CN101864553B - Integrated manufacturing method of microminiature parts based on surface coating - Google Patents
Integrated manufacturing method of microminiature parts based on surface coating Download PDFInfo
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- CN101864553B CN101864553B CN 201010178409 CN201010178409A CN101864553B CN 101864553 B CN101864553 B CN 101864553B CN 201010178409 CN201010178409 CN 201010178409 CN 201010178409 A CN201010178409 A CN 201010178409A CN 101864553 B CN101864553 B CN 101864553B
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Abstract
The invention relates to an integrated manufacturing method of microminiature parts based on surface coating. The technology integrates multiple technologies such as precision machining/ultraprecision machining, surface coating, precision measurement and the like, adopts the parts precision machining mode of firstly '-'(removing machining) and then '+' (combination machining), and compensates the sizes of parts through accurately controlling the thickness of a coating (plating) layer on the basis of precision measurement, thus improving machining precision and surface quality considering that the thickness of the coating layer can be precisely controlled to be in the nanometer level. The precision/ultraprecision machining technologies have wide range of machining materials and simple method, and can realize mass production of microminiature parts with three-dimensional complex structures; and the method of the invention be widely applied to the machining of various microminiature parts such as steel, alloy and the like.
Description
Technical field
The present invention relates to a kind of micro part manufacture method, particularly a kind of micro part integrated manufacturing method based on surface-coated.
Background technology
Development along with aerospace, national defense industry, precision instrument, medical science and biotechnology, the micro part manufacturing technology is as the important development direction of advanced manufacturing technology, more and more receive various countries scholar's concern, meanwhile, micro part is because its volume is little, lightweight, little, the advantage such as inertia is low that consumes energy is used and is also become more and more extensive.
Now, the micro part manufacturing mainly contains two kinds of methods.A kind of is comparatively ripe microelectronics take the little technique of silicon and LIGA technology as representative, i.e. MEMS technology, and another kind of method mainly is the manufacturing technology that is processed as background with traditional precision optical machinery, such as turning, milling, drilling, polishing etc.The Yu Huadong of Changchun University of Science and Technology professor is at Changchun University of Science and Technology's journal 2008 (3): that delivers among the 1-8. is entitled as " ultraprecise micro-machining progress " article, and above-mentioned two kinds of micro part manufacture method have been done more detailed contrast.Point out in the literary composition: the microelectronics take the little technique of silicon and LIGA technology as representative, i.e. MEMS technology, the main based semiconductor complete processing of this processing technology take silicon as main work material, can realize the batch production of part.But problems such as this working method ubiquity work material is single, and the said three-dimensional body working ability is relatively poor only can fairly simple two dimension or the accurate three-dimensional micromechanical parts of processing structure; Another kind of be processed as the manufacturing technology of background with traditional precision optical machinery, the work material scope of this processing technology is wide, and 3 d part that can batch machining complex construction shape.But because the impact of the factors such as process principle, lathe, cutter and clamping, the working accuracy of this method is lower, because the part to be processed characteristic dimension is especially little, causes complete processing very complicated simultaneously, realizes that the reliability of processing is relatively poor.Therefore also be difficult to widespread use.
Summary of the invention
The purpose of this invention is to provide and a kind ofly have the working accuracy height, but batch machining complex construction Shape Parts, and can break away from the micro part integrated manufacturing method based on surface-coated to the work material restriction.
The objective of the invention is by the following method, step realizes:
1) according to design requirements all micro parts/structures to be processed is carried out complete processing and dimension chain analysis, and according to economic accuracy of machining, amplify the manufacturing tolerance of part in the microsystem or the basic size of adjustment structure, determine the mechanical workout process dimension.
2) according to the determined mechanical workout process dimension of previous step micro-structure/part is carried out precision sizing, make micro-structure/part be processed into the waste product of traditional unrepairable;
3) micro-structure/part work surface after the processing is carried out precision measurement, and according to the coated compensate amount of relatively determining of final design size;
4) micro-structure/part is carried out ultrasonic cleaning;
5) select suitable deposition method, coated material and processing parameter, according to step 3) in measuring result the part work surface is adopted surface-coated, carry out dimension compensation, and carry out on-line measurement coating thickness is carried out Real-Time Monitoring, accurately control coating or thickness of coating, reach dimensional precision and the surface quality of design requirements.
Aforesaid method 5) in, the suitable deposition method of indication can be physical gas-phase deposite method or chemical gaseous phase depositing process or molecular beam epitaxy technique method; The material of described coating can be selected nitride or oxide compound or nitrogen carbon compound or quasi-diamond.
In general structure/part, the multiplex surface quality of improving part of coating or coating improves barrier propterty and mechanical property, increase attractive in appearance, and can not make a significant impact the dimensional precision of structure/part, but in micro-structure/part, coating or thickness of coating are with the change structure size and dimension.At present, precision processing technology and surface coating technique are relatively ripe, the precision of precision processing technology generally can reach micron order, and surface coating technique can accurately be controlled at nano level, between this point, surface coating technique can carry out dimension compensation for precision processing technology, the more important thing is, can according to the economic accuracy of machining principle, suitably amplify part tolerance, reduce difficulty of processing, Cost reduction.These two kinds of technology of integrated use provide possibility for the integrated innovation of the nano-precision manufacturing technology of micro part.
The present invention has adopted a kind of brand-new machining based conception, on the basis of theory of dimensional chain, amplifies the manufacturing tolerance of part in the precision sizing operation or the basic size of adjustment structure according to economic accuracy of machining, determines the mechanical processing technique size.Adopt the process redundancy between precision/ultraprecise processing removing step, make first part become " waste product of unrepairable ", the mode by surface-coated again, by the thickness of controlling accurate coating or coating accessory size is compensated, for " waste product " adds material, realize removing the combination of processing and combination processing dual mode, with the final precision of part by depending on originally that mechanical workout changed the thickness (tolerance) that depends on coating into, finally reach the manufacturing accuracy of micro parts, simultaneously also improve surface quality, had the effect of " double gain ".The advantage of the multinomial technology such as precision sizing, surface-coated and precision measurement that the present invention is integrated is the novel method of a kind of 3 D complex structural shape precision component minute manufacturing, has opened up the new way of an economical rationality.
The present invention compared with prior art its remarkable advantage is: (1) integrated use precision/Ultraprecision Machining, Technology of Precision Measurement and surface coating technique, by the gauge control that the piece surface precision is coated with (plating) layer accessory size is compensated, realized the precision sizing to 3 D complex structural shape micro parts; (2) by on-line measurement, the adjusting process parameter, coat thickness can accurately be controlled at nano level, has guaranteed higher working accuracy; (3) the present invention carries out the surface-coated processing to workpiece, can give piece surface new material property, improve surface quality, improve material and resist the ability of environmental activity, be mainly manifested in: improved corrosion-resistant, the resistance to high temperature oxidation, wear resistant friction reducing of material and goods thereof, lubricated and anti-fatigue performance etc., thereby prolong its work-ing life, also can beautify its outward appearance simultaneously; (4) precision/Ultraprecision Machining work material scope is wide, and method is simple, can realize mass production, can be widely used in the processing of the multiple micro parts such as steel, alloy.
Description of drawings
Accompanying drawing is the process flow diagram of the micro part integrated manufacturing method based on surface-coated of the present invention.
Embodiment
Below in conjunction with accompanying drawing, take work material as the 45# steel, the processing diameter is that the axial workpiece outside surface of 10mm is example, and requires to obtain certain intensity and wear resistance, and the present invention is described in further detail.
1) this axial workpiece outer round surface is carried out processing analysis, it is the 15mm round bar that blank is selected diameter, determine to adopt rough turn, half finish turning, grinding process, process redundancy is respectively 3mm, 1.5mm 0.6mm makes quality of tolerance reach IT7, according to economic accuracy of machining, can amplify the manufacturing tolerance 3-5 μ m of part.
2) complete processing of determining according to back is carried out rough turn to it, ground finish is carried out in finish turning processing again, makes part become the waste product of unrepairable.
3) adopt the cylindrical fine measuring instrument that the workpiece outside dimension is measured, and divide into groups, determine respectively respectively to organize required coated compensate amount, between 0-10 μ m, do not wait.
4) workpiece to be processed is carried out ultrasonic cleaning, its cleaning process is: the alkali lye degreasing with certain proportioning is deoiled, dense water spray, and pure water is removed polybase liquid, the pure water rinsing, air gun dries up, and adopts dewatering agent to slough pure water, oven dry.
5) surface coating process (genus physical gas-phase deposite method) of employing magnetron sputtering, with the mode depositing TiN thin film of reaction magnetocontrol sputtering, sputtering target employing purity is 99.9% plane Ti target.The workpiece to be processed clamping is put into coating equipment in batches on swinging strut, extracting vacuum passes into a certain proportion of N2 and Ar gas, selects suitable processing parameter, sputtering current for example, and sputtering voltage, pulsed bias, vacuum tightness etc. apply processing.Take the On-line Measuring Method Real Time Monitoring to be coated with (plating) layer thickness, according to measuring result, carry out dimension compensation, when reaching design requirements, stop to apply processing, take out workpiece.
6) finish part processing.
With respect to existing working method, this micro part integrated manufacturing method based on surface-coated has been realized the precision sizing to 3 D complex structural shape micro parts, make working accuracy and surface quality obtain synchronous raising, opened up the new way of a micro part minute manufacturing.
Claims (1)
1. micro part integrated manufacturing method based on surface-coated is characterized in that it is that step realizes by the following method:
1) according to design requirements all micro parts/structures to be processed is carried out complete processing and dimension chain analysis, and according to economic accuracy of machining, amplify the manufacturing tolerance of part in the microsystem or the basic size of adjustment structure, determine the mechanical workout process dimension.
2) according to the determined mechanical workout process dimension of previous step micro-structure/part is carried out precision sizing, make micro-structure/part be processed into the waste product of traditional unrepairable;
3) micro-structure/part work surface after the processing is carried out precision measurement, and according to the comparison of final design size, determine the coated compensate amount;
4) micro-structure/part is carried out ultrasonic cleaning;
5) select suitable deposition method, coated material and processing parameter, according to step 3) in measuring result the part work surface is adopted surface-coated, carry out dimension compensation, and carry out on-line measurement coating thickness is carried out Real-Time Monitoring, accurately control coating or thickness of coating, reach dimensional precision and the surface quality of design requirements;
Wherein above-mentioned steps 5) in, described suitable deposition method refers to physical gas-phase deposite method or chemical gaseous phase depositing process or molecular beam epitaxy technique method;
Above-mentioned steps 5) in, the material of described coating is nitride or oxide compound or nitrogen carbon compound or quasi-diamond.
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| CN 201010178409 CN101864553B (en) | 2010-05-21 | 2010-05-21 | Integrated manufacturing method of microminiature parts based on surface coating |
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| CN 201010178409 CN101864553B (en) | 2010-05-21 | 2010-05-21 | Integrated manufacturing method of microminiature parts based on surface coating |
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| CN101864553B true CN101864553B (en) | 2013-01-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103182626A (en) * | 2011-12-28 | 2013-07-03 | 中国航空工业集团公司第六三一研究所 | Machining detection process for part |
| CN103551813B (en) * | 2013-11-11 | 2015-10-21 | 中国南方航空工业(集团)有限公司 | A kind of processing method of annular outer cover inner ring surface plasma spraying profile |
| CN108505017A (en) * | 2018-05-11 | 2018-09-07 | 中国电子科技集团公司第十六研究所 | A kind of DLC film layer preparation method accurately controlling DLC film layer thickness |
| CN110363490A (en) * | 2019-06-05 | 2019-10-22 | 东莞新吉凯氏测量技术有限公司 | A kind of cloud Synergistic method of the workpiece with assembly relation |
| CN113304940B (en) * | 2021-07-30 | 2021-10-12 | 常州威远电工器材有限公司 | Online detection system for thickness of enameled wire surface paint film |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104262A (en) * | 1993-09-17 | 1995-06-28 | 凡利安同仁股份有限公司 | Method for controlling a collimated sputtering source |
| CN1779923A (en) * | 2005-09-23 | 2006-05-31 | 中国科学院上海技术物理研究所 | Production of thin-film ferroelectric materials with lead zirconate-titanate with reading circuit integration |
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| JPH03229456A (en) * | 1990-02-05 | 1991-10-11 | Rohm Co Ltd | Manufacture of semiconductor device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104262A (en) * | 1993-09-17 | 1995-06-28 | 凡利安同仁股份有限公司 | Method for controlling a collimated sputtering source |
| CN1779923A (en) * | 2005-09-23 | 2006-05-31 | 中国科学院上海技术物理研究所 | Production of thin-film ferroelectric materials with lead zirconate-titanate with reading circuit integration |
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| JP特开平3-229456A 1991.10.11 |
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