CN1170461C - High-pressure microwave plasma exciter - Google Patents
High-pressure microwave plasma exciter Download PDFInfo
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- CN1170461C CN1170461C CNB001104225A CN00110422A CN1170461C CN 1170461 C CN1170461 C CN 1170461C CN B001104225 A CNB001104225 A CN B001104225A CN 00110422 A CN00110422 A CN 00110422A CN 1170461 C CN1170461 C CN 1170461C
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Abstract
The present invention relates to a high-pressure microwave plasma exciter which is characterized in that the microwave plasma exciter is composed of a waveguide-coaxial switching mechanism, a wave transparent air seal window, a coaxial open resonant cavity with a cut-off section and a radiation open coaxial cavity, wherein an outer conductor sharing an axial line with the waveguide-coaxial switching mechanism is connected with the outer conductor of the coaxial open resonant cavity by the wave transparent air seal window, and an internal conductor couples microwave energy to the coaxial open resonant cavity through a capacitor by the wave transparent air seal window. The radiation open coaxial cavity is coaxially arranged in the coaxial open resonant cavity. The present invention can realize plasma excitation and maintenance under the condition of high air pressure, and has the advantages of basically no leakage of the microwave energy, high conversion efficiency and long service life.
Description
The present invention relates to the microwave plasma body technique, provide a kind of especially and can stablize the device that excites and keep high-pressure microwave plasma.
Microwave plasma is compared with conventional direct-current arc, high-frequency plasma, has characteristics such as electrodeless pollution, the active height of plasma reaction, capacity usage ratio height, is the desirable means of carrying out chemical synthesis, material surface modifying.Microwave plasma can be divided into two kinds of low pressure (less than 760Torr) and hyperbars (greater than 760Torr) by its operating pressure.The low pressure microwave plasma has obtained in fields such as thin film deposition, plasma etchings to use widely.Large-scale plasma chemistry is synthetic in order to satisfy, the needs of development new type light source, people have invented the exciting technique of multiple high-pressure microwave plasma in 20 years in the past, summarize and get up to mainly contain following several scheme: the exciting technique (CMP) of (1) capacitive coupling microwave plasma; (2) exciting technique (Surfatron) of coaxial base table ground roll microwave plasma; (3) exciting technique of waveguide-based surface wave microwave plasma (Surfaguide); (4) exciting technique of TM010 resonant cavity (MIP) microwave plasma.
The capacitive coupling microwave plasma exciter is the capacitor of forming by a hollow circular-tube and the stick electrode of the heart of being placed in one, and microwave energy is coupled to the gas in the quartz ampoule, makes gas ionization and forms CMP." ignition in hydriding could form the CMP that controls oneself, and the shortcoming of CMP discharge is the leakage of microwave energy and the ablation of interior electrode but it must use high-frequency spark.
Surfatron is by coaxial loading gap capacitance, forms axial high field intensity; Outer conductor effectively seals energy of electromagnetic field, and the aperture on top, gap is drawn for plasma column, surface wave continuation and keep plasma.Though this device does not have the leakage of microwave energy, but must keep plasma by quartzy or other high temperature resistant wave-permeable medium tube, this plasma chemistry of inhaling the ripple medium for height is synthetic unfavorable, in case inhale the ripple media attachment on medium tube, plasma extinguishes very soon, the plasma resistant ablation property of medium tube also influences the stability of plasma in addition, so plasma can not long-term stable operation be the subject matter that Surfatron exists.
Surfaguide is the improved form of Surfatron, the narrow limit of rectangular waveguide is dwindled as far as possible or uses the reentry post to compress narrow limit, replaces coaxial loading capacitance, causes and keeps plasma by surface wave.Compare the Surfaguide function with Surfatron substantially identical but have bigger power capacity.
The MIP microwave plasma exciter is that the microwave cavity of dwindling as far as possible increases field intensity from dwindling and accumulating two angles, and surface wave excitation and continuation plasma by medium tube, general MIP device needs high-frequency spark, and " ignition in hydriding, power capacity are also less.
The object of the present invention is to provide a kind of high-pressure microwave plasma exciter, it can realize plasma excitation and keeping under high barometric information, and microwave energy do not leak the conversion efficiency height substantially, and device itself has long useful life simultaneously.
The invention provides a kind of high-pressure microwave plasma exciter, it is characterized in that: this microwave plasma exciter is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity (4) of section waveguide-coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band; The outer conductor of waveguide-coaxial switching mechanism (1) coaxial line links to each other with the outer conductor of coaxial open circuit resonant cavity (3) by wave-permeating gas hermetyic window (2), the inner wire of waveguide-coaxial switching mechanism (1) coaxial line is coupled microwave energy to coaxial open circuit resonant cavity (3) through electric capacity (5) by wave-permeating gas hermetyic window (2), the coaxial inside that is installed in coaxial open circuit resonant cavity (3) of radiation open circuit coaxial cavity (4).
The hermetyic window of wave-permeating gas described in the present invention (2) is the annulus of a saturating ripple, is embedded between waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor; Described electric capacity (5) is capacitance sheet or the electric capacity circle that centers on coaxial open circuit resonant cavity (3) inner wire; The inner wire of described coaxial open circuit resonant cavity (3), coaxial open circuit resonant cavity (3) all are adjustable by short-circuit plunger, the inner wire of radiation open circuit coaxial cavity (4), the radiation open circuit coaxial cavity (4) of end by the short-circuit plunger of end.
The inner wire of waveguide described in the present invention-coaxial switching mechanism (1) coaxial line is a water-cooling structure; The material of described wave-permeating gas hermetyic window (2) is selected from a kind of of polytetrafluoroethylene, nylon, quartz, boron nitride or high purity aluminium oxide; Described waveguide-coaxial switching mechanism (1) coaxial line is through twice or repeatedly changeover portion conversion.
The present invention has following characteristics:
1. adopt waveguide-coaxial conversion and the measure of central inner conductor water-cooled, improved the power capacity of device; Power capacity can reach more than the 20KW
2. exciting and keeping structure and organically combine plasma, avoided the electrode erosion problem of conventional CMP on the one hand, seal electromagnetic field effectively by section on the other hand, avoid the leakage of microwave energy, thereby can not need the external world " to realize exciting and keeping of plasma under the condition of ignition in hydriding.
3. adopt the ripple hermetyic window to make the working gas kind of plasma to adjust arbitrarily as required, thereby increased range of application of the present invention.
4. because coaxial transmission line uses same impedance conversion, make this energy regenerative structure be suitable for the microwave cavity of size arbitrarily, because coaxial cavity has the frequency band of broad, design philosophy of the present invention can be suitable for metric wave, decimeter wave and centimeter wave simultaneously.
In a word, the present invention is on the basis of CMP, improve the power capacity of device by waveguide-coaxial conversion, with radiation open a way coaxial cavity (4) with the band by the section coaxial open circuit resonant cavity (3) organically combine, radiation open circuit coaxial cavity (4) coupling microwave energy from coaxial open circuit resonant cavity (3), utilize open end gap capacitance " ignition in hydriding plasma; coaxial open circuit resonant cavity (3) accumulates microwave energy effectively; strengthen field intensity; seal electromagnetic field effectively by section simultaneously; avoided the leakage of microwave energy, thus can not need the external world " to realize exciting and keeping of plasma under the condition of ignition in hydriding.Because apparatus of the present invention adopt waveguide-coaxial conversion Transmission Microwave energy; exciting and keeping and combine plasma; do not need outer boundary high frequency " ignition in hydriding or media table ground roll cause and keep plasma; and have gas sealing structure; thus can be under the condition of various hyperbar protective atmospheres, atmospheric flow, high power capacity, safety, stable operation.Apparatus of the present invention can be applicable to chemical synthesis (as: cracking of natural gas, the preparation of ozone, superfine ceramic powder synthetic etc.), the surface modification of material and processing (as: surface hardening of depositing of thin film, metal material and cut), novel plasma light source and plasma propeller.By embodiment in detail the present invention is described in detail below in conjunction with accompanying drawing.
Accompanying drawing 1 is the high-pressure microwave plasma exciter structural representation.
Accompanying drawing 3 is a wave-permeating gas hermetyic window part-structure schematic diagram.
Accompanying drawing 4 is radiation open circuit coaxial cavity part-structure schematic diagram.
Embodiment 1
As shown in Figure 1, excitation apparatus is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity parts such as (4) of section waveguide-coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band.
Waveguide-the major function of coaxial switching mechanism (1) is that the rectangular waveguide transfer transition is transmitted to coaxial line, the size of coaxial transmission inner and outer conductor can be amplified or dwindle as required, but must have one section changeover portion this moment, to guarantee the impedance matching of transmission line.This installs all designing impedance matching and all adopts 50 ohm of normal impedances.After adopting waveguide-coaxial conversion, device can be worked in the power bracket of 0～20KW, and the maximum temperature of plasma can reach more than the 2000K.
Wave-permeating gas hermetyic window (2): the saturating ripple medium that adopts low-k as: polytetrafluoroethylene, nylon, quartz, boron nitride or high purity aluminium oxide etc. are as wave-permeating gas hermetyic window (2), sealing between wave-permeating gas hermetyic window (2) and waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor can be adopted wiper seal or sealed with brazing according to selected hermetyic window material.For the introducing that makes wave-permeating gas hermetyic window (2) does not influence the transmission performance of coaxial line, also to carry out impedance conversion in the position of wave-permeating gas hermetyic window (2).Be to guarantee safety, the steady operation of hermetyic window, inner wire adopts water-cooled inner wire temperature when preventing high-power operation to raise, and causes the damage of wave-permeating gas hermetyic window (2).
The band that is made of coaxial open circuit resonant cavity (3) internal and external conductor and short-circuit plunger is the chamber of keeping of plasma by the coaxial open circuit resonant cavity (3) of section.Waveguide-the outer conductor of coaxial switching mechanism (1) coaxial transmission line links to each other with the outer conductor of coaxial open circuit resonant cavity (3), and the inner wire of waveguide-coaxial switching mechanism (1) coaxial transmission line is coupled microwave energy to coaxial open circuit resonant cavity (3) by a capacitance sheet or around the electric capacity circle of resonant cavity inner wire.The resonance frequency of the length decision resonant cavity of coaxial open circuit resonant cavity (3) inner wire.Adopt leakage maximum to be no more than 0.01mW/cm by coaxial open circuit resonant cavity (3) back microwave
2
Coaxial open circuit resonant cavity (3) inner wire constitutes a radiation open circuit coaxial cavity (4) as the outer conductor of radiation open circuit coaxial cavity (4) metal bar and the short-circuit plunger inner with it simultaneously, and the size of radiation open circuit coaxial cavity also is as the criterion to satisfy the open circuit condition of resonance.The function of radiation open circuit coaxial cavity (4) is to realize exciting of microwave plasma, and its operation principle is similar to CMP.The size of cavity should satisfy the condition of open circuit resonance.
The operation principle of whole device is as follows: waveguide-coaxial switching mechanism (1) coaxial transmission line is transferred to coaxial open circuit resonant cavity (3) with microwave energy, adjusting by short-circuit plunger and inner wire makes fully energy storage in the coaxial open circuit resonant cavity (3), radiation open circuit coaxial cavity (4) makes its resonance frequency identical with microwave source frequency by the length of regulating inner wire, capacitance gap at open end causes plasma, plasma excites chamber radiation open circuit coaxial cavity (4) in case form i.e. disengaging, enter coaxial open circuit resonant cavity (3), radiation open circuit coaxial cavity (4) quits work automatically, and plasma is kept in coaxial open circuit resonant cavity (3).Thereby avoided the ablation problem of electrode in the similar conventional CMP microwave plasma exciter.Adjusting by short-circuit plunger and coaxial open circuit resonant cavity (3) inner wire can make the microwave energy full consumption on plasma.On the one hand seal electromagnetic field effectively by section, avoided the leakage of microwave energy, improved the quality factor of cavity on the other hand, make the exciting and keep to become and be more prone to of plasma.
Particularly, be the microwave of 2450MHZ for operating frequency, the size of excitation apparatus is as follows: d
1=10～43mm, d
2=23～100mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～30mm, d
7=4～39mm, d
8=2～17mm, d
9=10～90mm, d
10=5～40mm, l
1=30.6～150mm, l
2=30.6～150mm, l
3=40～80mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.D wherein
1Be waveguide-former coaxial inner conductor external diameter of coaxial switching mechanism (1), d
2Be waveguide-former coaxial outer conductor internal diameter of coaxial switching mechanism (1), d
3Be waveguide-coaxial switching mechanism (1) conversion back coaxial inner conductor external diameter, d
4Be waveguide one coaxial switching mechanism (1) conversion back coaxial outer conductor internal diameter, δ is coaxial switching mechanism (a 1) transition section length, d
7Be the external diameter of radiation open circuit coaxial cavity (4), d
8Be the internal diameter of radiation open circuit coaxial cavity (4), l
1For the chamber of radiation open circuit coaxial cavity (4) long, d
9Be the external diameter of coaxial open circuit resonant cavity (3), d
10Be the internal diameter of coaxial open circuit resonant cavity (3), l
2Be the length of coaxial open circuit resonant cavity (3) inner wire, l
2+ l
3For the chamber of coaxial open circuit resonant cavity (3) long, d
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
For operating frequency is the microwave of 915MHZ, and the size of excitation apparatus is as follows: d
1=10～108mm, d
2=23～250mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～50mm, d
7=7～107mm, d
8=3～47mm, d
9=23～250mm, d
10=10～108mm, l
1=80～200mm, l
2=80～200mm, l
3=80～250mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.
For operating frequency is the microwave of 314MHZ, and the size of excitation apparatus is as follows: d
1=10～130mm, d
2=23～300mm considers the d that gets usually easy to make of hermetyic window
3=6～20mm, d
4=13～46mm, δ=10～80mm, d
7=7～128mm, d
8=3～127mm, d
9=23～300mm, d
10=10～130mm, l
1=140～600mm, l
2=240～450mm, l
3=240～500mm, d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm.
Other are as embodiment 1, d when hermetyic window is boron nitride
5=4～20mm, d
6=21～106mm.
Other are as embodiment 1, d when hermetyic window is quartzy
5=4～20mm, d
6=17～89mm.
Embodiment 6
Other are as embodiment 1, d when hermetyic window is aluminium oxide
5=4～20mm, d
6=47～236mm.
Claims (17)
1, a kind of high-pressure microwave plasma exciter is characterized in that: this microwave plasma exciter is made up of by the coaxial open circuit resonant cavity (3) and the radiation open circuit coaxial cavity (4) of section waveguide-coaxial switching mechanism (1), wave-permeating gas hermetyic window (2), band; The outer conductor of waveguide-coaxial switching mechanism (1) coaxial line links to each other with the outer conductor of coaxial open circuit resonant cavity (3) by wave-permeating gas hermetyic window (2), the inner wire of waveguide-coaxial switching mechanism (1) coaxial line is coupled microwave energy to coaxial open circuit resonant cavity (3) through electric capacity (5) by wave-permeating gas hermetyic window (2), the coaxial inside that is installed in coaxial open circuit resonant cavity (3) of radiation open circuit coaxial cavity (4).
2, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: wave-permeating gas hermetyic window (2) is the annulus of a saturating ripple, is embedded between waveguide-coaxial switching mechanism (1) coaxial line internal and external conductor.
3, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: described electric capacity (5) is capacitance sheet or the electric capacity circle that centers on coaxial open circuit resonant cavity (3) inner wire.
4, by the described high-pressure microwave plasma exciter of claim 2, it is characterized in that: the inner wire of described coaxial open circuit resonant cavity (3), coaxial open circuit resonant cavity (3) all are adjustable by short-circuit plunger, the inner wire of radiation open circuit coaxial cavity (4), the radiation open circuit coaxial cavity (4) of end by the short-circuit plunger of end.
5, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: the inner wire of described waveguide-coaxial switching mechanism (1) coaxial line is a water-cooling structure.
6, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: the material of described wave-permeating gas hermetyic window (2) is selected from a kind of of polytetrafluoroethylene, nylon, quartz, boron nitride or high purity aluminium oxide.
7, by the described high-pressure microwave plasma exciter of claim 1, it is characterized in that: described waveguide-coaxial switching mechanism (1) coaxial line is through twice or repeatedly changeover portion conversion.
8, by the described high-pressure microwave plasma exciter of claim 4, it is characterized in that for operating frequency being the microwave of 2450MHZ, the size of excitation apparatus is as follows: d
1=10～43mm, d
2=23～100mm, d
3=6～20mm, d
4=13～46mm δ=10～30mm, d
7=4～39mm, d
8=2～17mm, d
9=10～90mm d
10=5～40mm, l
1=30.6～150mm, l
2=30.6～150mm, l
3=40～80mm; D wherein
1Be waveguide-former coaxial inner conductor external diameter of coaxial switching mechanism (1), d
2Be waveguide-former coaxial outer conductor internal diameter of coaxial switching mechanism (1), d
3Be waveguide-coaxial switching mechanism (1) conversion back coaxial inner conductor external diameter, d
4Be waveguide-coaxial switching mechanism (1) conversion back coaxial outer conductor internal diameter, δ is coaxial switching mechanism (a 1) transition section length, d
7Be the external diameter of radiation open circuit coaxial cavity (4), d
8Be the internal diameter of radiation open circuit coaxial cavity (4), l
1For the chamber of radiation open circuit coaxial cavity (4) long, d
9Be the external diameter of coaxial open circuit resonant cavity (3), d
10Be the internal diameter of coaxial open circuit resonant cavity (3), l
2Be the length of coaxial open circuit resonant cavity (3) inner wire, l
3For ending segment length, l
2+ l
3For the chamber of coaxial open circuit resonant cavity (3) long.
9, the described high-pressure microwave plasma exciter of claim 8 is characterized in that: d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
10, by the described high-pressure microwave plasma exciter of claim 8, it is characterized in that: d when hermetyic window is boron nitride
5=4～20mm, d
6=21～106mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
11, by the described high-pressure microwave plasma exciter of claim 8, it is characterized in that: d when hermetyic window is quartz
5=4～20mm, d
6=17～89mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
12, by the described high-pressure microwave plasma exciter of claim 8, it is characterized in that: d when hermetyic window is aluminium oxide
5=4～20mm, d
6=47～236mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
13, by the described high-pressure microwave plasma exciter of claim 4, it is characterized in that for operating frequency being the microwave of 915MHZ, the size of excitation apparatus is as follows: d
1=10～108mm, d
2=23～250mm, d
3=6～20mm, d
4=13～46mm, δ=10～50mm, d
7=7～107mm, d
8=3～47mm, d
9=23～250mm, d
10=10～108mm, l
1=80～200mm, l
2=80～200mm, l
3=80～250mm; D wherein
1Be waveguide-former coaxial inner conductor external diameter of coaxial switching mechanism (1), d
2Be waveguide-former coaxial outer conductor internal diameter of coaxial switching mechanism (1), d
3Be waveguide-coaxial switching mechanism (1) conversion back coaxial inner conductor external diameter, d
4Be waveguide-coaxial switching mechanism (1) conversion back coaxial outer conductor internal diameter, δ is coaxial switching mechanism (a 1) transition section length, d
7Be the external diameter of radiation open circuit coaxial cavity (4), d
8Be the internal diameter of radiation open circuit coaxial cavity (4), l
1For the chamber of radiation open circuit coaxial cavity (4) long, d
9Be the external diameter of coaxial open circuit resonant cavity (3), d
10Be the internal diameter of coaxial open circuit resonant cavity (3), l
2Be the length of coaxial open circuit resonant cavity (3) inner wire, l
3For ending segment length, l
2+ l
3For the chamber of coaxial open circuit resonant cavity (3) long.
14, by the described high-pressure microwave plasma exciter of claim 13, it is characterized in that: d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
15, by the described high-pressure microwave plasma exciter of claim 14, it is characterized in that for operating frequency being the microwave of 314MHZ, the size of excitation apparatus is as follows: d
1=10～130mm, d
2=23～300mm, d
3=6～20mm, d
4=13～46mm, δ=10～80mm, d
7=7～128mm, d
8=3～127mm, d
9=23～300mm, d
10=10～130mm, l
3=140～600mm, l
2=240～450mm, l
3=240～500mm; D wherein
1Be waveguide-former coaxial inner conductor external diameter of coaxial switching mechanism (1), d
2Be waveguide-former coaxial outer conductor internal diameter of coaxial switching mechanism (1), d
3Be waveguide-coaxial switching mechanism (1) conversion back coaxial inner conductor external diameter, d
4Be waveguide-coaxial switching mechanism (1) conversion back coaxial outer conductor internal diameter, δ is coaxial switching mechanism (a 1) transition section length, d
7Be the external diameter of radiation open circuit coaxial cavity (4), d
8Be the internal diameter of radiation open circuit coaxial cavity (4), l
1For the chamber of radiation open circuit coaxial cavity (4) long, d
9Be the external diameter of coaxial open circuit resonant cavity (3), d
10Be the internal diameter of coaxial open circuit resonant cavity (3), l
2Be the length of coaxial open circuit resonant cavity (3) inner wire, l
3For ending segment length, l
2+ l
3For the chamber of coaxial open circuit resonant cavity (3) long.
16, by the described high-pressure microwave plasma exciter of claim 15, it is characterized in that: d when hermetyic window is polytetrafluoroethylene
5=4～20mm, d
6=14～67mm; D wherein
5Be the internal diameter of wave-permeating gas hermetyic window (2), d
6The external diameter of wave-permeating gas hermetyic window (2).
17, the described high-pressure microwave plasma exciter of claim 1 is used for chemical synthesis, the surface modification of material and processing, the gas ions propeller of novel plasma light source and spacecraft.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB001104225A CN1170461C (en) | 2000-05-17 | 2000-05-17 | High-pressure microwave plasma exciter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB001104225A CN1170461C (en) | 2000-05-17 | 2000-05-17 | High-pressure microwave plasma exciter |
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|---|---|
| CN1324207A CN1324207A (en) | 2001-11-28 |
| CN1170461C true CN1170461C (en) | 2004-10-06 |
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| CN106432779A (en) * | 2016-11-30 | 2017-02-22 | 深圳优普莱等离子体技术有限公司 | Microwave plasma powder processing device |
| CN107331929A (en) * | 2017-08-09 | 2017-11-07 | 上海至纯洁净***科技股份有限公司 | A kind of microwave plasma system and its waveguide coaxial converter |
| CN109727835B (en) * | 2018-12-29 | 2021-06-29 | 中国电子科技集团公司第十二研究所 | Inner conductor for coaxial energy transmission window, coaxial energy transmission window and traveling wave tube |
| CN110159933B (en) * | 2019-05-29 | 2020-05-01 | 中国水利水电科学研究院 | Controllable constant-voltage low-strength transient current excitation device and method |
| CN111706482A (en) * | 2020-06-28 | 2020-09-25 | 哈尔滨工业大学 | Ion wind thrust device cooperated with microwave |
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