CN212750806U - Excimer lamp - Google Patents

Abstract

The utility model provides an excimer lamp, the front end of outer tube is received narrowly and is formed preceding neck position, and the back neck position is received narrowly to the back, and the tip of preceding neck position and back neck position is sealed, and the both ends of inner tube are placed on preceding neck position and back neck position, and the inside packing of outer tube has luminous gas, and the periphery of outer tube is provided with the outer electrode, and the inside of inner tube is provided with the inner electrode, and the front end connecting conductor of inner electrode, conductor are drawn forth from the front end of inner tube and outer tube. This excimer lamp forms preceding neck position and back neck position at the both ends of outer tube, and the inner tube has been realized fixedly and spacing by preceding neck position and back neck position, no matter like this in the course of working or in the use can not be because of being heated the inequality, at the combination position formation stress and the crackle of inner tube and outer tube. On the premise of realizing double dielectric barrier discharge functions, the inner tube and the outer tube are not needed to be consolidated together, thereby overcoming the defects of the traditional excimer lamp. The product is more reliable, and the service life can be prolonged.

Description

Excimer lamp

Technical Field

The utility model relates to an ultraviolet lamps and lanterns technical field especially relates to an excimer lamp.

Background

When the voltage is higher than the breakdown voltage of the interelectrode gas, the interelectrode gas is ionized to form plasma, and non-uniform filament discharge is formed between the two electrodes to emit light. The luminous effect can not generate natural absorption of radiation, and has high luminous efficiency and good monochromaticity. But the unstable uniformity of the discharge limits its application. It was subsequently found that when an insulating medium is inserted between the two electrodes, the discharge becomes uniformly dispersed and consists of a large number of fine wire discharges in the form of a mist. And when the voltage is kept unchanged and the areas of the insulating medium and the electrodes are increased, the discharge current is also increased, so that not less power can be realized, namely the working principle of the excimer lamp. The double-layer dielectric barrier discharge structure is proved to be the most uniform and efficient scheme for discharge light emission of the excimer lamp.

As shown in fig. 1 and 2, fig. 1 and 2 are schematic diagrams illustrating a double-layer dielectric barrier discharge structure with concentric cylinders as most of excimer lamp structures commonly used today. The inner pipe and the outer pipe are consolidated into a whole through a glass process. Therefore, the inner pipe and the outer pipe are heated unevenly in the processing process and the using process, the joint (A point position) of the inner pipe and the outer pipe is easy to generate stress to cause cracks, the processing technology requirement is high, and the processing difficulty is high. The combination of the two tubes can cause cracks due to ultraviolet deterioration caused by ultraviolet light conduction and aggregation along the glass bulb in the use process of the lamp tube.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to provide an excimer lamp which can easily avoid cracks caused when the inner tube and the outer tube are combined during production or use.

The utility model provides a technical scheme that its technical problem adopted is:

the utility model provides an excimer lamp, includes outer tube and inner tube, the front end of outer tube is narrowed and is formed preceding neck position, and the back neck position is narrowed and is formed to the back end, the tip seal of preceding neck position and back neck position, place on preceding neck position and back neck position at the both ends of inner tube, the intussuseption of outer tube is filled with luminescent gas, the periphery of outer tube is provided with the outer electrode, the inside of inner tube is provided with the inner electrode, the front end connecting conductor of inner electrode, the conductor is metal molybdenum, the conductor is drawn forth from the front end of inner tube and outer tube.

Further, the axes of the main body of the outer tube, the front neck position and the back neck position are collinear.

Furthermore, the excircle surfaces of the two ends of the inner tube are in clearance fit with the inner holes of the front neck part and the rear neck part.

Further, the inner electrode is one of spiral, net or sheet, and the inner electrode is tightly attached to the inner wall of the inner tube and uniformly arranged around the axis of the inner tube.

Further, the outer electrode is one of a spiral shape and a net shape, and the outer electrode is tightly attached to the outer wall of the outer tube and uniformly arranged around the axis of the outer tube.

Furthermore, lamp caps are arranged on the outer sides of the front neck position and the back neck position.

The utility model has the advantages that:

through adopting the technical scheme, the utility model discloses an excimer lamp forms preceding neck position and back neck position at the both ends of outer tube, and the inner tube has been realized fixedly and spacing by preceding neck position and back neck position, no matter like this can not be because of being heated inequality in the course of working or the use, including the combination position formation stress and the crackle of pipe and outer tube. On the premise of realizing double dielectric barrier discharge functions, the inner tube and the outer tube are not needed to be consolidated together, thereby overcoming the defects of the traditional excimer lamp. The product is more reliable, and the service life can be prolonged.

Drawings

The present invention will be further explained with reference to the drawings and examples.

FIG. 1 is a schematic structural diagram of a first conventional excimer lamp;

FIG. 2 is a schematic structural diagram of a second conventional excimer lamp;

FIG. 3 is a schematic view of the whole structure of the excimer lamp of the present invention;

FIG. 4 is a schematic structural diagram of an outer tube assembly in the process of implementing the excimer lamp of the present invention;

FIG. 5 is a schematic view of the inner tube assembly in the process of implementing the excimer lamp of the present invention;

fig. 6 is a schematic structural diagram of a composite member in the implementation process of the excimer lamp of the present invention.

Reference numerals: 1. an outer tube; 11. the front neck position; 12. the back neck position; 13. a first aperture; 2. an inner tube; 21. a second aperture; 3. an outer electrode; 4. an inner electrode; 5. a conductor; 6. a lamp cap; 100. a first pipe body; 200. a second tube body; 300. a third tube; 400. a fourth tube body; 500. and (4) exhausting the gas.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.

As shown in fig. 3, an excimer lamp comprises an outer tube 1 and an inner tube 2, wherein the front end of the outer tube 1 is narrowed to form a front neck position 11, the rear end is narrowed to form a rear neck position 12, the ends of the front neck position 11 and the rear neck position 12 are sealed, two ends of the inner tube 2 are placed on the front neck position 11 and the rear neck position 12, the outer tube 1 is filled with luminous gas, an outer electrode 3 is arranged on the periphery of the outer tube 1, an inner electrode 4 is arranged inside the inner tube 2, the front end of the inner electrode 4 is connected with a conductor 5, and the conductor 5 is led out from the front ends of the inner tube 2 and the outer tube 1.

In the specific implementation process, the quartz tube capable of transmitting the emission spectrum of the excimer lamp is selected to include the first tube 100, the second tube 200, the third tube 300, the fourth tube 400, and the exhaust tube 500.

The first tube 100 forms the main body of the outer tube 1, the two ends of the main body of the outer tube 1 are reduced by glass process, and then two sections of the second tube 200 and the third tube 300 with smaller diameter than the first tube 100 are respectively welded by a bubble welding method to form the front neck position 11 and the back neck position 12 of the outer tube 1. Wherein, the axes of the main body of the outer tube 1, the front neck part 11 and the back neck part 12 are collinear. The rear end of the rear neck 12 is bent inward by a glass processing process to form a first small hole 13, and then the upper exhaust pipe 500 is welded at the first small hole 13 by a glass bubble welding process to form the outer pipe assembly shown in fig. 4.

The fourth tube 400 having an outer diameter slightly smaller than the inner diameter of the second tube 200 and the third tube 300 and a length slightly longer than the first tube 100 is selected as the inner tube 2. The rear end of the inner pipe 2 is bent inwards to form a second small hole 21 by a glass processing technology, and the inner pipe 2 can be supported by inner holes of the front neck part 11 and the back neck part 12 of the outer pipe assembly after being assembled into the outer pipe 1. Wherein, the excircle surfaces of the two ends of the inner tube 2 are in clearance fit with the inner holes of the front neck part 11 and the back neck part 12. A spiral, net, or sheet-like inner electrode 4 is disposed in the inner tube 2 in close contact with the inner wall of the inner tube 2. The inner electrode 4 is welded to a conductor 5 which forms a reliable seal with the quartz to form an inner tube assembly as shown in fig. 5, the conductor 5 typically being molybdenum.

The inner tube assembly is placed inside the outer tube assembly, the two ends of the inner tube 2 are supported by the front neck 11 and the back neck 12, and the conductor 5 is led out from the front end of the outer tube 1, forming a composite member as shown in fig. 6.

And clamping and sealing the front neck position 11 of the outer pipe 1 of the assembled composite member on a special clamping and sealing machine, so that the inner pipe 2 and the outer pipe 1 form an integral member. Inert gas is continuously injected into the tube through the exhaust tube 500 in the clamping and sealing process, so that the conductor 5 formed by the inner electrode 4, the connecting sheet and the guide wire is protected from being oxidized in the clamping and sealing process, and the conductor 5 can be well fused with quartz in the clamping and sealing process to form reliable sealing.

The composite member formed after clamping and sealing is connected to an exhaust system of a vacuum exhauster through an exhaust pipe 500, the outer pipe 1 and the inner pipe 2 are heated and baked after primary pumping, the inner pipe 2 is often baked in a high-frequency heating mode, and the vacuum degree in the pipe is improved through repeated inert gas flushing, and impurity gases are removed in the fine pumping process. Then injecting working gas required by the excimer lamp to emit light and burning away the exhaust system.

The spiral or net-shaped outer electrode 3 is closely arranged on the outer wall of the outer tube 1 of the member after the exhaust is finished, and the main manufacturing process of the excimer lamp is finished after the lamp holder 6 is installed. The high-frequency high-voltage power supply is switched on to work.

According to the manufacturing process, the manufacturing of the excimer lamp can be completed only by using the common clamping, sealing, exhausting and other processes in the manufacturing of the common ultraviolet lamp. Without adopting a complicated and difficult double-layer glass tube fusion process which is easy to cause stress and crack. The manufacturing difficulty of the excimer lamp is reduced, and the product stability is improved.

As can be seen from the structure of the novel excimer lamp, the inner tube 2 of the lamp is well fixed and limited by the inner walls of the quartz tubes at the front neck position 11 and the back neck position 12, but is not fixed together, and the inner tube 2 can slightly slide along the inner walls of the front neck position 11 and the back neck position 12 in a limiting range. Therefore, stress and cracks are not formed at the joint position of the inner pipe 2 and the outer pipe 1 due to uneven heating in the processing process or the using process. The product is more reliable, and the service life can be prolonged.

The conductor 5 can be fused well with the quartz material during the clamping process to form a reliable seal. The inner electrode 4 of the lamp is also protected by the inert gas atmosphere inside the tube from the original exposure to air. Not only avoids the energy loss caused by the unnecessary ozone generated by the discharge of the inner electrode 4 in the air, but also can not shorten the service life caused by oxidation.

The structure of the lamp holder 6 can well protect the glass components of the excimer lamp and make the lamp easy to install and fix.

The above embodiments of the present invention are not right the utility model discloses the limited protection scope, the utility model discloses an embodiment is not limited to this, all kinds of basis according to the above-mentioned of the utility model discloses an under the above-mentioned basic technical thought prerequisite of the utility model, right according to ordinary technical knowledge and the conventional means in this field the modification, replacement or the change of other multiple forms that above-mentioned structure made all should fall within the protection scope of the utility model.

Claims (6)

1. An excimer lamp, characterized in that: the luminous tube comprises an outer tube and an inner tube, wherein the front end of the outer tube is narrowed to form a front neck position, the rear end of the outer tube is narrowed to form a rear neck position, the ends of the front neck position and the rear neck position are sealed, the two ends of the inner tube are placed on the front neck position and the rear neck position, the outer tube is filled with luminous gas, an outer electrode is arranged on the periphery of the outer tube, an inner electrode is arranged inside the inner tube, the front end of the inner electrode is connected with a conductor, and the conductor is led out from the front ends of the inner tube and the outer tube.

2. An excimer lamp as claimed in claim 1, wherein: the axes of the main body, the front neck and the back neck of the outer tube are collinear.

3. An excimer lamp as claimed in claim 1, wherein: the excircle surfaces of the two ends of the inner tube are in clearance fit with the inner holes of the front neck part and the rear neck part.

4. An excimer lamp as claimed in claim 1, wherein: the inner electrode is one of spiral, net or sheet, clings to the inner wall of the inner tube and is uniformly arranged around the axis of the inner tube.

5. An excimer lamp as claimed in claim 1 or 4, wherein: the outer electrode is one of spiral and net shape, clings to the outer wall of the outer tube and is uniformly arranged around the axis of the outer tube.

6. An excimer lamp as claimed in claim 1, wherein: and lamp caps are arranged on the outer sides of the front neck part and the back neck part.

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