CN112346175B - 3dB light wave power beam splitter - Google Patents
3dB light wave power beam splitter Download PDFInfo
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- CN112346175B CN112346175B CN202110011703.4A CN202110011703A CN112346175B CN 112346175 B CN112346175 B CN 112346175B CN 202110011703 A CN202110011703 A CN 202110011703A CN 112346175 B CN112346175 B CN 112346175B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12154—Power divider
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Abstract
The invention provides a 3dB light wave power beam splitter, which comprises a substrate, a flat light waveguide layer arranged on the substrate and a cladding layer arranged on the surface of the flat light waveguide layer; the flat optical waveguide layer comprises an optical waveguide layer main body, a strip-shaped input port arranged on one side of the optical waveguide layer main body and two strip-shaped output ports arranged on the other side of the optical waveguide layer main body; the optical waveguide layer body is provided with a semi-transparent semi-reflecting mirror and a total reflecting mirror, the semi-transparent semi-reflecting mirror is used for dividing an incident beam into a reflected beam and a transmitted beam, the reflected beam is emitted to one of the strip-shaped output ports, and the total reflecting mirror is used for emitting the transmitted beam to the other strip-shaped output port; the optical power of the reflected beam and the transmitted beam is equal; the 3dB optical wave power beam splitter has low optical loss and compact structure.
Description
Technical Field
The invention relates to the field of integrated photonic devices, in particular to a 3dB optical wave power beam splitter.
Background
Silicon photonics can enable low cost optical devices through relatively simple integration of semiconductor fabrication technology with microelectronic chips. This enables the design and fabrication of new devices based On high contrast index materials using SOI (Silicon-On-Insulator) technology. The 3dB optical wave splitter is a passive device unit which is not replaced for realizing an integrated photonic system and can convert optical power into 1: a ratio of 1 is assigned to 2 output devices to meet the multi-device cascade requirement of optoelectronic integration.
At present, a light wave power beam splitter in an on-chip photoelectronic integrated system mainly splits light waves by a Y branch, a multimode interference coupler and a directional coupler, and unit structures of the devices are all prepared on the basis of SOI strip-shaped optical waveguides. However, the light waves propagate in the waveguide in the form of gaussian light waves, which have far-field divergence characteristics; when the light wave propagates in the strip-shaped optical waveguide, the propagation mode of the light wave is restrained from diverging in both the transverse direction and the longitudinal direction in the waveguide; in addition, due to the limitation of a processing technology, rough walls exist on two sides of the strip-shaped optical waveguide during preparation, and the rough walls can cause large insertion loss of the optical wave when the propagation mode is restricted, and the insertion loss is about 3 dB/cm; therefore, the conventional optical wave power beam splitter has large loss of optical waves and large device size, and is not favorable for low-loss and high-integration design of an optoelectronic integrated circuit.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a 3dB optical power splitter with low optical loss and compact structure.
In order to achieve the purpose, the invention adopts the following technical scheme:
a3 dB light wave power beam splitter comprises a substrate, a flat light waveguide layer arranged on the substrate, and a cladding layer arranged on the surface of the flat light waveguide layer; the flat optical waveguide layer comprises an optical waveguide layer main body, a strip-shaped input port arranged on one side of the optical waveguide layer main body and two strip-shaped output ports arranged on the other side of the optical waveguide layer main body;
the optical waveguide layer body is provided with a semi-transparent semi-reflecting mirror and a total reflecting mirror, the semi-transparent semi-reflecting mirror is used for dividing an incident beam into a reflected beam and a transmitted beam, the reflected beam is emitted to one of the strip-shaped output ports, and the total reflecting mirror is used for emitting the transmitted beam to the other strip-shaped output port; the optical power of the reflected beam and the transmitted beam is equal.
In the 3dB light wave power beam splitter, the semi-permeable and semi-reflective mirror and the total reflection mirror are both curved mirrors, and the curved mirrors are concave mirrors.
In the 3dB light wave power beam splitter, the semi-transparent semi-reflecting mirror comprises a groove arranged on the optical waveguide layer main body, the groove is a hollow groove, or the groove is filled with a filling material, and the refractive index of the filling material is lower than that of the material of the optical waveguide layer main body.
In the 3dB optical wave power splitter, the total reflection mirror is a side surface of the optical waveguide layer main body.
Furthermore, the thickness of a cladding layer coated on the side surface of the total reflection mirror is not less than the total reflection transmission depth of the light wave.
In the 3dB light wave power beam splitter, the flat light waveguide layer is silicon, indium phosphide, antimony, gallium arsenide or indium arsenide; the cladding is silica.
In the 3dB optical wave power beam splitter, the strip-shaped input port and the strip-shaped output port are both rectangular strips, and the cross sections of the strip-shaped input port and the strip-shaped output port are the same in size.
Further, the width and thickness of the strip input port and the strip output port satisfy the condition: max (w, 2 h) < λ <2w, where w is the width, h is the thickness, and λ is the wavelength of the operating light wave.
In the 3dB light wave power beam splitter, the positions and the sizes of the semi-transparent semi-reflecting mirror and the total reflecting mirror meet the following conditions:
wherein the content of the first and second substances,
is the radius of the waist of the incident light wave,
is the radius of the light waist of the outgoing light wave,
is the incident distance from the root of the strip input port to the reflection point,
is the outgoing distance from the reflection point to the root of the corresponding strip-shaped output port,
is the focal length of the curved mirror,
is the rayleigh distance of the incident light wave,
is the radius of the curved mirror and,
is the angle of incidence of the incident light wave.
In the 3dB optical wave power beam splitter, the central axis of the strip-shaped output port is perpendicular to the central axis of the strip-shaped output port.
Has the advantages that:
compared with the prior art, the 3dB optical wave power beam splitter provided by the invention has the following advantages:
1. through the semi-transparent half-reflecting mirror of one side in the optical waveguide layer main part and a holophote, realize power 1: 1, the light wave beam splitting has compact structure and is beneficial to reducing the size;
2. the light wave power beam splitter is based on the flat-plate-shaped light waveguide, when light waves are transmitted in the flat-plate-shaped light waveguide, the transmission mode of the light waves is limited only in the longitudinal direction, the light waves can be freely transmitted in the transverse direction, and compared with a strip-shaped light waveguide, the light wave transmission efficiency is less affected by the rough side wall of the waveguide, and the insertion loss is lower.
Drawings
Fig. 1 is a schematic structural diagram of a 3dB optical wave power splitter according to the present invention.
Fig. 2 is a top view of a flat optical waveguide layer in the 3dB optical power splitter according to the present invention.
FIG. 3 is a schematic diagram of a process in a different embodiment
In the case of the ratio,
ratio is as follows
Trend graph of the ratio.
FIG. 4 is a graph showing the variation of the transmission power of the half-reflecting and half-transmitting curved mirror with the thickness of the mirror.
Fig. 5 is a simulation result of a simulation performed on a gaussian optical wave having TE polarization.
Fig. 6 is a simulation calculation result of the power of two output beams.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The following disclosure provides embodiments or examples for implementing different configurations of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
Referring to fig. 1 and 2, the 3dB optical power splitter according to the present invention includes a substrate 1, a planar optical waveguide layer 2 disposed on the substrate 1, and a cladding layer disposed on a surface of the planar optical waveguide layer; the slab-shaped optical waveguide layer 2 includes an optical waveguide layer main body 201, a strip-shaped input port 202 disposed on one side of the optical waveguide layer main body 201, and two strip-shaped output ports 203 disposed on the other side of the optical waveguide layer main body 201 (the strip shape here is with respect to the slab-shaped waveguide layer main body 201, and the width of the strip-shaped input port 202 and the strip-shaped output port 203 is smaller than the width of the corresponding side surface of the waveguide layer main body 201);
the optical waveguide layer body 201 is provided with a semi-transparent and semi-reflective mirror 204 and a total reflection mirror 205, the semi-transparent and semi-reflective mirror 204 is used for dividing an incident beam (namely a beam incident into the optical waveguide layer body 201 from the strip-shaped input port 202) into a reflected beam and a transmitted beam, the reflected beam is emitted to one of the strip-shaped output ports 203, and the total reflection mirror 205 is used for emitting the transmitted beam to the other strip-shaped output port 203; the optical power of the reflected beam and the transmitted beam is equal.
In operation, an incident light beam is incident from the strip input port 202, and when the incident light beam arrives at the half mirror 204, the half mirror 204 is driven by a power of 1: 1, the incident beam is divided into a reflected beam and a transmitted beam, wherein the reflected beam directly emits to one of the strip-shaped output ports 203, and the transmitted beam passes through the semi-transparent half-mirror 204, then strikes the total reflection mirror 205 and is totally reflected by the total reflection mirror 205 to the other strip-shaped output port 203, so that the power of 1: 1. Compared with the prior art, the method has the following advantages:
1. through the semi-transparent half-reflecting mirror of one side in the optical waveguide layer main part and a holophote, realize power 1: 1, the light wave beam splitting has simple and compact structure, is beneficial to reducing the size and realizing the miniaturization design;
2. the optical wave power splitter is based on the flat optical waveguide, the transverse dimension of the optical waveguide layer body is larger than the transverse dimension (width direction) of the strip-shaped input port, the propagation mode of the optical wave is limited only in the longitudinal direction (thickness direction) when the optical wave propagates in the flat optical waveguide, the optical wave can freely propagate in the transverse direction, compared with the strip-shaped optical waveguide, the influence of the rough side wall of the waveguide on the optical wave transmission efficiency is small, the insertion loss is low, and therefore the optical loss of the whole 3dB optical wave power splitter is low.
In some preferred embodiments, the transflective mirror 204 and the total reflecting mirror 205 are both curved mirrors, which are concave mirrors. Because the concave mirror type curved mirror has a light-gathering function, the Gaussian beam after far-field divergence can be gathered, and the width of the output beam is smaller than or equal to that of the input beam, so that the width of the strip-shaped output port 203 can be set to be equal to that of the strip-shaped input port 202, and the universality requirement of the device structure can be met (in practical application, interfaces of external equipment for transmitting incident beams and receiving the output beams are generally the same in size); in fact, if the transflective mirror 204 and the total reflection mirror 205 do not have the light condensing effect, the output beam width is larger than the input beam width, so the width of the strip output port 203 needs to be larger than the width of the strip input port 202, and the versatility is poor.
In some preferred embodiments, the transflective mirror 204 includes a groove opened in the optical waveguide layer body 201, the groove being a void (as in the case of FIG. 1), or the groove being filled with a filling material having a refractive index lower than that of the material of the optical waveguide layer body 201. The filler material may be the same as the material of the cladding. In fact, when the recess is empty, the filling material in the recess can be considered to be air. The groove is convenient to produce and can be directly obtained by etching on the optical waveguide layer main body 201.
In some preferred embodiments, the total reflection mirror 205 is one side surface of the optical waveguide layer body 201. For example, when the total reflection mirror 205 is a curved mirror, the side surface facing away from the reflection surface of the half mirror 204 may be directly processed into a curved surface, which is simple and convenient.
Further, the side surface of the total reflection mirror may be clad or unclad, and in fact, when the side surface is unclad, it is equivalent to using air as the clad. If the side surface of the total reflection mirror is coated with the cladding, the thickness of the coated cladding is not less than the total reflection transmission depth of the light wave. Because, when the light wave is totally reflected, a certain transmission depth exists in the reflective medium, which is called goos-hanchen shift, and the specific calculation formula of the transmission depth is as follows:
wherein the content of the first and second substances,
as the depth of transmission, it is,
the wavelength of the operating light wave (vacuum wavelength), n1 is the refractive index of the host material of the optical waveguide layer, n2 is the refractive index of the cladding material,
is the angle of incidence of the incident light wave.
In some embodiments, the slab optical waveguide layer 2 is silicon, indium phosphide, antimony, gallium arsenide, or indium arsenide (i.e., the waveguide layer body 201, the strip input ports 202, and the strip output ports 203 are all silicon, indium phosphide, antimony, gallium arsenide, or indium arsenide), but is not limited thereto; the cladding is silica. In practice, the clad may be a polymer, air (the clad is air, that is, the clad is not provided), or the like.
In this embodiment, the bar input port 202 and the bar output port 203 are both rectangular bars, and the cross-sectional dimensions of the bar input port 202 and the bar output port 203 are the same. In fact, the cross-sectional shapes of the bar input port 202 and the bar output port 203 are not limited to being rectangular, nor are the cross-sectional dimensions limited to being the same. However, in practical application, the interfaces of the external device for transmitting the incident light beam and receiving the output light beam are generally the same in size and generally rectangular, so that the cross sections of the strip-shaped input port 202 and the strip-shaped output port 203 are set to be rectangles with the same size, the requirement on the universality of the device structure can be met, and the flat-plate-shaped optical waveguide layer 2 is plate-shaped and can be obtained by directly cutting a plate-shaped material during production, at the moment, the strip-shaped input port 202 and the strip-shaped output port 203 are set to be rectangular, further processing on the shapes of the strip-shaped input port 202 and the strip-shaped output port 203 is not needed.
Further, the width and thickness of the bar input port 202 and the bar output port 203 should satisfy the condition: max (w, 2 h) < λ <2w, where w is the width, h is the thickness, and λ is the wavelength of the operating light wave (vacuum wavelength). In practical applications, the input optical wave and the output optical wave are generally transmitted through a single-mode fiber, so that if the 3dB optical wave power splitter is to be used in cooperation with a single-mode fiber, the optical wave needs to be transmitted in a single-mode manner in the strip-shaped input port 202 and the strip-shaped output port 203 to reduce coupling loss; only when the above condition "max (w, 2 h) < λ <2 w" is satisfied, the optical wave can propagate in a single mode in the strip input port 202 and the strip output port 203.
In order to meet the requirement that the output beam width is less than or equal to the input beam width, the width of the bar-shaped output port 203 can be set to be equal to that of the bar-shaped input port 202, and the requirement of universality is met; in some preferred embodiments, the positions and sizes of the half-mirror 204 and the total-mirror 205 satisfy the following conditions:
wherein the content of the first and second substances,
is the light waist radius of the incident light wave (which is equal to half the width of the strip input port 202),
is the radius of the light waist of the outgoing light wave,
is the incident distance from the root of the strip input port to the reflection point (for the transflective mirror 204, the incident distance is oa length in fig. 2; for the total reflecting mirror 205, the incident distance is oc length in fig. 2),
is the exit distance of the reflection point to the root of the corresponding strip output port (for the half-transparent half-mirror 204, the exit distance is ab length in fig. 2; for the total reflection mirror 205, the exit distance is cd length in fig. 2),
is the focal length of the curved mirror,
is the rayleigh distance of the incident light wave,
is the radius of the curved mirror and,
is the angle of incidence of the incident light wave.
Wherein the content of the first and second substances,
，
is the effective wavelength of the operating light in the plate-shaped optical waveguide layer 2. Can be calculated in different
In the case of the ratio,
ratio is as follows
Relationship of ratio to select the appropriate
To determine the radius of the curved mirror. For example, FIG. 3 is different
In the case of the ratio,
ratio is as follows
A trend graph of the ratio when
Equal to 1,
When the ratio is more than 1, the reaction solution is,
approximately equal to 1, and, at this time,
and the design condition is met.
The thickness of the half-mirror 204 is set according to the filling material (including the case where the filling material is air) and the radius of the half-mirror, for example, the relationship between the mirror surface thickness and the curved mirror transmittance at a set radius can be calculated by scanning with Rsoft simulation software based on the time domain finite difference method, and the curved mirror thickness at which the normalized energy of light wave transmission is 50% is selected as the thickness of the half-reflecting half-mirror.
In some embodimentsReferring to fig. 1 and 2, the central axis of the strip input port 202 is perpendicular to the central axis of the strip output port 203. Whereby the incident and output beams are perpendicular to each other, at which time the angle of incidence
Equal to 45 deg..
Wherein the substrate 1 is made of a material having a lower refractive index than the slab-shaped optical waveguide layer 2, such as silicon dioxide.
In summary, the 3dB lightwave power splitter skillfully arranges the semi-transparent and semi-reflective mirror and the total-reflective mirror in the flat optical waveguide, so that the gaussian beam propagating in the flat optical waveguide can be split successfully, and the curved mirror has the function of converging the gaussian beam diverged in the far field, so that the width of the output beam is less than or equal to that of the input beam, thereby meeting the universality of the device structure; the following advantages are also provided:
1. high accuracy 1 can be achieved at both outputs: 1, splitting a light wave;
2. the structure is simple and compact, the size is reduced, and the miniaturization design is realized;
3. the optical wave power beam splitter is based on the flat optical waveguide, the transverse size of the optical waveguide layer body is larger than that of the strip-shaped input port, the propagation mode of the optical wave is limited only in the longitudinal direction when the optical wave propagates in the flat optical waveguide, the optical wave can freely propagate in the transverse direction, compared with the strip-shaped optical waveguide, the optical wave transmission efficiency is slightly influenced by the rough side wall of the waveguide, the insertion loss is low, and therefore the optical loss of the whole 3dB optical wave power beam splitter is low.
The following is further illustrated by the specific examples:
example one
The flat optical waveguide layer 2 of the 3dB optical power splitter in this embodiment is made of silicon (refractive index: 3.45), and the cladding and the substrate 1 are made of silicon dioxide (refractive index: 1.45);
the cross sections of the strip-shaped input port 202 and the strip-shaped output port 203 are rectangular, the width w is 1.4 mu m, and the thickness h is 0.5 mu m; and a strip input port 202 and a strip output port 203Perpendicular to each other, therefore, angle of incidence
Equal to 45 °;
the operating wavelength is 1.55 μm, which is a wavelength commonly used in optical communications, and the rayleigh distance thereof in the slab-shaped optical waveguide layer 2
3.42 μm; at a different place
In the case of the ratio,
ratio is as follows
The trend graph of the ratio is shown in fig. 3; is selected by
Is equal to 1: (
3.42 μm) of,
More than 1,
A condition of approximately 1, so that the semireflective mirror 204 and the total reflective mirror 205 each have a radius of 9.7 μm;
the transflective mirror 204 comprises a groove, wherein silicon dioxide is filled in the groove, and the thickness of the transflective mirror 204 is 0.105 μm; the variation trend of the transmission power of the semi-reflecting and semi-transmitting curved mirror along with the thickness of the mirror is shown in figure 4;
wherein, the incident distance from the root of the strip input port 202 to the reflection point of the semi-transparent and semi-reflective mirror 204
Is 4 μm; the emitting distance from the reflection point of the semi-transparent semi-reflective mirror 204 to the root of the corresponding strip-shaped output port 203
4.3 μm;
wherein, the incident distance from the root of the strip input port 202 to the reflection point of the total reflection mirror 205
7.5 μm; the emergent distance from the reflection point of the total reflection mirror 205 to the root of the corresponding strip-shaped output port 203
And 4.3 μm.
Wherein the substrate 1 has dimensions of 10 μm x 10 μm.
With the gaussian optical wave with TE polarization as the working optical wave (i.e. the gaussian optical wave with the polarization direction of the electric field parallel to the plane of the plate), through simulation calculation (the simulation calculation result is shown in fig. 5 and 6), the splitting ratio of the two strip-shaped output ports 203 is 1: 0.995, the insertion loss of the two strip-shaped output ports 203 is 0.08dB and 0.10dB, respectively. Therefore, the 3dB optical wave power beam splitter has high light splitting precision and small optical loss.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, which are substantially the same as the present invention.
Claims (9)
1. A3 dB light wave power beam splitter comprises a substrate, a flat light waveguide layer arranged on the substrate, and a cladding layer arranged on the surface of the flat light waveguide layer; the flat-plate-shaped optical waveguide layer comprises an optical waveguide layer main body, a strip-shaped input port arranged on one side of the optical waveguide layer main body and two strip-shaped output ports arranged on the other side of the optical waveguide layer main body;
the optical waveguide layer main body is provided with a semi-transparent and semi-reflective mirror and a total reflector, the total reflector is one side surface of the optical waveguide layer main body, and the semi-transparent and semi-reflective mirror is arranged inside the optical waveguide layer main body; the semi-transparent semi-reflecting mirror is used for dividing an incident beam into a reflected beam and a transmitted beam, the reflected beam is emitted to one of the strip-shaped output ports, and the total reflecting mirror is used for emitting the transmitted beam to the other strip-shaped output port; the optical power of the reflected beam and the transmitted beam is equal.
2. The 3dB optical power splitter according to claim 1, wherein the transflective mirror and the total reflection mirror are curved mirrors, and the curved mirrors are concave mirrors.
3. The 3dB optical wave power splitter according to claim 1, wherein the semi-transparent and semi-reflective mirror comprises a groove formed on the optical waveguide layer body, the groove is a hollow groove, or the groove is filled with a filling material, and the refractive index of the filling material is lower than that of the material of the optical waveguide layer body.
4. The 3dB optical power splitter according to claim 1, wherein the thickness of the cladding layer coated on the side surface as a total reflection mirror is not less than the total reflection transmission depth of the optical wave.
5. The 3dB optical power splitter according to claim 1, wherein the plate-shaped optical waveguide layer is silicon, indium phosphide, antimony, gallium arsenide, or indium arsenide; the cladding is silica.
6. The 3dB optical power splitter according to claim 1, wherein the strip input port and the strip output port are both rectangular strips, and the cross-sectional dimensions of the strip input port and the strip output port are the same.
7. The 3dB optical power splitter of claim 6, wherein the strip input port and the strip output port have widths and thicknesses that satisfy the condition: max (w, 2 h) < λ <2w, where w is the width, h is the thickness, and λ is the wavelength of the operating light wave.
8. The 3dB optical power splitter according to claim 2, wherein the semi-transparent semi-reflecting mirror and the total reflecting mirror are positioned and sized to satisfy the following conditions:
wherein the content of the first and second substances,
is the radius of the waist of the incident light wave,
is the radius of the light waist of the outgoing light wave,
is the incident distance from the root of the strip input port to the reflection point,
is the outgoing distance from the reflection point to the root of the corresponding strip-shaped output port,
is the focal length of the curved mirror,
is the rayleigh distance of the incident light wave,
is the radius of the curved mirror and,
is the angle of incidence of the incident light wave.
9. The 3dB optical power splitter according to claim 1, wherein a central axis of the strip-shaped output port is perpendicular to a central axis of the strip-shaped output port.
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| CN101782368A (en) * | 2010-03-03 | 2010-07-21 | 福州高意通讯有限公司 | Interferometer |
| CN205229520U (en) * | 2015-11-02 | 2016-05-11 | 苏州旭创科技有限公司 | Two -way BOSA structure of single fiber |
| CN209460499U (en) * | 2019-02-28 | 2019-10-01 | 杭州富光科技有限公司 | A kind of multichannel optical branching filter |
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| US20190052362A1 (en) * | 2017-08-10 | 2019-02-14 | Luxtera, Inc. | Method And System For A Free Space CWDM MUX/DEMUX For Integration With A Grating Coupler Based Silicon Photonics Platform |
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| CN101782368A (en) * | 2010-03-03 | 2010-07-21 | 福州高意通讯有限公司 | Interferometer |
| CN205229520U (en) * | 2015-11-02 | 2016-05-11 | 苏州旭创科技有限公司 | Two -way BOSA structure of single fiber |
| CN209460499U (en) * | 2019-02-28 | 2019-10-01 | 杭州富光科技有限公司 | A kind of multichannel optical branching filter |
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