difficult for melting the earthenware joining place from two sections difficulties and overflows, and passes to refractory ceramic tube because the linking of the Jiao Erre that produces in the discharge process in the discharge plasma pipe partly melted the metal light wall pipe by difficulty.The refractory metal light wall pipe is equivalent to increase a thermal shield, makes to be connected tube wall temperature partly melts earthenware a little more than its adjacent difficulty tube wall temperature.After discharge stops, in the heat radiation process, be connected heat radiation partly also around difficulty to melt earthenware slow, so its tube wall temperature still is higher than it on every side.
The difficulty of using as discharge ion body pipe in the above-mentioned discharge tube structure is melted earthenware and is generally selected high temperature high-purity alpha-alumina earthenware for use (working temperature is higher than 1500 ℃, purity is greater than 99.99), thermal insulation layer is generally selected high temperature alumina fibrofelt (1600 ℃ of heatproofs, thermal conductivity coefficient k=0.5W/cmk) or typing alumina fibre pipe for use.The High-Voltage Insulation pipe can be selected quartz ampoule for use, or sends lux (Perex) glass, or the high-purity alpha-alumina earthenware etc.The thin tube that connection tube can be made with metal materials such as molybdenum, tantalum, tungsten.Sealing ring fluorine commonly used or acrylonitrile-butadiene rubber " zero " circle also can use metal rings such as copper, silver.
Advantage of the present invention:
1. can make the discharge plasma pipe of random length with short tube engagement technique of the present invention, do not selected difficulty to melt the restriction of earthenware material finite length.Much larger than one meter discharge plasma pipe actual application value is arranged to being used for high-power metallic steam laser factory length especially, because melting the earthenware finite length, the difficulty of φ more than 40 only be one meter, straight degree is generally every meter 8-10 millimeter, 6 millimeters every meter the straight degree of being less than that is used for discharge tube, select long qualified difficulty to melt pottery is suitable difficulty.And can easily reach requirement with the discharge plasma Guan Qizhi degree that the short tube engagement technique is made.
2. by first advantage as can be known, the quality that short difficulty is melted the earthenware material is selected to be better than long difficulty and is melted earthenware, short high-quality difficulty is melted earthenware and is produced easily, and the tubing price is also cheap, therefore can reduce the cost of discharge tube with short tube engagement technique making discharge plasma pipe.
3. each connection of vacuum sealing chamber partly all with the sealing ring sealing, uses the discharge tube dismounting flexible, and the transposing parts conveniently, and are practical.
4. generally get d1=d2 when discharge tube uses as laser oscillator, when using as laser amplifier as if discharge tube, only need get d2=2d1 just can reach promising result.So discharge tube of metal vapour of the present invention both can be used for laser oscillator, can be used for laser amplifier again.
5. the metallic cylinder of coaxial return-flow structure of the present invention places vacuum seal outdoor, and this has just been avoided the metallic cylinder discharge of negative electrode by coaxial return-flow structure, thereby has guaranteed the reliable and stable of discharge.
Description of drawings:
Fig. 1 is a United States Patent (USP) 4,694,463 discharge tube structure schematic diagram.Among the figure:
The 1-anode
2-anode seat
3-metal bellows B
The 4-gas-tight container
The 5-difficulty is melted earthenware
6-discharge plasma pipe
7-elevated temperature heat insulating barrier
8-metal bellows A
The 9-cathode block
The 10-negative electrode
11-negative electrode window
12-high pressure incoming line
The 13-ground wire
14-outsourcing thermal insulation layer
The metallic cylinder of the coaxial return-flow structure of 15-
16-anode window
Fig. 2 is the discharge tube structure schematic diagram of European patent 0319898.Among the figure:
17-High-Voltage Insulation tube
The 18-resonator mirror
The 19-exhaust outlet
The 20-vacuum pump
21-working metal material
The 22-gas supply system
The 23-air inlet
The 24-resonant cavity
D1-negative electrode window is to the distance of negative electrode end face
D2-anode window is to the distance of anode end face
Fig. 3 is a United States Patent (USP) 4,761,792 discharge tube structure schematic diagram.
25-liner refractory metal film
Fig. 4 is the structural representation of discharge tube of the present invention
Flange in the 26-negative electrode
27-High-Voltage Insulation bracing frame
The 28-difficulty is melted insulated tube
The 29-connection tube
Flange in the 30-anode
31-anode head flanges
32-negative electrode head flanges
The 33-sealing ring
Fig. 5 melts earthenware for metal vapor laser discharge plasma Guan Yousan section difficulty of the present invention and is connected the structural representation that forms.
Fig. 6 is the structural representation of discharge tube of metal vapour of the present invention when using as amplifier.D2=2d1 among the figure.
Most preferred embodiment:
Embodiment 1:
Structure as shown in Figure 4.Its main structure parameters is:
This pipe is formed by a φ 55 * 1000 and φ 55 * 300 two a short tube linking.
Connection tube 29 φ 47.5 * 100 wall thickness 0.3
Difficulty is melted insulated tube 28 150 * 1670
Anode 1 φ 47 * 250 wall thickness 2
d1＝d2 150
Negative electrode window 11 φ 90
High-Voltage Insulation support bar 27 φ 10 * 150
The connection tube material selection approaches the molybdenum tube.The acrylonitrile-butadiene rubber " zero " of selecting for use of selecting for use fluorubber to have that sealing ring has encloses.Difficulty is melted the insulated tube material and is selected quartz ampoule for use, and difficulty is melted earthenware material selection high temperature high-purity alpha-alumina earthenware.Electrode material is selected the molybdenum tube for use.The High-Voltage Insulation bar is selected glass-reinforced plastic material for use.Each metal parts of discharge tube such as middle flange, negative electrode and anode head, the metallic cylinder of coaxial return-flow structure etc. is all selected stainless steel material for use.The discharge tube of said structure is as copper vapor laser, and its average output power is 45 watts.
Embodiment 2:
Structure as shown in Figure 5, its main structure parameters is:
This pipe is to add φ 55 * 500 by φ 55 * 400 to add φ 55 * 400 3 section short tube and be connected and form.
Other main structure parameters are selected all identical with embodiment 1 with material.
The discharge tube of said structure is as copper vapor laser, and its average output power is 45 watts.
Embodiment 3:
Its main structure parameters of structure as shown in Figure 6 is:
This pipe is formed by a φ 40 * 700 and φ 40 * 400 two a short tube linking.
Connection tube 29 φ 34.5 * 100 wall thickness 0.3
Difficulty is melted insulated tube 28 φ 120 * 1420
Anode 1 φ 34 * 150 wall thickness 2
d1＝150，d2＝300
Negative electrode window 11 φ 70
The above long measure of High-Voltage Insulation support bar 27 φ 10 * 150(is millimeter) each component materials selects identical with embodiment 1,2.
During as the copper vapor laser amplifier, its average output power is 25 watts with the discharge tube of said structure.
Claims (4)
1, a kind of discharge tube of metal vapour that belongs to gas laser is divided into negative electrode head, middle body and anode head three parts, and wherein the negative electrode head comprises negative electrode window, air inlet and negative electrode; Middle body has the discharge plasma pipe by the outside coaxial storing of central axis, the elevated temperature heat insulating barrier, and difficulty is melted insulated tube, the cylinder of coaxial return-flow structure; The anode head comprises anode window, exhaust outlet and anode, it is characterized in that melting all convergence part branches of vacuum sealing chamber that insulated tube inwardly constitutes by difficulty comprises that being fixed in difficulty melts the head flanges at the middle flange at insulated tube two ends, negative and positive the two poles of the earth and window all with the sealing ring sealing-in; The discharge plasma pipe can adopt the short tube engagement technique to be connected and form; D2 〉=d1 (wherein d1 is the distance of negative electrode head window to the negative electrode end face, and d2 is the distance of anode head window to the anode end face); Place cylinder one end of the outdoor coaxial return-flow structure of vacuum seal to link to each other with anode with head flanges by the anode flange, the other end has the High-Voltage Insulation bracing frame to support and cathode isolation.
2, a kind of discharge tube of metal vapour according to claim 1 is characterized in that the short tube engagement technique is the discharge plasma pipe that with connection tube the short tube of segmentation is connected to become the length that requires.
3, a kind of discharge tube of metal vapour according to claim 1 and 2 is characterized in that connection tube is a metal tube, and wall thickness is smaller or equal to 0.3 millimeter, and length is for being connected 0.08 to 0.12 of two sections discharge plasma pipe addition total lengths.
4, a kind of discharge tube of metal vapour according to claim 1 is characterized in that what the High-Voltage Insulation bracing frame was made up of the disk at support bar and support bar two ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90102917 CN1018687B (en) | 1990-08-20 | 1990-08-20 | Discharge tube of metal vapour |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90102917 CN1018687B (en) | 1990-08-20 | 1990-08-20 | Discharge tube of metal vapour |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1059426A CN1059426A (en) | 1992-03-11 |
| CN1018687B true CN1018687B (en) | 1992-10-14 |
Family
ID=4877794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90102917 Expired CN1018687B (en) | 1990-08-20 | 1990-08-20 | Discharge tube of metal vapour |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1018687B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101521064B (en) * | 2009-04-28 | 2011-08-24 | 南通市神马电力科技有限公司 | Supporting piece for bushing electrode |
| DE102012205308B4 (en) * | 2012-03-30 | 2018-05-30 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Device for amplifying a laser beam |
| CN107204561B (en) * | 2017-05-22 | 2019-09-27 | 西北核技术研究所 | Closed loop discharge excitation pulse repetition gas laser and its operation method |
| CN107017544B (en) * | 2017-05-22 | 2019-09-27 | 西北核技术研究所 | A kind of electric discharge excited gaseous laser and its operation method |
-
1990
- 1990-08-20 CN CN 90102917 patent/CN1018687B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN1059426A (en) | 1992-03-11 |
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