CN101782368A - Interferometer - Google Patents

Interferometer Download PDF

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Publication number
CN101782368A
CN101782368A CN 201010120891 CN201010120891A CN101782368A CN 101782368 A CN101782368 A CN 101782368A CN 201010120891 CN201010120891 CN 201010120891 CN 201010120891 A CN201010120891 A CN 201010120891A CN 101782368 A CN101782368 A CN 101782368A
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beam splitter
corner cube
cube mirror
parallel
optical
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蔡宏铭
徐云兵
陈斯杰
林斌
凌吉武
潘忠灵
莫霜
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Photop Technologies Inc
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Photop Technologies Inc
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Abstract

The invention relates to the optical communication field, in particular relating to a demodulator and a detector used for optical phase signal detection. An interferometer provided by the invention comprises an optical beam splitter, a right-angle reflecting mirror and a piece of plate glass, wherein the optical beam splitter is used for splitting an incident optical beam into two parallel beams to output and consists of a rhombus prism member and a right-angle prism member, and the two members are bonded to each other and form a spectro-film with the ratio of transmission to reflection being 50:50; the right-angle reflecting mirror is used for retracing the above two parallel optical beams to the optical beam splitter in a parallel manner and generating interference after reflecting by two right-angled reflectors thereof; and the plate glass is arranged between the optical beam splitter and the right-angled reflectors, and the optical beam splitter and the right-angled reflectors are connected into a whole by two parallel side surfaces at the two sides of the plate glass. In the retracing process of the two sub optical beams split by the optical beam splitter, an optical path difference (OPD) which is calculated by multiplying duple thicknesses of the rhombus prism by the material refractive index of the rhombus prism exists, which is unrelated to the distances between the right-angled reflectors and the optical beam splitter.

Description

A kind of interferometer
Technical field
The present invention relates to the optical communication field, especially relate to and be used for detuner, the detector that optical phase signal is surveyed.
Background technology
Phase-shift keying (PSK) (PSK) modulation technique and coherent detection technology can effectively reduce chromatic dispersion in the hypervelocity optical transfer network and the PMD influence to signal, but existing any photo-detector is the direct phase information of response light all, the phase signal that is loaded must be converted to strength signal, the mode that adopts light intensity to survey is then carried out demodulation.For phase signal is converted to strength signal, existing a kind of disclosed ultimate principle is exactly that the light beam of same frequency is interfered, because the light intensity I of interference wave and the two light beam phase differential that participate in interfering
Figure GSA00000027785500011
Available formula
Figure GSA00000027785500012
Expression, wherein I 1, I 2Be the peak light intensity of two light beams, be given value, therefore can directly calculate the light intensity signal that detects is conversed phase signal by formula.
In order to obtain above-mentioned two coherent lights, a kind of mode is the local carrier (reference light) of introducing and input signal light same frequency, but, therefore interfere the light intensity minimax value of back, back gained also to put upside down (being that digital signaling zero after the demodulation, 1 is put upside down) easily because the carrier phase of local carrier is likely inaccurate.Another kind of mode then is to adopt differential phase keying (DPSK) (DPSK) modulation technique, is promptly changed by the carrier wave relative phase of the adjacent code element in front and back of flashlight and represents numerical information.For example in Binary Differential Phase Shift Keying (2DPSK) modulation technique, poor with the front and back symbol phases The time represent numerical information " 0 ", The time represent numerical information " 1 ".Like this, if the flashlight of input is separated into 50: 50 two bundle subsignal light of beam intensity ratio, then with bit of one of them subsignal light delay (i.e. code element), allow two subsignal light interfere again, thereby obtain the interference wave of light intensity and front and back symbol phases difference correlation, receive and the electric signal processing through optical power detector, can demodulate required numerical information.
In the optical communication field, interferometer commonly used has 2 big classes, one class is representative with Michelson (Michelson) interferometer (as shown in Figure 1), Mach-Zehnder (Mach-Zehnder) interferometer, mainly adopts optical prisms such as beam splitter and catoptron to realize the function of beam separation, phase delay (optical path difference by different light paths that two-beam the passes through generation that separates causes), interference; The another kind of interferometer that is based on coupling mechanism/waveguide, ultimate principle is identical with the first kind, just adopting splitting ratio is that 50: 50 coupling mechanism/waveguide replaces beam splitter to realize the function of beam split, interference, and its phase delay mainly realizes by two output terminal fibers/waveguides of coupling mechanism/waveguide arm lengths difference.
Disclosed China Patent No. is to propose a kind of new structure based on Michelson (Michelson) interferometer in 200680009541.4 the technical scheme, as shown in Figure 2, has solved the temperature stability problem of interfering the arm lengths difference effectively.But because the optical element that light beam passed through that separates not is same, interelement processing dimension error will make optical path length preserve consistent designing requirement and become difficult, thereby be forced to improve the requirement on machining accuracy of optical element.For example glass planar sheets among the figure 14 and glass planar sheets 22, according to designing requirement is to wish to have identical thickness (in other words very little thickness difference), realize that two different plain films arrive this requirement, the thickness deviation of glass planar sheets must be set to corresponding requirement, also strengthen the difficulty of actual production thus.
Summary of the invention
At the deficiency of public technology scheme, the present invention proposes a kind of novel enforcement structure based on the Mach-Zehnder interferometer, guaranteeing to interfere under the temperature stability of arm lengths poor (being phase differential), reduction is to the difficulty of processing of optical element, used for reference the advantage of Michelson interferometer simultaneously, utilize a beam splitter to realize beam split and two kinds of functions of interference simultaneously, reduce optical element quantity.
Technical scheme of the present invention is:
Interferometer of the present invention comprises:
One beam splitter is used for incident beam is separated into two parallel beam outputs;
One corner cube mirror is used for going back to beam splitter abreast with after two right angle reflecting surface reflections of above-mentioned two parallel beams through corner cube mirror;
One retaining element places between beam splitter and the corner cube mirror, and the side by the retaining element both sides are parallel to each other is connected described beam splitter as a whole with corner cube mirror.
Further, beam splitter is made up of rhombic prism parts and right-angle prism parts.The corner angle of rhombic prism parts are 45 degree, the inclined-plane of one side and right-angle prism bonding, and to form inverse ratio be 50: 50 spectro-film, the another side of rhombic prism is concordant with the edged surface always of right-angle prism, same being in the plane.The cross section of corner cube mirror (at right angles triangle) is vertical mutually with the plane of above-mentioned two parallel beams formation, thereby makes the light beam that returns and the incident beam side-play amount on having living space.Retaining element is a sheet glass, places between beam splitter and the corner cube mirror, and the side by the sheet glass both sides are parallel to each other is connected beam splitter as a whole with corner cube mirror.
Significantly, two bundle directional lights of the above-mentioned beam splitter that turns back will be to be divided into the output of two beam interferometer light after 50: 50 spectro-film place interferes at saturating inverse ratio.Because the effect of rhombic prism parts in the beam splitter, there is one in the two light beams of separating and is equal to the optical path difference that 2 times of rhombic prism thickness are multiplied by rhombic prism material refractive index in the stroke of turning back.For example when the DPSK demodulator design, the inverse (i.e. the mistiming of front and back bit) of the bit rate that equals required restituted signal light is set in the time-delay (being that optical path difference multiply by the light velocity) that this optical path difference is caused, and can realize that optical phase information arrives the conversion of intensity signal.
Further, the rhombic prism parts of described beam splitter are removable to be divided into two right-angle prisms, and the edged surface always of two right-angle prisms bonds mutually.
Perhaps further, the right-angle prism parts of described beam splitter can be changed to another rhombic prism parts, combine with previous rhombic prism parts bonding, and to form inverse ratio are 50: 50 spectro-film.Light beam after interfering is exported in the another side transmission after total reflection takes place in a side of these rhombic prism parts.Export light and incident light this moment in beam splitter the same side, and be parallel to each other.
Further, described retaining element also can be substrate, places between beam splitter and the corner cube mirror, and the side by the sheet glass both sides are parallel to each other is connected beam splitter as a whole with corner cube mirror.
Further, described corner cube mirror is interchangeable makes the optics that reflection function is arranged that plane mirror etc. is made of one or more optical elements, this moment, two light beams after reflection still were parallel to each other, but there is certain drift angle with two light beams of incident, interferes so that reflection luminous energy incides on the spectro-film of beam splitter once more.
Further, described inverse ratio is that 50: 50 spectro-film can change and is plated to the polarization beam splitter relevant with polarization.
Further,, can on the beam channel between beam splitter and the corner cube mirror, introduce the plain film of negative expansion coefficient material, with the temperature drift of compensation optical path difference in order to reduce the minor shifts of described optical path difference under different temperatures.
Further, for described optical path difference being carried out dynamic adjustments among a small circle, can be on the beam channel between beam splitter and the corner cube mirror, introducing is based on the adjustable phase retardation plate/device of effects such as thermo-optic effect, electrooptical effect, electrostriction, with the phase adjusted (also being that light path is regulated) that realizes light beam, the perhaps all kinds of optical elements of other change optical characteristics.
The design core of interferometer of the present invention is: incident beam is separated into the parallel beamlet of two bundles after being with the beam splitter that turns to function, behind the air-gap of beamlet through a determining deviation, reflect on the optical element/assembly of band reflection function, two bundle beamlets of reflection remain parallel to each other ground Returning beam beam splitter and interfere and export at the spectro-film place; The optical path difference of two beamlets is to be determined by the thickness of the rhombic prism parts of beam splitter, with the location independent of catoptrics part.
Description of drawings
Fig. 1 Michelson interferometer schematic diagram;
Fig. 2 is an embodiment of publication;
The vertical view of Fig. 3 A first embodiment of the present invention;
The side view of Fig. 3 B first embodiment of the present invention;
The synoptic diagram of second kind of pattern of Fig. 4 A beam splitter of the present invention;
The synoptic diagram of the third pattern of Fig. 4 B beam splitter of the present invention;
The vertical view of Fig. 5 A second embodiment of the present invention;
The side view of Fig. 5 B second embodiment of the present invention;
The synoptic diagram of second kind of pattern of Fig. 6 A catoptron of the present invention;
The synoptic diagram of the third pattern of Fig. 6 B catoptron of the present invention;
The vertical view of Fig. 7 the 3rd embodiment of the present invention.
Embodiment
Now the present invention is further described with embodiment in conjunction with the accompanying drawings.
First embodiment of the present invention shown in Fig. 3 A, Fig. 3 B, wherein, the vertical view of Fig. 3 A first embodiment of the present invention, Fig. 3 B are its side views.It is made of beam splitter 1, corner cube mirror 2 and sheet glass 3.Wherein beam splitter 1 again by rhombic prism 10 and directly prism 11 forms, it is 50: 50 spectro-film that rhombic prism 10 and directly prism 11 is as a whole by the cementing agent bonding, its adhesive surface plate inverse ratio, formation light splitting surface 13.Beam splitter 1 and directly prism 2 is fixing with the side bonding that the both sides of sheet glass 3 are parallel to each other respectively forms an integral body.When the flashlight 50 of incident impinges perpendicularly in the beam splitter 1, can be separated into beamlet 501 and 502 at light splitting surface 13 places, beamlet 502 directly sees through right-angle prism 11, beamlet 501 sees through rhombic prism 10 after on the side 101 of rhombic prism 10 total reflection taking place, export in the same side with beamlet 502, and two light beams are parallel to each other.Two light beams are jointly through inciding in the corner cube mirror 2 behind one section air-gap then, and reflect on two right angle reflectings surface of corner cube mirror 2.For the ease of diagram and description, the reflected light called after reflected light 503,504 of beamlet 501,502, beamlet 501 is with a branch of light with reflected light 503 in fact, and light beam beamlet 502 is with a branch of light with reflected light 504.Because beamlet the 501, the 502nd impinges perpendicularly on the corner cube mirror 2, therefore in vertical view 3A, reflected light 503 overlaps with beamlet 501, reflected light 504 overlaps with beamlet 502, and all with on the reverse spectro-film 13 that incides beam splitter, and produce to interfere and form interference light 505 and 506 and export.If the light path of light beam 501,502,503,504 is respectively OPL1, OPL2, OPL3, OPL4, and the material refractive index of rhombic prism 10 and right-angle prism 11 is all N, then incident light 50 converges once more and interferes from being separated to, the optical path difference of two coherent lights is (OPL1+OPL3)-(OPL2+OPL4)=2L*N, be that optical path difference is only relevant with the thickness L and the material refractive index N of rhombic prism, with the range-independence of corner cube mirror and beam splitter, thereby can effectively reduce assembly precision requirement between optical element.
Shown in Fig. 4 A and Fig. 4 B two kinds of patterns of beam splitter in the first embodiment of the invention.Among Fig. 4 A, original rhombic prism is divided into two right- angle prisms 10,12, right-angle prism 10 and right-angle prism 12 are by the edged surface bonding is as a whole separately always.Among Fig. 4 B original right-angle prism is expanded to rhombic prism 11, with respect to former right-angle prism, its effect is that the interference light 506 of outgoing is turned to, and makes its output at input light 50 homonymies.The beam splitter that is made of two rhombic prisms 10,11 is seen the batch machining production of being more convenient for from the angle of optics processing in addition.
Shown in Fig. 5 A and Fig. 5 B is second embodiment of the invention.Wherein, the vertical view of Fig. 5 A second embodiment of the present invention, Fig. 5 B are its side views.Be to introduce the original sheet glass of substrate 3 replacements with the difference of first embodiment.Beam splitter 1 is connected as a whole by the bottom surface with the mode of substrate 3 bondings with corner cube mirror 2.Illustrate that thus the fit between beam splitter and the corner cube mirror can have nothing in common with each other, the cross section (at right angles triangle) that is primarily characterized in that corner cube mirror 2 is with vertical mutually through the plane of beam splitter 1 isolated two parallel beams formation, thereby makes the light beam that returns and incident beam a side-play amount be arranged on having living space.
Shown in Fig. 6 A and Fig. 6 B be catoptron of the present invention two kinds of patterns.Wherein the catoptron shown in Fig. 6 A 2 is made of corner cube mirror 21,22 and sheet glass 23 bondings; Fig. 6 B then adopts plane mirror 2 to replace original corner cube mirror, and this moment, requiring incident light was that the band certain angle incides on the plane mirror in order to realize that incident light spatially separates to some extent with emergent light.Explanation thus, catoptron of the present invention can be a corner cube mirror, it can also be the optics that reflection function is arranged that constitutes by one or more optical elements, be primarily characterized in that when inciding on the optics and can reflect through beam splitter 1 isolated two parallel beams, its reflected light is also keeping the relation that is parallel to each other, to interfere on the light splitting surface that makes it to incide once more beam splitter.
Shown in Figure 7 is the vertical view of third embodiment of the invention.Because the path of advancing through two bundle beamlets of beam splitter 1 separation is inequality, therefore under different temperatures, described optical path difference has small difference, therefore necessity is to introduce the plain film 5 of negative expansion coefficient material on the beam channel between beam splitter 1 and the corner cube mirror 2, with the temperature drift of compensation optical path difference.Further, for described optical path difference being carried out dynamic adjustments among a small circle, can be on the beam channel between beam splitter 1 and the corner cube mirror 2, introducing is based on the adjustable phase retardation plate/device 4 of effects such as thermo-optic effect, electrooptical effect, electrostriction, with the phase adjusted (also being that light path is regulated) that realizes light beam.Explanation thus for better application interferometer of the present invention, can be introduced all kinds of optical elements at the air-gap place between beam splitter 2 and the corner cube mirror 2, for example imports optical switch reversing device or the like, gives unnecessary details no longer one by one in this.
Although specifically show and introduced the present invention in conjunction with preferred embodiment; but the those skilled in the art should be understood that; in the spirit and scope of the present invention that do not break away from appended claims and limited; can make various variations to the present invention in the form and details, be protection scope of the present invention.

Claims (12)

1. interferometer comprises:
One beam splitter is used for incident beam is separated into two parallel beam outputs;
One corner cube mirror is used for going back to beam splitter abreast with after two right angle reflecting surface reflections of above-mentioned two parallel beams through corner cube mirror;
One retaining element places between beam splitter and the corner cube mirror, and the side by the retaining element both sides are parallel to each other is connected described beam splitter as a whole with corner cube mirror.
2. interferometer according to claim 1, it is characterized in that: described beam splitter is made up of rhombic prism parts and right-angle prism parts, the corner angle of rhombic prism parts are 45 °, the inclined-plane bonding of one side and right-angle prism, and to form inverse ratio be 50: 50 spectro-film, the another side of rhombic prism is concordant with the edged surface always of right-angle prism, with being in the plane.
3. interferometer according to claim 2 is characterized in that: the rhombic prism parts of described beam splitter are removable to be divided into two right-angle prisms, and being bondd mutually by the right angle face by two right-angle prisms constitutes.
4. interferometer according to claim 2, it is characterized in that: the right-angle prism parts of described beam splitter can be changed to another rhombic prism parts, with previous rhombic prism parts bonding, make the light beam of exporting after total reflection takes place in a side of these rhombic prism parts, export in the another side transmission, export light and incident light this moment in beam splitter the same side, and be parallel to each other.
5. interferometer according to claim 1, it is characterized in that: the cross section of described corner cube mirror (at right angles triangle) is vertical mutually with the plane of described two parallel beams formation, thereby makes the light beam that returns and the incident beam side-play amount on having living space.
6. according to the interferometer of claim 1, it is characterized in that: the optics that reflection function is arranged that the interchangeable work of described corner cube mirror is made of one or more optical elements, two parallel beams that make the process beam splitter separate can reflect when inciding on the optics, its reflected light is also keeping the relation that is parallel to each other, interferes so that reflection luminous energy incides on the spectro-film of beam splitter once more.
7. interferometer according to claim 1, it is characterized in that: described retaining element is a sheet glass, place between beam splitter and the corner cube mirror, the side by the sheet glass both sides are parallel to each other is connected beam splitter as a whole with corner cube mirror.
8. interferometer according to claim 1 is characterized in that: described retaining element is a substrate, places beam splitter and corner cube mirror bottom surface, and described beam splitter and corner cube mirror and substrate bonding is as a whole.
9. interferometer according to claim 2 is characterized in that: described inverse ratio is that 50: 50 spectro-film can change and is plated to the polarization beam splitter relevant with polarization.
10. interferometer according to claim 1 is characterized in that: the plain film that can introduce the negative expansion coefficient material on the beam channel between described beam splitter and the corner cube mirror.
11. interferometer according to claim 1 is characterized in that: can on the beam channel between described beam splitter and the corner cube mirror, introduce adjustable phase retardation plate based on thermo-optic effect or electrooptical effect or electrostrictive effect.
12. interferometer according to claim 1 is characterized in that: can on the beam channel between described beam splitter and the corner cube mirror, introduce the optical element that changes optical characteristics.
CN 201010120891 2010-03-03 2010-03-03 Interferometer Pending CN101782368A (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103576330A (en) * 2012-08-03 2014-02-12 诺方(哈尔滨)科技股份有限公司 Interference assembly and optical comb filter
CN107036527A (en) * 2015-12-23 2017-08-11 陈亮嘉 Optical system and method for synchronously measuring absolute addressing distance and deflection angle
CN109391471A (en) * 2018-10-15 2019-02-26 中国科学技术大学 A kind of hybrid waveguide integrated interferometer and quantum key dispatching system
CN110727058A (en) * 2019-11-11 2020-01-24 中国科学院大学 Turning optical switch control method based on metamaterial resonator and optical switch
CN111678868A (en) * 2020-05-10 2020-09-18 陈绩 Multi-light-path switching device and method and spectrum detection device
CN111928879A (en) * 2020-08-26 2020-11-13 南京英特飞光电技术有限公司 Polarized Mach-Zehnder interference system with output
CN111982267A (en) * 2020-08-12 2020-11-24 重庆邮电大学 Optical fiber sensor for sound wave and vibration measurement and working method thereof
CN112346175A (en) * 2021-01-06 2021-02-09 季华实验室 3dB light wave power beam splitter
CN112462519A (en) * 2020-12-04 2021-03-09 北京枭龙防务科技有限公司 Grating waveguide display device with uniform light emission
US10976151B2 (en) 2018-12-26 2021-04-13 Industrial Technology Research Institute Optical interferometer with reference arm longer than sample arm

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Publication number Priority date Publication date Assignee Title
GB778782A (en) * 1954-10-06 1957-07-10 Ass Elect Ind Improvements in optical apparatus for examining transparent objects by interferometry
EP0239506A2 (en) * 1986-03-28 1987-09-30 Zygo Corporation Differential plane mirror interferometer
US6690513B2 (en) * 2001-07-03 2004-02-10 Jds Uniphase Corporation Rhomb interleaver
CN1854678A (en) * 2005-04-29 2006-11-01 安捷伦科技有限公司 Displacement measure interferometer with low nonlinear error
CN101166946A (en) * 2005-02-23 2008-04-23 奥托莱克斯公司 Michelson interferometer based delay line interferometers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB778782A (en) * 1954-10-06 1957-07-10 Ass Elect Ind Improvements in optical apparatus for examining transparent objects by interferometry
EP0239506A2 (en) * 1986-03-28 1987-09-30 Zygo Corporation Differential plane mirror interferometer
US6690513B2 (en) * 2001-07-03 2004-02-10 Jds Uniphase Corporation Rhomb interleaver
CN101166946A (en) * 2005-02-23 2008-04-23 奥托莱克斯公司 Michelson interferometer based delay line interferometers
CN1854678A (en) * 2005-04-29 2006-11-01 安捷伦科技有限公司 Displacement measure interferometer with low nonlinear error

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103576330A (en) * 2012-08-03 2014-02-12 诺方(哈尔滨)科技股份有限公司 Interference assembly and optical comb filter
CN103576330B (en) * 2012-08-03 2016-08-17 诺方(哈尔滨)科技股份有限公司 Interference component and optical interleaver
CN107036527A (en) * 2015-12-23 2017-08-11 陈亮嘉 Optical system and method for synchronously measuring absolute addressing distance and deflection angle
CN107036527B (en) * 2015-12-23 2019-09-06 陈亮嘉 Optical system and method for synchronously measuring absolute addressing distance and deflection angle
CN109391471A (en) * 2018-10-15 2019-02-26 中国科学技术大学 A kind of hybrid waveguide integrated interferometer and quantum key dispatching system
US10976151B2 (en) 2018-12-26 2021-04-13 Industrial Technology Research Institute Optical interferometer with reference arm longer than sample arm
CN110727058B (en) * 2019-11-11 2020-07-24 中国科学院大学 Turning optical switch control method based on metamaterial resonator and optical switch
CN110727058A (en) * 2019-11-11 2020-01-24 中国科学院大学 Turning optical switch control method based on metamaterial resonator and optical switch
CN111678868A (en) * 2020-05-10 2020-09-18 陈绩 Multi-light-path switching device and method and spectrum detection device
CN111982267A (en) * 2020-08-12 2020-11-24 重庆邮电大学 Optical fiber sensor for sound wave and vibration measurement and working method thereof
CN111928879A (en) * 2020-08-26 2020-11-13 南京英特飞光电技术有限公司 Polarized Mach-Zehnder interference system with output
CN111928879B (en) * 2020-08-26 2021-12-07 南京英特飞光电技术有限公司 Polarized Mach-Zehnder interference system with output
CN112462519A (en) * 2020-12-04 2021-03-09 北京枭龙防务科技有限公司 Grating waveguide display device with uniform light emission
CN112346175A (en) * 2021-01-06 2021-02-09 季华实验室 3dB light wave power beam splitter
CN112346175B (en) * 2021-01-06 2021-04-06 季华实验室 3dB light wave power beam splitter

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